CN208902127U - Optical fiber micro-displacement sensor - Google Patents
Optical fiber micro-displacement sensor Download PDFInfo
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- CN208902127U CN208902127U CN201821605096.4U CN201821605096U CN208902127U CN 208902127 U CN208902127 U CN 208902127U CN 201821605096 U CN201821605096 U CN 201821605096U CN 208902127 U CN208902127 U CN 208902127U
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Abstract
The utility model provides a kind of optical fiber micro-displacement sensor, can solve current displacement sensor in high temperature, strong electromagnetic environment measurement inaccuracy using the utility model, is easy the problems such as failing.The utility model is achieved by following technical proposals: setting the collimation lens there are two symmetrical centre on top panel in the shell of measurement part, the upper fixed tooth plate reflecting mirror (2) as displacement measurement element is fixedly connected on the downside of top panel, the lower moving tooth plate reflecting mirror (3) of tooth socket on the corresponding upper tooth plate angle of reflection of angle of reflection tooth top is equipped in the lower section of upper fixed tooth plate reflecting mirror, and their sawtooth is symmetrical in opposite directions, in hanging dislocation rake tooth coupling distribution, each tooth is reflected back incident ray parallel direction by constituting total reflection mirror at 90 degree of two mirror surfaces；It is fixedly connected with drive rod below lower moving tooth plate reflecting mirror, spring is fixed below the spring base and rectangle frame between plate by drive rod by spring base.With electromagnetism interference, the higher feature of measurement accuracy.
Description
Technical field
The utility model relates to a kind of optical fibre displacement sensors for measuring micro-displacement, in particular for high precision and large measuring range survey
Measure the optical fibre displacement sensor of micro-displacement.
Background technique
In the positioning system of nano-micro level, it is desirable that sensor can detect the information of small power and displacement.It uses at present
It is more in the principle of micro-displacement detection, such as optical profile type, optical displacement sensor, inductive displacement transducer, capacitive displacement
Multiple types such as sensor, condenser type and piezoelectric type and ultrasonic type displacement sensor etc., but these are mostly inconvenient for machine
Acquisition of the device people to small multi-dimensional force and displacement information.Displacement sensor is also known as linear transducer, is with widest
One of sensor.Existing high accuracy displacement sensor measuring range is narrow, the problems such as vulnerable to electromagnetic interference.Wherein, condenser type position
The general range of displacement sensor all very littles are less than 1mm, and precision is especially high, is generally used for thickness measure.But it needs in advance to quilt
The electric conductivity for surveying body is demarcated to be measured again, and several kilo hertzs to tens kilo hertzs of response frequency are differed, and range is usually mm grades, essence
Degree is usually μm grade.Ultrasonic sensor belongs to non-contact measurement sensor, and precision is high, but due to having between sound wave pulse
There are certain intervals, therefore, it can only realize displacement detecting quasi real time, and can not achieve real-time displacement measurement.Inductance type position
Displacement sensor is typically all to be made of fixed coil and movable core by its structure and principle, when iron core in coil along axial direction
When movement, detection displacement is achieved the purpose that by the variation of coil inductance.But this kind of sensor is for large displacement measurement, general
All over the problems such as that there is measurement ranges is narrow, and structure is more complex, and application is limited.With optic fibre manufacturing technology rapid development and
The further investigation of fiber optic materials, optical fiber sensing technology are also developed rapidly.Fibre optical sensor and traditional various kinds of sensors
It compares, with high sensitivity, anti-electromagnetic interference capability is strong, corrosion-resistant, explosion-proof, structure is simple, small in size, light-weight etc. a series of
Unique advantage.Therefore it has fabulous application prospect in the fields such as miniature instrument and device.Present fibre optical sensor there has been
Circular waveguide is not used only in new intension, i.e. transducing part, and also using optical waveguide technique, integrated electronic technology will be a variety of different
Optical waveguide and optical fiber together as one, form so-called optical waveguide sensor.Using light as the sharpest edges of sensing and conductive medium
It is that transmission capacity is big, electromagnetism interference, and chemical inertness and softness possessed by the optical fiber (optical waveguide) as light carrier
Property.Intellectual material and intelligence structure and large scale structure monitoring, high voltage, high-intensity magnetic field, nuclear radiation and in terms of,
Fibre optical sensor is competitive measurement means.By development these years, fibre optical sensor is in scientific research and industrial application
In occupied important one seat, the fundamental difference being mainly due between optical fiber and plain conductor.This area
Be not to have the advantages that following some uniquenesses due to fibre optical sensor: (1) anti-electromagnetic interference capability is strong, is electrically insulated, is corrosion-resistant, this
