CN201751427U - Linear evaporation source - Google Patents
Linear evaporation source Download PDFInfo
- Publication number
- CN201751427U CN201751427U CN2010201406965U CN201020140696U CN201751427U CN 201751427 U CN201751427 U CN 201751427U CN 2010201406965 U CN2010201406965 U CN 2010201406965U CN 201020140696 U CN201020140696 U CN 201020140696U CN 201751427 U CN201751427 U CN 201751427U
- Authority
- CN
- China
- Prior art keywords
- evaporation source
- linear evaporation
- crucible
- thermal transfer
- transfer plate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Images
Abstract
The utility model provides a linear evaporation source which comprises a plurality of crucibles arranged side by side, a heat conduction plate and a heating electrode, wherein the heat conduction plate is in contact with the crucibles arranged side by side, the heating electrode is connected with the heat conduction plate, each crucible comprises a main body part and a spray nozzle part on the main body part, each main body part comprises an accommodating space for accommodating organic material, and each spray nozzle part comprises a spray nozzle communicated with the accommodating space. The linear evaporation source can realize uniform heating and further effectively solve the problem of non-uniform heating of the organic material during the evaporation process, and has stable evaporation speed, good uniformity of a thin film and few defects, thereby being suitable for vacuum evaporation coating of a variety of organic materials; as a baseplate is nearer to the linear evaporation source during the evaporation coating process and the evaporation coating range of the organic material is close to that of the baseplate, the linear evaporation source can reduce the waste of the organic material during the practical using process in comparison with other evaporation coating methods and effectively improve the utilization rate of the organic material.
Description
[technical field]
The utility model relates to a kind of evaporation source, relates in particular to a kind of linear evaporation source.
[background technology]
The evaporation coating technique of OLED is a small molecules OLED manufacturing method thereof, has used this method to form the OLED volume production in the world, is the gordian technique of OLED scale production.This technology is under high vacuum state, makes a kind of method of small molecule material evaporation by the heating to evaporation source, when carrying out the small molecules steaming spending under vacuum state, the metal mask version is blocked the place ahead at substrate, and then organic materials is deposited on the substrate.
Linear evaporation source is formed by some somes evaporation source linear array, the gas that each linear evaporation source evaporates is fan shape, linear evaporation source is away from the gas lap at the evaporation source center gas lap less than centre portions, Zhou Bian homogeneity can not show a candle to the uniformity coefficient at center like this, and generally in order to prevent inhomogenous generation, the length of linear evaporation source is greater than the width of substrate, causes greatly waste to being worth expensive organic materials like this.
Therefore, be necessary to relate to a kind of linear evaporation source and overcome above-mentioned technical problem.
[summary of the invention]
The purpose of this utility model provides a kind of linear evaporation source, this linear evaporation source evaporation good uniformity, and can improve the organic materials utilization ratio.
To achieve these goals, the utility model adopts following technical scheme: a kind of linear evaporation source, it comprises some crucibles that are arranged side by side, thermal transfer plate and heating electrode, the described crucible that is arranged side by side of described thermal transfer plate contact, heating electrode connects thermal transfer plate, described crucible comprises the spray nozzle part on main part and the main part, and main part has the receiving space of accommodating organic materials, and spray nozzle part has the nozzle of a connection receiving space.
Described main part is square.
The material of described crucible is a titanium.
Described crucible has a jet hole, near the jet hole of the crucible at linear evaporation source center less than jet hole away from the crucible at linear evaporation source center.
Described nozzle is up-small and down-big cone structure.
Compared with prior art, the utlity model has following advantage: the utility model linear evaporation source homogeneous heating, thereby effectively solve in the evaporative process organic materials uneven problem of being heated, velocity of evaporation is stable, uniformity of film is good, defective is few, is suitable for the vacuum vapor plating of multiple organic materials; Owing to the close together of substrate and this linear evaporation source, the evaporation scope of organic materials evaporation scope and substrate is approaching in evaporate process, and the waste of comparing other evaporation coating method organic materialss in actual use is less, has effectively improved the organic materials utilization ratio.
