CN205282457U - 一种应用于离子束蚀刻的基片载片台 - Google Patents
一种应用于离子束蚀刻的基片载片台 Download PDFInfo
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- CN205282457U CN205282457U CN201521103597.9U CN201521103597U CN205282457U CN 205282457 U CN205282457 U CN 205282457U CN 201521103597 U CN201521103597 U CN 201521103597U CN 205282457 U CN205282457 U CN 205282457U
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CN107024730A (zh) * | 2017-06-21 | 2017-08-08 | 福建中科晶创光电科技有限公司 | 一种采用lift‑off原理制作方形光栅的方法 |
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CN107024730A (zh) * | 2017-06-21 | 2017-08-08 | 福建中科晶创光电科技有限公司 | 一种采用lift‑off原理制作方形光栅的方法 |
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C14 | Grant of patent or utility model | ||
GR01 | Patent grant | ||
CB03 | Change of inventor or designer information |
Inventor after: Liang Wanguo Inventor after: Li Guangwei Inventor after: Feng Xinkai Inventor after: Chen Liyuan Inventor after: Zou Xiaolin Inventor after: Jiu Long Inventor after: Chen Huaixi Inventor before: Liang Wanguo Inventor before: Feng Xinkai Inventor before: Chen Liyuan Inventor before: Zou Xiaolin Inventor before: Li Guangwei Inventor before: Jiu Long Inventor before: Chen Huaixi |
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Effective date of registration: 20190418 Address after: 350100 Fujian Province Fuzhou Minhou County Shangjie Town Science and Technology East Road 8 Pioneer Building 3 Floor 304-A118 Patentee after: Fujian Ruichuang Photoelectric Technology Co., Ltd. Address before: 350108 Room 726, Building 3, Haixi Research Institute, Chinese Academy of Sciences, Shangjie Town, Minhou County, Fuzhou City, Fujian Province Patentee before: FUJIAN ZHONGKE JINGCHUANG PHOTOELECTRIC TECHNOLOGY CO., LTD. |
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