Matter safety.Due to fibre optical sensor be using light wave transmissions information, optical fiber be again be electrically insulated, corrosion resistant transmission medium, and
Securely and reliably, this can be convenient it to be effectively used for strong electromagnetics such as various large-scale electromechanics, petrochemical industry, mine and easy
The adverse circumstances such as combustion, explosive.(2) high sensitivity.The sensitivity of fibre optical sensor is better than general sensor, wherein some is
By theoretical proof, some experiments verify that, such as the measurement underwater sound, acceleration, radiation, magnetic field physical quantity fibre optical sensor,
It measures the fibre optic chemical sensor of various gas concentrations and measures the optical fiber biosensor etc. of various biomass.(3) light-weight,
Small in size, deflection.Optical fiber in addition to have the characteristics that it is light-weight, small in size other than there are also deflection the advantages of, therefore can use
Different shapes, various sizes of various sensors are made in optical fiber.This is conducive to aerospace and answering in narrow space
With.4) measurement object is extensive.Have the different various physical quantitys of measurement of performance at present, the fibre optical sensor of chemical quantity makes at the scene
With.5) small on measured medium influence, be conducive to apply in the field that medicine, health etc. have complex environment.6 convenient for multiple
With convenient for networking.Be conducive to form telemtry net and optical fiber sensing network with existing optical communication technique.7 is at low cost.There are many kinds
The cost of the fibre optical sensor of class will be significantly lower than existing same type of sensor.The sensitivity of fibre optical sensor is than traditional sensors
Much higher times, and it can be worked normally under many particular surroundings such as high voltage, big noise, high temperature, strong corrosive, may be used also
To cooperate with optical fiber remote sensing, telemetry, optical fiber remote sensing system and Ogticai Fiber Based Telemetering System are formed.Fibre optical sensor is surveyed for practical
The main problem of amount is prolonged drift effect, and the drift effect of fibre optical sensor is from the decaying of optical fiber transmission line, coupling
Device and beam splitter characteristic is not perfect, light source output is unstable and the influence of detector etc..Two fiber end faces are if there is longitudinal position
There is power deviation in shifting, lateral displacement or two fiber axis, can all coupling efficiency be made to decline.Optical fiber can generate under micro-bend state
The coupling of Mode Coupling, especially guided mode and radiation mode, so that fiber transmission attenuation be made to increase.General optical fibre displacement sensor
It is the displacement that object is monitored using the Doppler effect of light, object has to put down for the reflecting surface of light, can increase light
Reflection efficiency, while needing the direction of the movement of object relatively simple, it not swing.Most microbend sensor is all handle
The variation of external field is converted into the variation of the born pressure of optical fiber, they are also called pressure-type and is slightly variable sensor.Due to optical fiber
Output intensity it is very sensitive to the variation of bending degree, therefore the measurement sensitivity of micro-bend type optical fibre displacement sensor compares
Height, optical path are fully sealed, and are not easily affected by environmental factors, but he is very high to the micro-bend device requirement of transmitting strain.Because of light
The optical signal of fine end output is usually faint and there is the signal being centainly distorted, thus photodetector must satisfy it is very high
Characteristic requirements.Due to the sensitivity characteristic of optical fiber itself, so that fibre optical sensor is more harsh to external operating environment requirements,
It makes slow progress always in practical problem, remains in laboratory stage mostly.It is originally some when optical fiber is in bending state
Except the light radiation to optical fiber that can be propagated inside straight optical fiber, optical power loss is generated.Bending loss of optical fiber problem is one
Complicated theoretical question.Research work to bending loss of optical fiber mainly passes through two approach of ray theory and pattern theory
Come what is analyzed.Most documents are that slave pattern point of theory analyzes fibre loss.Traditional optical fiber micro-bending passes
Sensor generally can only measuring force, displacement, stress, strain etc. size, can not know the direction of these parameters.For this purpose, existing skill
Art devises a kind of differential optical fiber micro bend sensor, and specific structure is that two deformations are fixedly mounted respectively on two skeletons
Tooth, two deformation teeth composition staggered relatively on different skeletons deform tooth pair, form two fibre strain devices.Two optical fiber point
It is not placed in the backlash of two pairs of bent forming teeth pair.By increasing elastic device, the limit of deformation tooth and fiber orientation slot, improve
The performance of differential optical fiber micro bend sensor, and the shift position limit of design variations tooth prevents optical fiber by pinch off, deficiency
Place is that measurement displacement range is smaller, and measurement accuracy is not high.
