CN201674722U - Same plane plasma generator - Google Patents
Same plane plasma generator Download PDFInfo
- Publication number
- CN201674722U CN201674722U CN2010201874950U CN201020187495U CN201674722U CN 201674722 U CN201674722 U CN 201674722U CN 2010201874950 U CN2010201874950 U CN 2010201874950U CN 201020187495 U CN201020187495 U CN 201020187495U CN 201674722 U CN201674722 U CN 201674722U
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- quartz ampoule
- electrode
- plasma
- radio
- frequency power
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Abstract
The utility model discloses a same-plane plasma generator, which comprises a plurality of radio-frequency power supplies and a plurality of plasma nozzles and is characterized in that the plurality of plasma nozzles are installed on a planar support; jet orifices of the plurality of plasma nozzles form a plane; each of the plurality of plasma nozzles is formed by a quartz tube covering a metal tube electrode and a ring electrode arranged outside a jet orifice of the quartz tube; one end of the metal tube electrode covered by the quartz tube is disposed inside the quartz tube and the other end of the metal tube electrode is arranged outside the quartz tube; one of the plurality of radio-frequency power supplies is respectively connected with an internal electrode and an external electrode of the quartz tube; the metal tube electrode covered by the quartz tube is connected with a gas inlet tube; the other end of the gas inlet tube is connected with a gas bottle through a gas pressure reducing valve; and when gas passes through the end of the metal tube electrode covered by the quartz tube, gas is ionized into plasma and sprayed out through the jet orifices of the quartz tubes. The same-plane plasma generator can be used for surface treatment of large-area heat sensitive materials.
Description
Technical field
The utility model relates to same flat plasma generator, especially is installed in the system of the outside jet plasma line of a plurality of plasma spouts on the planar bracket.
Background technology
The atmospheric plasma body technique is in the new technology that just develops rapidly in recent years, also has been used widely, and it can be applicable to: (1) surface clean (for example biochemical pollution of clean surface, surperficial organic contamination).(2) modification of material surface.(3) surface sterilization and sterilization or the like.
Traditionally, atmospheric plasma generally is to adopt the high-frequency and high-voltage discharge, and electric power output voltage height, the plasma that is produced are thread discharges, can not produce glow discharge, is not suitable for the surface treatment of sensitive material etc.; In addition, the general power supply that adopts of normal pressure glow plasma spray gun body is 13.56MHz, and this kind power volume is big, the price height, inconvenience is used for a plurality of generator line discharges, thereby has limited the range of application of conventional radio frequency plasma spray gun body, more is not suitable for the requirement that the large tracts of land material surface is handled.
The utility model has been introduced same flat plasma generator, be adopt a plurality of discharge cells integrated, the corresponding power supply of each discharge tube, the discharge frequency of each power supply is 6.78MHz, this radio-frequency power supply power consumption only is tens watts to tens watts, simple in structure, be easier to install and a plurality of plasma discharge tube has constituted a kind of plasma generator of novel many shower nozzles.
The utility model content
In order to achieve the above object, the utility model discloses same flat plasma generator, comprise a plurality of radio-frequency power supplies and a plurality of plasma torch etc., it is characterized by: a plurality of plasma torch are mounted on the planar bracket, the spout of a plurality of jet pipes constitutes a horizontal plane, wherein each plasma torch is to be made of the quartz ampoule of a clad metal pipe electrode and a round loop electrode outside the quartz ampoule spout, one end of the pipe electrode that quartz ampoule coated is in quartz ampoule, the other end is outside pipe, radio-frequency power supply respectively with quartz ampoule in interior electrode be connected with its external electrode, the metal tube electrode that quartz ampoule coated is connected with an air inlet pipe, the other end of air inlet pipe is to be connected with gas cylinder by gas pressure reducer, ionization generates plasma when the end of gas by the metal tube electrode that quartz ampoule coated, and by the spout ejection of quartz ampoule.
Described same flat plasma generator comprises a plurality of radio-frequency power supplies and a plurality of plasma torch etc., and it is characterized by: each plasma torch is mounted on the planar bracket, and the spout of a plurality of jet pipes is on same horizontal plane.
