CN206486584U - A kind of linear evaporation source and vacuum deposition apparatus - Google Patents
A kind of linear evaporation source and vacuum deposition apparatus Download PDFInfo
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- CN206486584U CN206486584U CN201621431392.8U CN201621431392U CN206486584U CN 206486584 U CN206486584 U CN 206486584U CN 201621431392 U CN201621431392 U CN 201621431392U CN 206486584 U CN206486584 U CN 206486584U
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Abstract
The utility model discloses a kind of linear evaporation source and vacuum deposition apparatus, linear evaporation source includes：Crucible, including crucible volume and crucible cover；Crucible volume includes the first volume and the second volume, and the second volume is located inside the first volume；The thickness of second volume is more than or equal to 1mm, less than or equal to 3mm；Pad is provided between crucible cover and crucible volume, crucible cover pressed pad is in crucible volume.By the technical solution of the utility model, while improving linear evaporation source sealing, the corrosion resistance of linear evaporation source is improved, and then improves the stability that linear evaporation source carries out evaporation rate during vacuum evaporation.
Description
Technical field
The utility model embodiment is related to display technology field, more particularly to a kind of linear evaporation source and vacuum evaporation dress
Put.
Background technology
Each film layer for constituting organic electroluminescence device is general by the way that formation is deposited, and linear evaporation source is equal due to its film forming
Even characteristic is widely used in the making of organic electroluminescence device.General linear evaporation source is by crucible volume and with spray
The crucible cover of mouth is constituted, and material to be deposited is placed in crucible volume, deposition material passes through crucible via heating devices heat
The nozzle covered sprays to substrate formed film.
At present, when the deposition material higher to evaporation temperature is deposited, deposition material is easily to linear evaporation source
Crucible volume causes corrosion so that crucible volume is deformed, and has a strong impact on the stability of linear evaporation source evaporation rate.In addition, line
There is certain gap between the crucible cover and crucible volume of shape evaporation source, and the deposition material of injection is each tropism, that is, is steamed
Plating material sprays via nozzle to all directions, and therefore, the deposition material sprayed via heater is easy to steam by wire
The gap risen between crucible cover and crucible volume is spilt, and causes the sealing of linear evaporation source poor, and then influences wire evaporation
The stability of source evaporation rate.
Utility model content
The utility model provides a kind of linear evaporation source and vacuum deposition apparatus, to realize the sealing for improving linear evaporation source
Property and corrosion resistance, and then improve linear evaporation source evaporation rate stability.
In a first aspect, the utility model embodiment provides a kind of linear evaporation source, including：
Crucible, including crucible volume and crucible cover；
The crucible volume includes the first volume and the second volume, and second volume is located inside the first volume；
The thickness of second volume is more than or equal to 1mm, less than or equal to 3mm；
Pad is provided between the crucible cover and the crucible volume, the crucible cover presses the pad in the earthenware
In crucible volume.
Second aspect, the utility model embodiment provides a kind of vacuum deposition apparatus, including the line described in first aspect
Shape evaporation source.
The utility model embodiment provides a kind of linear evaporation source and vacuum deposition apparatus, by holding in crucible cover and earthenware
Pad is set between body, and crucible cover pressed pad is in the crucible cover and crucible volume that in crucible volume, add linear evaporation source
Between sealing, it is therefore prevented that the deposition material of crucible volume improves wire by being spilt between crucible cover and crucible volume
The stability of evaporation source evaporation rate, and the second volume is set inside the first volume, the thickness of the second volume is more than or waited
In 1mm, less than or equal to 3mm so that the second volume will not be excessive due to thickness and influence heat of second volume when being deposited
Conductibility, also will not it is too small due to thickness and cause deposition material the first volume outside the second volume is caused corrode and influence
Evaporation rate, improves linear evaporation source sealing and corrosion resistance, and then improve the steady of linear evaporation source evaporation rate
It is qualitative.
Brief description of the drawings
A kind of cross-sectional view for linear evaporation source that Fig. 1 provides for the utility model embodiment；
A kind of structural representation for vacuum deposition apparatus that Fig. 2 provides for the utility model embodiment.