Utility model content
Technical problem to be solved in the utility model is that place, provides a kind of amount in view of the shortcomings of the prior art
Cheng Geng great, measurement accuracy is higher, electromagnetism interference, optical fiber type micro-displacement sensor resistant to high temperature, to solve current displacement sensing
The problems such as device measures inaccuracy under high temperature environment, is easy failure.
The above-mentioned purpose of the utility model can be reached by the following measures, a kind of optical fiber micro-displacement sensor, comprising:
Signal modulation part, displacement measurement part and signal demodulation part, it is characterised in that: in the shell of measurement part on top panel
If being fixedly connected with the upper fixed tooth plate reflection as displacement measurement element on the downside of top panel there are two the collimation lens of symmetrical centre
Mirror is equipped with the lower moving tooth plate reflection of tooth socket on the corresponding upper tooth plate angle of reflection of angle of reflection tooth top in the lower section of upper fixed tooth plate reflecting mirror
Mirror, and their sawtooth is symmetrical in opposite directions, in hanging dislocation rake tooth coupling distribution, each tooth at 90 degree of two mirror surfaces by constituting
Total reflection mirror reflects back incident ray parallel direction；It is fixedly connected with drive rod below lower moving tooth plate reflecting mirror, drive rod passes through
Spring is fixed below the spring base and rectangle frame between plate by spring base.
The utility model has the advantages that compared with the prior art.
Range is bigger.One group of parallel tooth plate is reflected microscope group by the utility model, is separately mounted in sensing cavity, is passed through
The displacement of drive rod makes two parallel tooth plate reflecting mirror distances change, and displacement can be obtained by measurement lens distance variation
Parameter.It is movable plate that the pressing plate anamorphoser of two pieces of triangle tooth sockets, which is constituted one of, and another piece is fixed plate, when upper lower tooth plate
When reflecting mirror is by ambient pressure or change in displacement, the distance of reflecting mirror can generate variation between two plates, then will lead to and pass through tooth plate
Between optical path length change Δ L, optical signal reaches the time change Δ t of photodetector, wherein Δ L=V Δ t, V
For the light velocity.To which optical path phase difference changesThe relationship of phase changing capacity and displacement are as follows:Since f is frequency modulating signal, keep constant constant, when displacement is excessive, f Δ L/V > 1, so
The optical signal phase variation of optical path can be more than 2 π, and phase comparator can only detect the phase within the scope of 2 π, actually measured phase
Position isTo generating loss of data, range of displacement measurement is excessive to lead to phase hit in order to eliminate, and can increase light letter
Number period, i.e. for reduction modulating frequency f when it being made to meet maximum displacement, modulated optical signal passes through optical path phase changing capacity
Less than 2 π f Δ L/V < 1, so changing the displacement measurement that modulation of source frequency is able to achieve wider range by driving signal.Lower tooth
The number of teeth n of plate, displacement variable Z, there are relationships: Δ L=2nZ with optical path length variation delta L, so the position of sensor
Shift measurement range meetsIn view of phase comparator detection frequency is between 100M~2.7G and linear work area
Between 120 ° of π/3 of width or so, number of teeth n=4, so maximum detection range Z < (1/3) * 3*108/(2*4*100*106), about
125mm or so.In linear work area, phase comparator precision is higher than 0.05%, it is possible to obtain higher displacement measurement essence
Degree.The result shows that: the measurement range of displacement increases with the number of teeth and is declined, increases with the period of light modulating signal and increase, set
The sensor measurement range of meter is up to 0~125mm relative measurement error less than 0.05%.
