CN206455519U

CN206455519U - Grinding/grinding complex machining device and lapping device

Info

Publication number: CN206455519U
Application number: CN201720030271.0U
Authority: CN
Inventors: 宫本高志; 岩濑比宇麻
Original assignee: Nakamura Tome Precision Industry Co Ltd
Current assignee: Nakamura Tome Precision Industry Co Ltd
Priority date: 2016-01-12
Filing date: 2017-01-11
Publication date: 2017-09-01
Anticipated expiration: 2027-01-11
Also published as: KR102637724B1; JP2017124484A; KR20170084704A; JP6851068B2; TWM546882U

Abstract

The purpose of this utility model is to provide a kind of grinding/grinding complex machining device and lapping device, wherein, grinding/grinding complex machining device can carry out grinding processing and the attrition process of workpiece by a processing unit (plant), simultaneously, grinding mechanism is simple and grinds excellent quality, also, the grinding efficiency and excellent quality of lapping device.Grinding of the present utility model/grinding complex machining device is characterised by, possess for carrying out the grinding platform of grinding processing, the grinding table for being ground processing to workpiece to workpiece and the work transporting unit of workpiece being transported from the grinding platform to grinding table, the grinding table has belt grinding unit, and the belt grinding unit uses lapping tape.

Description

Grinding/grinding complex machining device and lapping device

Technical field

The utility model, which is related to, a kind of can continuously carry out the Compound Machining of grinding processing and its attrition process afterwards Device.

Also, it is related to a kind of lapping device of utilization belt grinding.

Background technology

It is being used in the fields such as the various substrates of various devices, after profile is shaped by grinding, is entering one Step implements attrition process into mirror-like.

Here, grinding is processed as the side being formed using surface, profile of grinding stone skiving workpiece of high speed rotation etc. Method, carries out thick grinding, middle grinding, lappingout according to the smoothness on surface and cuts.

Attrition process refers to surface grinding using tiny abrasive grains into mirror-like.

As Ginding process, all it was utilized in the past and disperses the method for free abrasive grains in lapping liquid, using being referred to as The Surface Machining that the chemical reaction of etching is carried out, however, in recent years, from the viewpoint of environmental protection, purification workability, and The reasons such as processing can not be etched based on factor material, banding is coated with and is immobilized onto using by tiny abrasive grains The lapping tape of film (is also referred to as sand belt, polished silicon wafer etc..) be ground.

Up to now, these processing unit (plant)s turn into processing unit (plant) independently as grinding device, lapping device, because This between its processing machine, it is necessary to these a variety of devices of assortment or set Work carrying device, and the setting standard of each device is tight In lattice, cost also at high price.

Therefore, the present utility model people to grinding unit and using band grinding unit positioning easily, cooling agent The common of the attendant equipments such as the circulatory system is studied, and as a result completes the utility model.

In addition, in the lapping device of existing utilization lapping tape, such as shown in patent document 1, between a pair of tep reels Lapping tape is set up, and with the compression joint mechanism for the machined object that the lapping tape is crimped on to rotation.

For such compression joint mechanism, the elastic of elastomer adjusts, selectes very difficult.

For example, as shown in figure 13, the shaping form in the grinding face through grinding of substrate needs to be configured to according to purposes various The angle of various kinds, it is more complicated, therefore, in order to coordinate its shape to move control to compression joint mechanism, not only need by complexity Turning unit and the controlling organization that constitutes of multiple axles, and easily produce gap between surface to be polished so as to grinding tired It is difficult.

Prior art literature

Patent document

Patent document 1：Japanese Unexamined Patent Publication 2011-45957 publications

Utility model content

(the problem of utility model will be solved)

The purpose of this utility model is to provide a kind of grinding/grinding complex machining device, can filled by a processing The grinding processing for carrying out workpiece and attrition process are put, meanwhile, grinding mechanism is simple and grinds excellent quality.

