CN207313744U - New single crystal growth stove - Google Patents
New single crystal growth stove Download PDFInfo
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- CN207313744U CN207313744U CN201721000178.1U CN201721000178U CN207313744U CN 207313744 U CN207313744 U CN 207313744U CN 201721000178 U CN201721000178 U CN 201721000178U CN 207313744 U CN207313744 U CN 207313744U
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Abstract
The utility model discloses new single crystal growth stove,Including heat-preservation cylinder,The heat-preservation cylinder is internally provided with graphite support,The heat-preservation cylinder is fixedly connected with tube door by hinge,The graphite support is internally provided with growth room,The side of the growth room is provided with peep hole,Opposite side is provided with vacuum orifice,The both sides up and down of the growth room are symmetrically arranged with heat-insulating plug,ZM100 laser scanning calipers are installed at a side position of peep hole inside the growth room,The utility model is provided with heat recovery room,Heat recovery room one end is connected by air inlet pipe growth room upper end,The other end is connected by wind turbine and air outlet pipe with growth room bottom,Multiple filter screens are installed in the inside of heat recovery room,The impurity that heat recovery chamber interior is entered by air outlet pipe can fully be filtered out,The gas for being accompanied with heat after filtering is entered inside growth room by air inlet pipe again,Realize the recycling of heat.
Description
Technical field
The utility model belongs to single crystal growth stove technical field, and in particular to new single crystal growth stove.
Background technology
Single crystal growth stove is the manufacturing equipment that monocrystal is produced by vertical pulling method, mainly by host, heating power supply and meter
Calculation machine control system three parts form, during monocrystalline growth with czochralski body, the success or not of single crystal growth and
The height of quality is determined by the Temperature Distribution of thermal field, and the suitable thermal field of Temperature Distribution, not only single crystal growth is smooth, but also
Quality is higher；If the Temperature Distribution of thermal field is not quite reasonable, various defects are easily produced during growing single crystals, are influenced
Quality, situation is serious to be there is morphotropism growth and does not come out monocrystal.
There are the inert gas flow inside some defects, such as growth furnace in use for existing single crystal growth stove
Speed is uneven, influences the growth of monocrystal, and the heat utilization ratio in growth furnace is relatively low.
In the Chinese patent that the patent No. is CN203653745U, it is noted that a kind of method of crystal growth by crystal pulling stove, includes
Inner hollow, which forms the furnace body of furnace chamber and the crucible positioned at furnace chamber center, the utility model, can effectively control flowing heat transfer in furnace chamber
Fuel factor, in the preferable temperature environment of crystal surrounding tissue, at the same cause crystal growing process in solid liquid interface be in preferably
Temperature gradient, which can reduce the generation of crystal growing process Dislocations or rupture, but this is new
Device for recycling heat is not provided with type, it is impossible to the heat for the gas that recycling is discharged by gas outlet, and do not set
Baffle is put, internal gas flow velocity is uneven, easily influences the quality of monocrystal.
Utility model content
The purpose of this utility model is to provide new single crystal growth stove, to solve life proposed in the above background technology
The inert gas flow velocity of long furnace interior is uneven, influences the growth of monocrystal, and the heat utilization ratio in growth furnace is relatively low
Problem.
To achieve the above object, the utility model provides following technical solution：New single crystal growth stove, including insulation
Cylinder, the heat-preservation cylinder is internally provided with graphite support, and heat-preservation cylinder side is provided with support post, and the heat-preservation cylinder passes through hinge
Tube door is fixedly connected with, the graphite support is internally provided with growth room, and the side of the growth room is provided with peep hole, another
Side is provided with vacuum orifice, and the both sides up and down of the growth room are symmetrically arranged with heat-insulating plug, and the growth room inside is close to observation
ZM100 laser scanning calipers are installed, the middle position of the heat-insulating plug is provided with seed crystal, described at one side position in hole
Seed crystal is rotatably connected to rotation cylinder by connecting shaft, and telescopic rod is provided with above the rotation cylinder, the telescopic rod
Top is provided with hydraulic cylinder, fixed station is provided with above the hydraulic cylinder, and hydraulic cylinder is connected with hydraulic pressure by hydraulic oil pipe
Pump, the side of the hydraulic pump are provided with hydraulic oil container, and the top of the growth room is connected with heat recovery room by air inlet pipe,
The side away from heat-preservation cylinder is provided with inert gas import on the heat recovery room；The internal symmetry of the air outlet pipe is provided with
Baffle, the growth room inside are provided with culture medium close to the lower position of seed crystal, earthenware are provided with below the culture medium
Crucible, the bottom of the crucible are provided with thermocouple, and the lower section of the thermocouple is rotatably connected to servomotor by shaft, described
Heat insulating element is symmetrically installed with two side positions of crucible inside graphite support, the heat-preservation cylinder side is close to support post
Lower position is provided with machine body base, and the machine body base top is provided with KS02Y controllers close to the side of support post,
The wind turbine, servomotor, thermocouple, ZM100 laser scannings caliper, rotation cylinder and hydraulic pump with KS02Y controllers
It is electrically connected.