Electromagnetism interference.The utility model sets the standard there are two symmetrical centre on the upper surface of the rectangle frame of measurement part plate
Straight lens, top panel downside is fixedly connected with the upper fixed tooth plate reflecting mirror 2 as displacement measurement element, in upper fixed tooth plate reflecting mirror
2 lower section is equipped with the lower moving tooth plate reflecting mirror 3 of tooth socket on the corresponding upper tooth plate angle of reflection of angle of reflection tooth top, and their sawtooth is opposite
Symmetrically, in hanging dislocation rake tooth coupling distribution, displacement, pressure minor change can be measured, optical power is maintained into light
Fine internal, optical signal substantially electromagnetism interference, electromagnetic environment without influence, can all exempt from the phase of optical signal, the parameters such as amplitude
Except the interference of ambient enviroment, and sensitivity is very high, anti-electromagnetic interference capability with higher.
Measurement accuracy is higher.The optical signal that the utility model signal modulation part is modulated is divided into two by fiber coupling
Beam, a branch of optical signal directly reach reference light of the pd1 photodetector 12 as optic fibre light path by fiber optic loop displacement sensor
Road, and another beam optical signal is incident on the lower tooth socket angle of reflection of lower moving tooth plate reflecting mirror 3 by the first collimation lens 1, by straight
Line reflects the upper tooth socket angle of reflection of the supreme fixed tooth plate reflecting mirror 2 of back reflection, and incident light is by upper fixed tooth plate reflecting mirror 2 under
After multiple tooth angle multiple reflections between 3 plate of moving tooth plate reflecting mirror, the triangle tooth sockets of two pressure plates is by the periodically continued folding of generation
Bending reflected light is penetrated, the light pd2 electric explorer 13 connected by optical fiber is incident on from the second collimation lens 7.When shift length is protected
When holding constant, the distance that two-beam passes through is steady state value, therefore the optical signal phase difference for reaching photodetector is kept constant；
After measurement object moves, change by the light beam distance of drive rod sensor, therefore reach the letter of photodetection
Number phase also accordingly changes, and can calculate reflecting mirror generation by comparing the signal phase difference variation of two photodetectors
The problems such as moving distance solves current displacement sensor and measures inaccuracy under high temperature environment, is easy failure.Sensitivity is single
Twice of one transducer sensitivity, and the size and Orientation of pressure, stress, strain, displacement, acceleration can be measured, or
Person judges increaseing or decreasing for temperature.
High temperature resistant.The utility model is using the optical element of low thermal coefficient of expansion as displacement measurement element quartz glass heat
559 degree of deformation temperature, as higher performance preferred embodiment, sapphire main component AL can be used2O3, operating temperature can be to 1300
Degree is used as optical element, and using the optical signal of modulation, by fiber coupling, it is divided into two beams, a branch of directly to be reached by fiber optic loop
Photodetector, and in addition a branch of optical signals fiber optic collimator mirror passes through two groups of reflecting mirrors of inside cavity, then reaches again another
An outer photodetector realizes that biography is combined into one with what is felt, and small in size, anti-electromagnetic capability is strong, chemical stability is good, resistance to height
Intensity, that is, amplitude, phase, frequency, polarization and the wave of temperature, the refractive index of adjustable parameter many cases such as optical fiber, propagation constant, light wave
It is long etc., it may be achieved the measurement etc. to small physics variable quantity.Inductance and capacitive displacement sensor are solved due to its own
Realization principle be easy to occur failing and measuring in temperature and electromagnetic interference inaccurate phenomenon.Sensor section is without electronics
Temperature drift is not present in component, the problems such as failure under high temperature.
The utility model has that electromagnetism interference, high temperature resistant, high sensitivity, range are big, are easily installed and can supervise in real time
The advantages that control, can be used for the measurement such as displacement, power and acceleration.
