CN204539603U - Atmospheric pressure discharges cold plasma generator - Google Patents
Atmospheric pressure discharges cold plasma generator Download PDFInfo
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- CN204539603U CN204539603U CN201420735674.1U CN201420735674U CN204539603U CN 204539603 U CN204539603 U CN 204539603U CN 201420735674 U CN201420735674 U CN 201420735674U CN 204539603 U CN204539603 U CN 204539603U
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- electrode
- radio frequency
- ground electrode
- atmospheric pressure
- parallel strip
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Abstract
A kind of atmospheric pressure discharges cold plasma generator, belongs to technical field of plasma.This generator comprises upper spacer, radio frequency electrode, lower clapboard and ground electrode; Radio frequency electrode is connected with radio-frequency power supply, and ground electrode is connected with radio-frequency power supply ground wire; Upper spacer is covered in radio frequency electrode.It is characterized in that, radio frequency electrode establishes bossed parallel strip, ground electrode, lower clapboard are equipped with the narrow groove matched with the lath of radio frequency electrode, the parallel strip of radio frequency electrode can through the narrow groove of lower clapboard, between the parallel narrow groove being interspersed in ground electrode or through the narrow groove of ground electrode again the parallel parallel strip being interspersed in ground electrode; Between the parallel strip and the narrow groove of ground electrode of radio frequency electrode or and form plasma discharge chamber between narrow groove and parallel strip; Lower clapboard inside is provided with the gas passage intersected in length and breadth, working gas can be evenly distributed to each arc chamber, by applying voltage, produces the uniform plasma jet of large volume under normal pressure.
Description
Technical field
The utility model belongs to technical field of plasma, is specifically related to a kind of atmospheric pressure discharges cold plasma generator.
Background technology
At present, large-area non-equilibrium cold plasma can be produced under low air pressure condition, but need to complete in the vacuum chamber, can not continued operation be realized, simultaneously because vacuum chamber volume is comparatively large, build and maintenance cost costliness, significantly limit its range of application.The current plasma that can produce under atmospheric conditions has two kinds, and one is hot plasma, as the plasma that electric arc produces, and the about 10000K magnitude of temperature, for fear hot material, its application is restricted; Another kind is cold plasma, as the plasma that corona discharge, dielectric barrier discharge produce, and temperature near room temperature.
For increasing the area of cold plasma, existing cold plasma generator many employings plate electrode structures.As CN 200910085918.X discloses " large-area flat-plate normal-pressure radio-frequency cold plasma system ", there are two surfaces parallel to each other and the electrode of mutually insulated, one to be connected with radio-frequency power supply and to be radio frequency electrode, another is connected to ground and is ground electrode, wherein the bottom of ground electrode is provided with the temperature on a heater for regulating ground electrode, and insulating material at one end offers air vent hole.ZL 201010180725.5 discloses " normal pressure lower plate electrode radio frequency capacitive coupling argon oxygen/argon-nitrogen plasma generator ", the water-cooled flat metal electrode parallel to each other by two surfaces forms, at surface of metal electrode bonding insulation lath, be provided with multiple air vent hole in one end of fixing insulating material.ZL 200610012139.3 discloses " atmosphere pressure discharging cold plasma generators based on two gas source ", adopt two gas source air supply system and bare electrode structure, form plate round or disciform atmosphere pressure discharging cold plasma generators, also can by multiple plate or coaxial type plasma generator forming array type cold plasma generator.
It is no matter the array type cold plasma generator that the cold plasma generator that is made up of the flat metal electrode that two surfaces are parallel to each other or multiple flat board are formed, though the plasma of larger area can be formed, be difficult to ensure produce the uniformity of cold plasma.
Summary of the invention
The purpose of this utility model is to provide a kind of atmospheric pressure discharges cold plasma generator, by using the radio frequency electrode with battened construction and the ground electrode matched, form each arc chamber, and be provided with the gas passage of transverse and longitudinal intersection, working gas can be evenly distributed to each arc chamber, under normal pressure, produce the uniform plasma jet of large volume and eject outside arc chamber, be conducive to rotation or the movement of pending sample, make it to be more suitable for the fields such as biological induced-mutation, sterilization, purification and body surface modification, cleaning, sterilization.