As an improvement, the bottom of the heat recovery room is connected with wind turbine by pipeline, the wind turbine by air outlet pipe with
Growth room bottom connects.
As an improvement, the wind turbine is fixedly connected with heat-preservation cylinder by bearing diagonal frame.
As an improvement, the inside of the air inlet pipe and growth room is both provided with baffle.
As an improvement, the inside of the heat recovery room is provided with filter screen.
As an improvement, the quantity of the filter screen is four, and it is uniformly arranged on the inside of heat recovery room.
As an improvement, the hydraulic oil pipe and support post connection fixed by snap.
The utility model compared with prior art, has the advantages that：
(1) the utility model is provided with heat recovery room, and heat recovery room one end is connected by air inlet pipe growth room upper end,
The other end is connected by wind turbine and air outlet pipe with growth room bottom, and multiple filter screens are provided with the inside of heat recovery room, can
Fully to filter out the impurity that heat recovery chamber interior is entered by air outlet pipe, the gas for being accompanied with heat after filtering again by into
Tracheae is entered inside growth room, realizes the recycling of heat.
(2) the utility model is provided with baffle in the inner homogeneous of air inlet pipe, growth room and air outlet pipe, can to by into
Gas inside tracheae, growth room and air outlet pipe slows down, and allows internal gas uniformly through preventing that gas flow rate is uneven
The even growth quality for influencing monocrystal.
Brief description of the drawings
Fig. 1 is the structure diagram of the utility model；
Fig. 2 is the left view of the utility model；
Fig. 3 is the right view of the utility model；
In figure：1- hydraulic cylinders, 2- support posts, 3- heat-insulating plugs, 4- heat-preservation cylinders, 5- vacuum orifices, 6- air inlet pipe, 7- cultures
Base, 8- inert gas imports, 9- filter screens, 10- heat recoveries room, 11- graphite supports, 12- wind turbines, 13- air outlet pipes, 14- baffles,
15- servomotors, 16- thermocouples, 17- crucibles, 18- heat insulating elements, 19- seed crystals, 20- peep holes, 21-ZM100 laser scannings
Caliper, 22- growth rooms, 23- rotation cylinders, 24- telescopic rods, 25- fixed stations, 26- hydraulic oil pipes, 27-KS02Y controllers,
28- machine body bases, 29- hydraulic pumps, 30- hydraulic oil containers, 31- tube doors.
Embodiment
The following is a combination of the drawings in the embodiments of the present utility model, and the technical scheme in the embodiment of the utility model is carried out
Clearly and completely describe, it is clear that the described embodiments are only a part of the embodiments of the utility model, rather than whole
Embodiment.Based on the embodiment in the utility model, those of ordinary skill in the art are without making creative work
All other embodiments obtained, shall fall within the protection scope of the present invention.
- 3 are please referred to Fig.1, the utility model provides a kind of technical solution：A kind of new single crystal growth stove, including insulation
Cylinder 4, heat-preservation cylinder 4 is internally provided with graphite support 11, and 4 side of heat-preservation cylinder is provided with support post 2, and heat-preservation cylinder 4 passes through hinge
Tube door 31 is fixedly connected with, graphite support 11 is internally provided with growth room 22, and the side of growth room 22 is provided with peep hole 20, uses
The condition of production of 22 inside monocrystal of growth room is observed in operator, opposite side is provided with vacuum orifice 5, for extracting growth room
Air inside 22, the both sides up and down of growth room 22 are symmetrically arranged with heat-insulating plug 3, prevent 22 internal heat of growth room from shedding, raw
The long inside of room 22 is provided with ZM100 laser scannings caliper 21 at a side position of peep hole 20, can detect inside
The growth diameter of monocrystal.