Detailed description of the invention
Fig. 1 is the utility model optical fiber micro-displacement sensor measuring principle figure
Fig. 2 is the overall system structure figure of the utility model optical fiber micro-displacement sensor.
In figure: 1 collimation lens, 2 reflecting mirrors, 3 reflecting mirrors, 4 springs, 5 cavitys, 6 drive rods, 7 collimation lenses, 8 driving letters
Number source, 9 light sources, 10 couplers, 11 fiber optic loop displacement sensors, 12 photodetectors, 13 photodetectors, 14 phase bit comparisons
Device, 15 voltage signal collectors, 16 processors.
Specific embodiment
Refering to fig. 1, Fig. 2.In the embodiment described below, a kind of optical fiber micro-displacement sensor, comprising: signal modulation portion
Point, displacement measurement part and signal demodulation part, wherein measurement portion point includes the cavity 5 surrounded by rectangle frame, from rectangle frame bottom
Portion is inserted into the drive rod 6 of cavity 5, is set with one group of parallel lower moving tooth plate reflecting mirror 3, conduct that drive rod 6 connects firmly by spring 4
The upper fixed tooth plate reflecting mirror 2 of displacement measurement element and setting above lower 3 backside of moving tooth plate reflecting mirror on, be symmetrical with
First collimation lens 1 and the second collimation lens 7 on 2 both sides of fixed tooth plate reflecting mirror, lower moving tooth plate reflecting mirror 3 and upper fixed tooth plate
2 sawtooth of reflecting mirror is symmetrically uniformly distributed in hanging dislocation rake tooth coupling in opposite directions；Luminous intensity therein is carried out by signal modulation part
After modulation, the optical signal modulated is divided into two beams by fiber coupling, wherein a branch of optical signal passes through fiber optic loop displacement sensor
Periodic continuous bend optical signal is generated, fiber optic loop 11 generates certain optical path, directly arrival pd1 photodetector 12
Reference path all the way as signal demodulation part.And displacement measurement is passed through by another beam optical signal of signal modulation partial modulation
The first collimation lens 1 in part enters tooth plate and reflects microscope group, reaches another pd2 electric explorer by the second collimation lens 7
13。
After measurement object moves, changes by the light beam distance of drive rod sensor, reach photodetection
Signal phase also accordingly change, by phase comparator 14 compare two photodetectors signal phase difference change, resolve
The moving distance that tooth plate reflecting mirror occurs out is detected by phase and obtains micro-displacement amount.
Instantly when moving tooth plate reflecting mirror 3 and upper fixed tooth plate reflecting mirror 2 are by ambient pressure or change in displacement, drive rod 6
Displacement produce the reflecting mirror sawtooth distance between two parallel 2 liang of plates of lower moving tooth plate reflecting mirror 3 and upper fixed tooth plate reflecting mirror can
Changing obtains be connected coupler 10 and the corresponding phase change of 13 optical signal of pd2 photodetector generation.
Measurement portion point includes: the collimation lens set on the upper surface of rectangle frame plate there are two symmetrical centre, and top panel downside is solid
It is associated with the upper fixed tooth plate reflecting mirror 2 as displacement measurement element, is equipped with angle of reflection tooth in the lower section of upper fixed tooth plate reflecting mirror 2
The lower moving tooth plate reflecting mirror 3 of tooth socket on the corresponding upper tooth plate angle of reflection in top, and their sawtooth is symmetrical in opposite directions, in hanging dislocation triangle
Tooth coupling distribution；Drive rod 6 is fixedly connected with below lower moving tooth plate reflecting mirror 3, spring 4 is fixed on institute by spring base by drive rod 6
It states below spring base and rectangle frame between plate.The optical signal that signal modulation part is modulated is divided into two beams by fiber coupling,
A branch of optical signal directly reaches reference path of the pd1 photodetector 12 as optic fibre light path by fiber optic loop displacement sensor,
And another beam optical signal is incident on the lower tooth socket angle of reflection of lower moving tooth plate reflecting mirror 3 by the first collimation lens 1, is rolled over by straight line
The upper tooth socket angle of reflection of the supreme fixed tooth plate reflecting mirror 2 of back reflection is penetrated, incident light passes through upper fixed tooth plate reflecting mirror 2 and lower movable tooth
After multiple tooth angle multiple reflections between 3 plate of plate reflecting mirror, the light pd2 electrical resistivity survey connected by optical fiber is incident on from the second collimation lens 7
Survey device 13；Displacement measurement part is according between lower moving tooth plate reflecting mirror 3 and upper fixed tooth plate reflecting mirror 2, by ambient pressure or survey
After measuring object movement, change by the beam phase that the light beam distance that 6 pickup arm change in displacement of drive rod generates occurs, in comparison
State the signal phase difference of two photodetectors, demodulate change in displacement, calculate the generation of two tooth plate reflecting mirrors moving distance or
The phase changing capacity of detection detects the micro-displacement amount of measurement object by phase.