For achieving the above object, the utility model provides a kind of atmospheric pressure discharges cold plasma generator, comprise upper spacer 6, radio frequency electrode 7, lower clapboard 8 and ground electrode 9, radio frequency electrode 7 is connected with radio-frequency power supply 5, ground electrode 9 is connected with radio-frequency power supply ground wire, upper spacer 6 is covered in radio frequency electrode 7, it is characterized in that, lower clapboard 8 inside is provided with the gas passage 12 intersected in length and breadth, radio frequency electrode 7 establishes bossed parallel strip, ground electrode 9, lower clapboard 8 is equipped with the narrow groove matched with the lath of radio frequency electrode 7, the parallel strip of radio frequency electrode 7 can through the narrow groove 13 of lower clapboard 8, between the parallel narrow groove being interspersed in ground electrode 9, plasma discharge chamber 10 is formed between the parallel strip and the narrow groove of ground electrode 9 of radio frequency electrode 7.
The another kind of structure of cold plasma generator described in the utility model is, ground electrode 9 also establishes bossed parallel-plate strip configurations, the parallel strip of radio frequency electrode 7 passes the narrow groove of lower clapboard 8 and the narrow groove of ground electrode 9, then between the parallel parallel strip being interspersed in ground electrode 9; Arc chamber 10 is formed between the parallel strip of radio frequency electrode 7 and the narrow groove of ground electrode 9 and parallel strip.
Cold plasma generator described in the utility model, the parallel strip lower surface of radio frequency electrode 7 and the parallel strip lower surface of ground electrode 9 or ground electrode 9 are positioned at same plane.
Cold plasma generator described in the utility model, the height of the parallel strip of radio frequency electrode 7 or ground electrode 9 is 1-100mm.
Cold plasma generator described in the utility model, the gap forming plasma discharge chamber 10 between radio frequency electrode 7 and ground electrode 9 is 0.5-3.0 mm.
Cold plasma generator described in the utility model, the cross section that plasma discharge chamber is formed jointly is circular, oval, square, rectangle.
Cold plasma generator described in the utility model, generator uses bare metal electrode, and upper and lower dividing plate uses insulating material.
Cold plasma generator described in the utility model, gas flow controller by Controlled by Programmable Controller, thus realizes the accurate control of working gas flow.
Cold plasma generator described in the utility model, radio frequency electrode is connected by radio frequency line with 13.56MHz radio-frequency power supply, and radio frequency discharge is carried out at ambient pressure.
Cold plasma generator described in the utility model, work gas body source comprise helium, argon gas can the source of the gas of under atmospheric pressure stable discharging.
Beneficial effect: a kind of atmospheric pressure discharges cold plasma generator that the utility model provides, structure is simple, easily processes; The lath of its radio frequency electrode, through lower clapboard, among the parallel narrow groove being interspersed in ground electrode or between the lath of ground electrode, forms arc chamber; The lower clapboard of generator is provided with the gas passage of transverse and longitudinal intersection, guarantees working gas to be evenly distributed to each arc chamber, ensures the uniformity of electric discharge; By applying voltage, plasma is produced under normal pressure, plasma jet goes out outside arc chamber endlessly, form the jet of large volume, pending sample is positioned over fluerics, namely the discharge process of plasma generator inside can not have an impact, can to rotate again or mobile example makes process more abundant; Also can change the stave lengths of electrode, quantity and electrode spacing according to actual needs, thus obtain the plasma jet of different volumes, be applicable to the fields such as biological induced-mutation, sterilization, purification and body surface modification, cleaning, sterilization.
Accompanying drawing explanation
Accompanying drawing 1 is atmospheric pressure discharges cold plasma generator air supply system schematic diagram.
Accompanying drawing 2 is Facad structure cross-sectional schematic that ground electrode is provided with the atmospheric pressure discharges cold plasma generator of battened construction.
Accompanying drawing 3 is Facad structure schematic diagrames that ground electrode is provided with the atmospheric pressure discharges cold plasma generator of battened construction.
Accompanying drawing 4 is side structure schematic diagrames that ground electrode is provided with the atmospheric pressure discharges cold plasma generator of battened construction.
Accompanying drawing 5 is cross-sectional schematic of atmospheric pressure discharges cold plasma generator lower clapboard place plane.
Accompanying drawing 6 is atmospheric pressure discharges cold plasma generator elevational schematic view, and the cross section that its plasma discharge chamber is formed is circular.
