CN101487111A - Winding film coating machine - Google Patents
Winding film coating machine Download PDFInfo
- Publication number
- CN101487111A CN101487111A CNA2008100451994A CN200810045199A CN101487111A CN 101487111 A CN101487111 A CN 101487111A CN A2008100451994 A CNA2008100451994 A CN A2008100451994A CN 200810045199 A CN200810045199 A CN 200810045199A CN 101487111 A CN101487111 A CN 101487111A
- Authority
- CN
- China
- Prior art keywords
- vacuum
- plated film
- coiled material
- vacuum chamber
- coating machine
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Images
Landscapes
- Physical Vapour Deposition (AREA)
Abstract
The invention provides a winding coating machine which comprises at least one coating vacuum chamber, a coiled material unwinding mechanism and a winding mechanism that was placed outside the coating vacuum chamber, the machine is characterized in that at least one vacuum channel for bringing materials in and out is arranged among the coating vacuum chamber, the coiled material unwinding mechanism and the winding mechanism, the vacuum channel consists of narrow slit damp channels and vacuum locks consisting of vacuum aspirating chambers. The coiled material unwinding mechanism and the winding mechanism are placed outside the vacuum chamber, the vacuum locks and the narrow slit damp channels are reliably sealed, so the machine has a long life and low manufacturing cost, can ensure the continuous production, and can coat monolayer or multilayer on the surface of the plastic films and sheet metals; and the microstructure of the coating surface obtained is very dense, and the surface is smooth.
Description
Technical field:
The present invention relates to a kind of winding film coating machine, particularly be that a kind of coiled material unreeling structure and rolling-up mechanism place the winding film coating machine outside the vacuum chamber.
Background technology:
The plating functional membrane adopts the winding film plating mode more on film, and traditional winding film coating machine adopts single roller monoblock type plated film, both in a plated film vacuum chamber, laid a cold rod, 2-3 negative electrode and target core and coiled material unreeling structure, rolling-up mechanism, owing to the structural limitations reason, particularly will be with bulky coiled material unreeling structure, rolling-up mechanism places within the vacuum chamber, need too big vacuum chamber, and entirely in vacuum chamber, water flowing, the pipeline of energising is many, and the gas discharge quantity of generation is too big, the operation of unfavorable vacuum pump economy, complex structural designs and be inconvenient to overhaul, and can't carry out continuous production, production efficiency is low.
Summary of the invention:
The objective of the invention is in order to overcome above deficiency, provide that a kind of production efficiency height, equipment cost are low, coiled material unreeling structure and rolling-up mechanism place and can carry out the quantity-produced winding film coating machine outside the vacuum chamber.
The object of the present invention is achieved like this:
Winding film coating machine of the present invention, comprise at least one plated film vacuum chamber, place coiled material unreeling structure and rolling-up mechanism outside the plated film vacuum chamber, it is characterized in that between plated film vacuum chamber and coiled material unreeling structure and rolling-up mechanism, having at least one band to pass in and out the vacuum tunnel that passes through, the vacuum lock that vacuum tunnel is made up of narrow slit damp channel and vacuum suction chamber constitutes, coiled material unreeling structure and rolling-up mechanism are placed outside the vacuum chamber, greatly reduce the device fabrication cost, also alleviated and vacuumized difficulty, reduced the vacuum pump load, vacuum lock and narrow slit damp channel have been formed features simple structure, sealing property is reliable, the seal channel that life-span is long, because no sealed strip, sealing elements such as sealing roller contact with the tight of coiled material, have both guaranteed 2-4 in the plated film vacuum chamber * 10
-2The working vacuum degree of Pa has been avoided the mutual wearing and tearing of coiled material and sealing member again, has guaranteed the coiled material surface quality, and winding film plating function of the present invention is carried out continuous production, has improved production efficiency widely.
Above-mentioned winding film coating machine, the vacuum-pumping system that vacuum tunnel is made up of at least one vacuum pumping pump.The vacuum-sealing mechanism that forms by multi-group vacuum lock and narrow slit damping forms vacuum tunnel, has realized vacuumizing step by step, has guaranteed 2-4 in the plated film vacuum chamber * 10
-2The working vacuum degree of Pa.
