CN205049621U - Probe station - Google Patents
Probe station Download PDFInfo
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- CN205049621U CN205049621U CN201520817357.9U CN201520817357U CN205049621U CN 205049621 U CN205049621 U CN 205049621U CN 201520817357 U CN201520817357 U CN 201520817357U CN 205049621 U CN205049621 U CN 205049621U
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- base
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- rotating shaft
- cam
- probe station
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Abstract
The utility model belongs to the probe station field especially relates to a probe station. When sample parameter testing, drive support piece through drive assembly and reciprocate, probe on the realization support piece and both relative position's of mount table regulation to make the test point quickly separating or the contact of probe and sample, this operation process is convenient, and is efficient.
Description
Technical field
The utility model belongs to probe station field, particularly relates to a kind of probe station.
Background technology
In the production and development process of semi-conductor chip, need to carry out procedural test and terminal test to the parameters of chip sample, the test aligning equipment completed needed for test is probe station.Probe station can find required test point on the sample that is placed on erecting bed convenient, accurately and rapidly, the base, launch site etc. of such as triode, by the probe on probe station and test point reliable contacts, the test condition that supporting testing tool is arranged is added on tested tube core by probe, realizes the object to core parameter testing.
In the prior art, the erecting bed in probe station and probe are relatively-stationary, when sample parameters is tested, by regulating the position of probe base, to regulate probe relative to the position of erecting bed, probe is allowed to be separated with the test point of sample or to contact, this operating process bothers, and efficiency is low.
Utility model content
The purpose of this utility model is to provide a kind of probe station, is intended to solve the operating process when the position regulating probe relative to erecting bed of existing probe station and bothers and inefficient technical matters.
The utility model realizes like this, a kind of probe station, comprising base, probe base, the probe clamp be arranged on described probe base, be arranged on the probe on described probe clamp and be arranged on described base and erecting bed for installing sample, also comprising the support member for installing described probe base and the driven unit for driving described support member to move up and down relative to described base.
Further, described driven unit comprises the cam be articulated on described base and the locating part be fixedly installed on described base, described locating part has a through hole extended along the thickness direction of described sample, pivot joint axis between described cam with described base is mutually vertical with the axis of the through hole of described locating part, described driven unit also comprises the lifting shaft of the through hole being arranged in described locating part, wherein one end of described lifting shaft is connected to described support member, and other one end of described lifting shaft is connected on the outer wall of described cam.
Further, described driven unit also comprises the rotating shaft that is articulated on described base and to be arranged on described base and bearing for supporting described rotating shaft, and described cam to be installed in described rotating shaft and described cam and described rotating shaft synchronous axial system.
Further, the quantity of described rotating shaft is two, two described shaft parallels are arranged on described base, described driven unit also comprises the first crank be articulated in rotating shaft described in one of them, be articulated in the second crank in rotating shaft described in another one and opposite end is articulated in connecting rod on described first crank and described second crank respectively, and the axis of described rotating shaft, the pivot joint axis between described first crank and described connecting rod and the pivot joint axis between described second crank and described connecting rod are parallel to each other.
Further, the quantity of the quantity of described cam, the quantity of described locating part, described lifting shaft is four, wherein two described cams are installed in rotating shaft described in one of them, cam described in two other is installed in rotating shaft described in another one, four described locating part one_to_one corresponding, four described cams are fixedly installed on described base, and four described lifting shaft one_to_one corresponding are arranged in the through hole of four described locating parts.
Further, described driven unit also comprises the tumbler be fixedly mounted in rotating shaft described in one of them.
Further, described driven unit also comprises and being arranged on described base and the bolster abutted against with the outer wall of described cam, and described lifting shaft is connected to one end of the outer wall of described cam and described bolster is oppositely arranged.
Further, described locating part is linear bearing, and described linear bearing is fixedly installed on described base.
Further, described support member offers mounting hole, wherein one end of described lifting shaft is connected with the mounting hole interference fit of described support member.
Further, described base is provided with for regulating described sample relative to the angle adjusting mechanism of the level angle of described base.
The utility model relative to the technique effect of prior art is: when sample parameters is tested, support member is driven to move up and down by driven unit, realize the adjustment of probe on support member and erecting bed relative position, to make the test point quick separating of probe and sample or to contact, this operating process is convenient, and efficiency is high.
