CN203579208U - Direct drive type micro motion platform - Google Patents
Direct drive type micro motion platform Download PDFInfo
- Publication number
- CN203579208U CN203579208U CN201320679056.5U CN201320679056U CN203579208U CN 203579208 U CN203579208 U CN 203579208U CN 201320679056 U CN201320679056 U CN 201320679056U CN 203579208 U CN203579208 U CN 203579208U
- Authority
- CN
- China
- Prior art keywords
- drive type
- voice coil
- coil motor
- straight line
- support member
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 230000033001 locomotion Effects 0.000 title abstract description 11
- 230000005693 optoelectronics Effects 0.000 claims description 7
- 230000005540 biological transmission Effects 0.000 abstract description 4
- 230000005489 elastic deformation Effects 0.000 abstract description 3
- 238000004519 manufacturing process Methods 0.000 description 8
- 238000005516 engineering process Methods 0.000 description 6
- 238000000034 method Methods 0.000 description 4
- 238000006073 displacement reaction Methods 0.000 description 3
- 238000013459 approach Methods 0.000 description 2
- 230000001133 acceleration Effects 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 238000012545 processing Methods 0.000 description 1
- 230000006641 stabilisation Effects 0.000 description 1
- 238000011105 stabilization Methods 0.000 description 1
Images
Landscapes
- Micromachines (AREA)
Abstract
The utility model discloses a direct drive type micro motion platform. The direct drive type micro motion platform comprises a base and a working table arranged on the base. Three sets of linear modules are arranged in the working table and fixed to the base in a circumferential array mode, and the included angle between every two sets of linear modules is 60 degrees. Each linear module comprises a voice coil motor and a mobile mechanism connected with the voice coil motor, wherein the voice coil motor is arranged on the base, and the mobile mechanism is connected to the working table. One side of each linear module is electrically connected with one grating ruler, and the other side of each linear module is electrically connected with one photoelectric switch. The direct drive type micro motion platform is simple in structure, the motion inertia of the micro motion platform is reduced, elastic deformation and gaps generated in an intermediate transmission mechanism link are eliminated, efficiency and accuracy are high, and response is fast.
Description
Technical field
The utility model relates to accurate measurement and manufacturing technology field, particularly relates to a kind of direct-drive type micromotion platform.
Background technology
Along with the advanced manufacturing technologies such as Precision Manufacturing Technology, microelectric technique and Numeric Control Technology develop rapidly, high-speed, high-precision demand is day by day urgent, becomes the main trend of current advanced manufacturing technology development.The positioning precision of precision micro-displacement workbench and stroke range directly have influence on precision and the working ability of production and processing.Meanwhile, have influence on the efficiency of manufacturing process equipment the stabilization time of the speed of precision micro-displacement workbench, acceleration and shutdown process, become the important indicator of workbench.
Traditional micro-displacement work table adopts the forms such as electric rotating machine, leading screw or pinion and rack more, becomes rectilinear motion drive workbench to move by electric rotating machine by screw mandrel.Its volume and weight is all very large, is not suitable for being applied in the occasion in little space, and because intermediate link leading screw has maximum (top) speed restriction and backlass, is difficult to realize high speed, high-precision location.
Summary of the invention
Based on this, be necessary the problem for the shortcoming of prior art, a kind of direct-drive type micromotion platform is provided, simple in structure, reduced the movement inertia of micromotion platform, eliminate intermediate transmission mechanism link elastic deformation and gap, to have efficiency high, precision is high, responds fast feature.
A kind of direct-drive type micromotion platform, comprise base and be located at the workbench on described base, in described workbench, be provided with three groups of straight line modules, three groups of straight line modules are circumference array form and are fixed on described base, and described in every two groups, the angle of straight line module is 60 degree; The travel mechanism that described straight line module comprises voice coil motor and is connected with described voice coil motor, described voice coil motor is located on described base, and described travel mechanism is connected in described workbench; One side of described straight line module is electrically connected with grating scale, and the opposite side of described straight line module is electrically connected with optoelectronic switch.
Therein in an embodiment, described travel mechanism comprises connecting plate, support member, folder and duplex bearing, described connecting plate is connected in described voice coil motor, described support member is located on described connecting plate, described support member is L-shaped, described folder is positioned on described support member, and described bearing is located at position between described support member and folder.
In an embodiment, offer one first deep-slotted chip breaker on described support member therein, offer the second deep-slotted chip breaker on described folder, described the first deep-slotted chip breaker is relative with the second deep-slotted chip breaker position, forms an accepting groove, and described duplex bearing is positioned at described accepting groove.
In an embodiment, described duplex bearing comprises the bearing of two overlapping storings therein, and the central part of two bearings is penetrated with axle center.
In an embodiment, described voice coil motor comprises stator and mover therein, and described stator is fixed on described base, and described mover is connected in described travel mechanism, and during voice coil motor work, described mover drives described travel mechanism moving linearly back and forth.
In an embodiment, described workbench is flexibly connected with described base therein, and described workbench is circular, the top transparent of described workbench.
In an embodiment, described folder is secured by bolts in described support member therein.