Embodiment
The utility model is described in further detail with reference to the accompanying drawings and examples.It is understood that herein
Described specific embodiment is used only for explaining the utility model, rather than limits of the present utility model.Further need exist for
It is bright, for the ease of description, the part related to the utility model rather than entire infrastructure are illustrate only in accompanying drawing.
The utility model embodiment provides a kind of linear evaporation source, including crucible, including crucible volume and crucible cover, earthenware
Crucible volume includes the first volume and the second volume, and the second volume is located inside the first volume, and the thickness of the second volume is more than or waited
In 1mm, less than or equal to 3mm, pad is provided between crucible cover and crucible volume, crucible cover pressed pad is in crucible volume
On.
Deposition material is placed in crucible volume by linear evaporation source, in the presence of heater, the steaming in crucible volume
Plating material sprays to substrate to form the film layer needed by the nozzle set on crucible cover.In the steaming higher to evaporation temperature
When plating material is deposited, deposition material easily causes corrosion to the crucible volume of linear evaporation source so that crucible volume is deformed,
Have a strong impact on the stability of linear evaporation source evaporation rate.In addition, existing between the crucible cover and crucible volume of linear evaporation source
Certain gap, and the deposition material of injection is each tropism, the deposition material sprayed via heater is easy to by line
Gap between shape evaporation source crucible cover and crucible volume is spilt, and causes the sealing of linear evaporation source poor, and then influences wire
The stability of evaporation source evaporation rate.
In view of the above-mentioned problems, the utility model embodiment provides a kind of linear evaporation source and vacuum deposition apparatus, pass through
Pad is set between crucible cover and earthenware volume, and crucible cover pressed pad adds the earthenware of linear evaporation source in crucible volume
Sealing between crucible lid and crucible volume, it is therefore prevented that the deposition material of crucible volume between crucible cover and crucible volume by leaking
Go out, improve the stability of linear evaporation source evaporation rate, and set the second volume inside the first volume, the second volume
Thickness is more than or equal to 1mm, less than or equal to 3mm so that the second volume will not be excessive due to thickness, and the second volume of influence is entered
Heat conductivity during row evaporation, also will not cause deposition material to make the first volume outside the second volume because thickness is too small
Evaporation rate is influenceed into mechanical erosion, while improving linear evaporation source sealing, the corrosion resistant of linear evaporation source is improved
Corrosion, and then improve the stability of linear evaporation source evaporation rate.
Above is core concept of the present utility model, below in conjunction with the accompanying drawing in the utility model embodiment, to this reality
It is clearly and completely described with the technical scheme in new embodiment.Based on the embodiment in the utility model, this area is general
Logical technical staff is not under the premise of creative work is made, and the every other embodiment obtained belongs to the utility model
The scope of protection.
A kind of cross-sectional view for linear evaporation source that Fig. 1 provides for the utility model embodiment.As shown in figure 1,
Linear evaporation source includes crucible, and crucible includes crucible volume 10 and crucible cover 11, and crucible volume 10 includes the He of the first volume 101
Second volume 102, is provided with pad 12, the pressed pad 12 of crucible cover 11 is in crucible volume between crucible cover 11 and crucible volume 10
On 10, the thickness of the second volume 102 is more than or equal to 1mm, less than or equal to 3mm.Optionally, the second volume 102 can be embedded
Exemplary in the inside of the first volume 101, the second volume 102 can be embedded in the first volume 101 by a fixed structure
It is interior, it can also be directly embedded into the first volume 101.
It should be noted that the utility model embodiment is located at the first volume 101 to the second volume 102 in what kind of form
Inside is not construed as limiting, the coating method or inline mode that can be, the second volume 102 can also be with art technology
Personnel it is conceivable that mode be located at the first volume 101 inside.Optionally, the second volume 102 is coated in the first volume 101
Portion.The present embodiment is illustrated so that the second volume 102 is coated on the inside of the first melt 101 as an example.
Optionally, constituting the material of the first volume 101 includes metal material, for example, can be Titanium, constitutes second and holds
The material of body 102 includes nonmetallic materials, for example, can be ceramics, and the ceramic material that the second volume 102 is used for example can be
Alundum (Al2O3) or pyrolytic boron nitride.