Also, the purpose of this utility model is the lapping device for providing a kind of grinding efficiency and excellent quality.

(technical scheme for solving technical problem)

Grinding/grinding complex machining device involved by the utility model is characterised by that the grinding/grinding is compound to be added Frock, which is put, to be possessed：For grinding process the grinding platform of workpiece, the grinding table for attrition process workpiece and from the grinding platform to The work transporting unit of grinding table, the grinding table has belt grinding unit, and the belt grinding unit uses lapping tape.

So, one is turned to by the way that grinding processing machine and grinding machine are combined, the positioning of workpiece is easy and can The common of attendant equipment is realized, therefore, the device as low cost.

Here, grinding platform and grinding table have the rotation holding unit of workpiece.

Further, since being belt grinding unit, therefore, compared with the existing device using free abrasive grains, environment is protected Shield property is excellent.

In the utility model, the belt grinding unit has a pair of backing rolls, turning unit or mobile control unit, The pair of backing roll, which is hung, is wound with lapping tape, the turning unit be used for so that hang be around in the pair of backing roll lapping tape it is suitable The mode of the surface to be polished of workpiece turns round the pair of backing roll, the mobile control unit be used for so that hang be around in it is described The lapping tape of a pair of backing rolls makes the pair of backing roll be relatively moved towards workpiece along the mode of the surface to be polished of workpiece.

In other words, in the utility model, belt grinding unit can also have hang be wound with lapping tape a pair of backing rolls, And turning unit, the turning unit is used for so that extension is around in surface to be polished of the lapping tape along workpiece of the pair of backing roll Mode make a pair of backing rolls revolution.

So, lapping tape is provided with due to setting up and opening between a pair of backing rolls, therefore, by being supported to workpiece and a pair Carry out close between the turning unit of roller and leave control, lapping tape can be made with along the side of the surface to be polished of complicated shape Formula is turned round.

Now, by so as to set, hang and be around in the lapping tape of a pair of backing rolls and the contact position of workpiece as such as one Mode to position as defined in central portion between backing roll etc. to lapping tape while be controlled while turning round it, it is easy to really Protect uniform contact pressure.

In addition, if making the contact position of lapping tape and workpiece from the central portion skew between a pair of backing rolls of rotation Words, the then abrasive grains for being crimped on the zone face of workpiece are moved due to the revolution of the lapping tape along the contact surface of workpiece, therefore, Adjustment function with amount of grinding.

Be easy to be ground band feed speed speed and temporarily cease wait control, also, be also easy to progress in order to Grind section supply water etc. cooling-lubricant and pair with the contact site progress of workpiece is temporary leaves control.

In the utility model, for the feeding of lapping tape, the rotation with workpiece is synchronous, asynchronous, can Play a role.

As the method that is ground shape of the lapping tape along workpiece is made, belt grinding unit, which can also have to be wound with by extension, to be ground A pair of backing rolls and mobile control unit that first roller of grinding belt and the second roller are constituted, the mobile control unit be used for Extension is around in mode of the lapping tape of the pair of backing roll along the grinding face of workpiece makes first roller and the second roller direction Workpiece marches forward and direction of retreat relative movement.

Thereby, it is possible to the same mobile control of the lapping tape revolution for carrying out and making being winded between a pair of backing rolls.

Here, in the case where making a pair of backing rolls towards workpiece relative movement, servomotor can also be being utilized Jointed connecting rod mechanism on slew gear, and backing roll is set in a pair of links respectively.

In addition, the first roller and the second roller can also make the feed speed of lapping tape change or stop, and it can lead to Crossing makes the first roller, the second roller synchronize or asynchronous be controlled.

In the utility model, the pair of backing roll, which can also have, tilts limiting unit, the inclination limiting unit For making the abradant surface of lapping tape be tilted in the way of the surface to be polished relative to workpiece is obliquely abutted in the lateral direction.