[description of drawings]
Fig. 1 is the structural representation of the utility model linear evaporation source.
Fig. 2 is the vertical view of the utility model linear evaporation source.
Wherein, 1 is crucible; 11 is main part; 110 is receiving space; 12 is spray nozzle part; 120 is nozzle; 1201 is jet hole; 2 is thermal transfer plate; 21 is first thermal transfer plate; 22 is second thermal transfer plate; 23 is the 3rd thermal transfer plate; 24 is the 4th thermal transfer plate; 25 is the 5th thermal transfer plate; 3 is heating electrode; 31 is first heating electrode; 32 is second heating electrode; 33 is the 3rd heating electrode; 34 is the 4th heating electrode; 35 is the slender acanthopanax thermode.
[embodiment]
Below in conjunction with accompanying drawing the utility model linear evaporation source is done detailed description.
See also Figure 1 and Figure 2, the utility model linear evaporation source comprises a plurality of crucibles that are arranged side by side 1, thermal transfer plate 2 and heating electrode 3.
Crucible 1 is a metallic crucible, and it is formed by the titanium metal manufacturing.Crucible 1 comprises the spray nozzle part 12 on quadrate main part 11 and the main part 11, main part 11 has a receiving space 110, spray nozzle part 12 has the nozzle 120 of a connection receiving space 110, nozzle 120 has a jet hole 1201, nozzle 120 is up-small and down-big, and promptly the size of jet hole 1201 is less than the size away from jet hole 1201.See also Figure 1 and Figure 2, a plurality of crucibles 1 are formed the crucible group side by side, and the jet hole 1201 of the spray nozzle part 12 of the crucible 1 of close crucible group switching centre is less than the jet hole 1201 of outside crucible 1 in the crucible group.
Heating electrode 3 comprises first heating electrode 31, second heating electrode 32, the 3rd heating electrode 33, the 4th heating electrode 34 and the slender acanthopanax thermode 35 of drawing respectively from first thermal transfer plate 21, second thermal transfer plate 22, the 3rd thermal transfer plate 23, the 4th thermal transfer plate 24 and the 5th thermal transfer plate 25.
During evaporation, at first, from the jet hole 1201 of crucible 1, add organic materials in the receiving space 110; Then, heating electrode 3 energising heat hot conductive plates 2, utilize the heating of the thermal conduction realization of metal fever conductive plate 2 and crucible 1 wall to organic materials, heat exchange sheet 2 is a sheet, good and the homogeneous heating of thermal conduction effect goes out the problem of evaporation source thereby effectively solve the surge spray that is heated of organic materials powder in the evaporative process, and velocity of evaporation is stable, film defects is few, is suitable for the vacuum vapor plating of multiple organic materials.
The utility model linear evaporation source can be used for main body and is steaming, and also can be used for mixing steaming, homogeneity when combination the time considers that the usage quantity of organic materials and steaming are spent, when carrying out unit combination, the jet hole 1201 on crucible 1 top varies in size, and central opening is little generally speaking, the both sides opening is big, because in evaporate process, the organic materials at center is sedimentary more, so that opening is done is little, machine material all around is sedimentary less, when making crucible, opening is done more greatly.Concrete opening is arranged and is determined with steamings degree uniformity coefficient, in use moves with substrate or evaporation source moves, and substrate is carried out the steaming degree of organic materials.Owing to the close together of substrate and this linear evaporation source, the evaporation scope of organic materials evaporation scope and substrate is approaching in evaporate process, and the waste of comparing other evaporation coating method organic materialss in actual use is less.