Accompanying drawing explanation
Fig. 1 is the three-dimensional wiring layout of the probe station that the utility model embodiment provides;
Fig. 2 is the three-dimensional wiring layout of the probe station of Fig. 1, and wherein erecting bed and top board do not show;
Fig. 3 is the three-dimensional structure diagram of the cam applied in the probe station of Fig. 1.
Embodiment
In order to make the purpose of this utility model, technical scheme and advantage clearly understand, below in conjunction with drawings and Examples, the utility model is further elaborated.Should be appreciated that specific embodiment described herein only in order to explain the utility model, and be not used in restriction the utility model.
Refer to Fig. 1 to Fig. 3, the probe station that the utility model embodiment provides, comprising base 10, probe base (not shown), the probe clamp (not shown) be arranged on probe base, be arranged on the probe (not shown) on probe clamp and be arranged on base 10 and erecting bed 20 for installing sample (not shown), also comprising the support member 30 for installing probe base and the driven unit 40 for driving support member 30 to move up and down relative to base 10.
When sample parameters is tested, drive support member 30 to move up and down by driven unit 40, realize the adjustment of both probe on support member 30 and erecting bed 20 relative position, to make the test point quick separating of probe and sample or to contact, this operating process is convenient, and efficiency is high.
In the present embodiment, the thickness direction of sample and above-below direction.
Particularly, probe base is for adjusting the position of probe and stationary probe and probe clamp.Probe base can be divided into DC probe seat and rf probe seat according to function.Probe base can be divided into high precision, middle precision, low accurate probe seat according to precision difference.High precision needle stand below mobile accuracy 1um, middle precision needle stand mobile accuracy at 1 to 5um, low precision needle stand more than mobile accuracy 5um.
Probe clamp is used for stationary probe, linking probe the signal such as transmission current, voltage.Probe clamp is divided into three axle clamp tools, coaxial holder according to precision.Three axle clamp tool electric leakage precision are high, and electric leakage precision is in 100fA rank, and be suitable for testing high-precision test signal, test result is accurate.
Probe be directly and survey sample electrode or wiring circuit contact, for connecting chip sample and fixture cable.Probe is mainly divided into high frequency probe and DC probe by function.High frequency probe for testing some radio-frequency devices, the device that current/voltage direction constantly changes.Probe mainly contains beryllium copper probe, wolfram steel probe, proof gold probe by material.
Erecting bed 20 is sucker structure, can carry out negative-pressure adsorption to sample, allows sample be fixedly mounted on erecting bed 20.Base 10 is provided with the air valve 17 for controlling sucker work.Mainly be divided into 4 inch probe platforms and 6 inch probe platforms by size, mainly refer to the maximum sample size that can test.Normal temperature probe station and pyrometric probe platform can be divided into by working temperature.
Further, driven unit 40 comprises the cam 41 be articulated on base 10 and the locating part 42 be fixedly installed on base 10, locating part 42 has a through hole (not shown) extended along the thickness direction of sample, pivot joint axis between cam 41 with base 10 is mutually vertical with the axis of the through hole of locating part 42, driven unit 40 also comprises the lifting shaft 43 of the through hole being arranged in locating part 42, wherein one end of lifting shaft 43 is connected to support member 30, and other one end of lifting shaft 43 is connected on the outer wall of cam 41.When sample parameters is tested, by rotating the cam 41 be articulated on base 10, the lifting shaft 43 be connected on the outer wall of cam 41 is moved up and down under the position-limiting action of locating part 42, lifting shaft 43 drives support member 30 to move up and down, realize the adjustment of both probe on support member 30 and erecting bed 20 relative position, to make the test point quick separating of probe and sample or to contact, this operating process is convenient, and efficiency is high.
Further, the cross section of cam 41 is kidney-shaped, i.e. rectangle arrange a semicircle respectively at the opposite end of rectangle, and cam 41 is arranged on the circle centre position of one of them semicircle with the pivot joint axis of base 10.The side of cam 41 offers a groove 411, and when one end of lifting shaft 43 is connected on groove 411, lifting shaft 43 and support member 30 are positioned at lowest order, and when rotating cam 41, lifting shaft 43 and support member 30 can up move.In the present embodiment, cam 41 can allow lifting shaft 43 fast lifting within the scope of 10mm.Understandably, the cross section of cam 41 is other shapes, as long as allow cam 41 coordinate with lifting shaft 43, lifting shaft 43 in the vertical direction is moved.