Here, so-called tilt in the lateral direction refers to, in situation about configuring with for example rotating the workpiece level of holding Under, the setting for vertical direction up and down relative to lapping tape tilts to the right or back to left.

The notch part formed thereby, it is possible to easily enter lapping tape on workpiece, or make the surface to be polished with workpiece The area increase of contact, improves grinding efficiency, the supply of cooling-lubricant when being also easy to be ground.

In the utility model, the grinding/grinding complex machining device can also have backup support unit, the reinforcement list Member presses the lapping tape that extension is around in a pair of backing rolls from the rear side of the lapping tape towards workpiece.

Like this, the shape that can correspond to the grinding unit of workpiece supports lapping tape from rear side.

As described above, the utility model has feature in itself due to belt grinding unit, accordingly it is also possible to be formed using so Grinding mechanism single lapping device.

Lapping device involved by the utility model is characterised by that the lapping device has a pair of backing rolls, revolutions Unit or mobile control unit, the pair of backing roll, which is hung, is wound with lapping tape, and the turning unit is used to be around in institute so as to hang State the lapping tape of a pair of backing rolls turns round the pair of backing roll along the mode of the surface to be polished of workpiece, the mobile control Unit is used to make the pair of branch in the way of making extension be around in the lapping tape of the pair of backing roll along the surface to be polished of workpiece Runner is relatively moved towards workpiece.

In the utility model, the lapping device can also have backup support unit, and extension is around in institute by the backup support unit The lapping tape for stating a pair of backing rolls is pressed from the rear side of the lapping tape towards workpiece.

(effect of utility model)

In grinding/lapping device involved by the utility model, due to by the conveyance of grinding platform and grinding table and workpiece Unit is integrated together, therefore, it is possible to carry out these multiple processing by a table apparatus.

As grinding unit, due to making to rotate around a pair of backing rolls for hanging with lapping tape, or make a pair of backing rolls First roller and the second roller advance respectively relative to workpiece, retreats mobile control, therefore, it is possible to be ground along grinding work-piece The mode of the shape of flour milling is ground, and therefore, there is no need to existing contact component etc., with simple structure and grind Excellent in uniformity.

Brief description of the drawings

Fig. 1 shows the configuration example of grinding/grinding complex machining device involved by the utility model.

Fig. 2 (a) shows to be arranged at the example of the grinding unit of grinding platform.Fig. 2 (b), Fig. 2 (c) show to process by grinding And the end surface shape example of the substrate shaped.

Fig. 3 (a)~Fig. 3 (c) shows to be arranged at the example of the action of the rotary unit of a pair of backing rolls of grinding table.

Fig. 4 shows the state for making rotating mechanism (rotary unit) be retreated from workpiece.

Fig. 5 (a)~Fig. 5 (c) shows to correspond to the action of rotary unit into the enlarged drawing of Fig. 3 (a)~Fig. 3 (c) amplifications.

Fig. 6 (a)~Fig. 6 (c) shows the example of the mobile control of a pair of backing rolls.

Fig. 7 (a) shows to make the contact site of lapping tape from the example of off-centring, and Fig. 7 (b) shows to carry out using idler roller The example of pressing.

Fig. 8 (a) shows lapping tape that relative to the example that workpiece is configured in the vertical direction Fig. 8 (b) shows to make lapping tape Inclined example in the lateral direction.

Fig. 9 (a) and Fig. 9 (b) show the example being ground to the notch part of workpiece, and Fig. 9 (a) shows to tilt lapping tape The example of ground action, Fig. 9 (b) shows the example of reinforcement.

Figure 10 (a) and Figure 10 (b) show the example for being combined rotating mechanism and linkage.

Figure 11 shows the example with reinforcement roller.

Figure 12 (a) shows the grinding example of square substrate, and Figure 12 (b) shows outer shape example.

Figure 13 shows the example of existing belt grinding.