Refering to Fig. 2.Since the phase of optical signal has the phase that periodically will lead to variation when change in displacement is excessive super
A cycle is crossed, so that the displacement of corresponding 2 π phase changes, therefore, the displacement model measured as needed occur in displacement detecting data
Size is enclosed, driving signal 8 increases modulation of source frequency cycle, reduces modulation of source signal frequency f, so that measurement portion is divided into displacement and passes
The phase change of optical path is less than 2 π in the maximum measurement range of sensor displacement.Similarly, small range of in detection sensor
The frequency modulating signal f of light source can be increased when displacement, realize phase large change within the scope of sensor thin tail sheep.
Signal solution tune part includes source driving signal 8 in sequential series, light source 9 and coupler 10, and driving signal 8 generates
Modulated signal light source 9 is driven, adjust driving current defeated people's light intensity light source 9 be adjusted and issue central wavelength
Light is transmitted by large core fiber, and by being modulated when fiber optic loop displacement sensor, output intensity is with fiber optic loop displacement sensor
Change in displacement and change, light intensity is converted into voltage signal, to increase modulation of source frequency cycle, increases the modulated signal of light source
There is the displacement of corresponding 2 π phase changes in the displacement detecting data that measurement portion is divided into displacement sensor in frequency f, generate one
Sin (the 2 π ft) modulated optical signal of t moment to 9 modulated optical signal frequency f of light source.Modulated optical signal is divided into after coupler 10
Two beams, a branch of to enter pd1 photodetector 12 by fiber optic loop displacement sensor 11, modulated optical signal reaches pd1 photodetection
The distance of device 12 be it is constant, the modulated optical signal frequency f that photodetector 12 receives is constant, 9 phase of facing light sourcesIt produces
Life one is expressed as constantPhase difference, this beam optic fibre light path is known as reference path；In addition a branch of by surveying
Amount part is that the optical path of displacement sensor reaches pd2 photodetector 13, and displacement sensor changes in 16 position of drive rod
When will lead to measurement optical fiber light path change, so as to cause phaseIt changes, pd2 photodetector 13 connects at this time
The signal received can be expressed asThis beam optic fibre light path is known as optical path.
10 1 road optical fiber of coupler passes through the series connection pd1 photodetector 12 of fiber optic loop displacement sensor 11, another way optical fiber
Go deep into the first collimation lens 1, the second collimation lens 7 passes through outlet optical fiber series connection pd2 photodetector 13, pd1 photodetector
12 and pd2 photodetector 13 is connected the positive input and reverse input end of demodulation part phase comparator 14 respectively.Phase
Comparator 14 realized by common phase comparable chip, is inputted as 2 modulated signals, is exported as voltage value, voltage swing and phase
Potential difference is at corresponding relationship.The phase difference of optical path and two optical signals of reference path is transformed into voltage letter by phase comparator 14
Number, in the linear operating region of phase comparator, voltage is directly proportional to phase difference.
Demodulation part includes: that demodulation part includes: 14 output end of phase comparator, 15 He of voltage signal collector in sequential series
Processor 16, the two-way modulated signal that phase comparator 14 acquires reference path and optical path obtains, detection are compared in two-way
PhasePhaseThe analog-digital converter AD acquisition being connected by phase comparator 14 and its arm processor realize phase signal
Calculation process, by phase signal be converted into displacement signal output.Relationship meets between them:
Wherein f is frequency modulating signal, and n is the lower tooth plate number of teeth, and V is light speed in air.Arm processor, can according to this relational expression
With output shift quantity Z.
