TWI652544B

TWI652544B - Membrane structure, film storage body and fixing method

Info

Publication number: TWI652544B
Application number: TW106138937A
Authority: TW
Inventors: 廣瀬隆徳; 栗山芳真
Original assignee: 日商旭化成股份有限公司
Priority date: 2016-11-11
Filing date: 2017-11-10
Publication date: 2019-03-01
Also published as: TW201820030A; JP7017900B2; KR20180053245A; CN207488699U; JP2018084806A; KR102084479B1

Abstract

本發明提供一種當自收納容器取出時，能夠使保護膜確實地自黏著層剝離之表膜結構體、表膜收納體及其固定方法。表膜結構體1具備框體2、表膜之膜3及保護膜4。框體2於前視下外形為矩形，且於背面側端面具有黏著層24。表膜之膜3設置於框體2之正面側端面，覆蓋框體2之內部。保護膜4具有：保護部41，其貼附於黏著層24而保護黏著層24；及複數個壓邊5，其等與保護部41一體設置。複數個壓邊5係以朝向框體2之外部延伸之方式形成。複數個壓邊5中之至少一者具有：基端部51，其係端部511連接於保護部41；及錨定部52，其連接於基端部51之端部512。錨定部52之寬度W2大於基端部51之寬度W1。The present invention provides a film structure, a film storage body, and a method of fixing the protective film which can be reliably peeled off from the adhesive layer when taken out from the storage container. The film structure 1 includes a frame 2, a film 3 of a film, and a protective film 4. The frame 2 has a rectangular outer shape in a front view and an adhesive layer 24 on the back side end surface. The film 3 of the surface film is provided on the front end side surface of the frame 2, and covers the inside of the frame 2. The protective film 4 has a protective portion 41 attached to the adhesive layer 24 to protect the adhesive layer 24, and a plurality of beads 5 which are integrally provided with the protective portion 41. A plurality of beads 5 are formed to extend toward the outside of the frame 2. At least one of the plurality of beads 5 has a base end portion 51 having a system end portion 511 connected to the protection portion 41 and an anchor portion 52 connected to the end portion 512 of the base end portion 51. The width W2 of the anchor portion 52 is greater than the width W1 of the base end portion 51.

Description

表膜結構體、表膜收納體及固定方法Membrane structure, film storage body and fixing method

本發明係關於一種表膜結構體、表膜收納體及固定方法。The present invention relates to a surface film structure, a film storage body, and a fixing method.

於構成LSI(Large Scale Integration，大型積體電路)、平板顯示器之薄膜電晶體、彩色濾光片等之製造步驟中，需要光罩或倍縮光罩(以下成為｢光罩等｣)之防塵。作為防塵機構，廣泛使用被稱為表膜結構體之結構體。表膜結構體一般而言包含框體及高分子膜(以下稱為｢表膜之膜｣)。表膜之膜例如係由硝化纖維素或纖維素衍生物、氟聚合物等形成之厚度10 μm以下之透明膜。表膜結構體係構成為於框體之一端面貼附表膜之膜，並且藉由該表膜之膜覆蓋框體之內部。於框體之另一端面設置有用以使表膜結構體黏著於光罩等之黏著層。此種表膜結構體一般而言由該表膜結構體之製造者供給至光罩等之製造者。光罩等之製造者藉由使黏著層黏著於光罩等，而將表膜結構體相對於光罩等固定。因此，表膜結構體之製造者為使黏著層之黏著力維持至其之使用，而以於黏著層上貼附保護膜進行保護之狀態，將表膜結構體供給至光罩等之製造者。光罩等之製造者使供給之表膜結構體之保護膜剝離，使框體之黏著層露出，藉此能夠使表膜結構體於黏著層上黏著於光罩等。又，表膜結構體為了防止其損傷或異物對表膜之膜等之附著，而以密封於收納容器之狀態搬送。表膜結構體必須於收納容器之內部確實地固定，而不使框體或表膜之膜與收納容器接觸。對於此種要求，於專利文獻1中，提出有使用膠帶將表膜結構體相對收納容器固定之構成。詳細而言，該構成係於保護膜形成有複數個壓邊，以跨及壓邊及收納容器之托盤之方式貼附膠帶，藉此能夠將表膜結構體之保護膜相對於托盤固定。當將表膜結構體自收納容器取出時，以自托盤拉開之方式對表膜結構體施加力。藉此，能夠於保持著保護膜固定於托盤之狀態下，使保護膜自黏著層剝離，使框體之黏著層露出。即，能夠同時地進行表膜結構體自收納容器之取出及保護膜之剝離。當將表膜結構體自收納容器取出時，必須藉由以自托盤拉開之方式對表膜結構體施加力，而首先於黏著層與保護膜之間形成開始剝離之端部(以下，將該端部稱為｢剝離端｣)。於剝離端形成後，可藉由對表膜結構體進一步施加力而使保護膜中自黏著層剝離之範圍自剝離端擴大，從而使保護膜整體自黏著層剝離。 [先前技術文獻] [專利文獻] [專利文獻1]國際公開第2006/59388號In the manufacturing steps of LSI (Large Scale Integration), thin film transistors for flat panel displays, color filters, etc., it is necessary to protect the dust from a photomask or a reticle (hereinafter referred to as a "mask"). . As the dustproof mechanism, a structure called a film structure is widely used. The film structure generally includes a frame and a polymer film (hereinafter referred to as "film of the film"). The film of the surface film is, for example, a transparent film having a thickness of 10 μm or less formed of nitrocellulose or a cellulose derivative, a fluoropolymer or the like. The film structure system is configured by attaching a film of a film to one end surface of the frame, and covering the inside of the frame by the film of the film. An adhesive layer for adhering the film structure to the mask or the like is provided on the other end surface of the frame. Such a film structure is generally supplied to the manufacturer of the mask or the like by the manufacturer of the film structure. The manufacturer of the mask or the like fixes the film structure to the mask or the like by adhering the adhesive layer to the mask or the like. Therefore, the manufacturer of the film structure body supplies the film structure to the manufacturer of the mask or the like in a state in which the adhesive layer is adhered to the adhesive layer to protect the adhesive layer. . The manufacturer of the mask or the like peels off the protective film of the supplied film structure and exposes the adhesive layer of the frame, whereby the film structure can be adhered to the mask or the like on the adhesive layer. In addition, the film structure is transported in a state of being sealed to the storage container in order to prevent damage or adhesion of foreign matter to the film of the surface film or the like. The film structure must be reliably fixed inside the container without bringing the film of the frame or the film into contact with the container. In order to meet such a request, Patent Document 1 proposes a configuration in which a film structure is fixed to a storage container using an adhesive tape. Specifically, in this configuration, the protective film is formed with a plurality of beads, and the tape is attached so as to straddle the tray and the tray of the container, whereby the protective film of the film structure can be fixed to the tray. When the film structure is taken out from the container, a force is applied to the film structure from the tray. Thereby, the protective film can be peeled off from the adhesive layer while the protective film is fixed to the tray, and the adhesive layer of the frame can be exposed. In other words, the removal of the film structure from the storage container and the peeling of the protective film can be simultaneously performed. When the film structure is taken out from the container, it is necessary to apply a force to the film structure by pulling it from the tray, and first, an end portion to start peeling is formed between the adhesive layer and the protective film (hereinafter, This end is called the "peeled end"). After the formation of the peeling end, the peeling of the self-adhesive layer in the protective film can be extended from the peeling end by further applying a force to the film structure, thereby peeling off the entire protective film from the adhesive layer. [Prior Art Document] [Patent Document] [Patent Document 1] International Publication No. 2006/59388