Symbol description

10 grinding platforms

11 turntables (rotation holding unit)

12 grinding stones

13 mill spindles

20 grinding tables

22 turning arms

23 first backing rolls

24 second backing rolls

29 base portions

30 conveyers

41 drive disks

42 clutch plates

43 first connecting rods

44 second connecting rods

100 grindings/grinding complex machining device.

Embodiment

Grinding/grinding complex machining device (the hereinafter referred to as present apparatus) 100 involved by the utility model is shown in Fig. 1 Configuration example.

The present apparatus 100 has for carrying out the grinding platform 10 of grinding processing to workpiece, for being ground processing to workpiece Grinding table 20, for from grinding platform 10 to grinding table 20 transport workpiece conveyer 30.

Conveyer 30 involved by the present embodiment has first such as possessing absorption layer manipulated to workpiece Hand 33a, the second hand 33b, the first hand 33a have the first X guide rails for moving control in the vertical direction in Fig. 1 31a and the first Y guide rail 32a for moving control in the lateral direction.

Second hand 33b is similarly by the 2nd X guide rails 31b and the second Y guide rail 32b mobile control in the x-y directions.

The workpiece such as substrate are externally supplied to raw material rickyard (the first rickyard) 34, will by the first hand 33a Work transporting is transported to the second rickyard 35 to grinding platform 10, and after grinding processing.

The workpiece of second rickyard 35 is manipulated by the first hand 33a or the second hand 33b, and is transferred to the 3rd heap Stock ground 36.

Second hand 33b fetches the workpiece of grinding completion from the 3rd rickyard 36, is ground on grinding table 20, by it Conveyance is taken out of to subsequent processing to the finished goods rickyard (the 4th rickyard) 37 after attrition process.

The present embodiment is the example that work transporting is carried out by X-Y guide rails, still, in the utility model, for conveyance System is not limited, for example, can also use manipulator.

So, by the way that by grinding platform and grinding table Composite, the not only conveyance and positioning of workpiece becomes easy, also can Realize grinding, grinding when use cooling system it is common.

Fig. 2 (a)~Fig. 2 (c) shows the example for the grinding unit that grinding platform 10 possesses.

There is grinding unit rotation to keep the turntable 11 of workpiece 1 and the grinding stone 12 of grinding workpiece.

Turntable 11 has the holding unit of the workpiece 1 such as suction hole, and driven part 11a rotation controls.

Grinding stone 12 is linked by mill spindle 13 and drive system, and is controlled by high speed rotation.

In addition, control grinding stone 12 is relative to the forward/backward of workpiece, above-below direction and inclination.

In addition, by changing or possessing multiple grinding stones, thick grinding, middle grinding, lappingout can be carried out and the conversion such as cut.

The example of the chamfering grinding of the end face of workpiece (substrate) 1 is shown in Fig. 2 (b), Fig. 2 (c).

According to the purposes of substrate, quality requirements etc., except C chamfered sections 1a, 1b such as Fig. 2 (b) Suo Shi relative to end face 1c Outside same degree, there is also such as Fig. 2 (c) Suo Shi, the size of C chamfered sections is in situations different with 1b 1a.

In addition, the end for existing in workpiece 1 forms the situation of the notch parts such as V-notch.

If using the grinding unit involved by the utility model, then it can also carry out grinding and be configured to this complexity The grinding of the part of shape.

First reality of the grinding unit that grinding table 20 possesses is shown in Fig. 3 (a)~Fig. 3 (c) to Fig. 5 (a)~Fig. 5 (c) Apply example.

The driven part 21a of rotating disk 21 rotation controls, absorption keeps workpiece 1 on rotating disk.

Grinding unit has the revoliving arm for being approached and leaving the base portion 29 of control relative to the workpiece 1 and link therewith 22。

For revoliving arm 22, major part is only symbolically represented, the support for eliminating diagram is utilized from base portion 29 Part etc. installs the drive divisions such as servomotor, is controlled around centre of gyration O by revolution.

