CN206848304U - The hot many reference amounts coupling microscope probe of magnetoelectricity - Google Patents
The hot many reference amounts coupling microscope probe of magnetoelectricity Download PDFInfo
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- CN206848304U CN206848304U CN201720613253.5U CN201720613253U CN206848304U CN 206848304 U CN206848304 U CN 206848304U CN 201720613253 U CN201720613253 U CN 201720613253U CN 206848304 U CN206848304 U CN 206848304U
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Abstract
The utility model provides a kind of hot many reference amounts coupling microscope probe of magnetoelectricity, including feeler arm, and the needle point body being connected with feeler arm, outside from feeler arm and needle point body surface, is covered with thermoelectricity double-layer, thermally conductive insulating layer and magnetic conductive layer successively；Thermoelectricity double-layer forms electrothermal circuit with external circuit；Magnetic conductive layer forms galvanic circle with sample, external circuit.The probe structure is simple, preparation difficulty is low, is capable of magnetic signal, electric signal and the thermal signal of in-situ micro area detection magneto-electric functional material, and can effectively avoid the signal interference between electrothermal circuit and electrical circuit.
Description
Technical field
A kind of probe of scanning probe microscopy is the utility model is related to, especially relates to a kind of magnetic-electric-thermal many reference amounts
Couple microscope probe.
Background technology
With the rapid development of information technology, the electronic component of integrated circuit tends to miniaturization and integrated direction hair
Exhibition, the size of electronic component enter in a subtle way/receive yardstick, it generates heat, and to have become restriction with heat dissipation problem further highly integrated
Bottleneck problem.Micro-/to receive the physical property related with heat is characterized under yardstick, understanding the physical process of heating and radiating, to have become the modern times hot
- micro-/the yardstick science of heat of receiving of a brand-new branch in science.It is micro-/receive under yardstick, the microstructure of material and domain structure
The influence of (for magnetic, ferroelectric material) to thermal property is particularly important, a micro-crack, hole, crystal boundary or even a domain wall
The thermal property of material may all be had influence on.By taking multi-iron material as an example, magnetic/electricdomain upset under being driven in outfield (or domain wall moves
It is dynamic) and leakage current can all cause microcell to generate heat.Although people have developed multiple technologies means to study these parameters, simply arrive
So far, also these parameters can be carried out with situ-in real time-simultaneous synthesis without technology and equipment to characterize, limited to material
Middle heating and the deep understanding of the physical mechanism of radiating, so as to can not find out solve material it is micro-/receive the heating and radiating of yardstick
Problem.
Atomic force microscope technology has obtained hair at full speed as a kind of important research nanoscale science and technology research meanses
Exhibition.Scanning probe microscopy technology has spatial resolution height based on being developed on the basis of PSTM, can
Vacuum, air, even alternating temperature works in a variety of environment such as solution many advantages, such as, it is widely used in physics quickly
The research field such as, chemistry, biology, electronics.People pass through all kinds of interactions between exploratory probe and sample surfaces
The physical quantity such as power or electric current detects the surface topography of sample and other physical characteristics, developed AFM,
The technologies such as magnetic force microscopy, piezoelectricity force microscope, conductive force microscope, it can be used for detecting sample surface morphology, domain structure, micro-
Area's conductance, etc. physical parameter.
In recent years, newly-developed scanning calorimeter probe technique, scanning probe microscopy technique extension to calorifics is studied and led
Domain, realize and the spatial distribution of the thermal property such as material and device surface micro-area temperature and heat conduction is characterized and studied.Although people
The microcell thermal imaging based on scanning probe microscopy has been developed, but be currently based on the technology and be merely able to solely
Calorifics information is obtained, in-situ synchronization is still unable in real time while obtains domain structure, ferroelectricity/piezoelectricity domain structure, conductive domain structure
It is not clear particularly with the relevance people of period etc. all multi informations, magnetic-electric-thermal coupling imaging can not be carried out, is limited pair
In material generate heat with radiating physical mechanism deep understanding, so as to can not find out solve material it is micro-/receive yardstick heating with
Heat dissipation problem.
The utility model proposes a kind of novel nano magnetic-electric-thermal many reference amounts coupling microscope probe, will overcome existing single
Magnetic, electricity, the limitation of hot function module, the probe for having magnetic-electric-thermal property detection concurrently is developed, is equipped with corresponding signal detection
And processing system, will can realize in-situ characterization magnetic domain, ferroelectric domain, microcell conductance, microcell heating property change and its mutually
Between association.Therefore, it is in nanometer technical field of measurement and test, Development of Novel nanometer characterization technique, especially probe characterization technique
One of study hotspot of presently relevant research field.