Described same flat plasma generator, comprise a plurality of radio-frequency power supplies and a plurality of plasma torch etc., it is characterized by: each plasma torch is to be made of the quartz ampoule of a clad metal pipe electrode and an outer round loop electrode of quartz ampoule spout, the metal tube end that quartz ampoule coated is the 3-10 millimeter from the distance range of the spout of quartz ampoule, and the outer metal ring electrode of quartz ampoule spout is to be coated on outside the quartz ampoule near the spout place.
Described same flat plasma generator, comprise a plurality of radio-frequency power supplies and a plurality of plasma torch etc., it is characterized by: the internal and external electrode of each quartz ampoule is connected with a radio-frequency power supply respectively, and the frequency of radio-frequency power supply is 6.78MHz, and power bracket is 10-30W.
Described same flat plasma generator, comprise a plurality of radio-frequency power supplies and a plurality of plasma torch etc., it is characterized by: the metal tube electrode that quartz ampoule coated is connected with an air inlet pipe, and the other end of air inlet pipe is to be connected with gas cylinder by gas pressure reducer, and gas is to adopt argon gas.
Described same flat plasma generator, comprise a plurality of radio-frequency power supplies and a plurality of plasma torch etc., it is characterized by: be ionized the formation plasma at gas during by metal tube electrode nozzle exit area that quartz ampoule coated, and form the plasma line that outwards sprays.
The utility model provides same flat plasma generator, compares with other type plasma generator, and its advantage is: (1), and a plurality of unit RF plasma generator is integrated can to produce larger area glow discharge; (2), equipment is easy to install, and is fit to the surface treatment to the large tracts of land heat-sensitive material.
Main application of the present utility model is: to surface treatments such as the surface modification of plane heat-sensitive material, surface clean.
Embodiment
Fig. 1 is the same flat plasma generator of a utility model embodiment side-looking structure chart.
Fig. 2 is the same flat plasma generator of the utility model embodiment plan structure figure.
Fig. 3 is the utility model embodiment individual plasma generator architecture cross-sectional schematic.
See also Fig. 1, Fig. 2 and Fig. 3, a plurality of plasma torch 103 are mounted on plane 100 supports, the spout of a plurality of jet pipes 103 is at same horizontal plane, wherein each plasma torch 103 is to be made of quartz ampoule, at metal tube electrode 105 of quartz ampoule 103 interior coatings, be provided with a round loop electrode 104 outside the end of quartz ampoule 103, the internal and external electrode 105 of quartz ampoule 103 is connected with two outputs of a radio-frequency power supply 101 by stube cable 102 respectively with being connected; The other end of metal tube electrode 105 outside quartz ampoule is connected with an air inlet pipe 109, the other end of air inlet pipe 109 is to be connected with gas cylinder 107 by gas pressure reducer 108, ionization generates plasma 106 when metal tube electrode 105 end that gas coats by quartz ampoule 103, and this plasma 106 is by the spout ejection of quartz ampoule 103.
In conjunction with specific embodiments the utility model is described with reference to the accompanying drawings above, yet, need to prove, for a person skilled in the art, under the situation that does not break away from spirit and scope of the present utility model, can make many changes and modification to the foregoing description, these changes and modification all drop in the claim restricted portion of the present utility model.
Claims (6)
1. the utility model discloses same flat plasma generator, comprise a plurality of radio-frequency power supplies and a plurality of plasma torch etc., it is characterized by: a plurality of plasma torch are mounted on the planar bracket, the spout of a plurality of jet pipes constitutes a horizontal plane, wherein each plasma torch is to be made of the quartz ampoule of a clad metal pipe electrode and a round loop electrode outside the quartz ampoule spout, one end of the pipe electrode that quartz ampoule coated is in quartz ampoule, the other end is outside pipe, radio-frequency power supply respectively with quartz ampoule in interior electrode be connected with its external electrode, the metal tube electrode that quartz ampoule coated is connected with an air inlet pipe, the other end of air inlet pipe is to be connected with gas cylinder by gas pressure reducer, ionization generates plasma when the end of gas by the metal tube electrode that quartz ampoule coated, and by the spout ejection of quartz ampoule.
2. same flat plasma generator as claimed in claim 1, comprise a plurality of radio-frequency power supplies and a plurality of plasma torch etc., it is characterized by: each plasma torch is mounted on the planar bracket, and the spout of a plurality of jet pipes is on same horizontal plane.