There are a pair of backing rolls being made up of the first backing roll 23 and the second backing roll 24 at the both ends of revoliving arm 22.

Lapping tape 2 is sent out by feed rolls 25 from tep reel 26, a pair of backing rolls 23,24 is set up in, via pulling roll 27 It is back to the side of tep reel 28.

Now, by the adjustment of feed rolls 25 and pulling roll 27, opened in the way of tension force as defined in applying to lapping tape 2 If.

Corresponding to Fig. 3 (a)~Fig. 3 (c), enlarged drawing is shown in Fig. 5 (a)~Fig. 5 (c).

Thus, turning round revoliving arm 22 by way of grinding face with lapping tape 2, the end face of substrate can be corresponded to Grinding shape be ground.

Rotational speed can adjust milling time by servomotor control according to the shape of end face or position.

Lapping tape is to mix less than 10 μm of particulate and polyester polyurethane resin etc., and is coated on on base material Obtained fixation abrasive grains grinding component.

As abrasive grains, motion has white alumina (ホワイトア Le ミ Na), green silicon carbide (グリーンカーボ Application ラ Application ダ system), the various materials such as diamond, it is selected according to the material of substrate (workpiece).

Preferably, lapping tape 2 is located between a pair of backing rolls, in Fig. 3 (a)~Fig. 3 (c), when revoliving arm 22 times When turning, uniform contact pressure puts on workpiece 1.

Accordingly it is also possible to make the central portion up and down of the end face of workpiece 1 correspond to centre of gyration O position.

Alternatively, it is also possible to shown in such as Fig. 7 (a) and Fig. 7 (b), make the position contacted with workpiece 1 of lapping tape 2 into revolution Upper side or the lower side skew of the heart.

So, in the revolution of lapping tape 2, the abrasive grains of zone face along the contact surface of workpiece 1 while move while entering Row grinding, amount of grinding increase.

So, lapping tape 2 is set due to opening, thus, it is easy to be ground the adjustment of the feed speed of band 2 and temporarily cease Deng.

In addition, as shown in figure 4, being also easy to temporarily retreat from workpiece 1.

The second embodiment of grinding unit is shown in Fig. 6 (a)~Fig. 6 (c), can also be in the situation without using revoliving arm Under, control that separately the first backing roll 123 and the second backing roll 124 are advanced and retreated.

In this case, as shown in Fig. 6 (a), adjustment is put between the first backing roll 123 and the second backing roll 124 While the tension force of lapping tape 2, in Fig. 6 (a), the first backing roll 123 is set to be relatively advanced compared with the second backing roll 124, The grinding face 1a of upside is ground, afterwards, continuously as shown in Fig. 6 (b), Fig. 6 (c), while making after the first backing roll 123 Move back while make the second backing roll 124 advance, so as to by successively along the end face of substrate in the way of be ground.

In Fig. 7 (b), by fixing the first backing roll 223 and the second backing roll 224, and idler roller 223a is advanced, Movement is retreated, can be relatively moved in the same manner as the first backing roll, the relative movement of the second backing roll.

In addition, as shown in Figure 10 (a) and Figure 10 (b), showing and being kept for a pair first by drive disk 41 and clutch plate 42 The example of connecting rod 43 and second connecting rod 44.

The rear portion side of first connecting rod 43 and the rear portion side of second connecting rod 44 is set to be turned round respectively on the drive disk 41 of control It is relative to be connect to ground by axle portion 41b, 41c axle, the midway of first connecting rod 43 and second connecting rod 44 is passed through on clutch plate 42 It is relative to axle portion 42b, 42c axle connect.

A pair of backing rolls 43a, 44a are installed in the front of a pair of links.

Drive disk 41 and servo-electric arbor link 41a, are controlled by the revolution of servomotor, a pair of backing roll 43a, 44a reciprocally advances, retreats movement.

Lapping tape 2 passes through a pair of backing rolls 43a, 44a and help roll 43b, 44b and idler roller before a pair of links 25a set.