The material selection metal material of the first externally-located volume 101 of linear evaporation source crucible volume 10, metal material
There is preferable ductility, the pressed pad of crucible cover 11 for the linear evaporation source that the utility model is provided relative to nonmetallic materials
12 in crucible volume 10, and the first volume 101 can improve the pressed pad 12 of crucible cover 11 using the good metal material of ductility
Intensity, and then improve linear evaporation source sealing, it is ensured that the stability of linear evaporation source evaporation rate.Meanwhile, metal material
Expect resistance to elevated temperatures preferably, the first volume 101, which is made, using resistant to elevated temperatures metal material can realize to high temperature deposition material
Evaporation.Optionally, the metal material that the first volume 101 is used can be titanium, and Titanium has hardness high relative to common metal
And the characteristic of precision component is easily processed into, the first volume 101 of linear evaporation source is made of Titanium, wire is being improved
While evaporation source sealing is with heat-resisting quantity, it is possible to increase the hardness of linear evaporation source and the precision for making linear evaporation source
Property.
Optionally, the material selection nonmetallic materials of the second internally positioned volume 102 of linear evaporation source crucible volume 10,
When the metal material higher to evaporation temperature carries out vacuum evaporation, the metal material of high-temperature fusant is easily to having by metal material
The first volume 101 being made causes corrosion, causes the first volume 101 to deform, and then cause for placing the whole of deposition material
Crucible volume 10 is deformed, and has a strong impact on the stability of linear evaporation source evaporation rate.By nonmetallic in the utility model embodiment
The second volume 102 that material is made can effectively prevent high-temperature fusant metal material to the first volume for being made up of metal material
101 corrosion.The nonmetallic materials that second volume 102 is used are such as can be alundum (Al2O3) or the pottery pyrolytic boron nitride
Ceramic material, ceramic material has resistant to elevated temperatures characteristic, and the metal material of linear evaporation source high temperature melt will not be to by ceramics etc.
The second volume 102 that resistant to elevated temperatures nonmetallic materials are made causes corrosion, would not also make the crucible volume 10 of linear evaporation source
Deformation, causes the evaporation rate of linear evaporation source unstable, further increases the stability of linear evaporation source evaporation rate.
Optionally, metal evaporation material, exemplary, metal can be provided with the second volume 102 of linear evaporation source
Deposition material can include ytterbium.The evaporation temperature range of metal material ytterbium is about 400 DEG C to 500 DEG C, and temperature is significantly larger than deposited
The organic material that about 200 DEG C of degree, therefore, when carrying out vacuum evaporation to metal material ytterbium using linear evaporation source, high-temperature fusant
Metallic ytterbium material easily corrode the crucible volume 10 of linear evaporation source, the linear evaporation source that the utility model embodiment is used exists
The inside of first volume 101 sets the second volume 102, and the second volume 102 can be using alundum (Al2O3) or pyrolytic boron nitride etc.
Ceramic nonmetallic, can effectively prevent that metal first volume of the higher metallic ytterbium material of temperature to crucible volume 10 is deposited
101 corrosion, therefore, the utility model embodiment provide linear evaporation source realize can to ytterbium etc. be deposited temperature compared with
While high metal material carries out vacuum evaporation, it is ensured that the higher metallic ytterbium material of evaporation temperature does not result in wire evaporation
The deformation of source crucible volume 10, improves the stability of linear evaporation source evaporation rate in evaporation metal material.In addition, organic
Electroluminescent device includes the film layers such as electron transfer layer, luminous material layer, hole transmission layer and electron type auxiliary layer, is making
When electron transfer layer and electron type auxiliary layer, in order to increase the electron mobility of electron transfer layer and electron type auxiliary layer,
Increase recombination rate of two kinds of carriers in luminous material layer, and then improve the luminous efficiency of organic electroluminescence device, often need
Will in the film layer such as electron transfer layer and electron type auxiliary layer doped N-type foreign ion ytterbium ion to strengthen its electric transmission
Rate.Therefore, the linear evaporation source that the utility model embodiment is provided can also be realized to electric transmission in organic electroluminescence device
The vacuum evaporation of the film layer such as layer and electron type auxiliary layer.