3. same flat plasma generator as claimed in claim 1, comprise a plurality of radio-frequency power supplies and a plurality of plasma torch etc., it is characterized by: each plasma torch is to be made of the quartz ampoule of a clad metal pipe electrode and an outer round loop electrode of quartz ampoule spout, the metal tube end that quartz ampoule coated is the 3-10 millimeter from the distance range of the spout of quartz ampoule, and the outer metal ring electrode of quartz ampoule spout is to be coated on outside the quartz ampoule near the spout place.
4. same flat plasma generator as claimed in claim 1, comprise a plurality of radio-frequency power supplies and a plurality of plasma torch etc., it is characterized by: the internal and external electrode of each quartz ampoule is connected with a radio-frequency power supply respectively, and the frequency of radio-frequency power supply is 6.78MHz, and power bracket is 10-30W.
5. same flat plasma generator as claimed in claim 1, comprise a plurality of radio-frequency power supplies and a plurality of plasma torch etc., it is characterized by: the metal tube electrode that quartz ampoule coated is connected with an air inlet pipe, the other end of air inlet pipe is to be connected with gas cylinder by gas pressure reducer, and gas is to adopt argon gas.
6. same flat plasma generator as claimed in claim 1, comprise a plurality of radio-frequency power supplies and a plurality of plasma torch etc., it is characterized by: be ionized the formation plasma at gas during by metal tube electrode nozzle exit area that quartz ampoule coated, and form the plasma line that outwards sprays.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2010201874950U CN201674722U (en) | 2010-05-12 | 2010-05-12 | Same plane plasma generator |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2010201874950U CN201674722U (en) | 2010-05-12 | 2010-05-12 | Same plane plasma generator |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN201674722U true CN201674722U (en) | 2010-12-15 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2010201874950U Expired - Fee Related CN201674722U (en) | 2010-05-12 | 2010-05-12 | Same plane plasma generator |
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| CN (1) | CN201674722U (en) |
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102244970A (en) * | 2010-05-12 | 2011-11-16 | 中国科学院嘉兴微电子仪器与设备工程中心 | Multi-nozzle radio frequency plasma generator |
| CN102637633A (en) * | 2011-06-17 | 2012-08-15 | 京东方科技集团股份有限公司 | Array substrate manufacturing method and system |
| CN103606507A (en) * | 2013-11-26 | 2014-02-26 | 苏州市奥普斯等离子体科技有限公司 | Plasma processing device for sheet material |
| CN103731969A (en) * | 2013-12-24 | 2014-04-16 | 苏州市奥普斯等离子体科技有限公司 | Hollow cathode spaying gun device |
| CN103747607A (en) * | 2013-12-24 | 2014-04-23 | 苏州市奥普斯等离子体科技有限公司 | Far zone plasma spray gun device |
| CN110248458A (en) * | 2019-06-19 | 2019-09-17 | 大连理工大学 | A kind of more microplasma body electric discharge devices of radio frequency |
-
2010
- 2010-05-12 CN CN2010201874950U patent/CN201674722U/en not_active Expired - Fee Related
Cited By (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102244970A (en) * | 2010-05-12 | 2011-11-16 | 中国科学院嘉兴微电子仪器与设备工程中心 | Multi-nozzle radio frequency plasma generator |
| CN102637633A (en) * | 2011-06-17 | 2012-08-15 | 京东方科技集团股份有限公司 | Array substrate manufacturing method and system |
| CN102637633B (en) * | 2011-06-17 | 2015-08-12 | 京东方科技集团股份有限公司 | A kind of manufacturing method of array base plate and system |
| CN103606507A (en) * | 2013-11-26 | 2014-02-26 | 苏州市奥普斯等离子体科技有限公司 | Plasma processing device for sheet material |
| CN103606507B (en) * | 2013-11-26 | 2016-08-17 | 苏州市奥普斯等离子体科技有限公司 | A kind of sheet material plasma processing apparatus |
| CN103731969A (en) * | 2013-12-24 | 2014-04-16 | 苏州市奥普斯等离子体科技有限公司 | Hollow cathode spaying gun device |
| CN103747607A (en) * | 2013-12-24 | 2014-04-23 | 苏州市奥普斯等离子体科技有限公司 | Far zone plasma spray gun device |
| CN110248458A (en) * | 2019-06-19 | 2019-09-17 | 大连理工大学 | A kind of more microplasma body electric discharge devices of radio frequency |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| C17 | Cessation of patent right | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20101215 Termination date: 20130512 |