In the present embodiment, by combining rotating mechanism and linkage, it can extend between driving part and workpiece Distance, and when can avoid the workpiece from rotating and driving part interference.

In the utility model, tilt control unit can also be set, such as Fig. 8 (a) and Fig. 8 (b) are shown, make lapping tape Rotated under the 2 inclined state from Fig. 8 (a) to Fig. 8 (b).

As shown in Fig. 8 (b), if tilting lapping tape, then contact area increases, grinding efficiency lifting.

In addition, as shown in Fig. 9 (a) and Fig. 9 (b), if lapping tape 2 obliquely turn round, then lapping tape 2 it is easy with The mode of bending enters the notch part 1d such as the V breach that is formed on workpiece 1 inside.

In the utility model, although set the contact pressure that power adjusts lapping tape by opening between a pair of backing rolls, still, The elasticity material such as the bag for being filled with air can also be used to be supported from the rear side of lapping tape.

In addition, as shown in Fig. 9 (b), if the peripheral part in reinforcement (the バッ Network アップ) roller 50 rotated freely is installed Elastomer 51, and if being pressed (reinforcement) from the back side of lapping tape 2 towards workpiece, then the notch part 1d of workpiece 1 grinding Also it is easy to become.

Illustrate the ability to adjust the example of the support force of reinforcement roller 50 in Figure 11 by the reinforcement such as spring Flexible element 52.

Workpiece shapes as object of the present utility model are not only circle, can be by Figure 12 (a) and Figure 12 (b) yet In the variously-shaped workpiece such as the square substrate that shows polar coordinates control is carried out to tackle.

Claims

1. a kind of grinding/grinding complex machining device, it is characterised in that

The grinding/grinding complex machining device possesses：Grinding platform for carrying out grinding processing to workpiece；For entering to workpiece The grinding table of row attrition process；The work transporting unit of workpiece is transported from the grinding platform to grinding table,

The grinding table has belt grinding unit, and the belt grinding unit uses lapping tape.

2. grinding according to claim 1/grinding complex machining device, it is characterised in that

The belt grinding unit has a pair of backing rolls, turning unit or a mobile control unit, the pair of backing roll hang around There is lapping tape, the turning unit is used for so as to hang the lapping tape for being around in the pair of backing roll along the surface to be polished of workpiece Mode turns round the pair of backing roll, and the mobile control unit is used for so as to hang the lapping tape for being around in the pair of backing roll The pair of backing roll is set to be relatively moved towards workpiece along the mode of the surface to be polished of workpiece.

3. grinding according to claim 2/grinding complex machining device, it is characterised in that

The pair of backing roll, which has, tilts limiting unit, and the inclination limiting unit is used for the abradant surface for making lapping tape with relative The mode obliquely abutted in the lateral direction in the surface to be polished of workpiece is tilted.

4. grinding according to claim 2/grinding complex machining device, it is characterised in that

The grinding/grinding complex machining device has backup support unit, and extension is around in the pair of backing roll by the backup support unit Lapping tape from the rear side of the lapping tape towards workpiece press.

5. a kind of lapping device, it is characterised in that

The lapping device has a pair of backing rolls, turning unit or mobile control unit, and the pair of backing roll is hung and is wound with Lapping tape, the turning unit is used for so as to hang the lapping tape for being around in the pair of backing roll along the side of the surface to be polished of workpiece Formula turns round the pair of backing roll, the mobile control unit be used for so that hang be around in the pair of backing roll lapping tape it is suitable The mode of the surface to be polished of workpiece makes the pair of backing roll be relatively moved towards workpiece.

6. lapping device according to claim 5, it is characterised in that

7. lapping device according to claim 5, it is characterised in that

The lapping device has backup support unit, and the backup support unit grinds the lapping tape that extension is around in the pair of backing roll from this The rear side of grinding belt is pressed towards workpiece.