Further, the middle position of the heat-insulating plug 3 is provided with seed crystal 19, logical for growing single crystals, seed crystal 19
Cross connecting shaft and be rotatably connected to rotation cylinder 23, the top of rotation cylinder 23 is provided with telescopic rod 24, and the top of telescopic rod 24 is set
Hydraulic cylinder 1 is equipped with, the top of hydraulic cylinder 1 is provided with fixed station 25, and hydraulic cylinder 1 is connected with hydraulic pump by hydraulic oil pipe 26
29, the side of hydraulic pump 29 is provided with hydraulic oil container 30, and the top of growth room 22 is connected with heat recovery room by air inlet pipe 6
10, reused easy to store heat.
In the present embodiment, the side away from heat-preservation cylinder 4 is provided with inert gas import 8 on the heat recovery room 10, and
The inside of heat recovery room 10 is provided with filter screen 9, and for filtering the impurity in gas, the bottom of heat recovery room 10 passes through pipe
Road is connected with wind turbine 12, and wind turbine 12 is connected by air outlet pipe 13 with 22 bottom of growth room；The internal symmetry of air outlet pipe 13 is provided with
Baffle 14, allows the gas inside air outlet pipe 13 uniformly through the inside of growth room 22 is set close to the lower position of seed crystal 19
Culture medium 7 is equipped with, the lower section of culture medium 7 is provided with crucible 17, and the bottom of crucible 17 is provided with thermocouple 16, for crucible 17
Heated, the lower section of thermocouple 16 is rotatably connected to servomotor 15 by shaft, and the inside of graphite support 11 is close to crucible 17
Heat insulating element 18 is symmetrically installed with two side positions, 4 side of heat-preservation cylinder is provided with fuselage close to the lower position of support post 2
Base 28, the top of machine body base 28 is provided with KS02Y controllers 27 close to the side of support post 2, for controlling this growth furnace
Normal work, wind turbine 12, servomotor 15, thermocouple 16, ZM100 laser scannings caliper 21, rotation cylinder 23 and hydraulic pump
29 are electrically connected with KS02Y controllers 27.
In the present embodiment, in order to make air inlet pipe 6 and 22 internal gas flow velocity of growth room uniform, air inlet pipe 6 and growth room 22
Inside be both provided with baffle 14.
In the present embodiment, in order to allow wind turbine 12 to stablize fixation, wind turbine 12 is fixed with heat-preservation cylinder 4 by bearing diagonal frame to be connected
Connect.
In the present embodiment, in order to allow the impurity inside reflux gas fully to filter, filter screen 9 is preferably provided with four
It is a, and four filter screens 9 are uniformly arranged on the inside of heat recovery room 10.
In the present embodiment, in order to allow hydraulic oil pipe 26 to stablize fixation, hydraulic oil pipe 26 passes through buckle with support post 2
It is fixedly connected.
The operation principle and process for using of the utility model：After the new single crystal growth stove installs, tube door is opened
31, the polycrystal raw material of high-purity is put into inside crucible 17, tube door 31 is closed, thermocouple is made by KS02Y controllers 27
16 normal works, heat crucible 17, make the polycrystal melting sources inside crucible 17, then to the solution after fusing slightly
Seed crystal 19, the surface of solution is inserted into by the heat-insulating plug 3 of the top of growth room 22 by cooling, while seed crystal 19 is passed through connecting shaft
Be connected with rotation cylinder 23, after seed crystal 19 and solution melt and after, hydraulic pump 29 is worked by KS02Y controllers 27, hydraulic pump
29 work drive hydraulic cylinder 1 to work, and drive seed crystal 19 slowly to rise by telescopic rod 24, at this time, crystal can be under seed crystal 19
Fang Shengchang, the diameter of the monocrystal of growth can be detected by ZM100 laser scannings caliper 21, after the completion of growth, opened
Tube door 31 takes out the monocrystal grown, in 19 production process of seed crystal, passes through the inert gas import 8 on heat recovery room 10
Inert gas is filled with into heat recovery room 10, inert gas is entered the inside of growth room 22 by air inlet pipe 6, by growth course
The foreign gas of middle generation is brought into inside heat recovery room 10 by air outlet pipe 13, in air inlet pipe 13, growth room 22 and outlet
Pipe 6 is internally provided with baffle 14, can make inert gas at the uniform velocity by the way that inert gas passes through the mistake inside heat recovery room 10
After strainer 9 filters, then entered inside growth room 22 and recycled by air inlet pipe 6, improve the utilization rate of heat.