[發明所欲解決之問題] 專利文獻1中提出之構成係若為形成剝離端而對表膜結構體施加較大之力，則自膠帶拉出般之力作用於壓邊。若將壓邊自膠帶拉出，無法保持保護膜固定於收納容器，則存在無法使保護膜自黏著層剝離之類問題。又，隨著近年顯示器之大型化，表膜結構體之框體亦存在大型化之傾向。因此，存在若對表膜結構體施加較大之力而形成剝離端，則導致框體變形之虞。詳細而言，當自收納容器取出時，存在欲自托盤拉開之力及自保護膜受到之反作用力施加於框體，導致框體中產生撓曲之虞。如此般，於先前之表膜結構體及其固定方法中，存在難以兼顧收納容器之內部中之表膜結構體之確實之固定與表膜結構體容易取出之問題。本發明係鑒於此種問題而完成者，其目的在於提供一種當自收納容器取出時，能夠使保護膜確實地自黏著層剝離之表膜結構體、表膜收納體及其固定方法。 [解決問題之技術手段] 本發明者等人進行了積極研究，結果完成了當將表膜結構體自收納容器取出時，能夠使保護膜確實地自黏著層剝離之本發明。即，本發明係如下所述。 (1) 一種表膜結構體，其特徵在於具備：框體，其於前視下外形為矩形，且於背面側端面具有黏著層；表膜之膜，其設置於上述框體之正面側端面，覆蓋該框體之內部；及保護膜，其具有貼附於上述黏著層保護該黏著層之保護部、及與上述保護部一體設置之複數個壓邊；上述複數個壓邊係以朝向上述框體之外部延伸之方式形成，上述複數個壓邊中之至少一者具有一端部連接於上述保護部之基端部、及連接於上述基端部之另一端部之錨定部，上述錨定部之寬度大於上述基端部之寬度。 (2) 如(1)之表膜結構體，其中上述錨定部係以朝向相對於具有該錨定部之上述壓邊所延伸之方向垂直之方向延伸之方式形成。 (3) 如(1)或(2)之表膜結構體，其中上述基端部之另一端部之寬度係自上述保護部朝向上述錨定部逐漸變大。 (4) 如(1)至(3)中任一項之表膜結構體，其中上述錨定部形成有沿著具有該錨定部之上述壓邊所延伸之方向之狹縫。 (5) 如(1)至(4)中任一項之表膜結構體，其中上述基端部之寬度之尺寸為上述錨定部之寬度之尺寸之40%以上。 (6) 如(1)至(5)中任一項之表膜結構體，其中上述基端部之寬度之尺寸為上述錨定部之寬度之尺寸之90%以下。 (7) 如技術方案6之表膜結構體，其中上述基端部之寬度之尺寸為上述錨定部之寬度之尺寸之80%以下。 (8) 如(6)之表膜結構體，其中上述基端部之寬度之尺寸為上述錨定部之寬度之尺寸之70%以下。 (9) 如(6)之表膜結構體，其中上述基端部之寬度之尺寸為上述錨定部之寬度之尺寸之60%以下。 (10) 如(1)至(9)中任一項之表膜結構體，其中上述基端部之寬度之尺寸為60 mm以下。 (11) 如(10)之表膜結構體，其中上述基端部之寬度之尺寸為40 mm以下。 (12) 如(11)之表膜結構體，其中上述基端部之寬度之尺寸為30 mm以下。 (13) 如(12)之表膜結構體，其中上述基端部之寬度之尺寸為20 mm以下。 (14) 一種表膜收納體，其特徵在於：其係具備如(1)至(13)中任一項之表膜結構體及收納上述表膜結構體之收納容器者，且具有用以將上述基端部固定於上述收納容器之固定構件。 (15) 如(14)之表膜收納體，其中上述複數個壓邊之相鄰壓邊之間之保護膜未固定於上述收納容器，且上述相鄰壓邊之間之未固定於上述收納容器之保護膜之長度為200 mm以上。 (16) 如(15)之表膜收納體，其中上述複數個壓邊之相鄰壓邊之間之保護膜未固定於上述收納容器，且上述相鄰壓邊之間之未固定於上述收納容器之保護膜之長度為410 mm以上。 (17) 一種表膜收納體，其特徵在於，其係具備表膜結構體、及收納上述表膜結構體之收納容器者，上述表膜結構體具備：框體，其於前視下外形為矩形；表膜之膜，其設置於上述框體之一面，覆蓋上述框體之內部；黏著層，其設置於上述框體之另一面；及保護膜，其貼附於上述黏著層之與設置有上述框體之面為相反側之面；上述保護膜具有突出至上述保護膜之外側之壓邊，上述壓邊藉由固定構件而固定於上述表膜收納體，上述壓邊之藉由上述固定構件固定於上述表膜收納體之部分之長度之合計占上述保護膜之1邊長度之1.0%以上且7.0%以下。 (18) 如(17)之表膜收納體，其中上述壓邊之藉由上述固定構件固定於上述表膜收納體之部分之長度之合計占上述保護膜之1邊長度之1.0%以上且4.0%以下。 (19) 一種表膜收納體，其特徵在於，其係具備表膜結構體、及收納上述表膜結構體之收納容器者，上述表膜結構體具備：框體，其於前視下外形為矩形；表膜之膜，其設置於上述框體之一面，覆蓋上述框體之內部；黏著層，其設置於上述框體之另一面；及保護膜，其貼附於上述黏著層之與設置有上述框體之面為相反側之面；上述保護膜具有突出至上述保護膜之外側之第1至第3壓邊，上述第1至第3壓邊藉由第1至第3固定構件固定於上述表膜收納體，上述第1固定構件、上述第2固定構件及上述第3固定構件係沿上述框體之同一邊依序設置，上述第1壓邊、上述第2壓邊及上述第3壓邊係沿上述框體之同一邊依序設置，第1固定構件與第2固定構件之間之保護膜未固定於上述收納容器，第2固定構件與第3固定構件之間之保護膜未固定於上述收納容器，上述第1固定構件與第2固定構件之間之未固定於上述收納容器之上述保護膜之長度、及上述第2固定構件與第3固定構件之間之未固定於上述收納容器之上述保護膜之長度均為200 mm以上，上述第2壓邊之最小寬度為60 mm以下，上述第2壓邊之最小寬度部分藉由上述第2固定構件固定於上述表膜收納體。 (20) 如(19)之表膜收納體，其中上述第2壓邊之最小寬度為40 mm以下。 (21) 如(20)之表膜收納體，其中上述第2壓邊之最小寬度為30 mm以下。 (22) 如(21)之表膜收納體，其中上述第2壓邊之最小寬度為20 mm以下。 (23) 如(19)至(22)中任一項之表膜收納體，其中上述第1固定構件與第2固定構件之間之未固定於上述收納容器之上述保護膜之長度、及上述第2固定構件與第3固定構件之間之未固定於上述收納容器之上述保護膜之長度均為250 mm以上。 (24) 如(23)之表膜收納體，其中上述第1固定構件與第2固定構件之間之未固定於上述收納容器之上述保護膜之長度、及上述第2固定構件與第3固定構件之間之未固定於上述收納容器之上述保護膜之長度均為300 mm以上。 (25) 一種固定方法，其特徵在於，其係將表膜結構體相對於收納容器固定者，上述表膜結構體具備：框體，其於前視下外形為矩形，且於背面側端面具有黏著層；表膜之膜，其設置於上述框體之正面側端面，覆蓋該框體之內部；及保護膜，其具有貼附於上述黏著層而保護該黏著層之保護部、及與上述保護部一體設置且以朝向上述框體之外部延伸之方式形成之複數個壓邊；上述複數個壓邊中之至少一者具有一端部連接於上述保護部之基端部、及連接於上述基端部之另一端部且寬度大於上述基端部之錨定部，以跨及上述基端部及上述收納容器之方式貼附膠帶，而非將該膠帶貼附於上述錨定部。 [發明之效果] 根據本發明，能夠提供一種當自收納容器取出時，能夠使保護膜確實地自黏著層剝離之表膜結構體、表膜收納體及其固定方法。[Problems to be Solved by the Invention] In the configuration proposed in Patent Document 1, if a large force is applied to the film structure to form the peeling end, a force such as pulling out from the tape acts on the presser. If the crimping is pulled out from the tape and the protective film cannot be held in the storage container, there is a problem that the protective film cannot be peeled off from the adhesive layer. Moreover, with the increase in size of displays in recent years, the frame of the film structure has a tendency to increase in size. Therefore, if a peeling end is formed by applying a large force to the film structure, the frame body is deformed. Specifically, when it is taken out from the storage container, the force to be pulled from the tray and the reaction force received from the protective film are applied to the frame, and the frame body is deflected. As described above, in the conventional film structure and the method for fixing the same, there is a problem that it is difficult to achieve both the fixation of the film structure in the inside of the container and the easy removal of the film structure. The present invention has been made in view of such a problem, and an object of the invention is to provide a film structure, a film storage body, and a method of fixing the protective film which can be reliably peeled off from the adhesive layer when taken out from the storage container. [Means for Solving the Problems] The inventors of the present invention conducted active research, and as a result, the present invention capable of reliably peeling off the protective film from the adhesive layer when the film structure is taken out from the container is completed. That is, the present invention is as follows. (1) A surface film structure comprising: a frame body having a rectangular outer shape in a front view and an adhesive layer on a back side end surface; and a film of the surface film provided on a front side end surface of the frame body Covering the inside of the frame; and a protective film having a protective portion attached to the adhesive layer to protect the adhesive layer, and a plurality of beads integrally provided with the protective portion; the plurality of crimping portions facing the above Forming the outer portion of the frame, wherein at least one of the plurality of beads has an end portion connected to the base end portion of the protection portion and an anchor portion connected to the other end portion of the base end portion, the anchor The width of the fixed portion is greater than the width of the base end portion. (2) The film structure according to (1), wherein the anchor portion is formed to extend in a direction perpendicular to a direction in which the bead having the anchor portion extends. (3) The film structure according to (1) or (2), wherein a width of the other end portion of the base end portion gradually increases from the protection portion toward the anchor portion. (4) The film structure according to any one of (1) to (3), wherein the anchor portion is formed with a slit along a direction in which the crimping portion of the anchor portion extends. (5) The film structure according to any one of (1) to (4) wherein the width of the base end portion is 40% or more of the width of the anchor portion. (6) The film structure according to any one of (1) to (5) wherein the width of the base end portion is 90% or less of the width of the anchor portion. (7) The film structure according to claim 6, wherein the width of the base end portion is 80% or less of the width of the anchor portion. (8) The film structure according to (6), wherein a dimension of a width of the base end portion is 70% or less of a width of the anchor portion. (9) The film structure according to (6), wherein a dimension of a width of the base end portion is 60% or less of a width of the anchor portion. (10) The film structure according to any one of (1) to (9) wherein the width of the base end portion is 60 mm or less. (11) The film structure according to (10), wherein the width of the base end portion is 40 mm or less. (12) The film structure according to (11), wherein the width of the base end portion is 30 mm or less. (13) The film structure according to (12), wherein the width of the base end portion is 20 mm or less. (14) A surface film storage body comprising the film structure according to any one of (1) to (13) and a storage container accommodating the surface film structure, and having The base end portion is fixed to a fixing member of the storage container. (15) The film storage body according to (14), wherein the protective film between the adjacent crimping edges of the plurality of crimping edges is not fixed to the storage container, and the adjacent crimping edges are not fixed to the storage compartment The protective film of the container has a length of 200 mm or more. (16) The film storage body according to (15), wherein the protective film between the adjacent beads of the plurality of beads is not fixed to the storage container, and the adjacent crimp is not fixed to the storage. The protective film of the container has a length of 410 mm or more. (17) A surface film storage body comprising: a surface film structure; and a storage container accommodating the surface film structure, wherein the surface film structure includes: a frame body having a front view a film of a surface film disposed on one side of the frame to cover the inside of the frame; an adhesive layer disposed on the other side of the frame; and a protective film attached to the adhesive layer and disposed The protective film has a bead that protrudes to the outer side of the protective film, and the bead is fixed to the surface film storage body by a fixing member, wherein the beading is performed by the above The total length of the portion of the fixing member fixed to the surface film storage body is 1.0% or more and 7.0% or less of the length of one side of the protective film. (18) The film storage body according to (17), wherein a total length of the portion of the bead that is fixed to the surface of the surface of the protective film by the fixing member is 1.0% or more and 4.0 of a length of one side of the protective film. %the following. (19) A surface film storage body comprising: a film structure; and a storage container accommodating the surface film structure, wherein the surface film structure includes: a frame body having a front view a film of a surface film disposed on one side of the frame to cover the inside of the frame; an adhesive layer disposed on the other side of the frame; and a protective film attached to the adhesive layer and disposed The surface of the frame body is a surface on the opposite side; the protective film has first to third beads protruding from the outer side of the protective film, and the first to third beads are fixed by the first to third fixing members. In the above-mentioned surface film storage body, the first fixing member, the second fixing member, and the third fixing member are sequentially provided along the same side of the frame, and the first bead, the second bead, and the first 3, the presser edge is provided along the same side of the frame, and the protective film between the first fixing member and the second fixing member is not fixed to the storage container, and the protective film between the second fixing member and the third fixing member Not fixed to the storage container, the first The length of the protective film between the fixing member and the second fixing member that is not fixed to the storage container, and the length of the protective film that is not fixed to the storage container between the second fixing member and the third fixing member The minimum width of the second bead is 60 mm or less, and the minimum width of the second bead is fixed to the surface film storage body by the second fixing member. (20) The film storage body according to (19), wherein the minimum width of the second bead is 40 mm or less. (21) The film storage body according to (20), wherein the minimum width of the second bead is 30 mm or less. (22) The film storage body according to (21), wherein the minimum width of the second bead is 20 mm or less. (23) The film storage body according to any one of (19) to (22), wherein a length of the protective film that is not fixed to the storage container between the first fixing member and the second fixing member, and the above The length of the protective film that is not fixed to the storage container between the second fixing member and the third fixing member is 250 mm or more. (24) The film storage body according to (23), wherein a length of the protective film that is not fixed to the storage container between the first fixing member and the second fixing member, and the second fixing member and the third fixing The length of the protective film between the members that is not fixed to the storage container is 300 mm or more. (25) A fixing method, wherein the surface structure is fixed to a storage container, wherein the surface structure includes: a frame having a rectangular outer shape in a front view and having a rear end side end surface An adhesive film; the film of the surface film is disposed on the front end surface of the frame body to cover the inside of the frame body; and a protective film having a protective portion attached to the adhesive layer to protect the adhesive layer, and the above a plurality of beads formed integrally with the protection portion and extending toward the outside of the frame; at least one of the plurality of flanges having a one end connected to the base end of the protection portion and connected to the base The other end portion of the end portion is wider than the anchor portion of the base end portion, and the tape is attached so as to straddle the base end portion and the storage container, instead of attaching the tape to the anchor portion. [Effects of the Invention] According to the present invention, it is possible to provide a film structure, a film storage body, and a method of fixing the protective film which can be reliably peeled off from the adhesive layer when taken out from the storage container.