Claims (6)
1. linear evaporation source, it is characterized in that, it comprises some crucibles that are arranged side by side (1), thermal transfer plate (2) and heating electrode (3), described thermal transfer plate (2) the contact described crucible that is arranged side by side (1), heating electrode (3) connects thermal transfer plate (2), described crucible (1) comprises the spray nozzle part (12) on main part (11) and the main part (11), main part (11) has the receiving space (110) of accommodating organic materials, and spray nozzle part (12) has the nozzle (120) of a connection receiving space (110).
2. linear evaporation source according to claim 1 is characterized in that described main part (11) is square.
3. linear evaporation source according to claim 1 is characterized in that the material of described crucible (1) is a titanium.
4. linear evaporation source according to claim 1, it is characterized in that, described nozzle (120) has a jet hole (1201), near the jet hole (1201) of the crucible (1) at linear evaporation source center less than jet hole (1201) away from the crucible (1) at linear evaporation source center.
5. linear evaporation source according to claim 1 is characterized in that described nozzle (120) is up-small and down-big cone structure.
6. linear evaporation source according to claim 1 is characterized in that the sheet structure that described thermal transfer plate (2) is made for stainless steel.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2010201406965U CN201751427U (en) | 2010-03-25 | 2010-03-25 | Linear evaporation source |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2010201406965U CN201751427U (en) | 2010-03-25 | 2010-03-25 | Linear evaporation source |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN201751427U true CN201751427U (en) | 2011-02-23 |
Family
ID=43601833
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2010201406965U Expired - Fee Related CN201751427U (en) | 2010-03-25 | 2010-03-25 | Linear evaporation source |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN201751427U (en) |
Cited By (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103966554A (en) * | 2013-01-31 | 2014-08-06 | 日立造船株式会社 | Vacuum evaporation device and vacuum evaporation method |
| CN104120385A (en) * | 2013-04-26 | 2014-10-29 | 三星显示有限公司 | Deposition source |
| CN105112855A (en) * | 2015-09-29 | 2015-12-02 | 京东方科技集团股份有限公司 | Evaporation crucible and evaporation system |
| CN106337165A (en) * | 2015-07-07 | 2017-01-18 | 三星显示有限公司 | Deposition sorce, deposition device including the same and method of manufacturing display device using the deposition device |
| CN107267921A (en) * | 2017-07-24 | 2017-10-20 | 武汉华星光电半导体显示技术有限公司 | Crucible and evaporation coating device is deposited |
| CN107400859A (en) * | 2017-08-17 | 2017-11-28 | 武汉华星光电半导体显示技术有限公司 | A kind of evaporation source |
| CN104561903B (en) * | 2013-10-24 | 2019-01-15 | 日立造船株式会社 | Vacuum deposition apparatus menifold |
| US10801101B2 (en) | 2017-08-17 | 2020-10-13 | Wuhan China Star Optoelectronics Semiconductor Display Technology Co., Ltd. | Vapor evaporation source |
| CN112853271A (en) * | 2019-11-27 | 2021-05-28 | 合肥欣奕华智能机器有限公司 | Linear evaporation source |
| CN113454262A (en) * | 2020-01-28 | 2021-09-28 | 株式会社爱发科 | Deposition source and deposition apparatus |
| CN116005114A (en) * | 2023-01-04 | 2023-04-25 | 京东方科技集团股份有限公司 | Vapor deposition source and vapor deposition device |
-
2010
- 2010-03-25 CN CN2010201406965U patent/CN201751427U/en not_active Expired - Fee Related
Cited By (15)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103966554A (en) * | 2013-01-31 | 2014-08-06 | 日立造船株式会社 | Vacuum evaporation device and vacuum evaporation method |
