CN206570402U - A kind of two-door vacuum evaporation coating film device of full-automatic vertical - Google Patents
A kind of two-door vacuum evaporation coating film device of full-automatic vertical Download PDFInfo
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- CN206570402U CN206570402U CN201720241668.4U CN201720241668U CN206570402U CN 206570402 U CN206570402 U CN 206570402U CN 201720241668 U CN201720241668 U CN 201720241668U CN 206570402 U CN206570402 U CN 206570402U
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- pump
- chamber
- mainframe
- full
- automatic vertical
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Abstract
The utility model discloses a kind of two-door vacuum evaporation coating film device of full-automatic vertical, including mainframe, lobe pump is installed above the mainframe, and biography film frame is fixed with the right side of mainframe, the mainframe is connected by branch pipe with slide valve pump, maintenance pump is installed above the slide valve pump, and maintain pump to be fixedly connected by wire with crane boom, foreline valve is provided with the crane boom, low temperature air and water pump is installed on the left of the slide valve pump, and it is provided with coating chamber below low temperature air and water pump, the coating chamber lower right is provided with coiling chamber, and coiling chamber is arranged on underframe, vacuum chamber is provided with the underframe, and it is fixed with booster pump on the right side of vacuum chamber, switch board is provided with the right side of the booster pump, and switch board is connected by main shaft with underframe.Coating chamber of the present utility model can keep high vacuum state, and foreign gas is few, can effectively prevent coating materials steam from being polluted by foreign gas, it is hereby achieved that the more excellent film layer of quality, and automation degree of equipment is higher.
Description
Technical field
The utility model is related to filming equipment technical field, and specially a kind of two-door vacuum vapor plating of full-automatic vertical is set
It is standby.
Background technology
Vacuum evaporation coating membrane technology is PVD（Physical vapour deposition (PVD)）Develop earliest, application field very wide plated film in technology
Technology.Its operation principle is the evaporation source that membrane material is placed in vacuum coating equipment（For heating the dress that membrane material is allowed to steam raising
Put）In, evaporation is allowed to by evaporation source heating membrane material in high vacuum conditions and forms steam, steam reaches plated substrate surface
Afterwards because base material temperature is relatively low, steam just condenses in substrate surface formation film.What is be widely used at present is box evaporation coating
Machine, this box evaporation coating owner will use resistance heating evaporation source and electron beam heating evaporation source（By electron gun and crucible
Composition）Two kinds of evaporation sources.This coating machine mainly include vacuum chamber, extract system, evaporation source, membrane thickness measuring system, ion gun,
Heater etc..Because above-mentioned this coating machine typically uses the extract system of oil diffusion pump+lobe pump+oil seal type sliding vane rotary pump, oil
Steam is known from experience to vacuum chamber certain pollution, so can pollution film layer quality, therefore market in urgent need develops a kind of new complete
The two-door vacuum evaporation coating film device of automatic vertical.
The content of the invention
The purpose of this utility model is to provide a kind of full-automatic vertical two-door vacuum evaporation coating film device, above-mentioned to solve
The problem of being proposed in background technology.
To achieve the above object, the utility model provides following technical scheme：A kind of full-automatic vertical is two-door to be evaporated in vacuo
It is provided with above filming equipment, including mainframe, the mainframe on the right side of lobe pump, and mainframe and is fixed with biography film frame, it is described
Mainframe is connected by branch pipe with slide valve pump, maintenance pump is provided with above the slide valve pump, and maintain pump by wire with rising
Weight frame is fixedly connected, and is provided with the crane boom on the left of foreline valve, the slide valve pump and is provided with low temperature air and water pump, and water at low temperature
Coating chamber is provided with below air pump, the coating chamber lower right is provided with coiling chamber, and coiling chamber is arranged on underframe, the bottom
It is provided with frame on the right side of vacuum chamber, and vacuum chamber and is fixed with booster pump, switch board is provided with the right side of the booster pump, and switch board is logical
Main shaft is crossed with underframe to be connected.
It is preferred that, the mainframe passes on left connecting shaft and is fixedly connected with slave frame.
It is preferred that, the slide valve pump is provided with two altogether, and valve is provided with slide valve pump.
It is preferred that, the low temperature air and water pump is connected by flexible pipe with cool chamber.
It is preferred that, provided with 66 degree of angles between the slide valve pump.
It is preferred that, it is provided with evaporation source between the coiling chamber and coating chamber.