Further, driven unit 40 also comprises the rotating shaft 44 that is articulated on base 10 and to be arranged on base 10 and for the bearing 45 of supporting shaft 44, and cam 41 to be installed in rotating shaft 44 and cam 41 and rotating shaft 44 synchronous axial system.The assembling of cam 41 is convenient in rotating shaft 44.Bearing 45 can allow rotating shaft 44 be articulated on base 10.Particularly, bearing 45 is deep groove ball bearing 45.Bearing 45 is arranged on and is fixedly installed on the bearing seat 451 of base 10.Rotating shaft 44 between bearing 45 and cam 41 is arranged with axle sleeve 452, carries out axial limiting to bearing 45.
Further, the quantity of rotating shaft 44 is two, two rotating shafts 44 are set in parallel on base 10, driven unit 40 also comprises the first crank 461 be articulated in one of them rotating shaft 44, be articulated in the second crank 462 in another one rotating shaft 44 and opposite end is articulated in connecting rod 463 on the first crank 461 and the second crank 462 respectively, and the axis of rotating shaft 44, the pivot joint axis between the first crank 461 and connecting rod 463 and the pivot joint axis between the second crank 462 and connecting rod 463 are parallel to each other.This configuration can allow two rotating shaft 44 synchronous axial system.Bearing pin is all adopted to realize pivot joint between first crank 461 and connecting rod 463, between the second crank 462 and connecting rod 463.
Further, the quantity of the quantity of cam 41, the quantity of locating part 42, lifting shaft 43 is four, wherein two cams 41 are installed in one of them rotating shaft 44, two other cam 41 is installed in another one rotating shaft 44, four locating part 42 one_to_one corresponding, four cams 41 are fixedly installed on base 10, and four lifting shaft 43 one_to_one corresponding are arranged in the through hole of four locating parts 42.This configuration can realize the steadily movement of support member 30 in the vertical direction.Particularly, when mounted, the outer wall of cam 41 will be arranged on same initial point to four cams 41.
Further, driven unit 40 also comprises the tumbler 47 be fixedly mounted in one of them rotating shaft 44.Tumbler 47 is convenient to the control of countershaft 44.Particularly, tumbler 47 is rocking bar.Base 10 is provided with for the block 14 spacing to rocking bar, when block 14 and rocking bar offset, rocking bar is vertical shape.Block 14 is arranged bolster 141.Base 10 is also provided with and puts block 15 for supporting crank, put rocking bar when block 15 offsets with rocking bar horizontal.Thus limit the hunting range of rocking bar, namely limit the moving range of support member 30.
Further, driven unit 40 also comprises and being arranged on base 10 and the bolster 48 abutted against with the outer wall of cam 41, and lifting shaft 43 is connected to one end of the outer wall of cam 41 and bolster 48 is oppositely arranged.The gravity of the related device on support member 30 and lifting shaft 43 is passed to bolster 48 by cam 41, and bolster 48 is in pressured state, and cam 41 can be rested on optional position, limits support member 30 position.
Further, locating part 42 is linear bearing, and linear bearing is fixedly installed on base 10.Linear bearing can only vertically move for limiting lifting shaft 43, and it is little to rub.Understandably, locating part 42 can also be cylindrical body structure, makes lifting shaft 43 spacing along the thickness direction of sample.
Further, support member 30 offers mounting hole (not shown), wherein one end of lifting shaft 43 is connected with the mounting hole interference fit of support member 30.User's mounting or dismounting are convenient in this configuration, conveniently take off support member 30, and user can the support member 30 of other sizes of self-changeable according to demand.Understandably, support member 30 and lifting shaft 43 can also adopt other Detachable connection structure.
Further, base 10 is provided with for regulating sample relative to the angle adjusting mechanism 21 of the level angle of base 10.The level angle regulating sample is convenient in this configuration.Particularly, sucker rotates and adopts coarse adjustment to combine with fine setting, both can realize the rotation of 360 degree of full angles, milscale can be used again to finely tune, trimming precision 1 point.Disk is laser scale, and be convenient to the accurate angle that user determines to rotate, main body adopts disk vernier, improves the precision of rotation.Further, base 10 being provided with for the horizontal level governor motion 22 of sample relative to position in the horizontal both direction of base 10, is Liang Zu screw nut driven mechanism.