以下，一邊參照隨附圖式，一邊對本發明之實施形態進行說明。為易於理解發明，而於各圖式中，對同一構成要素儘可能地標註同一符號，且省略重複說明。 [第1實施形態] 首先，一邊參照圖1及圖2，一邊對第1實施形態之表膜結構體1之概要進行說明。圖1係表示表膜結構體1之前視圖。圖2係表示圖1之II-II剖面之剖視圖。圖1係表示固定於下述收納容器9之托盤91之表膜結構體1，並且省略收納容器9之蓋92之圖示。該表膜結構體1係於光微影法中進行光罩等之防塵之機器。表膜結構體1具備框體2、表膜之膜3、及保護膜4。如圖1所示，框體2分別具有2個長邊構件21、及2個短邊構件22。長邊構件21及短邊構件22係均由鋁合金形成，且直線狀地延伸之棒狀之構件。2個長邊構件21係相互隔開間隔平行地配置，同樣地，2個短邊構件22亦相互隔開間隔平行地配置。長邊構件21及短邊構件22以相互成大致直角之方式連接有端部。藉此，框體2之外形於前視下呈矩形。框體2之尺寸係基於光罩等之尺寸而決定。例如，長邊構件21之長度為1700 mm以上，短邊構件22之長度為1500 mm以上，且開口面積為1000 cm² 以上。再者，為易於理解，而如圖1所示，使用將框體2之長邊構件21延伸之方向設為X方向，將短邊構件22延伸之方向設為Y方向，將與X方向及Y方向正交之方向設為Z方向之正交座標進行說明。於圖2以後亦表示有對應於該正交座標之座標。如圖2所示，於框體2之-Z方向側之端面設置有黏著層24。黏著層24係遍及該端面之整周地設置。如下所述，黏著層24係用於對於光罩等之黏著。表膜之膜3例如係由硝化纖維素、纖維素衍生物、氟聚合物等形成之薄膜。表膜之膜3係其厚度為10 μm以下，且以於光微影法中使光源發出之光充分地透過之方式形成。如圖2所示，表膜之膜3介隔接著劑23接著於框體2之Z方向側之端面，覆蓋框體2之內部。保護膜4例如係由聚對苯二甲酸乙二酯、聚乙烯等樹脂材料形成。保護膜4係厚度為30 μm至500 μm左右之薄膜，且具有可撓性。如圖1所示，保護膜4具有1個保護部41及8個壓邊5。保護部41呈現與框體2對應之框形狀。壓邊5係以自保護部41之外周放射狀地延伸之方式形成。亦即，各壓邊5係以相互隔開間隔地配置，並且自保護部41突出之方式形成。如圖2所示，保護膜4於保護部41貼附於框體2之黏著層24。藉此，黏著層24之大致整周由保護部41覆蓋，從而能夠防止灰塵附著於黏著層24。黏著層24之黏著力藉由被保護部41覆蓋而保護。又，可藉由剝離保護膜4使黏著層24露出而發揮一直得到保護之黏著力。可藉由將保護部41黏著於黏著層24，而將各壓邊5以朝向框體2之外部延伸之方式配置。以如上說明之方式構成之表膜結構體1係以密封於收納容器9之狀態搬送。其次，一邊參照圖1及圖2，一邊對收納容器9之概要進行說明。如圖2所示，收納容器9具有托盤91及蓋92。托盤91及蓋92係例如由聚對苯二甲酸乙二酯、丙烯腈-丁二烯-苯乙烯、丙烯酸、聚碳酸酯、聚氯乙烯等樹脂材料形成。托盤91及蓋92係各自之端部被夾具93於Z方向上夾持，從而彼此固定。托盤91及蓋92之中央部係於Z方向隔開間隙地設置。該間隙係配置表膜結構體1之收納空間90。配置於收納空間90之表膜結構體1係相對於托盤91固定。表膜結構體1之固定中，使用膠帶8等固定構件。膠帶8呈現帶形狀，例如可由聚乙烯、聚丙烯、聚對苯二甲酸乙二酯、聚氯乙烯等樹脂材料、或不織布形成。於膠帶8之一側面設置有具有黏著性之糊劑。作為該糊劑，例如可採用丙烯酸系者或聚乙烯醇等。表膜結構體1係配置於托盤91之中央部***之固定面911。膠帶8係以使設置有糊劑之面朝向固定面911側，並且如圖1所示，跨及保護膜4之壓邊5及托盤91之固定面911之方式貼附。藉此，表膜結構體1於保護膜4相對於托盤91之固定面911固定。以此方式固定之表膜結構體1僅於保護膜4與收納容器9接觸。亦即，無需使框體2或表膜之膜3接觸於收納容器9。因此，當搬送收納有表膜結構體1之收納容器9時，框體2或表膜之膜3不會因振動而與收納容器9刮擦。藉此，收納空間90中不會產生新的灰塵。表膜結構體1自收納容器9取出係於維持高空氣清潔度之環境中進行。於該環境中，首先，將夾具93自托盤91及蓋92之端部拆下。繼而，使蓋92與托盤91分離，使相對托盤91固定之表膜結構體1露出。進而，將特定之治具相對表膜結構體1之框體2及托盤91固定，並且藉由該治具而對框體2於Z方向上施加力。即，以自托盤91拉開之方式對框體2施加力。藉此，力以自托盤91拉開之方式亦作用於貼附於框體2之黏著層24之保護膜4。然而，如上所述，因跨及保護膜4之壓邊5及托盤91之固定面911之方式貼附膠帶8，故而保護膜4一直固定於固定面911。其結果，力以將框體2之黏著層24與保護膜4之保護部41拉開之方式作用。此種力集中地作用於保護部41之整周中之形成有壓邊5之部位。其結果，於形成有壓邊5之部位之附近，形成未圖示之剝離端。於剝離端形成後，可藉由對框體2進一步施加力，而使保護膜4之保護部41中之自黏著層24剝離之範圍擴大，從而使保護膜4整體自黏著層24剝離。如此同時地進行自收納容器9將表膜結構體1(其中，保護膜4已剝離之狀態者)取出與將保護膜4剝離。可藉由使保護膜4剝離而發揮黏著層24之黏著力，從而使表膜結構體1於黏著層24黏著於光罩等。該表膜結構體1係藉由表膜之膜3而覆蓋形成於光罩等之圖像圖案。藉此，於光微影法中，能夠進行光罩等之防塵。根據該表膜結構體1，可藉由以跨及保護膜4之壓邊5及收納容器9之方式貼附膠帶8，而將表膜結構體1相對收納容器9固定。8個壓邊5係以與貼附於框體2之黏著層24之保護部41一體地設置，並且朝向框體2之外部放射狀延伸之方式形成。可藉由壓邊5以此方式延伸，而確保能夠相對於收納容器9將壓邊5固定之範圍。其結果，能夠將表膜結構體1確實地相對於收納容器9固定。又，可藉由以朝向框體2之外部放射狀地延伸之方式形成8個壓邊5，而局部地形成壓邊5。相鄰壓邊5、5之間之保護膜4未固定於收納容器9。若對於以此方式構成之表膜結構體1以自收納容器9拉開之方式施加力，則於黏著層24與保護膜4之間，力集中地作用於形成有壓邊5之部位。其結果，當自收納容器9取出表膜結構體1時，能夠容易地形成剝離端。再者，為了容易地形成剝離端，較佳為相鄰壓邊5、5間之距離(保護膜4中之未固定於收納容器9之部分之長度)較長，較佳為設定為200 mm以上，較佳為設定為250 mm以上，較佳為設定為300 mm以上，較佳為設定為350 mm以上，較佳為設定為400 mm以上，較佳為設定為410 mm以上，較佳為設定為420 mm以上，較佳為設定為430 mm以上，較佳為設定為440 mm以上，較佳為設定為450 mm以上，較佳為設定為460 mm以上，較佳為設定為470 mm以上，較佳為設定為480 mm以上，較佳為設定為490 mm以上，較佳為設定為500 mm以上，較佳為設定為520 mm以上，較佳為設定為540 mm以上，較佳為設定為560 mm以上，較佳為設定為580 mm以上，較佳為設定為600 mm以上。上限並無特別限定，該距離可為2000 mm以下，亦可為1500 mm以下。為容易地形成剝離端，較佳為相對於保護膜4之一邊而言之壓邊5較少。若相對於保護膜4之一邊而言之壓邊較少，則當自托盤91拉開表膜之膜3時，保護膜4朝向上方移動，從而可出現複數個相對於光罩黏著劑被傾斜地拉伸之部位，藉此剝離變得容易。當將保護膜4之一邊之長度設為Lp，將保護膜4之一邊中之壓邊5之藉由固定構件固定於表膜收納體之部分之長度之合計設為La時，La/Lp之值較佳為7.0%以下，較佳為6.0%以下，較佳為5.0%以下，較佳為4.0%以下。La/Lp之值之下限只要為能夠將保護膜4固定於收納容器9之範圍，便無特別限定，可為1.0%以上，亦可為2.0%以上。即，根據上述構成，能夠將表膜結構體1確實地相對收納容器9固定，並且使自收納容器9取出表膜結構體1變得容易。然而，若使力集中地作用於形成有壓邊5之部位，則存在導致將該壓邊5自膠帶8拉出，從而無法保持將保護膜4一直固定於收納容器9之虞。若無法將保護膜4固定於收納容器9，則當自收納容器9取出表膜結構體1時，無法自黏著層24剝離保護膜4。針對此種問題，表膜結構體1係藉由設計保護膜4之壓邊5之形狀，而防止將壓邊5自膠帶8拉出。其次，一邊參照圖3及圖4，一邊對壓邊5進行詳細說明。圖3及圖4係圖1之III部之放大圖。圖3係表示取出時之力未施加至表膜結構體1之狀態，圖4係表示取出時之力施加至表膜結構體1之狀態。如上所述，保護膜4具有8個壓邊5，但各壓邊5之基本形狀相同。因此，此處對圖1之III部中所示之1個壓邊5進行說明，省略關於其他壓邊5之說明。壓邊5具有基端部51及錨定部52。基端部51係一端部511與保護部41連接。基端部51係以自連接著該基端部51之保護部41，於相對於該保護部41沿框體2延伸之方向(圖3所示之例中為X方向)大致垂直之方向(圖3所示之例中為Y方向)上延伸之方式形成。基端部51之寬度之尺寸(圖3所示之例為X方向上之尺寸)W1約為15 mm。又，基端部51自保護部41突出之長度L1約為20 mm。錨定部52係與基端部51之端部512連接。錨定部52係以於相對於具有該錨定部52之壓邊5所延伸之方向(圖3所示之例中為Y方向)垂直之方向(圖3所示之例中為X方向)上延伸之方式形成。錨定部52之寬度之尺寸(圖3所示之例中為X方向上之尺寸)W2約為30 mm。又，錨定部52自基端部51之端部512突出之長度L2約為5 mm。根據容易地形成剝離端之觀點，錨定部52之寬度大於基端部51之寬度。又，基端部51之寬度之尺寸W1為錨定部52之寬度之尺寸W2之10%以上。基端部51之寬度之尺寸W1可為錨定部52之寬度之尺寸W2之20%以上，亦可為30%以上，亦可為40%以上。進而，基端部51之端部512之寬度自保護部41朝向錨定部52逐漸變大。又，根據容易地形成剝離端之觀點，基端部51之寬度之尺寸W1較佳為錨定部52之寬度之尺寸W2之90%以下，較佳為80%以下，較佳為70%以下，較佳為60%以下。又，根據容易地形成剝離端之觀點，較佳為基端部51之寬度之尺寸W1較小，較佳為60 mm以下，較佳為55 mm以下，較佳為50 mm以下，較佳為45 mm以下，較佳為40 mm以下，較佳為35 mm以下，較佳為30 mm以下，較佳為25 mm以下，較佳為20 mm以下，較佳為15 mm以下，較佳為10 mm以下。尺寸W1之下限並無特別限定，但3 mm以上即可，亦可為5 mm以上。又，根據容易地形成剝離端之觀點，錨定部52之寬度之尺寸W2較佳為大於基端部51之寬度。錨定部52之寬度之尺寸W2可為10 mm以上，亦可為20 mm以上，亦可為30 mm以上，亦可為40 mm以上，亦可為50 mm以上，亦可為60 mm以上，亦可為70 mm以上。當將表膜結構體1固定於收納容器9之托盤91時，如圖3所示地貼附膠帶8。膠帶8係以跨及壓邊5之基端部51及托盤91之固定面911之方式貼附。詳細而言，膠帶8於X方向上橫截基端部51，並且將其中央部貼附於基端部51，兩端部貼附於固定面911。膠帶8係以其Y方向側之端部81與錨定部52之-Y方向側之端部521隔開特定間隔，或者與端部521抵接之方式配置。當將表膜結構體1自收納容器9取出時，若以自托盤91拉開之方式對框體2施加力，則力亦作用於貼附於框體2之黏著層24之保護膜4。該力係如圖4中以箭頭F11所示，以將保護膜4之壓邊5朝向-Y方向拉拽之方式作用。若保護膜4朝向-Y方向移動，則如圖4所示，錨定部52之端部521與膠帶8之端部81抵接。藉此，錨定部52於其端部521，自膠帶8之端部81如箭頭F12所示地受力。壓邊5藉由以該箭頭F12所示之力，對抗以自膠帶8拉出之方式作用之力。其結果，能夠防止壓邊5自膠帶8被拉出。錨定部52係以朝向相對於具有該錨定部52之壓邊所延伸之方向垂直之方向延伸之方式形成。根據該構成，能夠增大錨定部52與膠帶8之端部81抵接之範圍，從而確實地防止壓邊5自膠帶8被拉出。又，基端部51之端部512之寬度係自保護部41朝向錨定部52逐漸變大。根據該構成，能夠緩和基端部51之端部512與連接於該端部512之錨定部52之間之應力集中。其結果，即便於以自托盤91拉開之方式對框體2施加力之情形時，亦能夠防止基端部51之端部512與錨定部52斷裂。又，基端部51之寬度之尺寸W1為錨定部52之寬度之尺寸W2之40%以上。根據該構成，於以跨及基端部51及收納容器9之方式貼附膠帶8之情形時，即便以自收納容器9拉開之方式對表膜結構體1施加力，亦能夠防止基端部51之斷裂。其結果，當將表膜結構體1自收納容器9取出時，能夠保持保護膜4一直確實地固定於收納容器9。 [第2實施形態] 其次，一邊參照圖5及圖6，一邊對第2實施形態之表膜結構體10進行說明。圖5及圖6係表膜結構體10之放大圖，且表示表膜結構體10中之相當於圖1之III部之部位。表膜結構體10係與第1實施形態同樣地用於光罩等之防塵。表膜結構體10係該壓邊6之形狀與第1實施形態不同。對表膜結構體10之構成中之與第1實施形態之構成相同者標註相同符號，且適當省略說明。表膜結構體10之壓邊6具有基端部61及錨定部62。基端部61係一端部611與保護部41連接。基端部61係形成為自連接著該基端部61之保護部41，於相對於該保護部41沿框體2延伸之方向(圖5所示之例中為X方向)大致垂直之方向(於圖5所示之例中為Y方向)上延伸。錨定部62係與基端部61之端部612連接。錨定部62係形成為於相對於具有該錨定部62之壓邊6所延伸之方向(圖5所示之例中為Y方向)垂直之方向(圖5所示之例中為X方向)上延伸。又，錨定部62形成有2個狹縫63。各狹縫63自錨定部62之-Y方向側之端部622，沿具有該錨定部62之壓邊6所延伸之方向(圖5所示之例中為Y方向)上延伸。2個狹縫63係隔開與基端部61之寬度相同程度之間隔，相互平行地延伸。錨定部62藉由形成此種狹縫63，而如圖5中以箭頭A1所示，能夠將2個可動部621翻起或將翻起之可動部621復原。當將表膜結構體10固定於收納容器9之托盤91時，如圖6(A)所示地貼附膠帶8。膠帶8係如箭頭A2所示，以於將壓邊6之可動部621翻起之狀態下跨及基端部61及托盤91之固定面911之方式貼附。詳細而言，膠帶8係於X方向上橫截基端部61，並且將其中央部貼附於基端部61，兩端部貼附於固定面911。於貼附膠帶8後，翻起之可動部621以圖6(B)中箭頭A3所示之方式復原。藉此，將基端部61配置於膠帶8與固定面911之間，與此相對，將可動部621配置於較膠帶8更靠Z方向側。此時，膠帶8以其Y方向側之端部81與各狹縫63之端部631隔開特定間隔，或者與端部631抵接之方式配置。當將表膜結構體10自收納容器9取出時，若以自托盤91拉開之方式對框體2施加力，則力亦作用於貼附於框體2之黏著層24之保護膜4。該力係如圖6(C)中以箭頭F21所示，以將保護膜4之壓邊6朝向-Y方向拉拽之方式作用。若保護膜4朝向-Y方向移動，則各狹縫63之端部631與膠帶8之端部81抵接。藉此，錨定部62於各狹縫63之端部631，自膠帶8之端部81以箭頭F22所示之方式受力。壓邊6藉由該箭頭F22所示之力，對抗以自膠帶8拉出之方式作用之力。其結果，能夠防止壓邊6自膠帶8拉出。以上說明之實施形態係用以容易地理解本發明者，而非用以限定解釋本發明者。實施形態所具備之各要素及其配置、材料、條件、形狀及尺寸等並不限定於例示者，可適當進行變更。又，可將不同實施形態所示之構成彼此進行局部置換或組合。例如，亦可於壓邊5、6之基端部51、61之中央部形成於Z方向將基端部51、61貫通之貫通孔。貫通孔之形狀可設為圓形或四角形等各種者。該情形時，貼附於基端部51、61之膠帶8經由該貫通孔貼附於托盤91之固定面911。即，膠帶8不僅其兩端部，而且中央部亦貼附於固定面911。根據該構成，能夠將保護膜4進一步確實地固定於固定面911。又，固定構件並不限於膠帶8，亦可使用螺絲或螺栓等。但，根據容易地形成剝離端之觀點，最佳為膠帶。又，亦可沿保護膜4之1個邊或框體之1個邊設置3個以上之壓邊，亦可設置4個以上之壓邊，亦可設置5個以上之壓邊，亦可設置6個以上之壓邊。又，亦可沿保護膜4之1個邊或框體之1個邊設置3個以上之固定構件，亦可設置4個以上之固定構件，亦可設置5個以上之固定構件，亦可設置6個以上之壓邊。