Accompanying drawing 7 is atmospheric pressure discharges cold plasma generator elevational schematic view, and the cross section that its plasma discharge chamber is formed is rectangle.
In figure, each label lists as follows:
1-work gas body source; 2-gas cylinder valve; 3-gas flow controller; 4-gas delivery conduit; 5-radio-frequency power supply; 6-upper spacer; 7-radio frequency electrode; 8-lower clapboard; 9-ground electrode; 10-arc chamber; 11-plasma jet; 12-gas passage; The narrow groove of 13-.
Embodiment
Below in conjunction with technical scheme and accompanying drawing, describe embodiment of the present utility model in detail.
The utility model relates to a kind of atmospheric pressure discharges cold plasma generator, as shown in Figure 1, comprise upper spacer 6, radio frequency electrode 7, lower clapboard 8 and ground electrode 9, radio frequency electrode 7 is connected with radio-frequency power supply 5, ground electrode 9 is connected with radio-frequency power supply ground wire, upper spacer 6 is covered in radio frequency electrode 7, it is characterized in that, lower clapboard 8 inside is provided with the gas passage 12(that intersects in length and breadth as shown in Figure 5), radio frequency electrode establishes bossed parallel strip, ground electrode, lower clapboard is equipped with the narrow groove matched with the lath of radio frequency electrode, the parallel strip of radio frequency electrode can through the narrow groove of lower clapboard, between the parallel narrow groove being interspersed in ground electrode, between the parallel strip and the narrow groove of ground electrode of radio frequency electrode, form plasma discharge chamber 10, the cross section that arc chamber is formed can be the rectangle shown in the circle shown in Fig. 6 or Fig. 7.
The another kind of structure of atmospheric pressure discharges cold plasma generator, its Facad structure schematic diagram as shown in Figure 3, side structure schematic diagram as shown in Figure 4, Facad structure cross-sectional schematic as shown in Figure 2.The ground electrode 9 of this generator establishes bossed battened construction, and the lath of radio frequency electrode 7 passes the narrow groove of lower clapboard 8 and ground electrode 9, then between the parallel parallel strip being interspersed in ground electrode 9; Arc chamber 10 is formed between the parallel strip of radio frequency electrode and the narrow groove of ground electrode and parallel strip.
The air supply system of atmospheric pressure discharges cold plasma generator as shown in Figure 1.Open gas cylinder valve 2, gas flow controller 3 is used to regulate the size of throughput, work source of the gas 1 leads to plasma generator along gas delivery conduit 4, lower clapboard 8 is entered by air inlet, the gas passage 12 intersected by transverse and longitudinal in lower clapboard 8 again flows to each arc chamber 10, apply voltage by radio-frequency power supply 5, electric discharge occurs between electrode and produces uniform plasma jet 11, plasma jet 11 ejects outside arc chamber endlessly.Pending sample or article are positioned under generator, biological induced-mutation, sterilization, purification and body surface modification, cleaning, sterilization etc. can be realized.
Claims (10)
1. atmospheric pressure discharges cold plasma generator, comprise upper spacer (6), radio frequency electrode (7), lower clapboard (8) and ground electrode (9), radio frequency electrode (7) is connected with radio-frequency power supply (5), ground electrode (9) is connected with radio-frequency power supply ground wire, upper spacer (6) is covered in radio frequency electrode (7), it is characterized in that, lower clapboard (8) inside is provided with the gas passage (12) intersected in length and breadth, radio frequency electrode (7) establishes bossed parallel strip, ground electrode (9), lower clapboard (8) is equipped with the narrow groove matched with the lath of radio frequency electrode (7), the parallel strip of radio frequency electrode (7) can pass the narrow groove (13) of lower clapboard (8), between the parallel narrow groove being interspersed in ground electrode (8), plasma discharge chamber (10) is formed between the parallel strip and the narrow groove of ground electrode (9) of radio frequency electrode (7).
2. atmospheric pressure discharges cold plasma generator as claimed in claim 1, lower surface and the ground electrode lower surface of the parallel strip of radio frequency electrode are in same plane.
3. atmospheric pressure discharges cold plasma generator as claimed in claim 2, it is characterized in that, the height of the parallel strip of described radio frequency electrode is 1-100mm.
4. atmospheric pressure discharges cold plasma generator as claimed in claim 3, it is characterized in that, the gap forming plasma discharge chamber between described radio frequency electrode and ground electrode is 0.5-3.0mm.