Further, base 10 deviates from be provided with shock absorber part (not shown) on the side of erecting bed 20.Base 10 is provided with support column 16, shock absorber part is embedded in support column 16 end, effectively prevents earth shock on the impact of test, improves measuring accuracy and stability.Shock absorber part is rubber parts, good damping effect.
Further; base 10 comprises the top board 12 that base plate 11 and base plate 11 are oppositely arranged and the back up pad 13 be arranged between base plate 11 and top board 12; base plate 11, top board 12 enclose formation inner chamber with back up pad 13; rotating shaft 44, bolster 48, bearing seat 451, first crank 461, second crank 462, connecting rod 463 are all arranged in inner chamber, protect each device.Locating part 42 and erecting bed 20 are arranged on top board 12.Sleeve 49 is arranged with, for the protection of locating part 42 and lifting shaft 43 outside locating part 42.
Further, also comprise with erecting bed 20 with the use of microscope assembly 50, for amplifying and observing the required sample observed, as the circuit of chip and electrode etc.Microscope assembly 50 is arranged on base 10.Microscope assembly 50 comprises holder 51, be arranged on holder 51 and the first adjustable column 52 extended along the thickness direction of sample, along the second adjustable column 53 of the horizontal expansion of sample, the 3rd adjustable column 54 extended along the thickness direction of sample, for connect the first adjustable column 52 and first of the second adjustable column 53 transfer geometrical clamp 55, for second transferring geometrical clamp 56, the microscope 57 be arranged on the 3rd adjustable column 54 of being connected the second adjustable column 53 and the 3rd adjustable column 54.By regulating the first adjustable column 52, second adjustable column 53 and the 3rd adjustable column 54, adjustable microscope 57 is relative to the height spacing of erecting bed 20 and level orientation.Microscope that probe station uses 57 is mainly divided into Stereo microscope and metaloscope.Stereo microscope, enlargement ratio is little, the amplification range of 14 times to 200 times, and operating distance is long, facilitates the point of probe to survey and operation.Metaloscope, enlargement ratio is large, maximumly can amplify 4000 times, and resolution is high, may be used for failure analysis, the functions such as polarisation, but operating distance is relatively short, and operating space is little.Also comprise the annular light source (not shown) be arranged on the 3rd adjustable column 54.
Further, support member 30 is U-shaped plate, and U-shaped plate has a breach 31, within being positioned at the projection of breach 31 along the projection of the thickness direction erecting bed 20 of sample.This structure is convenient to operate erecting bed 20.Particularly, four lifting shafts 43 are distributed on U-shaped plate surrounding, to U-shaped plate stable support.Understandably, support member 30 is the plate of other shapes.
Further, the heating component (not shown) for heating sample is also comprised.Heating component can provide normal temperature to control to the temperature of 400 DEG C of high temperature.
These are only preferred embodiment of the present utility model, not in order to limit the utility model, all do within spirit of the present utility model and principle any amendment, equivalent to replace and improvement etc., all should be included within protection domain of the present utility model.
Claims (10)
1. a probe station, comprising base, probe base, the probe clamp be arranged on described probe base, be arranged on the probe on described probe clamp and be arranged on described base and erecting bed for installing sample, it is characterized in that: also comprise the support member for installing described probe base and the driven unit for driving described support member to move up and down relative to described base.
2. probe station as claimed in claim 1, it is characterized in that: described driven unit comprises the cam be articulated on described base and the locating part be fixedly installed on described base, described locating part has a through hole extended along the thickness direction of described sample, pivot joint axis between described cam with described base is mutually vertical with the axis of the through hole of described locating part, described driven unit also comprises the lifting shaft of the through hole being arranged in described locating part, wherein one end of described lifting shaft is connected to described support member, other one end of described lifting shaft is connected on the outer wall of described cam.
3. probe station as claimed in claim 2, it is characterized in that: described driven unit also comprises the rotating shaft that is articulated on described base and to be arranged on described base and bearing for supporting described rotating shaft, described cam to be installed in described rotating shaft and described cam and described rotating shaft synchronous axial system.