Hereinafter, embodiments of the present invention will be described with reference to the accompanying drawings. In the drawings, the same components are denoted by the same reference numerals, and the repeated description is omitted. [First Embodiment] First, the outline of the film structure 1 of the first embodiment will be described with reference to Figs. 1 and 2 . Fig. 1 is a front view showing the film structure 1. Figure 2 is a cross-sectional view showing a section II-II of Figure 1. Fig. 1 is a view showing the surface structure 1 of the tray 91 fixed to the storage container 9 described below, and the lid 92 of the storage container 9 is omitted. This film structure 1 is a device for performing dust prevention such as a photomask in the photolithography method. The film structure 1 includes a frame 2, a film 3 of a film, and a protective film 4. As shown in FIG. 1, the frame 2 has two long side members 21 and two short side members 22, respectively. The long side member 21 and the short side member 22 are members formed of an aluminum alloy and extending linearly in a rod shape. The two long side members 21 are arranged in parallel with each other at intervals, and similarly, the two short side members 22 are also arranged in parallel with each other at intervals. The long side member 21 and the short side member 22 are connected to the end portions at substantially right angles to each other. Thereby, the outer shape of the frame 2 is rectangular in front view. The size of the frame 2 is determined based on the size of the mask or the like. For example, the length of the long side member 21 is 1700 mm or more, the length of the short side member 22 is 1500 mm or more, and the opening area is 1000 cm ² or more. Further, for ease of understanding, as shown in FIG. 1, the direction in which the long side member 21 of the frame 2 extends is defined as the X direction, and the direction in which the short side member 22 extends is referred to as the Y direction, and the X direction and The direction in which the Y direction is orthogonal is defined as an orthogonal coordinate in the Z direction. Also shown in Fig. 2 is a coordinate corresponding to the orthogonal coordinate. As shown in FIG. 2, an adhesive layer 24 is provided on the end surface of the casing 2 on the -Z direction side. The adhesive layer 24 is disposed over the entire circumference of the end face. As described below, the adhesive layer 24 is used for adhesion to a photomask or the like. The film 3 of the film is, for example, a film formed of nitrocellulose, a cellulose derivative, a fluoropolymer or the like. The film 3 of the surface film has a thickness of 10 μm or less and is formed by sufficiently transmitting light emitted from the light source in the photolithography method. As shown in FIG. 2, the film 3 of the surface film is interposed between the adhesive 23 and the end surface of the frame 2 on the Z direction side, and covers the inside of the frame 2. The protective film 4 is formed of, for example, a resin material such as polyethylene terephthalate or polyethylene. The protective film 4 is a film having a thickness of about 30 μm to 500 μm and has flexibility. As shown in FIG. 1, the protective film 4 has one protection part 41 and eight crimping edges 5. The protection portion 41 presents a frame shape corresponding to the housing 2 . The bead 5 is formed to extend radially from the outer periphery of the protective portion 41. That is, each of the beads 5 is disposed at a distance from each other and is formed to protrude from the protection portion 41. As shown in FIG. 2, the protective film 4 is attached to the adhesive layer 24 of the frame 2 at the protective portion 41. Thereby, the entire circumference of the adhesive layer 24 is covered by the protective portion 41, and dust can be prevented from adhering to the adhesive layer 24. The adhesive force of the adhesive layer 24 is protected by being covered by the protective portion 41. Moreover, the adhesive layer 24 can be exposed by peeling off the protective film 4, and the adhesive force which is always protected can be exhibited. The bead 5 can be disposed to extend toward the outside of the casing 2 by adhering the protective portion 41 to the adhesive layer 24. The film structure 1 configured as described above is conveyed in a state of being sealed to the storage container 9. Next, the outline of the storage container 9 will be described with reference to FIGS. 1 and 2 . As shown in FIG. 2, the storage container 9 has a tray 91 and a lid 92. The tray 91 and the lid 92 are formed of, for example, a resin material such as polyethylene terephthalate, acrylonitrile-butadiene-styrene, acrylic, polycarbonate, or polyvinyl chloride. The respective ends of the tray 91 and the lid 92 are held by the jig 93 in the Z direction to be fixed to each other. The center portions of the tray 91 and the lid 92 are provided with a gap in the Z direction. This gap is a storage space 90 in which the membrane structure 1 is placed. The film structure 1 disposed in the housing space 90 is fixed to the tray 91. In the fixation of the membrane structure 1, a fixing member such as an adhesive tape 8 is used. The tape 8 has a belt shape, and may be formed of, for example, a resin material such as polyethylene, polypropylene, polyethylene terephthalate, or polyvinyl chloride, or a non-woven fabric. An adhesive having adhesiveness is provided on one side of the tape 8. As the paste, for example, an acrylic or polyvinyl alcohol can be used. The film structure 1 is disposed on a fixing surface 911 in which the central portion of the tray 91 is raised. The tape 8 is attached so that the surface on which the paste is provided faces the fixing surface 911 side, and as shown in FIG. 1, across the pressing edge 5 of the protective film 4 and the fixing surface 911 of the tray 91. Thereby, the film structure 1 is fixed to the fixing surface 911 of the protective film 4 with respect to the tray 91. The film structure 1 fixed in this manner is in contact with the container 9 only by the protective film 4. That is, it is not necessary to bring the film 2 of the frame 2 or the film into contact with the storage container 9. Therefore, when the storage container 9 in which the film structure 1 is accommodated is conveyed, the film 2 of the frame 2 or the surface film is not scratched by the storage container 9 by vibration. Thereby, no new dust is generated in the storage space 90. The removal of the membrane structure 1 from the storage container 9 is carried out in an environment that maintains high air cleanliness. In this environment, first, the jig 93 is detached from the ends of the tray 91 and the lid 92. Then, the lid 92 is separated from the tray 91, and the film structure 1 fixed to the tray 91 is exposed. Further, the specific jig is fixed to the frame 2 of the film structure 1 and the tray 91, and the frame 2 is biased in the Z direction by the jig. That is, a force is applied to the frame 2 so as to be pulled away from the tray 91. Thereby, the force acts on the protective film 4 attached to the adhesive layer 24 of the frame 2 in such a manner that the tray 91 is pulled apart. However, as described above, since the tape 8 is attached so as to extend over the bead 5 of the protective film 4 and the fixing surface 911 of the tray 91, the protective film 4 is always fixed to the fixing surface 911. As a result, the force acts to pull the adhesive layer 24 of the frame 2 and the protective portion 41 of the protective film 4 apart. This force acts intensively on the portion of the entire circumference of the protection portion 41 where the bead 5 is formed. As a result, a peeling end (not shown) is formed in the vicinity of the portion where the bead 5 is formed. After the formation of the peeling end, the surface of the protective portion 41 of the protective film 4 can be peeled off by the force applied to the frame 2, and the entire protective film 4 can be peeled off from the adhesive layer 24. At the same time, the film structure 1 (in which the protective film 4 has been peeled off) is taken out from the container 9 and the protective film 4 is peeled off. The adhesive film 4 can be peeled off to exert the adhesive force of the adhesive layer 24, and the film structure 1 can be adhered to the mask or the like in the adhesive layer 24. The film structure 1 is covered with an image pattern formed on a mask or the like by the film 3 of the surface film. Thereby, in the photolithography method, it is possible to perform dustproofing of a photomask or the like. According to the film structure 1, the film structure 1 can be attached to the container 9 by attaching the tape 8 so as to straddle the bead 5 of the protective film 4 and the container 9. The eight presser edges 5 are integrally formed with the protective portion 41 attached to the adhesive layer 24 of the frame 2, and are formed to extend radially outward of the frame body 2. This can be extended by the bead 5 in such a manner as to ensure a range in which the bead 5 can be fixed with respect to the container 9 . As a result, the film structure 1 can be surely