Utility model content
For the above-mentioned state of the art, the utility model provides a kind of nano magnetic-electric-thermal many reference amounts coupling microscope and visited
Pin, its is simple in construction, can more physical parameters such as original position, synchro measure magnetic, electricity, heat, realize magnetic domain, electricdomain to the shadow of thermal property
Ring law study.
The technical solution of the utility model is：A kind of magnetic-electric-thermal many reference amounts coupling microscope probe, including feeler arm, with
And the needle point body being connected with feeler arm, the tip of the needle point body are used to contact with sample or non-contact, to measure sample
Product signal；It is characterized in that：It is outside from needle point body surface, it is followed successively by thermoelectricity double-layer, thermally conductive insulating layer, magnetic conductive layer；
Described thermoelectricity double-layer is covered with the region A and region B of needle point body surface, and needle point body surface is except region A
It is remaining area with the region outside the B of region, region A regions non-overlapping with region B and in the sophisticated position phase of needle point body
Connection；Overlay area A material is materials A, and overlay area B material is material B, and materials A is different from material B, with external electrical
Road forms electrothermal circuit；
Described thermally conductive insulating layer is covered with the remaining area of thermoelectricity double-layer and needle point body surface；
Described magnetic conductive layer is located at heat conductive insulating layer surface, the sophisticated position of needle point body is at least covered with, with sample
Product, external circuit form galvanic circle.
The three-dimensional structure of described needle point body is unlimited, can be pyramid, circular cone, terrace with edge, round platform etc..
In order to improve detectivity, preferably, described region A and region B not phases in addition to the position of needle point tip
Connection.
Preferably, feeler arm surface includes region A ' and the non-overlapping region of region B ', region A ' and region B ', region A '
It is connected with region A, region B ' is connected with region B；Described external circuit includes being covered with the materials A on region A ' surfaces,
It is covered with the material B on region B ' surfaces.
Described materials A and material B are conductive, and the two is connected to form loop, during tie point temperature change, thermoelectricity
Electrical potential difference is produced in even loop.Described materials A is unlimited, including one kind in metal and semiconductor with excellent conductive performance
Material or two or more combined materials, such as the metal such as palladium, gold, bismuth (Bi), nickel (Ni), cobalt (Co), potassium (K) and its conjunction
At least one of semiconductor such as gold, graphite, graphene.Described material B is unlimited, including the metal with excellent conductive performance
With a kind of material in semiconductor or two or more combined materials, such as palladium, gold, bismuth (Bi), nickel (Ni), cobalt (Co), potassium
(K) at least one of the metal and the semiconductor such as its alloy, graphite, graphene such as.
Described heat conductive insulating has heat conductivity, while has electrical insulating property, and its material is unlimited, including with certain exhausted
Semiconductor, inorganic material or the organic material of edge performance, such as zinc oxide (ZnO), bismuth ferrite (BiFeO3), cobalt acid lithium
(LiCoO2), nickel oxide (NiO), cobalt oxide (Co2O3), cupric oxide (CuxO), silica (SiO2), silicon nitride (SiNx), two
Titanium oxide (TiO2), tantalum pentoxide (Ta2O5), niobium pentaoxide (Nb2O5), tungsten oxide (WOx), hafnium oxide (HfO2), oxygen
Change aluminium (Al2O3), graphene oxide, amorphous carbon, copper sulfide (CuxS), silver sulfide (Ag2S), non-crystalline silicon, titanium nitride (TiN), poly-
At least one of acid imide (PI), polyamide (PAI), poly- Schiff base (PA), polysulfones (PS) etc..
Described magnetic conductive layer has magnetic and electric conductivity, and its material is unlimited, including ferromagnetic metal iron (Fe), cobalt
(Co), nickel (Ni) and magnetic alloy etc..
For the ease of connect external circuit, described ferromagnetic conductive layer can also cover needle point body remove sophisticated position its
His position.As a kind of implementation, during working condition, ferromagnetic conductive layer contacts with sample, sample ground connection, external circuit connection
The ferromagnetic conductive layer, i.e. external circuit, ferromagnetic conductive layer connect, sample and the earth form electrical circuit, for measuring sample
Electric signal.