Above-mentioned direct-drive type micromotion platform, simple in structure, be easy to process and assemble, low cost of manufacture, has saved the intermediate transmission links such as electric rotating machine and leading screw, has simplified frame for movement, the median error that does not have mechanical connection to bring.Three groups of straight line modules form equilateral triangle and drive, and symmetrical structure is stable, and adopts grating scale as position feedback elements, movable information directly feeds back, detect the position of micromotion platform, and by described optoelectronic switch, undertaken spacingly, guaranteed the accuracy and runtime of micromotion platform.
Accompanying drawing explanation
Fig. 1 is structural perspective of the present utility model.
Fig. 2 is structure top view of the present utility model.
Fig. 3 is straight line modular structure schematic diagram of the present utility model.
The force direction figure that Fig. 4 produces for three straight line modules of the present utility model.
Another force direction figure that Fig. 5 produces for three straight line modules of the present utility model.
Below the explanation of the utility model parts sign flag:
The specific embodiment
For further understanding feature of the present utility model, technological means and the specific purposes that reach, function, resolve advantage of the present utility model and spirit, by below in conjunction with accompanying drawing and the specific embodiment, detailed description of the present utility model being further understood.
A kind of direct-drive type micromotion platform, comprises base 10 and is located at the workbench 20 on base 10.Workbench 20 is flexibly connected with base 10, can on base 10, move.This workbench 20 is circular, and the top of workbench 20 is transparent.
In workbench 20, be provided with 30, three groups of straight line modules 30 of three groups of straight line modules and be circumference array form and be fixed on base 10, and the angle of every two groups of straight line modules 30 is 60 degree.Three straight line modules 30 operate produced force direction and form an equilateral triangle.This symmetrical configuration and stable, simple in structure.
The travel mechanism 32 that this straight line module 30 comprises voice coil motor 31 and is connected with voice coil motor 31.Voice coil motor 31 is located on base 10, and travel mechanism 32 is connected in workbench 20, and this travel mechanism 32 is double-deck bearing arrangement, has eliminated gap, and precision is higher.Voice coil motor 31 comprises stator 311 and mover 312, and stator 311 is fixed on base 10, and mover 312 is connected in travel mechanism 32.When voice coil motor 31 is worked, this mover 312 drives travel mechanism 32 moving linearly back and forth.
On support member 322, offer one first deep-slotted chip breaker, on folder 323, offer the second deep-slotted chip breaker.The first deep-slotted chip breaker is relative with the second deep-slotted chip breaker position, forms an accepting groove 325, and duplex bearing 324 is positioned at described accepting groove 325.Duplex bearing 324 comprises the bearing of two overlapping storings, and the central part of two bearings is penetrated with axle center 326.During assembling, first two bearings is installed on this axle center 326, then by bolt, described folder 323 and support member 322 is locked, can realize the extruding to duplex bearing 324, eliminate gap, realize high accuracy.
One side of straight line module 30 is electrically connected with grating scale 40, by grating scale 40, straight line module 30 is operated and is fed back.The opposite side of straight line module 30 is electrically connected with optoelectronic switch 50, by optoelectronic switch 50, to straight line module 30, carries out positive and negative spacing.
When using the utility model, after energising, described voice coil motor 31 comes into operation, and the mover 312 of voice coil motor 31 drives described travel mechanism 32 to operate, and then travel mechanism 32 drives described workbench 20 to move.As shown in Figure 4, when three groups of straight line modules 30 operate, described travel mechanism 32 simultaneously to away from or stator 311 directions that approach voice coil motor 31 move, workbench 20 rotates.As shown in Figure 5, when the travel mechanism 32 of arbitrary two groups of straight line modules 30 wherein simultaneously to away from or stator 311 directions that approach voice coil motor 31 move, and the travel mechanism 32 of another straight line module 30 being to approaching or moving away from stator 311 directions of voice coil motor 31, workbench 20 running that is in line.Finally, the running direction of the travel mechanism 32 of the utility model by changing three groups of straight line modules 30 reaches control work rotation or rectilinear motion.
In sum, above-mentioned direct-drive type micromotion platform, simple in structure, be easy to process and assemble, low cost of manufacture, elastic deformation and the gap of eliminating intermediate transmission mechanism link, reduced the movement inertia of micromotion platform.Three groups of straight line modules 30 form equilateral triangle and drive, and symmetrical structure is stable, and adopts grating scale 40 as position feedback elements, movable information directly feeds back, and detects the position of micromotion platform, and is undertaken spacing by described optoelectronic switch 50, have efficiency high, precision is high, responds fast feature.
The above embodiment has only expressed several embodiment of the present utility model, and it describes comparatively concrete and detailed, but can not therefore be interpreted as the restriction to the utility model the scope of the claims.It should be pointed out that for the person of ordinary skill of the art, without departing from the concept of the premise utility, can also make some distortion and improvement, these all belong to protection domain of the present utility model.Therefore, the protection domain of the utility model patent should be as the criterion with claims.