fixed to the storage container 9. Further, the bead 5 can be partially formed by forming the eight bead 5 so as to radially extend toward the outside of the casing 2. The protective film 4 between the adjacent beads 5 and 5 is not fixed to the storage container 9. When the film structure 1 configured in this manner is applied with a force pulled away from the container 9, the force is concentrated on the portion where the bead 5 is formed between the adhesive layer 24 and the protective film 4. As a result, when the film structure 1 is taken out from the storage container 9, the peeling end can be easily formed. Further, in order to easily form the peeling end, it is preferable that the distance between adjacent beads 5 and 5 (the length of the portion of the protective film 4 that is not fixed to the container 9) is long, preferably set to 200 mm. The above is preferably set to 250 mm or more, preferably set to 300 mm or more, preferably set to 350 mm or more, preferably set to 400 mm or more, preferably set to 410 mm or more, preferably It is set to 420 mm or more, preferably set to 430 mm or more, preferably set to 440 mm or more, preferably set to 450 mm or more, preferably set to 460 mm or more, preferably set to 470 mm or more. Preferably, it is set to 480 mm or more, preferably set to 490 mm or more, preferably set to 500 mm or more, preferably set to 520 mm or more, preferably set to 540 mm or more, preferably set. It is 560 mm or more, preferably 580 mm or more, and preferably 600 mm or more. The upper limit is not particularly limited, and the distance may be 2000 mm or less, or may be 1500 mm or less. In order to easily form the peeling end, it is preferable that the crimping edge 5 is smaller with respect to one side of the protective film 4. If there is less pressing edge with respect to one side of the protective film 4, when the film 3 of the film is pulled from the tray 91, the protective film 4 is moved upward, so that a plurality of the adhesives can be inclined with respect to the reticle The portion to be stretched is thereby easily peeled off. When the length of one side of the protective film 4 is Lp, and the total length of the portion of the side edge 5 of the protective film 4 fixed to the surface film storage body by the fixing member is La, La/Lp The value is preferably 7.0% or less, preferably 6.0% or less, preferably 5.0% or less, and more preferably 4.0% or less. The lower limit of the value of the La/Lp is not particularly limited as long as the protective film 4 can be fixed to the storage container 9, and may be 1.0% or more, or 2.0% or more. In other words, according to the above configuration, the film structure 1 can be surely fixed to the storage container 9 and the film structure 1 can be taken out from the container 9 easily. However, if the force is concentrated on the portion where the bead 5 is formed, the bead 5 is pulled out from the tape 8, and the protective film 4 cannot be kept fixed to the storage container 9 at all times. When the protective film 4 cannot be fixed to the storage container 9, when the film structure 1 is taken out from the storage container 9, the protective film 4 cannot be peeled off from the adhesive layer 24. In response to such a problem, the film structure 1 prevents the crimp 5 from being pulled out from the tape 8 by designing the shape of the bead 5 of the protective film 4. Next, the bead 5 will be described in detail with reference to FIGS. 3 and 4. 3 and 4 are enlarged views of a portion III of Fig. 1. 3 shows a state in which the force at the time of taking out is not applied to the film structure 1, and FIG. 4 shows a state in which a force at the time of taking out is applied to the film structure 1. As described above, the protective film 4 has eight beads 5, but the basic shapes of the beads 5 are the same. Therefore, one bead 5 shown in the third portion of Fig. 1 will be described here, and the description of the other bead 5 will be omitted. The bead 5 has a base end portion 51 and an anchor portion 52. The proximal end portion 51 is connected to the protective portion 41 by the one end portion 511. The base end portion 51 is a direction substantially perpendicular to the direction in which the protective portion 41 extends in the direction in which the frame body 2 extends (the X direction in the example shown in FIG. 3) from the protective portion 41 to which the base end portion 51 is attached ( In the example shown in Fig. 3, the Y direction is extended to form. The dimension of the width of the base end portion 51 (the example shown in Fig. 3 is the dimension in the X direction) W1 is about 15 mm. Further, the length L1 of the proximal end portion 51 protruding from the protective portion 41 is approximately 20 mm. The anchor portion 52 is connected to the end portion 512 of the proximal end portion 51. The anchor portion 52 is perpendicular to the direction in which the bead 5 having the anchor portion 52 extends (the Y direction in the example shown in FIG. 3) (the X direction in the example shown in FIG. 3) Formed by extension. The dimension of the width of the anchor portion 52 (the dimension in the X direction in the example shown in Fig. 3) W2 is about 30 mm. Further, the length L2 of the anchor portion 52 protruding from the end portion 512 of the proximal end portion 51 is about 5 mm. The anchor portion 52 has a width larger than the width of the base end portion 51 from the viewpoint of easily forming the peeling end. Further, the dimension W1 of the width of the base end portion 51 is 10% or more of the dimension W2 of the width of the anchor portion 52. The dimension W1 of the width of the base end portion 51 may be 20% or more of the dimension W2 of the width of the anchor portion 52, may be 30% or more, or may be 40% or more. Further, the width of the end portion 512 of the proximal end portion 51 gradually increases from the protective portion 41 toward the anchor portion 52. Further, the width W1 of the width of the base end portion 51 is preferably 90% or less, preferably 80% or less, and preferably 70% or less of the dimension W2 of the width of the anchor portion 52, from the viewpoint of easily forming the peeling end. Preferably, it is 60% or less. Further, from the viewpoint of easily forming the peeling end, the width W1 of the width of the base end portion 51 is preferably small, preferably 60 mm or less, preferably 55 mm or less, preferably 50 mm or less, preferably 45 mm or less, preferably 40 mm or less, preferably 35 mm or less, preferably 30 mm or less, preferably 25 mm or less, preferably 20 mm or less, preferably 15 mm or less, preferably 10 or less Below mm. The lower limit of the dimension W1 is not particularly limited, but may be 3 mm or more, and may be 5 mm or more. Further, the dimension W2 of the width of the anchor portion 52 is preferably larger than the width of the base end portion 51 from the viewpoint of easily forming the peeling end. The width W2 of the anchor portion 52 may be 10 mm or more, 20 mm or more, 30 mm or more, 40 mm or more, 50 mm or more, or 60 mm or more. It can also be 70 mm or more. When the film structure 1 is fixed to the tray 91 of the storage container 9, the tape 8 is attached as shown in FIG. The tape 8 is attached so as to straddle the base end portion 51 of the bead 5 and the fixing surface 911 of the tray 91. Specifically, the tape 8 is formed to cross the base end portion 51 in the X direction, and the center portion thereof is attached to the base end portion 51, and both end portions are attached to the fixing surface 911. The tape 8 is disposed such that the end portion 81 on the Y-direction side is spaced apart from the end portion 521 on the Y-direction side of the anchor portion 52 by a predetermined interval or is in contact with the end portion 521. When the film structure 1 is taken out from the storage container 9, when a force is applied to the frame 2 so as to be pulled away from the tray 91, the force also acts on the protective