The utility model additionally provides a kind of method for preparing above-mentioned magnetic-electric-thermal many reference amounts coupling microscope probe, including
Following steps：
Step 1：Using magnetron sputtering technique in the region A surfaces deposition materials A of needle point body, the B surface deposition in region
Material B, obtain thermoelectricity double-layer；
Step 2：Using magnetron sputtering technique or pulsed laser technique on the surface of thermoelectricity double-layer, and needle point this body surface
The remaining area surface in addition to region A and region B in face deposits thermally conductive insulating layer；
Step 3：Using magnetron sputtering technique in heat conductive insulating layer surface deposited magnetic conductive layer.
The pattern of sample, magnetic letter can be detected using magnetic of the present utility model-electric-thermal many reference amounts coupling microscope probe
Number, electric signal and thermal signal, its detection method it is as follows：
(1) surface topography of sample detects with magnetic signal
Using contact mode.
That is, probe actuation unit driving probe, the tip displacement of its needle point body is made to be visited to sample surfaces initial position
Pin is oriented scanning to sample surfaces from the initial position, and tip and the sample table millet cake of needle point body are controlled in scanning process
Contact or oscillation point contact, the displacement signal or vibration signal of needle point body are gathered, the topography signal of sample is obtained through analysis；
Probe is back to described initial position and raises certain distance upwards, then according to described orientation to sample
Surface is scanned, and is controlled the tip of needle point body to carry out displacement or vibration along described feature image in scanning process, is adopted
Collect the displacement signal or vibration signal of needle point body, the magnetic signal image of sample is obtained through analysis.
(2) the thermal signal detection of sample
The thermoelectricity double-layer of external circuit and probe forms the electrothermal circuit of closure, and during tie point temperature change, thermocouple returns
Electrical potential difference change is produced in road.When the tip of needle point body is in contact with sample surfaces, pass through each coating needle point at tip
Body carries out heat exchange with sample, the electrical potential difference in calorifics loop is changed, acquired, analysis, obtains the heat letter of sample
Number image.
(3) the electric signal detection of sample
The tip of needle point body is in contact with sample surfaces, and external circuit, the magnetic conductive layer of probe, and sample are formed
The electrical return of closure, i.e. electric signal flows into the magnetic conductive layer and sample of probe, forms voltage signal, acquired, point
Analysis, obtains the electric signal image of sample.
Compared with prior art, the utility model uses thermocouple structure, and thermoelectricity double-layer independently forms thermoelectricity with external power
Loop, testing sample, magnetic conductive layer and external power independently form electrical circuit, and thermally conductive insulating layer is located at thermoelectricity resistance layer and magnetic
Between property conductive layer, the signal interference between electrothermal circuit and electrical circuit has effectively been obstructed, can be to the magnetic of magneto-electric functional material
Signal, electric signal and the detection of thermal signal in-situ micro area, magnetic signal, electric signal and the thermal signal being included under micron, nanoscale
In-situ micro area detection.
Brief description of the drawings
Fig. 1 is the feeler arm and needle point of magnetic-electric-thermal many reference amounts coupling microscope probe in the utility model embodiment 1
The positive structure schematic of body；
Fig. 2 is Fig. 1 side structure schematic diagram；
Fig. 3 is the thermoelectricity double-layer enlarged diagram of needle point body surface shown in Fig. 1；
Fig. 4 is the structural representation of thermoelectricity double-layer shown in Fig. 3 and part external circuit；
Fig. 5 is the structural representation of the covering thermally conductive insulating layer of detecting probe surface shown in Fig. 4；
Fig. 6 and 7 is the structural representation of the covering magnetic conductive layer of detecting probe surface shown in Fig. 5.
Wherein：1 feeler arm, 2 needle point bodies, a side of 3 needle point bodies, another side of 4 needle point bodies, 5 pins
The front of sharp body, the back side of 6 needle point bodies, 7 thermally conductive insulating layer, 8 magnetic conductive layers.
Embodiment
The utility model is described in further detail with reference to embodiments, it is pointed out that embodiment described below
It is intended to be easy to understanding of the present utility model, does not limit the utility model in any way.
Embodiment 1：
In the present embodiment, from commercially available uncoated Si probes, its structure as shown in figure 1, including feeler arm 1 and with spy
The connected needle point body 2 of needle arm 1.As shown in Figure 1, 2, needle point body 2 is in tetrahedron pyramidal structure, relative with front by front 5
The back side 6, and two sides 3 and 4 form.
As shown in figure 3, the surface of needle point body is divided into region A, region B, and the area in addition to region A and region B
Domain is remaining area.The region that lines are filled in the surface of needle point body in Fig. 3 is region A (that is a, side of needle point body
3), the region of Rectangle filling is region B (that is, another side 4 of needle point body), region A and the non-overlapping regions of region B and
Only it is connected at the sophisticated position of needle point body.