Above-mentioned winding film coating machine has electron gun evaporation plated film mechanism in the plated film vacuum chamber, have can be to band one or both sides plated film at least one electron beam gun and band turning device.When needs all during plated film, utilize band turning device such as roller turning device to make band another side facing gun to the band two sides, realized band two sides plated film, and utilized band turning device that the single or multiple lift plated film is carried out on the band two sides.
Above-mentioned winding film coating machine, plated film vacuum chamber outlet have the attached case of the vacuum that is attached thereto, and in the attached case of vacuum cooling roller are arranged, and particularly the sheet metal temperature is higher for the band that finishes of plated film, needs to settle before rolling cooling body to its processing of lowering the temperature.
Above-mentioned winding film coating machine, the position is equipped with and makes that its surface is heated before the coiled material plating, electron beam gun or the ion source or the well heater pre-treatment mechanism of activation clean before coiled material enters the plated film vacuum chamber.The film surface is cleaned and surface treatment, to guarantee follow-up coating quality.
Winding film coating machine of the present invention has changed traditional winding film coating machine and has adopted the monoblock type coating structure, promptly in a vacuum chamber, lay cold rod, negative electrode and target core and coiled material unreeling structure, rolling-up mechanism, coating equipment coiled material unreeling structure of the present invention and rolling-up mechanism place outside the vacuum chamber, vacuum lock and the sealing of narrow slit damp channel are reliable, life-span is long, the device fabrication cost is low, the plated film function is at plastics film, sheet metal surface multicoating, and the coated surface compact micro structure that obtains, surface smoothing.
Description of drawings:
Fig. 1 is a winding film coating machine structural representation of the present invention.
Fig. 2 is Fig. 1 schematic top plan view.
Fig. 3 be among Fig. 1 A to synoptic diagram.
Fig. 4 concerns synoptic diagram in band turning device, vacuum film coating chamber mutual alignment during for winding film coating machine coating single side of the present invention.
Fig. 5 concerns synoptic diagram in vacuum film coating chamber, the attached case of vacuum position during for winding film coating machine double-sided coating of the present invention.
Fig. 6 is the local structure for amplifying synoptic diagram of winding film coating machine vacuum lock of the present invention.
Fig. 7 is the local structure for amplifying synoptic diagram of B part among Fig. 6.
Fig. 8 is the local structure for amplifying synoptic diagram of damp channel part.
Fig. 9 is another structural representation of winding film coating machine of the present invention.
Embodiment:
Embodiment 1:
Fig. 1, Fig. 2, Fig. 3, Fig. 4, Fig. 6, Fig. 7, Fig. 8 have provided the embodiment of the invention 1 figure.Referring to Fig. 1~Fig. 3, the coiled material unreeling structure 1 and the rolling-up mechanism 19 that place outside the plated film vacuum chamber are arranged in the winding film coating machine of the present invention, steel band (or plastics film) 2, the steel band finished product 18 that has plated, steel band docking mechanism 3, No. 1 attached case 4 of vacuum, No. 1 vacuum lock 5, No. 1 damp channel 6, No. 3 damp channels 7, its surface is heated before making the coiled material plating, the electron beam gun 8 of activation clean, target 9, plated film electron beam gun 10, vacuum film coating chamber 11, No. 4 attached casees 12 of vacuum, No. 2 damp channels 13, No. 3 attached casees 14 of vacuum, cooling roller 15, No. 2 vacuum locks 16, No. 2 attached casees 17 of vacuum, by slide valve pump 20, the vacuum system 22 that lobe pump 21 and pipeline are formed.The vacuum lock at each position and the narrow slit of damp channel 24 (referring to Fig. 6, Fig. 7, Fig. 8) have been formed features simple structure, sealing property is reliable, the life-span is long seal channel, have intercepted getting in touch between plated film vacuum chamber and the atmosphere, have guaranteed 2-4 in the plated film vacuum chamber * 10
-2The working vacuum degree of Pa because sealing elements such as no sealed strip, sealing roller contact with the tight of coiled material, has both guaranteed 2-4 in the plated film vacuum chamber * 10
-2The working vacuum degree of Pa has been avoided the mutual wearing and tearing of coiled material and sealing member again, has guaranteed the coiled material surface quality.Coiled material unreeling structure and rolling-up mechanism are placed outside the vacuum chamber, greatly reduce the device fabrication cost, also alleviated and vacuumize difficulty, reduced the vacuum pump load.