While there has been shown and described that the embodiment of the utility model, for the ordinary skill in the art,
It is appreciated that these embodiments can be carried out with a variety of changes in the case where not departing from the principle of the utility model and spirit, repaiied
Change, replace and modification, the scope of the utility model are defined by the appended claims and the equivalents thereof.
Claims (7)
1. new single crystal growth stove, including heat-preservation cylinder (4), it is characterised in that：The heat-preservation cylinder (4) is internally provided with graphite
Hold in the palm (11), and heat-preservation cylinder (4) side is provided with support post (2)；The graphite support (11) is internally provided with growth room (22),
The growth room (22) is provided with vacuum orifice (5), its upper and lower both sides is symmetrically arranged with heat-insulating plug (3) and inside is provided with
ZM100 laser scannings caliper (21)；The middle position of the heat-insulating plug (3) is provided with seed crystal (19), and seed crystal (19) rotates
Rotation cylinder (23) is connected with, telescopic rod (24) is provided with above the rotation cylinder (23)；The top of the telescopic rod (24)
Hydraulic cylinder (1) is provided with, fixed station (25) is provided with above the hydraulic cylinder (1), and hydraulic cylinder (1) passes through hydraulic oil pipe (26)
It is connected with hydraulic pump (29)；The side of the hydraulic pump (29) is provided with hydraulic oil container (30), the top of the growth room (22)
Heat recovery room (10) is connected with by air inlet pipe (6), the side away from heat-preservation cylinder (4) is installed on the heat recovery room (10)
There is inert gas import (8)；The internal lower position close to seed crystal (19) of the growth room (22) is provided with culture medium (7),
Crucible (17) is provided with below the culture medium (7), the bottom of the crucible (17) is provided with thermocouple (16), the thermoelectricity
The lower section of even (16) is rotatably connected to servomotor (15) by shaft, and the graphite support (11) is internal close to the two of crucible (17)
Heat insulating element (18) is symmetrically installed with side position, heat-preservation cylinder (4) side is set close to the lower position of support post (2)
Machine body base (28) is equipped with, machine body base (28) top is provided with KS02Y controllers close to the side of support post (2)
(27), the servomotor (15), thermocouple (16), ZM100 laser scannings caliper (21), rotation cylinder (23) and hydraulic pump
(29) it is electrically connected with KS02Y controllers (27).
2. new single crystal growth stove according to claim 1, it is characterised in that：The bottom of the heat recovery room (10)
Wind turbine (12) is connected with by pipeline, the wind turbine (12) is connected by air outlet pipe (13) with growth room (22) bottom.
3. new single crystal growth stove according to claim 2, it is characterised in that：The wind turbine (12) and heat-preservation cylinder (4)
It is fixedly connected by bearing diagonal frame.
4. new single crystal growth stove according to claim 2, it is characterised in that：The internal symmetry of the air outlet pipe (13)
It is provided with baffle (14), the inside of the air inlet pipe (6) and growth room (22) is both provided with baffle (14).
5. new single crystal growth stove according to claim 1, it is characterised in that：The inside of the heat recovery room (10)
Filter screen (9) is installed.
6. new single crystal growth stove according to claim 5, it is characterised in that：The quantity of the filter screen (9) is four
It is a, and it is uniformly arranged on the inside of heat recovery room (10).
7. new single crystal growth stove according to claim 1, it is characterised in that：The hydraulic oil pipe (26) is vertical with support
Column (2) connection fixed by snap.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201721000178.1U CN207313744U (en) | 2017-08-11 | 2017-08-11 | New single crystal growth stove |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201721000178.1U CN207313744U (en) | 2017-08-11 | 2017-08-11 | New single crystal growth stove |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN207313744U true CN207313744U (en) | 2018-05-04 |
Family
ID=62434451
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201721000178.1U Active CN207313744U (en) | 2017-08-11 | 2017-08-11 | New single crystal growth stove |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN207313744U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2021179027A1 (en) * | 2020-03-09 | 2021-09-16 | Ebner Industrieofenbau Gmbh | Crystal growth apparatus with movable seed fixture |
-
2017
- 2017-08-11 CN CN201721000178.1U patent/CN207313744U/en active Active
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2021179027A1 (en) * | 2020-03-09 | 2021-09-16 | Ebner Industrieofenbau Gmbh | Crystal growth apparatus with movable seed fixture |
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