5. atmospheric pressure discharges cold plasma generator as claimed in claim 1, it is characterized in that, described ground electrode establishes bossed parallel strip, and the parallel strip of described radio frequency electrode passes the narrow groove (13) of lower clapboard and the narrow groove of ground electrode, then between the parallel parallel strip being interspersed in ground electrode.
6. atmospheric pressure discharges cold plasma generator as claimed in claim 5, it is characterized in that, the parallel strip lower surface of described radio frequency electrode and the parallel strip lower surface of described ground electrode are in same plane.
7. atmospheric pressure discharges cold plasma generator as claimed in claim 6, it is characterized in that, the parallel strip height of described ground electrode is 1-100mm.
8. atmospheric pressure discharges cold plasma generator as claimed in claim 7, it is characterized in that, the gap forming plasma discharge chamber between described radio frequency electrode and ground electrode is 0.5-3.0mm.
9. the atmospheric pressure discharges cold plasma generator as described in any one of claim 1-8, is characterized in that, the cross section that described plasma discharge chamber is formed jointly is circular, oval, square, rectangle.
10. atmospheric pressure discharges cold plasma generator as claimed in claim 9, it is characterized in that, the radio frequency electrode of described generator and ground electrode are bare metal electrode, and the material that described upper spacer and lower clapboard use is insulating material.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201420735674.1U CN204539603U (en) | 2014-12-01 | 2014-12-01 | Atmospheric pressure discharges cold plasma generator |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201420735674.1U CN204539603U (en) | 2014-12-01 | 2014-12-01 | Atmospheric pressure discharges cold plasma generator |
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| Publication Number | Publication Date |
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| CN204539603U true CN204539603U (en) | 2015-08-05 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN201420735674.1U Withdrawn - After Issue CN204539603U (en) | 2014-12-01 | 2014-12-01 | Atmospheric pressure discharges cold plasma generator |
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Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105722294A (en) * | 2014-12-01 | 2016-06-29 | 无锡源清天木生物科技有限公司 | Atmospheric pressure discharge cold plasma generator |
| CN106488638A (en) * | 2015-08-27 | 2017-03-08 | 上海至纯洁净***科技股份有限公司 | A kind of plasma apparatus |
| CN108293291A (en) * | 2016-01-18 | 2018-07-17 | 东芝三菱电机产业***株式会社 | Active gases generating means and film process device |
| CN110876222A (en) * | 2018-08-31 | 2020-03-10 | 无锡源清天木生物科技有限公司 | Cold plasma generator for mutation breeding |
-
2014
- 2014-12-01 CN CN201420735674.1U patent/CN204539603U/en not_active Withdrawn - After Issue
Cited By (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105722294A (en) * | 2014-12-01 | 2016-06-29 | 无锡源清天木生物科技有限公司 | Atmospheric pressure discharge cold plasma generator |
| CN105722294B (en) * | 2014-12-01 | 2019-04-30 | 无锡源清天木生物科技有限公司 | Atmospheric pressure discharges cold plasma generator |
| CN110167249A (en) * | 2014-12-01 | 2019-08-23 | 无锡源清天木生物科技有限公司 | Atmospheric pressure discharges cold plasma generator |
| CN110167249B (en) * | 2014-12-01 | 2022-01-28 | 无锡源清天木生物科技有限公司 | Normal pressure discharge cold plasma generator |
| CN106488638A (en) * | 2015-08-27 | 2017-03-08 | 上海至纯洁净***科技股份有限公司 | A kind of plasma apparatus |
| CN108293291A (en) * | 2016-01-18 | 2018-07-17 | 东芝三菱电机产业***株式会社 | Active gases generating means and film process device |
| CN108293291B (en) * | 2016-01-18 | 2020-09-18 | 东芝三菱电机产业***株式会社 | Active gas generating apparatus and film forming apparatus |
| CN110876222A (en) * | 2018-08-31 | 2020-03-10 | 无锡源清天木生物科技有限公司 | Cold plasma generator for mutation breeding |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| AV01 | Patent right actively abandoned | ||
| AV01 | Patent right actively abandoned | ||
| AV01 | Patent right actively abandoned |
Granted publication date: 20150805 Effective date of abandoning: 20220128 |
|
| AV01 | Patent right actively abandoned |
Granted publication date: 20150805 Effective date of abandoning: 20220128 |