Compared with prior art, the beneficial effects of the utility model are：The utility model is except work rest and the dress of coating materials
Unload using artificial outer, other operations are automatically performed by device, substantially increase plating membrane efficiency, it is ensured that product film layer it is consistent
Property, while can keep high vacuum state in coating chamber, foreign gas is few, can effectively prevent coating materials steam dirty by foreign gas
Dye, it is hereby achieved that the more excellent film layer of quality；Which overcomes the technical requirements and operating cost mistake existed using cold-trap
High defect, possesses and realizes home-made equipment, makes the reduction of complete machine cost, substantially increases operating efficiency so that coated product reaches
To advanced level.
Brief description of the drawings
Fig. 1 is structural representation of the present utility model；
Fig. 2 is front view of the present utility model.
In figure：1- slave framves；2- lobe pumps；3- mainframes；4- passes film frame；5- foreline valves；6- maintains pump；7- crane booms；
8- slide valve pumps；9- main shafts；10- switch boards；11- booster pumps；12- vacuum chambers；13- underframe；14- coiling chambers；15- coating chambers；16-
Valve；17- low temperature air and water pumps；18- branch pipes.
Embodiment
Below in conjunction with the accompanying drawing in the utility model embodiment, the technical scheme in the utility model embodiment is carried out
Clearly and completely describe, it is clear that described embodiment is only a part of embodiment of the utility model, rather than whole
Embodiment.Based on the embodiment in the utility model, those of ordinary skill in the art are not under the premise of creative work is made
The every other embodiment obtained, belongs to the scope of the utility model protection.
Refer to Fig. 1-2, a kind of embodiment that the utility model is provided：A kind of two-door vacuum vapor plating of full-automatic vertical
Equipment, including mainframe 3, the top of mainframe 3 are provided with lobe pump 2, and the right side of mainframe 3 is fixed with biography film frame 4, mainframe 3
It is connected by branch pipe 18 with slide valve pump 8, the top of slide valve pump 8 is provided with maintenance pump 6, and maintains pump 6 to pass through wire and crane boom 7
It is fixedly connected, foreline valve 5 is provided with crane boom 7, the left side of slide valve pump 8 is provided with low temperature air and water pump 17, and low temperature air and water pump 17
Lower section is provided with coating chamber 15, and the lower right of coating chamber 15 is provided with coiling chamber 14, and coiling chamber 14 is arranged on underframe 13, underframe
Vacuum chamber 12 is provided with 13, and the right side of vacuum chamber 12 is fixed with booster pump 11, the right side of booster pump 11 is provided with switch board 10, and control
Cabinet 10 processed is connected by main shaft 9 with underframe 13, and mainframe 3 passes on left connecting shaft and is fixedly connected with slave frame 1, and slide valve pump 8 is total to
It is provided with two, and slide valve pump 8 and valve 16 is installed, low temperature air and water pump 17 is connected by flexible pipe with cool chamber, water at low temperature
Air pump 17 is connected by flexible pipe with cool chamber, and evaporation source is provided between coiling chamber 14 and coating chamber 15.
When in use, whole machine carries out computer automation control to the utility model, and the right side of mainframe 3 is fixed with biography film frame
4, crane boom 7 slings entire volume plastic sheeting, loads on biography film frame 4, is moved to through passing film frame 4 on winding rod, the left side of slide valve pump 8
Low temperature air and water pump 17 is installed, the lower section of low temperature air and water pump 17 is provided with coating chamber 15, and the lower right of coating chamber 15 is provided with coiling chamber
14, advanced forward on the track of underframe 13 by roller, the plastic sheeting on biography film frame 4 is had respectively entered the He of coiling chamber 14
In coating chamber 15, it is stopped after push-tight sealing, evaporation source is provided between coiling chamber 14 and coating chamber 15, evaporation source is provided with
Aluminum pot and zinc pot, are entered in coating chamber 15, now zinc pot temperature is constant in 500 degree or so, aluminum pot temperature by roller along track
Degree is constant at 1500 degree, is advanced into after sealing station and stops promoting so that zinc-aluminium flashes to gas, opens foreline valve 5, extracts true
Air in empty room 12 is into vacuum, and winding rod proceeds by winding, after now aluminizing on a plastic film, then in aluminium film it is zinc-plated,
Entire volume zinc-aluminium film is obtained, the equipment is in addition to the handling of work rest and coating materials are used manually, and other operations are automatically complete by device
Into substantially increasing plating membrane efficiency, it is ensured that the uniformity of product film layer, while high vacuum state can be kept in coating chamber, it is miscellaneous
Matter gas is few, can effectively prevent coating materials steam from being polluted by foreign gas, it is hereby achieved that the more excellent film layer of quality.