film 4 attached to the adhesive layer 24 of the frame 2. This force acts as shown by an arrow F11 in FIG. 4 to pull the bead 5 of the protective film 4 in the -Y direction. When the protective film 4 is moved in the -Y direction, as shown in FIG. 4, the end portion 521 of the anchor portion 52 abuts against the end portion 81 of the tape 8. Thereby, the anchor portion 52 is biased at its end portion 521 from the end portion 81 of the tape 8 as indicated by an arrow F12. The bead 5 resists the force acting in a manner of being pulled out from the tape 8 by the force indicated by the arrow F12. As a result, it is possible to prevent the bead 5 from being pulled out from the tape 8. The anchor portion 52 is formed to extend in a direction perpendicular to a direction in which the bead having the anchor portion 52 extends. According to this configuration, the range in which the anchor portion 52 abuts against the end portion 81 of the tape 8 can be increased, and the bead 5 can be surely prevented from being pulled out from the tape 8. Further, the width of the end portion 512 of the proximal end portion 51 gradually increases from the protecting portion 41 toward the anchor portion 52. According to this configuration, the stress concentration between the end portion 512 of the proximal end portion 51 and the anchor portion 52 connected to the end portion 512 can be alleviated. As a result, even when a force is applied to the casing 2 so as to be pulled away from the tray 91, the end portion 512 of the proximal end portion 51 and the anchor portion 52 can be prevented from being broken. Further, the dimension W1 of the width of the base end portion 51 is 40% or more of the dimension W2 of the width of the anchor portion 52. According to this configuration, when the tape 8 is attached so as to straddle the base end portion 51 and the storage container 9, even if a force is applied to the film structure 1 so as to be pulled away from the container 9, the base end can be prevented. The break of the part 51. As a result, when the film structure 1 is taken out from the storage container 9, the protective film 4 can be reliably fixed to the storage container 9 at all times. [Second Embodiment] Next, the film structure 10 of the second embodiment will be described with reference to Figs. 5 and 6 . 5 and 6 are enlarged views of the film structure 10, and show portions corresponding to the portion III of Fig. 1 in the film structure 10. The film structure 10 is used for dustproofing of a mask or the like as in the first embodiment. The shape of the bead structure 6 in the film structure 10 is different from that of the first embodiment. In the configuration of the film structure 10, the same components as those in the first embodiment are denoted by the same reference numerals, and the description thereof will be appropriately omitted. The bead 6 of the film structure 10 has a base end portion 61 and an anchor portion 62. The proximal end portion 61 is connected to the protective portion 41 at one end portion 611. The base end portion 61 is formed in a direction from the protective portion 41 to which the base end portion 61 is connected, and is substantially perpendicular to the direction in which the protective portion 41 extends in the direction in which the frame body 2 extends (the X direction in the example shown in FIG. 5). (extending in the Y direction in the example shown in Fig. 5). The anchor portion 62 is coupled to the end portion 612 of the proximal end portion 61. The anchor portion 62 is formed in a direction perpendicular to the direction in which the bead 6 having the anchor portion 62 extends (the Y direction in the example shown in FIG. 5) (the X direction in the example shown in FIG. 5) ) extended. Further, the anchor portion 62 is formed with two slits 63. Each slit 63 extends from the end portion 622 on the -Y direction side of the anchor portion 62 in a direction in which the bead 6 of the anchor portion 62 extends (in the example shown in Fig. 5). The two slits 63 are spaced apart from each other by a distance equal to the width of the base end portion 61. By forming such a slit 63, the anchor portion 62 can be used to lift the two movable portions 621 or to restore the movable portion 621 which is turned up, as indicated by an arrow A1 in FIG. When the film structure 10 is fixed to the tray 91 of the storage container 9, the tape 8 is attached as shown in Fig. 6(A). The tape 8 is attached to the base end portion 61 and the fixing surface 911 of the tray 91 in a state where the movable portion 621 of the bead 6 is turned up as shown by an arrow A2. Specifically, the tape 8 is attached to the base end portion 61 in the X direction, and the center portion thereof is attached to the base end portion 61, and both end portions are attached to the fixing surface 911. After the tape 8 is attached, the movable portion 621 which is turned up is restored in the manner shown by an arrow A3 in Fig. 6(B). Thereby, the base end portion 61 is disposed between the tape 8 and the fixing surface 911, and the movable portion 621 is disposed closer to the Z direction than the tape 8 . At this time, the tape 8 is disposed such that the end portion 81 on the Y-direction side is spaced apart from the end portion 631 of each slit 63 by a predetermined interval or is in contact with the end portion 631. When the film structure 10 is taken out from the storage container 9, when a force is applied to the frame 2 so as to be pulled away from the tray 91, the force acts on the protective film 4 attached to the adhesive layer 24 of the frame 2. This force acts as shown by an arrow F21 in Fig. 6(C) to pull the bead 6 of the protective film 4 in the -Y direction. When the protective film 4 moves in the -Y direction, the end portion 631 of each slit 63 abuts against the end portion 81 of the tape 8. Thereby, the anchor portion 62 is urged from the end portion 631 of each slit 63 from the end portion 81 of the tape 8 as indicated by an arrow F22. The bead 6 is opposed to the force acting in a manner of being pulled out from the tape 8 by the force indicated by the arrow F22. As a result, it is possible to prevent the bead 6 from being pulled out from the tape 8. The embodiments described above are for easy understanding of the inventors and are not intended to limit the invention. The respective elements, arrangements, materials, conditions, shapes, dimensions, and the like of the embodiments are not limited to the examples, and can be appropriately changed. Further, the configurations shown in the different embodiments may be partially replaced or combined with each other. For example, a through hole penetrating the base end portions 51 and 61 in the Z direction may be formed in the central portion of the base end portions 51 and 61 of the pressurizing edges 5 and 6. The shape of the through hole can be various, such as a circular shape or a square shape. In this case, the tape 8 attached to the base end portions 51 and 61 is attached to the fixing surface 911 of the tray 91 via the through hole. That is, the tape 8 is attached to the fixing surface 911 not only at both end portions but also at the center portion. According to this configuration, the protective film 4 can be further reliably fixed to the fixing surface 911. Further, the fixing member is not limited to the tape 8, and a screw or a bolt or the like may be used. However, it is optimal for the tape from the viewpoint of easily forming the peeling end. Further, three or more press edges may be provided along one side of the protective film 4 or one side of the frame, or four or more press edges may be provided, or five or more press edges may be provided, or may be provided. More than 6 pressure edges. Further, three or more fixing members may be provided along one side of the protective film 4 or one side of the frame, or four or more fixing members may be provided, or five or more fixing members may be provided, or may be provided. More than 6 pressure edges.