Whole system realizes the detection of displacement using phase-detection method, and the specific working principle is as follows: the light warp that light source 9 issues
Overcoupling device is divided into two beams, a branch of directly directly to reach photodetector 12 by fiber optic loop displacement sensor 11, in addition a branch of
Light, in the 3 direct multiple reflections of rake tooth of upper fixed tooth plate reflecting mirror 2 and lower moving tooth plate reflecting mirror, then is passed through by the first collimation lens 1
It crosses the second collimation lens 7 and enters photodetector 13, by the optical signal phase for measuring photodetector 12 and photodetector 13
Position variation can obtain the variation of the distance between fixed tooth plate reflecting mirror 2 and lower moving tooth plate reflecting mirror 3, pass through phase and position
Shifting relationship is to realize displacement measurement.
The utility model embodiment is described in detail above, specific embodiment used herein is practical to this
It is novel to be expounded, the method for the above embodiments are only used to help understand the utility model；Meanwhile for ability
The those skilled in the art in domain have change based on the idea of the present invention in specific embodiments and applications
Place, in conclusion the content of the present specification should not be construed as a limitation of the present invention.
Claims (10)
1. a kind of optical fiber micro-displacement sensor, comprising: signal modulation part, displacement measurement part and signal demodulation part, it is special
Sign is: setting the collimation lens there are two symmetrical centre on top panel in the shell of measurement part, is fixedly connected on the downside of top panel
As the upper fixed tooth plate reflecting mirror (2) of displacement measurement element, angle of reflection tooth is equipped in the lower section of upper fixed tooth plate reflecting mirror (2)
The lower moving tooth plate reflecting mirror (3) of tooth socket on the corresponding upper tooth plate angle of reflection in top, and their sawtooth is symmetrical in opposite directions, in hanging dislocation three
The coupling distribution of angle tooth, each tooth are reflected back incident ray parallel direction by constituting total reflection mirror at 90 degree of two mirror surfaces；
It is fixedly connected with drive rod (6) below lower moving tooth plate reflecting mirror (3), spring (4) is fixed on the bullet by spring base by drive rod (6)
Below spring abutment and rectangle frame between plate.
2. optical fiber micro-displacement sensor as described in claim 1, it is characterised in that: lower moving tooth plate reflecting mirror (3) and upper fixation
Tooth plate reflecting mirror (2) sawtooth is symmetrically uniformly distributed in hanging dislocation rake tooth coupling in opposite directions.
3. optical fiber micro-displacement sensor as described in claim 1, it is characterised in that: measurement portion point includes being surrounded by rectangle frame
Cavity (5), from the drive rod (6) of rectangle frame bottom insertion cavity (5), one group connected firmly by spring (4) suit drive rod (6)
Parallel lower moving tooth plate reflecting mirror (3), the upper fixed tooth plate reflecting mirror (2) as displacement measurement element and setting is lower dynamic
On above tooth plate reflecting mirror (3) backside, it is symmetrical with first collimation lens (1) and second on fixed tooth plate reflecting mirror (2) both sides
Collimation lens (7).
4. optical fiber micro-displacement sensor as described in claim 1, it is characterised in that: by another beam of signal modulation partial modulation
Optical signal enters tooth plate by the first collimation lens (1) in displacement measurement part and reflects microscope group, passes through the second collimation lens (7)
Reach another pd2 electric explorer (13).
5. optical fiber micro-displacement sensor as described in claim 1, it is characterised in that: signal demodulation part includes in sequential series
Source driving signal (8), light source (9) and coupler (10), the modulated signal that source driving signal (8) generates drive light source (9)
It is dynamic, generate onetModulated optical signal of the moment to light source (9) frequency modulating signal.
6. optical fiber micro-displacement sensor as claimed in claim 5, it is characterised in that: optical fiber passes through optical fiber to coupler (10) all the way
Ring displacement sensor (11) is connected pd1 photodetector (12), and another way optical fiber gos deep into the first collimation lens (1), the second collimation
Lens (7) pass through outlet optical fiber series connection pd2 photodetector (13), pd1 photodetector (12) and pd2 photodetector (13)
The positive input and reverse input end of series connection demodulation part phase comparator (14) respectively.