As shown in figure 4, feeler arm surface includes region A ' and region B ', the region of Fig. 4 middle probe arms lines on surface filling
For A ', the region of Rectangle filling is B ', region A ' regions non-overlapping with region B ' and is not connected with, region A ' and region A phases
Connection, region B ' are connected with region B.
Such as lower caldding layer is prepared in the detecting probe surface.
(1) the uncoated Si probes, scavenging period 5min are cleaned with 50000Hz ultrasonic wave.
(2) as shown in figure 3, design given shape and the mask plate of size, utilize magnetron sputtering technique or pulse laser
Technology, in region, A surface evaporation platinum, the B surface gold evaporation in region, forms thermoelectricity double-layer.Also, as shown in figure 4, in area
Domain A ' surface evaporation platinum, B ' the surface gold evaporation in region, forms the part of external circuit.Thermoelectricity double-layer is formed with external circuit
Electrothermal circuit, for measuring the thermal signal of sample.
(3) as shown in figure 5, using magnetron sputtering technique or pulsed laser technique in the surface of thermoelectricity double-layer, Yi Jizhen
The surface of the remaining area (that is, the front 5 of needle point body and the back side 6) in addition to region A and region B of sharp body surface deposits
Silica, thermally conductive insulating layer 7 is obtained, as shown in the cross-wise lines filling in Fig. 5；
(4) as shown in fig. 6, using magnetron sputtering technique or pulsed laser technique on the surface of thermoelectricity double-layer, in heat conduction
Surface of insulating layer deposition iron-base magnetic conductive layer 8, as shown in grid lines filling in Fig. 6.The ferromagnetic conductive layer connects dispatch from foreign news agency
Road, during working condition, the ferromagnetic conductive layer contacts with sample, and sample ground connection, external circuit connects the ferromagnetic conductive layer, i.e.
External circuit, ferromagnetic conductive layer connect, sample and the earth form electrical circuit, for measuring the electric signal of sample.
When the pattern using probe obtained above detection sample is with magnetic signal, thermal signal and electric signal, it is detected
Method is as follows：
(1) it is used for the surface topography and magnetic signal for detecting sample
Probe actuation unit drives probe, makes the tip displacement of its needle point body to sample surfaces initial position, probe
Transversely sample surfaces are oriented with scanning from the initial position, tip and the sample table of needle point body are controlled in scanning process
Millet cake contacts or oscillation point contact, gathers the length travel signal or vibration signal of needle point body, the shape of sample is obtained through analysis
Looks signal；
Probe is back to described initial position and raises certain distance upwards, then according to described transversal orientation pair
Sample surfaces are scanned, controlled in scanning process the tip of needle point body along described feature image carry out length travel or
Vibration, the length travel signal or vibration signal of needle point body are gathered, the magnetic signal image of sample is obtained through analysis；
(2) it is used for the thermal signal for detecting sample
The thermoelectricity double-layer of external circuit and probe forms the calorifics loop of closure, the tie point temperature change at needle point tip
When, Thermocouple Circuit is interior to produce electrical potential difference change；Probe actuation unit driving probe is moved to sample surfaces position, makes needle point
The tip of body is in contact with sample surfaces, and needle point body carries out heat exchange by each coating and sample, makes in calorifics loop
Electric potential signal change, it is acquired, analysis, obtain the thermal signal image of sample；
(3) it is used for the electric signal for detecting sample
Probe actuation unit driving probe is moved to sample surfaces position, makes tip and the sample surfaces phase of needle point body
Contact, external circuit, the magnetic conductive layer of probe, and sample form the electrical return of closure, i.e. electric signal flows into probe
Magnetic conductive layer and sample, voltage signal is formed, it is acquired, analysis, obtain the electric signal image of sample.
Embodiment 2：
In the present embodiment, probe structure and the Si probe structures in embodiment 1 are essentially identical, it is unique unlike it is described
Step (4) is as follows：
As shown in fig. 7, using magnetron sputtering technique or pulsed laser technique on the surface of thermoelectricity double-layer, in heat conductive insulating
Layer surface deposition iron-base magnetic conductive layer 8, as shown in grid lines filling in Fig. 7.That is, compared with Fig. 6, the iron-based magnetic in Fig. 7
Property conductive layer 8 coat the whole front of probe tip and coat probe bodies front end, the structure is easy to magnetic conductive layer to connect
External circuit.During working condition, the ferromagnetic conductive layer contacts with sample, and sample ground connection, external circuit connects the ferromagnetic conductive layer,
That is, external circuit, ferromagnetic conductive layer connect, sample and the earth form electrical circuit, for measuring the electric signal of sample.