Claims (7)
1. a direct-drive type micromotion platform, it is characterized in that, comprise base and be located at the workbench on described base, in described workbench, be provided with three groups of straight line modules, three groups of straight line modules are circumference array form and are fixed on described base, and described in every two groups, the angle of straight line module is 60 degree; The travel mechanism that described straight line module comprises voice coil motor and is connected with described voice coil motor, described voice coil motor is located on described base, and described travel mechanism is connected in described workbench; One side of described straight line module is electrically connected with grating scale, and the opposite side of described straight line module is electrically connected with optoelectronic switch.
2. direct-drive type micromotion platform according to claim 1, it is characterized in that, described travel mechanism comprises connecting plate, support member, folder and duplex bearing, described connecting plate is connected in described voice coil motor, described support member is located on described connecting plate, described support member is L-shaped, and described folder is positioned on described support member, and described bearing is located at position between described support member and folder.
3. direct-drive type micromotion platform according to claim 2, it is characterized in that, on described support member, offer one first deep-slotted chip breaker, on described folder, offer the second deep-slotted chip breaker, described the first deep-slotted chip breaker is relative with the second deep-slotted chip breaker position, form an accepting groove, described duplex bearing is positioned at described accepting groove.
4. direct-drive type micromotion platform according to claim 2, is characterized in that, described duplex bearing comprises the bearing of two overlapping storings, and the central part of two bearings is penetrated with axle center.
5. direct-drive type micromotion platform according to claim 1, it is characterized in that, described voice coil motor comprises stator and mover, described stator is fixed on described base, described mover is connected in described travel mechanism, during voice coil motor work, described mover drives described travel mechanism moving linearly back and forth.
6. direct-drive type micromotion platform according to claim 1, is characterized in that, described workbench is flexibly connected with described base, and described workbench is circular, the top transparent of described workbench.
7. direct-drive type micromotion platform according to claim 2, is characterized in that, described folder is secured by bolts in described support member.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201320679056.5U CN203579208U (en) | 2013-10-31 | 2013-10-31 | Direct drive type micro motion platform |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201320679056.5U CN203579208U (en) | 2013-10-31 | 2013-10-31 | Direct drive type micro motion platform |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN203579208U true CN203579208U (en) | 2014-05-07 |
Family
ID=50577179
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201320679056.5U Expired - Lifetime CN203579208U (en) | 2013-10-31 | 2013-10-31 | Direct drive type micro motion platform |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN203579208U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103551862A (en) * | 2013-10-31 | 2014-02-05 | 东莞固高自动化技术有限公司 | Direct-driven micromotion platform |
-
2013
- 2013-10-31 CN CN201320679056.5U patent/CN203579208U/en not_active Expired - Lifetime
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103551862A (en) * | 2013-10-31 | 2014-02-05 | 东莞固高自动化技术有限公司 | Direct-driven micromotion platform |
| CN103551862B (en) * | 2013-10-31 | 2016-05-25 | 东莞固高自动化技术有限公司 | Direct-drive type micromotion platform |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN103551862B (en) | Direct-drive type micromotion platform | |
| CN105729141A (en) | Precise linear two-dimensional double-drive workbench based on control of open numerical-control system | |
| CN108214423B (en) | Motion platform for OLED detection equipment | |
| CN103021473A (en) | Direct drive type motion decoupling high-accuracy servo platform | |
| CN101924450B (en) | Fixed voice coil motor direct drive type X-Y micro-vibration platform | |
| CN203045153U (en) | Micron order four-axis motion platform | |
| CN203092144U (en) | Coaxial macro-micro composite linear motion platform device | |
| CN101607372A (en) | But the bilinear permanent magnet synchronous motor horizontally-feeding platform of offsetting influence of gravity | |
| CN204179920U (en) | Linear electric motors module | |
| CN105071686A (en) | Symmetrical double-feet driving offresonance piezoelectric linear motor | |
| CN112372319A (en) | Linear motor driven movable beam gantry numerical control machine tool for counteracting magnetic attraction | |
| CN103383526B (en) | The dynamic stacking workbench of a kind of thick essence | |
| CN103350351B (en) | Desktop three axle planer-type microfabrication lathe | |
| CN203579208U (en) | Direct drive type micro motion platform | |
| CN102736574B (en) | High-speed and high-precision modularized direct-drive motor assembly line framework and construction method | |
| CN107979223B (en) | Portable high-acceleration macro-micro motion platform | |
| CN202028928U (en) | Low-loading and high-speed XY working table | |
| CN202648619U (en) | Moving bridge type coordinate measuring machine added with bottom portion light source moving part | |
| CN104526693A (en) | Single-machine multi-station stamping manipulator | |
| CN214291926U (en) | Linear motor driven movable beam gantry numerical control machine tool for counteracting magnetic attraction | |
| CN203800781U (en) | Synchronously-driven positioning platform | |
| CN203827153U (en) | Linear motor and motor platform | |
| CN204175897U (en) | High speed and precision slide unit | |
| CN105334610A (en) | Automatic control microscope objective platform driven by permanent magnet synchronous linear motors | |
| CN207732608U (en) | A kind of Three Degree Of Freedom locating platform |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CX01 | Expiry of patent term | ||
| CX01 | Expiry of patent term |
Granted publication date: 20140507 |