When winding film coating machine of the present invention is worked, coiled material unreeling structure 1 is separately positioned in the conventional environment with coiled material rolling-up mechanism 19, the steel band (or plastics film) that will be plated 2 of emitting from unreeling machine 1 passes through No. 1 attached case 4 of vacuum, No. 1 vacuum lock 5, No. 1 damp channel 6 enters coating chamber 11, heat with 8 pairs of steel bands of electron beam gun before entering coating chamber 11, activation clean, electron beam gun 10 evaporated metal targets 9 (referring to Fig. 4), the metallics fast deposition is on the steel strip surface that is modified, realized the film-coating modification of steel band one side is handled, band turning device 23 is arranged in plated film casing 11, steel band enters into damp channel 7 No. 3 through turning to, by the attached case 14 of No. 3 vacuum the time, steel band enters into vacuum lock 16 again No. 2 after being close to cooling roller 15 1 circle of rotation, from No. 2 attached casees 17 of vacuum, come out again, after rolling-up mechanism 19 rollings, obtain finished product coiled material 18.
Embodiment 2:
Fig. 1, Fig. 2, Fig. 3, Fig. 5, Fig. 6, Fig. 7, Fig. 8 have provided the embodiment of the invention 2 figure.In the present embodiment, when needs to band two sides all (referring to Fig. 5) during plated film, behind plated film of steel band, utilize roller turning device to make band come back to coating chamber 11, the band another side is towards another electron beam gun, realized band two sides plated film, steel band enters into 12, No. 2 damp channels 13 of No. 4 attached casees of vacuum through turning to, equally, by the attached case 14 of No. 3 vacuum the time, steel band enters into vacuum lock 16 again No. 2 after being close to cooling roller 15 1 circle of rotation, comes out from No. 2 attached casees 17 of vacuum again, obtains finished product coiled material 18 after rolling-up mechanism 19 rollings.
Embodiment 3:
Fig. 9 has provided the embodiment of the invention 3 figure.Present embodiment 3 structures basic with embodiment 1 with, the coating chamber 11 that has been many of not existing together has been realized twice plated film of band one side.
The various embodiments described above are that foregoing of the present invention is further described, but this should be interpreted as that the scope of the above-mentioned theme of the present invention only limits to the foregoing description.All technology that realizes based on foregoing all belong to scope of the present invention.
Claims (5)
1, winding film coating machine, comprise at least one plated film vacuum chamber, place coiled material unreeling structure and rolling-up mechanism outside the plated film vacuum chamber, it is characterized in that having between plated film vacuum chamber and coiled material unreeling structure and rolling-up mechanism at least one band to pass in and out the vacuum tunnel that passes through, the vacuum lock that vacuum tunnel is made up of narrow slit damp channel and vacuum suction chamber constitutes.
2, winding film coating machine according to claim 1 is characterized in that the vacuum-pumping system that vacuum tunnel is made up of at least one vacuum pumping pump.
3, winding film coating machine according to claim 1 and 2 is characterized in that electron gun evaporation plated film mechanism is arranged in the plated film vacuum chamber, have can be to band one or both sides plated film at least one electron beam gun and band turning device.
4, winding film coating machine according to claim 1 and 2 is characterized in that there is the attached case of vacuum that is communicated with it in plated film vacuum chamber exit, has cooling roller in the attached case of vacuum.