The technical solution of the utility model is described in detail embodiment described above, it should be understood that above institute
Only specific embodiment of the utility model is stated, is not limited to the utility model, it is all in spirit of the present utility model
Interior done any modification, supplement or similar fashion replacement etc., should be included within the scope of protection of the utility model.
Claims (4)
1. a kind of magnetic-electric-thermal many reference amounts coupling microscope probe, including feeler arm, and the needle point body being connected with feeler arm,
The tip of the needle point body is used to contact with sample or non-contact, to measure sample signal；It is characterized in that：From needle point body
Surface is outside, is followed successively by thermoelectricity double-layer, thermally conductive insulating layer, magnetic conductive layer；
Described thermoelectricity double-layer is covered with the region A and region B of needle point body surface, and needle point body surface is except region A and area
Region outside the B of domain is remaining area, region A regions non-overlapping with region B and is connected at the sophisticated position of needle point body；
Overlay area A materials A, and the overlay area B material Bs different from materials A, electrothermal circuit is formed with external circuit；
Described thermally conductive insulating layer is covered with the remaining area of thermoelectricity double-layer and needle point body surface；
Described magnetic conductive layer is located at heat conductive insulating layer surface, is at least covered with the sophisticated position of needle point body, with sample, outside
Portion's circuit forms galvanic circle.
2. magnetic according to claim 1-electric-thermal many reference amounts coupling microscope probe, it is characterized in that：Described needle point body
Three-dimensional structure include pyramid, circular cone, terrace with edge, round platform.
3. magnetic according to claim 1-electric-thermal many reference amounts coupling microscope probe, it is characterized in that：Described region A with
Region B is not connected with addition to the position of needle point tip.
4. magnetic according to claim 1-electric-thermal many reference amounts coupling microscope probe, it is characterized in that：Feeler arm surface includes
Region A ' and the non-overlapping region of region B ', region A ' and region B ', region A ' are connected with region A, and region B ' is connected with region B
Connect；Described external circuit includes being covered with the materials A on region A ' surfaces, and is covered with the material B on region B ' surfaces.
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| Application Number | Priority Date | Filing Date | Title |
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| CN201720613253.5U CN206848304U (en) | 2017-05-27 | 2017-05-27 | The hot many reference amounts coupling microscope probe of magnetoelectricity |
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| Application Number | Priority Date | Filing Date | Title |
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| CN201720613253.5U CN206848304U (en) | 2017-05-27 | 2017-05-27 | The hot many reference amounts coupling microscope probe of magnetoelectricity |
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Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107064565A (en) * | 2017-05-27 | 2017-08-18 | 中国科学院宁波材料技术与工程研究所 | The hot many reference amounts coupling microscope probe of magnetoelectricity, its preparation method and detection method |
| CN110146726A (en) * | 2019-05-22 | 2019-08-20 | 季华实验室 | Method for controlling probe temperature |
| CN113504394A (en) * | 2021-07-12 | 2021-10-15 | 中国科学院半导体研究所 | Wafer-level preparation method of coated probe and coated probe |
| CN107064565B (en) * | 2017-05-27 | 2024-04-23 | 中国科学院宁波材料技术与工程研究所 | Magneto-electric-thermal multiparameter coupling microscope probe, preparation method and detection method thereof |
-
2017
- 2017-05-27 CN CN201720613253.5U patent/CN206848304U/en active Active
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107064565A (en) * | 2017-05-27 | 2017-08-18 | 中国科学院宁波材料技术与工程研究所 | The hot many reference amounts coupling microscope probe of magnetoelectricity, its preparation method and detection method |
| CN107064565B (en) * | 2017-05-27 | 2024-04-23 | 中国科学院宁波材料技术与工程研究所 | Magneto-electric-thermal multiparameter coupling microscope probe, preparation method and detection method thereof |
| CN110146726A (en) * | 2019-05-22 | 2019-08-20 | 季华实验室 | Method for controlling probe temperature |
| CN113504394A (en) * | 2021-07-12 | 2021-10-15 | 中国科学院半导体研究所 | Wafer-level preparation method of coated probe and coated probe |
| CN113504394B (en) * | 2021-07-12 | 2024-01-23 | 中国科学院半导体研究所 | Wafer level preparation method of coating probe and coating probe |
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