It is obvious to a person skilled in the art that the utility model is not limited to the details of above-mentioned one exemplary embodiment, and
And in the case of without departing substantially from spirit or essential attributes of the present utility model, can realize that this practicality is new in other specific forms
Type.Therefore, no matter from the point of view of which point, embodiment all should be regarded as exemplary, and is nonrestrictive, this practicality is new
The scope of type limits by appended claims rather than described above, it is intended that the equivalency fallen in claim is contained
All changes in justice and scope are included in the utility model.Any reference in claim should not be considered as limitation
Involved claim.
Moreover, it will be appreciated that although the present specification is described in terms of embodiments, not each embodiment is only wrapped
Containing an independent technical scheme, this narrating mode of specification is only that for clarity, those skilled in the art should
Using specification as an entirety, the technical solutions in the various embodiments may also be suitably combined, forms those skilled in the art
It may be appreciated other embodiment.
Claims (6)
1. a kind of two-door vacuum evaporation coating film device of full-automatic vertical, including mainframe（3）, it is characterised in that：The mainframe
（3）Top is provided with lobe pump（2）, and mainframe（3）Right side is fixed with biography film frame（4）, the mainframe（3）Pass through branch pipe
（18）With slide valve pump（8）It is connected, the slide valve pump（8）Top is provided with maintenance pump（6）, and maintain pump（6）By wire with
Crane boom（7）It is fixedly connected, the crane boom（7）On be provided with foreline valve（5）, the slide valve pump（8）Left side is provided with low temperature
Air and water pump（17）, and low temperature air and water pump（17）Lower section is provided with coating chamber（15）, the coating chamber（15）Lower right is provided with volume
Around room（14）, and coiling chamber（14）Installed in underframe（13）On, the underframe（13）Inside it is provided with vacuum chamber（12）, and vacuum chamber
（12）Right side is fixed with booster pump（11）, the booster pump（11）Right side is provided with switch board（10）, and switch board（10）Pass through master
Axle（9）With underframe（13）It is connected.
2. the two-door vacuum evaporation coating film device of a kind of full-automatic vertical according to claim 1, it is characterised in that：The master
Frame（3）Pass on left connecting shaft and slave frame（1）It is fixedly connected.
3. the two-door vacuum evaporation coating film device of a kind of full-automatic vertical according to claim 1, it is characterised in that：The cunning
Valve pump（8）Two, and slide valve pump are provided with altogether（8）Valve is inside installed（16）.
4. the two-door vacuum evaporation coating film device of a kind of full-automatic vertical according to claim 1, it is characterised in that：It is described low
Warm water air pump（17）It is connected by flexible pipe with cool chamber.
5. the two-door vacuum evaporation coating film device of a kind of full-automatic vertical according to claim 1, it is characterised in that：The cunning
Valve pump（8）Between provided with 66 degree of angles.
6. the two-door vacuum evaporation coating film device of a kind of full-automatic vertical according to claim 1, it is characterised in that：The volume
Around room（14）And coating chamber（15）Between be provided with evaporation source.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201720241668.4U CN206570402U (en) | 2017-03-11 | 2017-03-11 | A kind of two-door vacuum evaporation coating film device of full-automatic vertical |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201720241668.4U CN206570402U (en) | 2017-03-11 | 2017-03-11 | A kind of two-door vacuum evaporation coating film device of full-automatic vertical |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN206570402U true CN206570402U (en) | 2017-10-20 |
Family
ID=60055130
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201720241668.4U Expired - Fee Related CN206570402U (en) | 2017-03-11 | 2017-03-11 | A kind of two-door vacuum evaporation coating film device of full-automatic vertical |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN206570402U (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113136553A (en) * | 2021-04-23 | 2021-07-20 | 深圳市乐苏科技有限公司 | Film coating equipment and film coating process for mobile phone camera lens |
| CN113445021A (en) * | 2021-06-29 | 2021-09-28 | 辽宁分子流科技有限公司 | Winding coating method |
-
2017
- 2017-03-11 CN CN201720241668.4U patent/CN206570402U/en not_active Expired - Fee Related
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113136553A (en) * | 2021-04-23 | 2021-07-20 | 深圳市乐苏科技有限公司 | Film coating equipment and film coating process for mobile phone camera lens |
| CN113445021A (en) * | 2021-06-29 | 2021-09-28 | 辽宁分子流科技有限公司 | Winding coating method |
| CN113445021B (en) * | 2021-06-29 | 2023-04-07 | 辽宁分子流科技有限公司 | Winding coating method |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20171020 Termination date: 20200311 |