| CN104120385A (en) * | 2013-04-26 | 2014-10-29 | 三星显示有限公司 | Deposition source |
| CN104561903B (en) * | 2013-10-24 | 2019-01-15 | 日立造船株式会社 | Vacuum deposition apparatus menifold |
| CN106337165B (en) * | 2015-07-07 | 2020-03-10 | 三星显示有限公司 | Deposition source, deposition apparatus, and method of manufacturing display apparatus using the deposition apparatus |
| CN106337165A (en) * | 2015-07-07 | 2017-01-18 | 三星显示有限公司 | Deposition sorce, deposition device including the same and method of manufacturing display device using the deposition device |
| WO2017054417A1 (en) * | 2015-09-29 | 2017-04-06 | 京东方科技集团股份有限公司 | Vapor deposition crucible and vapor deposition system |
| CN105112855A (en) * | 2015-09-29 | 2015-12-02 | 京东方科技集团股份有限公司 | Evaporation crucible and evaporation system |
| CN107267921A (en) * | 2017-07-24 | 2017-10-20 | 武汉华星光电半导体显示技术有限公司 | Crucible and evaporation coating device is deposited |
| CN107400859A (en) * | 2017-08-17 | 2017-11-28 | 武汉华星光电半导体显示技术有限公司 | A kind of evaporation source |
| CN107400859B (en) * | 2017-08-17 | 2019-08-13 | 武汉华星光电半导体显示技术有限公司 | A kind of evaporation source |
| US10801101B2 (en) | 2017-08-17 | 2020-10-13 | Wuhan China Star Optoelectronics Semiconductor Display Technology Co., Ltd. | Vapor evaporation source |
| CN112853271A (en) * | 2019-11-27 | 2021-05-28 | 合肥欣奕华智能机器有限公司 | Linear evaporation source |
| CN112853271B (en) * | 2019-11-27 | 2023-11-14 | 合肥欣奕华智能机器股份有限公司 | Linear evaporation source |
| CN113454262A (en) * | 2020-01-28 | 2021-09-28 | 株式会社爱发科 | Deposition source and deposition apparatus |
| CN116005114A (en) * | 2023-01-04 | 2023-04-25 | 京东方科技集团股份有限公司 | Vapor deposition source and vapor deposition device |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN201751427U (en) | Linear evaporation source | |
| Jiang et al. | All electrospray printed perovskite solar cells | |
| CN105648404B (en) | Crucible is deposited | |
| US9522410B2 (en) | Apparatus and method for depositing thin film | |
| CN104099571A (en) | Evaporation source component, film deposition device and film deposition method | |
| US9150952B2 (en) | Deposition source and deposition apparatus including the same | |
| CN104928628A (en) | Evaporation crucible | |
| CN102899609A (en) | Mask and evaporation device and method for producing organic light-emitting display panel | |
| CN103160788A (en) | Vacuum evaporation system | |
| CN103305794A (en) | Organic film coating device and method | |
| CN207749179U (en) | A kind of vaporizing-source system | |
| CN206289295U (en) | A kind of linear evaporation source | |
| WO2017156827A1 (en) | Heat conduction device and evaporation crucible | |
| CN104694883A (en) | Crucible | |
| CN109355628A (en) | Crucible is deposited | |
| CN212247190U (en) | Crucible evaporation device | |
| CN106148901B (en) | Organic film evaporation coating device, method and organic film device | |
| CN203128644U (en) | Linear evaporation source nozzle | |
| CN1153506C (en) | Process of mfg. electrothermal SnO2:F film heating pipe by ultrasonic spray | |
| CN109385602B (en) | Uniform surface shape deposition evaporation device and method | |
| CN207918942U (en) | Vacuum deposition apparatus and its evaporator head | |
| CN205170963U (en) | Evaporate device and evaporating device group | |
| CN201890924U (en) | Plasma vacuum ceramic coating device | |
| CN104357799A (en) | Evaporation device with double-e type electron guns and evaporating method by using same | |
| CN102758192B (en) | Semiconductor epitaxial wafer substrate-bearing disk, supporting device thereof and metal organic chemical vapor deposition (MOCAD) reaction chamber |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20110223 Termination date: 20150325 |
|
| EXPY | Termination of patent right or utility model |