4. probe station as claimed in claim 3, it is characterized in that: the quantity of described rotating shaft is two, two described shaft parallels are arranged on described base, described driven unit also comprises the first crank be articulated in rotating shaft described in one of them, be articulated in the second crank in rotating shaft described in another one and opposite end is articulated in connecting rod on described first crank and described second crank respectively, and the axis of described rotating shaft, the pivot joint axis between described first crank and described connecting rod and the pivot joint axis between described second crank and described connecting rod are parallel to each other.
5. probe station as claimed in claim 4, it is characterized in that: the quantity of the quantity of described cam, the quantity of described locating part, described lifting shaft is four, wherein two described cams are installed in rotating shaft described in one of them, cam described in two other is installed in rotating shaft described in another one, four described locating part one_to_one corresponding, four described cams are fixedly installed on described base, and four described lifting shaft one_to_one corresponding are arranged in the through hole of four described locating parts.
6. probe station as claimed in claim 3, is characterized in that: described driven unit also comprises the tumbler be fixedly mounted in rotating shaft described in one of them.
7. the probe station as described in any one of claim 2 to 6, it is characterized in that: described driven unit also comprises and being arranged on described base and the bolster abutted against with the outer wall of described cam, described lifting shaft is connected to one end of the outer wall of described cam and described bolster is oppositely arranged.
8. the probe station as described in any one of claim 2 to 6, is characterized in that: described locating part is linear bearing, and described linear bearing is fixedly installed on described base.
9. the probe station as described in any one of claim 2 to 6, is characterized in that: described support member offers mounting hole, and wherein one end of described lifting shaft is connected with the mounting hole interference fit of described support member.
10. the probe station as described in any one of claim 2 to 6, is characterized in that: described base is provided with for regulating described sample relative to the angle adjusting mechanism of the level angle of described base.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201520817357.9U CN205049621U (en) | 2015-10-20 | 2015-10-20 | Probe station |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201520817357.9U CN205049621U (en) | 2015-10-20 | 2015-10-20 | Probe station |
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| Publication Number | Publication Date |
|---|---|
| CN205049621U true CN205049621U (en) | 2016-02-24 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201520817357.9U Active CN205049621U (en) | 2015-10-20 | 2015-10-20 | Probe station |
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Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105911355A (en) * | 2016-05-31 | 2016-08-31 | 南京协辰电子科技有限公司 | Probe device for impedance detection |
| CN109387671A (en) * | 2018-11-16 | 2019-02-26 | 苏州伊欧陆***集成有限公司 | A kind of probe station table top Pneumatic elevation system |
| CN110736417A (en) * | 2019-12-09 | 2020-01-31 | 苏州精濑光电有限公司 | kinds of resistance detection device |
-
2015
- 2015-10-20 CN CN201520817357.9U patent/CN205049621U/en active Active
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105911355A (en) * | 2016-05-31 | 2016-08-31 | 南京协辰电子科技有限公司 | Probe device for impedance detection |
| CN105911355B (en) * | 2016-05-31 | 2018-11-09 | 南京协辰电子科技有限公司 | A kind of probe apparatus of impedance detection |
| CN109387671A (en) * | 2018-11-16 | 2019-02-26 | 苏州伊欧陆***集成有限公司 | A kind of probe station table top Pneumatic elevation system |
| CN110736417A (en) * | 2019-12-09 | 2020-01-31 | 苏州精濑光电有限公司 | kinds of resistance detection device |
| CN110736417B (en) * | 2019-12-09 | 2022-04-29 | 苏州精濑光电有限公司 | Resistance detection device |
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| Date | Code | Title | Description |
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| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| TR01 | Transfer of patent right | ||
| TR01 | Transfer of patent right |
Effective date of registration: 20201230 Address after: 518109 room 801, building e, weihuada Industrial Park, 5 Lirong Road, Xinshi community, Dalang street, Longhua District, Shenzhen City, Guangdong Province Patentee after: Shenzhen sendongbao Technology Co.,Ltd. Address before: 518000 No.5-2, West 2nd Lane, Shuikou garden, Xin'an 31 District, Bao'an District, Shenzhen City, Guangdong Province Patentee before: Xiao Tichun |