Optionally, the crucible cover 11 of linear evaporation source can via fixing device pressed pad 12 in the first volume 101,
Exemplary, the pad 12 between crucible cover 11 and crucible volume 10 can be aluminium flake or graphite flake, and aluminium flake and graphite flake have
Good hot expansibility, linear evaporation source is when carrying out vacuum evaporation, it is necessary to be heated to crucible volume 10 so that crucible volume
Deposition material in 10 is deposited by the nozzle on crucible cover 11, and aluminium flake and graphite flake are due to its good thermal expansivity
Can, it can be expanded when crucible volume 10 is heated, be brought into close contact, reach between the crucible cover 11 and crucible volume 10 of contact
Strengthen the effect of linear evaporation source sealing.Exemplary, the fixing device of use can be screw.
Exemplary, the material of the first volume 101 includes metallic titanium material, and the material of the second volume 102 is including ceramics etc.
Nonmetallic materials, and ceramic material has certain fragility in itself, if crucible cover 11 is directly pressed together on into earthenware via pad 12
Crucible volume 10 is pressed together in the first volume 101 and the second volume 102 simultaneously, may cause second using brittle ceramic materials
Occur crackle in volume 102, and then cause the sealing of crucible volume 10 poor, influence linear evaporation source carries out vacuum evaporation
When evaporation rate stability.Therefore, in order to increase linear evaporation source crucible cover 11 and the sealing of crucible volume 10 and in crucible
The pad 12 set between lid 11 and crucible volume 10, can be via fixing device only pressed pad 12 in the first volume 101
On, the sealing of linear evaporation source, and energy can either be so improved by the pad 12 between crucible cover 11 and crucible volume 10
Enough ensure that brittle second volume 102 will not press the mechanism produced because of pad 12 and cause crucible crackle occur, influence
The sealing of linear evaporation source, so between crucible cover 11 and earthenware volume set pad 12, the pressed pad 12 of crucible cover 11 in
In crucible volume 10, the sealing between the crucible cover 11 of linear evaporation source and crucible volume 10 is added, it is therefore prevented that crucible holds
The deposition material of body 10 improves the steady of linear evaporation source evaporation rate by being spilt between crucible cover 11 and crucible volume 10
It is qualitative.Meanwhile, the second volume 102 of setting is located inside the first volume 101, and the thickness of the second volume 102 is more than or equal to 1mm,
Less than or equal to 3mm so that the second volume 102 will not be excessive due to thickness, heat biography when the second volume 102 of influence is deposited
The property led, also will not it is too small due to thickness and cause deposition material to the first volume 101 outside the second volume 102 cause corrosion and
Evaporation rate is influenceed, while improving linear evaporation source sealing, the corrosion resistance of linear evaporation source is improved, and then improve
The stability of linear evaporation source evaporation rate.
The wire that the utility model embodiment is additionally provided in a kind of vacuum deposition apparatus, including above-mentioned any embodiment is steamed
Rise, evaporation chamber, evaporation substrate, the angle board and remote positioned at angle board set around linear evaporation source can also be included
The baffle plate assembly of linear evaporation source side.Meanwhile, the film layer of organic electroluminescence device generally requires two or more material
Material mixing and doping is formed, when needing vacuum evaporation to form the blending doping film layer of two or more material, vacuum evaporation
Device can also include multiple linear evaporation sources, and multiple linear evaporation sources can by control simultaneously it is equidirectional be deposited altogether,
Form uniform blending doping film layer.Fig. 2 it is exemplary a kind of structural representation of vacuum deposition apparatus is shown.As shown in Fig. 2
Vacuum deposition apparatus includes evaporation chamber 13, evaporation substrate 14 and linear evaporation source 15, when carrying out vacuum evaporation, wire evaporation
Source 15 can form required film layer along AA ' directions movable spray deposition material to being deposited on substrate 14 by mask plate.