7. optical fiber micro-displacement sensor as claimed in claim 6, it is characterised in that: modulated optical signal is after coupler (10)
It is divided into two beams, a branch of to enter pd1 photodetector (12) by fiber optic loop displacement sensor (11), modulated optical signal reaches pd1
The distance of photodetector (12) is constant.
8. optical fiber micro-displacement sensor as described in claim 1, it is characterised in that: demodulation part includes: phase comparator
(14) output end voltage signal collector in sequential series (15) and processor (16), phase comparator (14) pass through phase comparator
(14) connected analog-digital converter AD is acquired and its phase signal difference is become displacement signal and exported by arm processor.
9. optical fiber micro-displacement sensor as described in claim 1, it is characterised in that: the optical signal that signal modulation part is modulated
It is divided into two beams by fiber coupling, a branch of optical signal directly reaches pd1 photodetector by fiber optic loop displacement sensor (11)
(12) as the reference path of optic fibre light path, and by the first collimation lens (1) to be incident on lower moving tooth plate anti-for another beam optical signal
The lower tooth socket angle of reflection for penetrating mirror (3), it is saturating from the second collimation after multiple total reflection mirror multiple reflections on two parallel tooth plates
Mirror (7) is incident on the light pd2 electric explorer (13) connected by optical fiber.
10. optical fiber micro-displacement sensor as claimed in claim 5, it is characterised in that: the light that light source (9) issues passes through coupler
Be divided into two beams, it is a branch of directly directly to reach photodetector (12) by fiber optic loop displacement sensor (11), in addition light beam by
First collimation lens (1) in upper fixed tooth plate reflecting mirror (2) and the direct multiple reflections of lower moving tooth plate reflecting mirror (3) rake tooth, then
Enter photodetector (13) by the second collimation lens (7), passes through measurement photodetector (12) and photodetector (13)
Optical signal phase variation just obtain the distance between fixed tooth plate reflecting mirror (2) and lower moving tooth plate reflecting mirror (3) variation, reality
Existing displacement measurement.
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Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109141491A (en) * | 2018-09-29 | 2019-01-04 | 成都凯天电子股份有限公司 | Pressure-type optical fiber is slightly variable sensor |
| CN112683152A (en) * | 2020-12-18 | 2021-04-20 | 重庆理工大学 | Contact type micro-displacement detection device |
| CN113091991A (en) * | 2021-03-16 | 2021-07-09 | 中电建南方建设投资有限公司 | Slip casting pressure monitoring system based on OFDR and Flex sensor |
| CN114088122A (en) * | 2021-11-19 | 2022-02-25 | 中国工商银行股份有限公司 | Sensor, sensing device and information processing system |
-
2018
- 2018-09-29 CN CN201821605096.4U patent/CN208902127U/en active Active
Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109141491A (en) * | 2018-09-29 | 2019-01-04 | 成都凯天电子股份有限公司 | Pressure-type optical fiber is slightly variable sensor |
| CN112683152A (en) * | 2020-12-18 | 2021-04-20 | 重庆理工大学 | Contact type micro-displacement detection device |
| CN112683152B (en) * | 2020-12-18 | 2022-04-22 | 重庆理工大学 | Contact type micro-displacement detection device |
| CN113091991A (en) * | 2021-03-16 | 2021-07-09 | 中电建南方建设投资有限公司 | Slip casting pressure monitoring system based on OFDR and Flex sensor |
| CN113091991B (en) * | 2021-03-16 | 2023-01-03 | 中电建南方建设投资有限公司 | Slip casting pressure monitoring system based on OFDR and Flex sensor |
| CN114088122A (en) * | 2021-11-19 | 2022-02-25 | 中国工商银行股份有限公司 | Sensor, sensing device and information processing system |
| CN114088122B (en) * | 2021-11-19 | 2024-04-16 | 中国工商银行股份有限公司 | Sensor, sensing device and information processing system |
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