1‧‧‧表膜結構體1‧‧‧membrane structure

2‧‧‧框體2‧‧‧ frame

3‧‧‧表膜之膜3‧‧‧ film of film

4‧‧‧保護膜4‧‧‧Protective film

5‧‧‧壓邊5‧‧‧Blank

6‧‧‧壓邊6‧‧‧Flanging

8‧‧‧膠帶(固定構件)8‧‧‧ Tape (fixed component)

9‧‧‧收納容器9‧‧‧ storage container

10‧‧‧表膜結構體10‧‧‧membrane structure

21‧‧‧長邊構件21‧‧‧Long-side components

22‧‧‧短邊構件22‧‧‧ Short-side components

23‧‧‧接著劑23‧‧‧Adhesive

24‧‧‧黏著層24‧‧‧Adhesive layer

41‧‧‧保護部41‧‧‧Protection Department

51‧‧‧基端部51‧‧‧ base end

52‧‧‧錨定部52‧‧‧ anchoring department

61‧‧‧基端部61‧‧‧ base end

62‧‧‧錨定部62‧‧‧ anchoring department

63‧‧‧狹縫63‧‧‧Slit

81‧‧‧端部81‧‧‧End

90‧‧‧收納空間90‧‧‧ Storage space

91‧‧‧托盤91‧‧‧Tray

92‧‧‧蓋92‧‧‧ Cover

93‧‧‧夾具93‧‧‧ fixture

511‧‧‧端部511‧‧‧End

512‧‧‧端部512‧‧‧ end

521‧‧‧端部521‧‧‧End

611‧‧‧端部611‧‧‧End

612‧‧‧端部612‧‧‧End

621‧‧‧可動部621‧‧‧movable department

622‧‧‧端部622‧‧‧End

631‧‧‧端部631‧‧‧ End

911‧‧‧固定面911‧‧‧fixed surface

A1‧‧‧箭頭A1‧‧‧ arrow

A2‧‧‧箭頭A2‧‧‧ arrow

A3‧‧‧箭頭A3‧‧‧ arrow

F11‧‧‧箭頭F11‧‧‧ arrow

F12‧‧‧箭頭F12‧‧‧ arrow

F21‧‧‧箭頭F21‧‧‧ arrow

F22‧‧‧箭頭F22‧‧‧ arrow

L1‧‧‧長度L1‧‧‧ length

L2‧‧‧長度L2‧‧‧ length

W1‧‧‧寬度W1‧‧‧Width

W2‧‧‧寬度W2‧‧‧Width

X‧‧‧X方向X‧‧‧X direction

Y‧‧‧Y方向Y‧‧‧Y direction

Z‧‧‧Z方向Z‧‧‧Z direction

圖1係表示第1實施形態之表膜結構體之前視圖。圖2係表示圖1之II-II剖面之剖視圖。圖3係圖1之III部之放大圖。圖4係圖1之III部之放大圖。圖5係第2實施形態之表膜結構體之放大圖。圖6(A)～(C)係第2實施形態之表膜結構體之放大圖。Fig. 1 is a front view showing a film structure of the first embodiment. Figure 2 is a cross-sectional view showing a section II-II of Figure 1. Figure 3 is an enlarged view of a portion III of Figure 1. Figure 4 is an enlarged view of a portion III of Figure 1. Fig. 5 is an enlarged view of the film structure of the second embodiment. 6(A) to 6(C) are enlarged views of the surface film structure of the second embodiment.

Claims

一種表膜結構體，其特徵在於具備：框體，其於前視下外形為矩形，且於背面側端面具有黏著層；表膜之膜，其設置於上述框體之正面側端面，覆蓋該框體之內部；及保護膜，其具有貼附於上述黏著層保護該黏著層之保護部、及與上述保護部一體設置之複數個壓邊；上述複數個壓邊係以朝向上述框體之外部延伸之方式形成，上述複數個壓邊中之至少一者具有基端部及錨定部，上述基端部之一端部連接於上述保護部，上述錨定部連接於上述基端部之另一端部，上述錨定部之寬度大於上述基端部之寬度。 A surface film structure comprising: a frame body having a rectangular outer shape in a front view and an adhesive layer on an end surface on a back side; and a film of a surface film provided on a front end surface of the frame body to cover the surface a protective film having a protective portion attached to the adhesive layer to protect the adhesive layer, and a plurality of beads integrally provided with the protective portion; the plurality of crimping portions facing the frame Formed by external extension, at least one of the plurality of crimps has a base end portion and an anchor portion, one end of the base end portion is connected to the protection portion, and the anchor portion is connected to the base end portion The width of the anchor portion is greater than the width of the base end portion at one end.

如請求項1之表膜結構體，其中上述錨定部係以朝向相對於具有該錨定部之上述壓邊所延伸之方向垂直之方向延伸之方式形成。 The film structure of claim 1, wherein the anchor portion is formed to extend in a direction perpendicular to a direction in which the bead having the anchor portion extends.

如請求項1之表膜結構體，其中上述基端部之另一端部之寬度係自上述保護部朝向上述錨定部逐漸變大。 The film structure of claim 1, wherein a width of the other end portion of the base end portion gradually increases from the protection portion toward the anchor portion.

如請求項2之表膜結構體，其中上述基端部之另一端部之寬度係自上述保護部朝向上述錨定部逐漸變大。 The film structure of claim 2, wherein a width of the other end portion of the base end portion gradually increases from the protection portion toward the anchor portion.

如請求項1之表膜結構體，其中上述錨定部形成有沿著具有該錨定部之上述壓邊所延伸之方向之狹縫。 The membrane structure of claim 1, wherein the anchor portion is formed along the anchor portion a slit in the direction in which the crimping is extended.

如請求項2之表膜結構體，其中上述錨定部形成有沿著具有該錨定部之上述壓邊所延伸之方向之狹縫。 The film structure of claim 2, wherein the anchor portion is formed with a slit along a direction in which the bead having the anchor portion extends.

如請求項3之表膜結構體，其中上述錨定部形成有沿著具有該錨定部之上述壓邊所延伸之方向之狹縫。 The film structure of claim 3, wherein the anchor portion is formed with a slit along a direction in which the bead having the anchor portion extends.

如請求項4之表膜結構體，其中上述錨定部形成有沿著具有該錨定部之上述壓邊所延伸之方向之狹縫。 The film structure of claim 4, wherein the anchor portion is formed with a slit along a direction in which the bead having the anchor portion extends.

如請求項1至8中任一項之表膜結構體，其中上述基端部之寬度之尺寸為上述錨定部之寬度之尺寸之40%以上。 The film structure according to any one of claims 1 to 8, wherein the width of the base end portion is 40% or more of the width of the anchor portion.

如請求項1至8中任一項之表膜結構體，其中上述基端部之寬度之尺寸為上述錨定部之寬度之尺寸之90%以下。 The film structure according to any one of claims 1 to 8, wherein the width of the base end portion is 90% or less of the width of the anchor portion.