5, winding film coating machine according to claim 1 and 2 is characterized in that before coiled material enters plated film vacuum chamber position is equipped with to make that its surface is heated before the coiled material plating, electron beam gun or the ion source or the well heater pre-treatment mechanism of activation clean.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CNA2008100451994A CN101487111A (en) | 2008-01-16 | 2008-01-16 | Winding film coating machine |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CNA2008100451994A CN101487111A (en) | 2008-01-16 | 2008-01-16 | Winding film coating machine |
Publications (1)
Publication Number | Publication Date |
---|---|
CN101487111A true CN101487111A (en) | 2009-07-22 |
Family
ID=40890170
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CNA2008100451994A Pending CN101487111A (en) | 2008-01-16 | 2008-01-16 | Winding film coating machine |
Country Status (1)
Country | Link |
---|---|
CN (1) | CN101487111A (en) |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN102080215A (en) * | 2010-12-01 | 2011-06-01 | 常州常松金属复合材料有限公司 | Vacuum deposition sealing device |
CN102021527B (en) * | 2009-09-17 | 2012-12-19 | 甘国工 | Strip film plating machine |
CN107513693A (en) * | 2017-08-07 | 2017-12-26 | 深圳市烯谷能源控股有限公司 | A kind of modular manufacturing multipurpose devices of coiled vacuum coating machine |
WO2019109620A1 (en) * | 2017-12-06 | 2019-06-13 | 米亚索乐装备集成(福建)有限公司 | Vacuum coating device for flexible substrate |
-
2008
- 2008-01-16 CN CNA2008100451994A patent/CN101487111A/en active Pending
Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN102021527B (en) * | 2009-09-17 | 2012-12-19 | 甘国工 | Strip film plating machine |
CN102080215A (en) * | 2010-12-01 | 2011-06-01 | 常州常松金属复合材料有限公司 | Vacuum deposition sealing device |
CN102080215B (en) * | 2010-12-01 | 2012-11-28 | 常州常松金属复合材料有限公司 | Vacuum deposition sealing device |
CN107513693A (en) * | 2017-08-07 | 2017-12-26 | 深圳市烯谷能源控股有限公司 | A kind of modular manufacturing multipurpose devices of coiled vacuum coating machine |
WO2019109620A1 (en) * | 2017-12-06 | 2019-06-13 | 米亚索乐装备集成(福建)有限公司 | Vacuum coating device for flexible substrate |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
CN206204411U (en) | The depositing device of coating flexible substrate is stacked with layer | |
CN201158699Y (en) | Coiling film-plating machine | |
CN104513967B (en) | Flexible parent metal magnetic-control sputtering coiling film coating machine | |
CN101492809B (en) | Vacuum magnetron sputtering coil film coating apparatus | |
CN101768726B (en) | Continuous winding magnetic control sputtering vacuum coating device | |
CN102206806B (en) | Flat solar heat absorption coated plate production method and vertical coating apparatus | |
CN106435516B (en) | Magnetic control evaporation multifunctional winding film coating machine | |
US9892889B2 (en) | Roll-to-roll hybrid plasma modular coating system | |
WO2009024460A3 (en) | System and process for the continous vacuum coating of a material in web form | |
CN111962037B (en) | Magnetron sputtering evaporation dual-system winding vacuum coating machine and coating process thereof | |
CN101487111A (en) | Winding film coating machine | |
CN201326012Y (en) | A continuous winding-type magnetron sputtering vacuum plating equipment | |
CN104775102B (en) | The vacuum coating system that volume to volume magnetic control sputtering cathode is combined with column multi-arc source | |
CN105130209A (en) | High-transmittance low-cost color-adjustable low-radiation energy-saving glass and preparation method thereof | |
CN102021527A (en) | Strip film plating machine | |
CN201648514U (en) | Vertical film coating device for producing flat-plate solar heat absorbing coated plates | |
CN101781754A (en) | Modularization solar selective coat continuous coating device | |
CN205635764U (en) | Physics chemical vapor deposition system | |
CN201648516U (en) | Production device for flat-plate solar heat absorption film-coating plate | |
CN208532925U (en) | A kind of two-sided physical vapor deposition coating film equipment | |
CN206635397U (en) | A kind of double-face vacuum film is aluminized device | |
CN105671508B (en) | A kind of roll-to-roll magnetic control sputtering vacuum coating device | |
CN201358299Y (en) | Vacuum magnetron-sputtering type winding film-coating device | |
CN102220559A (en) | Production method and production device of flat solar-energy heat-absorbing film-coated plate | |
CN103847170B (en) | A kind of Multifunctional layered Low emissivity energy-saving glass and preparation method thereof |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
C06 | Publication | ||
PB01 | Publication | ||
C10 | Entry into substantive examination | ||
SE01 | Entry into force of request for substantive examination | ||
C12 | Rejection of a patent application after its publication | ||
RJ01 | Rejection of invention patent application after publication |
Open date: 20090722 |