Note, above are only preferred embodiment of the present utility model and institute's application technology principle.Those skilled in the art's meeting
Understand, the utility model is not limited to specific embodiment described here, can carried out for a person skilled in the art various bright
Aobvious change, readjust and substitute without departing from protection domain of the present utility model.Therefore, although pass through above example
The utility model is described in further detail, but the utility model is not limited only to above example, is not departing from
In the case that the utility model is conceived, other more equivalent embodiments can also be included, and scope of the present utility model is by appended
Right determine.
Claims (12)
1. a kind of linear evaporation source, it is characterised in that including：
Crucible, including crucible volume and crucible cover；
The crucible volume includes the first volume and the second volume, and second volume is located inside the first volume；
The thickness of second volume is more than or equal to 1mm, less than or equal to 3mm；
Pad is provided between the crucible cover and the crucible volume, the crucible cover presses the pad to be held in the crucible
On body.
2. linear evaporation source according to claim 1, it is characterised in that second volume is coated on first volume
It is internal.
3. linear evaporation source according to claim 1, it is characterised in that second volume is embedded in first volume
It is internal.
4. linear evaporation source according to claim 1, it is characterised in that constituting the material of first volume includes metal
Material；Constituting the material of second volume includes nonmetallic materials.
5. linear evaporation source according to claim 4, it is characterised in that the metal material includes titanium.
6. linear evaporation source according to claim 4, it is characterised in that the nonmetallic materials include ceramics.
7. linear evaporation source according to claim 6, it is characterised in that the ceramic material includes alundum (Al2O3) or heat
Solve boron nitride.
8. linear evaporation source according to claim 1, it is characterised in that set in the second volume of the linear evaporation source
There is metal evaporation material.
9. linear evaporation source according to claim 8, it is characterised in that the metal evaporation material includes ytterbium.
10. linear evaporation source according to claim 1, it is characterised in that the crucible cover presses institute via fixing device
Pad is stated in first volume.
11. linear evaporation source according to claim 1, it is characterised in that the pad is aluminium flake or graphite flake.
12. a kind of vacuum deposition apparatus, it is characterised in that including the linear evaporation source any one of claim 1-11.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201621431392.8U CN206486584U (en) | 2016-12-23 | 2016-12-23 | A kind of linear evaporation source and vacuum deposition apparatus |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201621431392.8U CN206486584U (en) | 2016-12-23 | 2016-12-23 | A kind of linear evaporation source and vacuum deposition apparatus |
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| CN206486584U true CN206486584U (en) | 2017-09-12 |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107916401A (en) * | 2017-12-15 | 2018-04-17 | 合肥鑫晟光电科技有限公司 | Crucible and evaporation coating device is deposited |
| CN114875364A (en) * | 2022-05-13 | 2022-08-09 | 武汉华星光电半导体显示技术有限公司 | Evaporation source device |
-
2016
- 2016-12-23 CN CN201621431392.8U patent/CN206486584U/en active Active
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107916401A (en) * | 2017-12-15 | 2018-04-17 | 合肥鑫晟光电科技有限公司 | Crucible and evaporation coating device is deposited |
| CN107916401B (en) * | 2017-12-15 | 2023-09-22 | 合肥鑫晟光电科技有限公司 | Evaporation crucible and evaporation device |
| CN114875364A (en) * | 2022-05-13 | 2022-08-09 | 武汉华星光电半导体显示技术有限公司 | Evaporation source device |
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Effective date of registration: 20211029 Address after: No.8, liufangyuan Henglu, Donghu New Technology Development Zone, Wuhan City, Hubei Province Patentee after: WUHAN TIANMA MICRO-ELECTRONICS Co.,Ltd. Patentee after: Wuhan Tianma Microelectronics Co.,Ltd. Shanghai Branch Patentee after: Tianma Micro-Electronics Co.,Ltd. Address before: Room 509, building 1, No. 6111, Longdong Avenue, Pudong New Area, Shanghai, 200120 Patentee before: SHANGHAI TIANMA AM-OLED Co.,Ltd. Patentee before: Tianma Micro-Electronics Co.,Ltd. |