如請求項10之表膜結構體，其中上述基端部之寬度之尺寸為上述錨定部之寬度之尺寸之80%以下。 The film structure of claim 10, wherein the width of the base end portion is 80% or less of the width of the anchor portion.

如請求項10之表膜結構體，其中上述基端部之寬度之尺寸為上述錨定部之寬度之尺寸之70%以下。 The film structure of claim 10, wherein the width of the base end portion is 70% or less of the width of the anchor portion.

如請求項10之表膜結構體，其中上述基端部之寬度之尺寸為上述錨定部之寬度之尺寸之60%以下。 The film structure of claim 10, wherein the width of the base end portion is 60% or less of the width of the anchor portion.

如請求項1至8中任一項之表膜結構體，其中上述基端部之寬度之尺寸為60mm以下。 The film structure according to any one of claims 1 to 8, wherein the width of the base end portion is 60 mm or less.

如請求項9之表膜結構體，其中上述基端部之寬度之尺寸為60mm以下。 The film structure of claim 9, wherein the width of the base end portion is 60 mm or less.

如請求項10之表膜結構體，其中上述基端部之寬度之尺寸為60mm以下。 The film structure of claim 10, wherein the width of the base end portion is 60 mm or less.

如請求項14之表膜結構體，其中上述基端部之寬度之尺寸為40mm以下。 The film structure of claim 14, wherein the width of the base end portion is 40 mm or less.

如請求項17之表膜結構體，其中上述基端部之寬度之尺寸為30mm以下。 The film structure of claim 17, wherein the width of the base end portion is 30 mm or less.

如請求項18之表膜結構體，其中上述基端部之寬度之尺寸為20mm以下。 The film structure of claim 18, wherein the width of the base end portion is 20 mm or less.

一種表膜收納體，其特徵在於：其係具備如請求項1至19中任一項之表膜結構體、及收納上述表膜結構體之收納容器者，且具有用以將上述基端部固定於上述收納容器之固定構件。 A surface film storage body comprising the film structure according to any one of claims 1 to 19, and a storage container accommodating the surface film structure, and A fixing member for fixing the base end portion to the storage container is provided.

如請求項20之表膜收納體，其中上述複數個壓邊之相鄰壓邊之間之保護膜未固定於上述收納容器，且上述相鄰壓邊之間之未固定於上述收納容器之保護膜之長度為200mm以上。 The film storage body of claim 20, wherein the protective film between the adjacent crimping edges of the plurality of crimping edges is not fixed to the storage container, and the protection between the adjacent crimping edges is not fixed to the storage container The length of the film is 200 mm or more.

如請求項21之表膜收納體，其中上述複數個壓邊之相鄰壓邊之間之保護膜未固定於上述收納容器，且上述相鄰壓邊之間之未固定於上述收納容器之保護膜之長度為410mm以上。 The film storage body of claim 21, wherein the protective film between the adjacent crimping edges of the plurality of crimping edges is not fixed to the storage container, and the protection between the adjacent crimping edges is not fixed to the storage container The length of the film is 410 mm or more.

一種表膜收納體，其特徵在於，其係具備表膜結構體、及收納上述表膜結構體之收納容器者，上述表膜結構體具備：框體，其於前視下外形為矩形；表膜之膜，其設置於上述框體之一面，覆蓋上述框體之內部；黏著層，其設置於上述框體之另一面；及保護膜，其貼附於上述黏著層之與設置有上述框體之面為相反側之面；上述保護膜具有突出至上述保護膜之外側之壓邊，上述壓邊藉由固定構件固定於上述表膜收納體，上述壓邊之藉由上述固定構件固定於上述表膜收納體之部分之長度之合計占上述保護膜之1邊之長度之1.0%以上且7.0%以下。 A surface film storage body comprising a surface structure and a storage container for accommodating the surface structure, wherein the surface structure includes a frame having a rectangular shape in a front view; a film of the film disposed on one surface of the frame to cover the inside of the frame; an adhesive layer disposed on the other surface of the frame; and a protective film attached to the adhesive layer and provided with the frame The surface of the body is a surface on the opposite side; the protective film has a bead protruding to the outer side of the protective film, and the bead is fixed to the surface film receiving body by a fixing member, and the bead is fixed to the surface by the fixing member The length of the portion of the above film storage body The total amount is 1.0% or more and 7.0% or less of the length of one side of the protective film.

如請求項23之表膜收納體，其中上述壓邊之藉由上述固定構件固定於上述表膜收納體之部分之長度之合計占上述保護膜之1邊長度之1.0%以上且4.0%以下。 In the film storage body of claim 23, the total length of the portion of the bead that is fixed to the surface of the surface of the protective film by the fixing member is 1.0% or more and 4.0% or less of the length of one side of the protective film.

一種表膜收納體，其特徵在於，其係具備表膜結構體、及收納上述表膜結構體之收納容器者，上述表膜結構體具備：框體，其於前視下外形為矩形；表膜之膜，其設置於上述框體之一面，覆蓋上述框體之內部；黏著層，其設置於上述框體之另一面；及保護膜，其貼附於上述黏著層之與設置有上述框體之面為相反側之面；上述保護膜具有突出至上述保護膜之外側之第1至第3壓邊，上述第1至第3壓邊藉由第1至第3固定構件固定於上述表膜收納體，上述第1固定構件、上述第2固定構件、及上述第3固定構件係沿上述框體之同一邊依序設置，上述第1壓邊、上述第2壓邊、及上述第3壓邊沿上述框體之同一邊依序設置，第1固定構件與第2固定構件之間之保護膜未固定於上述收納容器，第2固定構件與第3固定構件之間之保護膜未固定於上述收納容器，上述第1固定構件與第2固定構件之間之未固定於上述收納容器之上述保護膜之長度、及上述第2固定構件與第3固定構件之間之未固定於上述收納容器之上述保護膜之長度均為200mm以上，上述第2壓邊之最小寬度為60mm以下，上述第2壓邊之最小寬度部分藉由上述第2固定構件固定於上述表膜收納體。 A surface film storage body comprising a surface structure and a storage container for accommodating the surface structure, wherein the surface structure includes a frame having a rectangular shape in a front view; a film of the film disposed on one surface of the frame to cover the inside of the frame; an adhesive layer disposed on the other surface of the frame; and a protective film attached to the adhesive layer and provided with the frame The surface of the body is a surface on the opposite side; the protective film has first to third beads protruding to the outer side of the protective film, and the first to third beads are fixed to the table by the first to third fixing members. In the film storage body, the first fixing member, the second fixing member, and the third fixing member are sequentially provided along the same side of the frame, and the first bead, the second bead, and the third The bead is sequentially provided along the same side of the frame, and the protective film between the first fixing member and the second fixing member is not fixed to the storage container, and the protective film between the second fixing member and the third fixing member is not fixed to the sealing film. The storage container, the first fixing member Not between the second fixing member is fixed to the top of the storage container The length of the protective film and the length of the protective film between the second fixing member and the third fixing member that are not fixed to the storage container are both 200 mm or more, and the minimum width of the second pressing edge is 60 mm or less. The minimum width portion of the second bead is fixed to the surface film storage body by the second fixing member.

如請求項25之表膜收納體，其中上述第2壓邊之最小寬度為40mm以下。 The film storage body of claim 25, wherein the minimum width of the second bead is 40 mm or less.

如請求項26之表膜收納體，其中上述第2壓邊之最小寬度為30mm以下。 The film storage body according to claim 26, wherein the minimum width of the second bead is 30 mm or less.

如請求項27之表膜收納體，其中上述第2壓邊之最小寬度為20mm以下。 The film storage body according to claim 27, wherein the minimum width of the second bead is 20 mm or less.

如請求項25至28中任一項之表膜收納體，其中上述第1固定構件與第2固定構件之間之未固定於上述收納容器之上述保護膜之長度、及上述第2固定構件與第3固定構件之間之未固定於上述收納容器之上述保護膜之長度均為250mm以上。 The film storage body according to any one of claims 25 to 28, wherein a length of the protective film between the first fixing member and the second fixing member that is not fixed to the storage container, and the second fixing member and The length of the protective film that is not fixed to the storage container between the third fixing members is 250 mm or more.

如請求項29之表膜收納體，其中上述第1固定構件與第2固定構件之間之未固定於上述收納容器之上述保護膜之長度、及上述第2固定構件與第3固定構件之間之未固定於上述收納容器之上述保護膜之長度均為300 mm以上。 The film storage body according to claim 29, wherein a length between the first fixing member and the second fixing member that is not fixed to the storage container and a length between the second fixing member and the third fixing member The length of the protective film that is not fixed to the storage container is 300 Mm or more.

一種固定方法，其特徵在於，其係將表膜結構體相對於收納容器固定者，上述表膜結構體具備：框體，其於前視下外形為矩形，且於背面側端面具有黏著層；表膜之膜，其設置於上述框體之正面側端面，覆蓋該框體之內部；及保護膜，其具有貼附於上述黏著層而保護該黏著層之保護部、及與上述保護部一體設置且以朝向上述框體之外部延伸之方式形成之複數個壓邊；上述複數個壓邊中之至少一者具有基端部及錨定部，上述基端部之一端部連接於上述保護部，上述錨定部連接於上述基端部之另一端部，膠帶係以跨及上述基端部及上述收納容器之方式貼附，而非貼附於上述錨定部。 A fixing method, wherein the surface structure is fixed to a storage container, wherein the surface structure comprises: a frame having a rectangular outer shape in front view and an adhesive layer on an end surface on the back side; a film of the surface film provided on the front end surface of the frame body to cover the inside of the frame body, and a protective film having a protective portion attached to the adhesive layer to protect the adhesive layer, and integrated with the protective portion a plurality of beads formed to extend toward the outside of the frame; at least one of the plurality of beads has a base end and an anchor portion, and one end of the base end is connected to the protection portion The anchor portion is connected to the other end portion of the base end portion, and the tape is attached so as to straddle the base end portion and the storage container, instead of being attached to the anchor portion.