CN103551862B - Direct-drive type micromotion platform - Google Patents
Direct-drive type micromotion platform Download PDFInfo
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- CN103551862B CN103551862B CN201310527775.XA CN201310527775A CN103551862B CN 103551862 B CN103551862 B CN 103551862B CN 201310527775 A CN201310527775 A CN 201310527775A CN 103551862 B CN103551862 B CN 103551862B
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- Prior art keywords
- straight line
- voice coil
- support member
- workbench
- coil motor
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
- B25H—WORKSHOP EQUIPMENT, e.g. FOR MARKING-OUT WORK; STORAGE MEANS FOR WORKSHOPS
- B25H1/00—Work benches; Portable stands or supports for positioning portable tools or work to be operated on thereby
- B25H1/14—Work benches; Portable stands or supports for positioning portable tools or work to be operated on thereby with provision for adjusting the bench top
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- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Linear Motors (AREA)
- Micromachines (AREA)
Abstract
The invention discloses a kind of direct-drive type micromotion platform, comprise base and be located at the workbench on base. In workbench, be provided with three groups of straight line modules, three groups of straight line modules are circumference array form and are fixed on base, and the angle of every two groups of straight line modules is 60 degree. The travel mechanism that straight line module comprises voice coil motor and is connected with voice coil motor, voice coil motor is located on base, and travel mechanism is connected in workbench. One side of straight line module is electrically connected with grating scale, and opposite side is electrically connected with optoelectronic switch. The present invention is simple in structure, has reduced the movement inertia of micromotion platform, eliminates the elastic deformation of intermediate transmission mechanism link and gap, efficiency is high, and precision is high, and response is fast.
Description
Technical field
The present invention relates to accurate measurement and manufacturing technology field, particularly relate to a kind of direct-drive type micromotion platform.
Background technology
Along with the advanced manufacturing technologies such as Precision Manufacturing Technology, microelectric technique and Numeric Control Technology develop rapidly, high-speed, high-precision demand is day by day urgent, becomes the main trend of current advanced manufacturing technology development. The positioning precision of precision micro-displacement workbench and stroke range directly have influence on precision and the working ability of production and processing. Meanwhile, have influence on the efficiency of manufacturing process equipment the stabilization time of the speed of precision micro-displacement workbench, acceleration and shutdown process, become the important indicator of workbench.
Traditional micro-displacement work table adopts the forms such as electric rotating machine, leading screw or pinion and rack more, becomes rectilinear motion drive workbench to move by electric rotating machine by screw mandrel. Its volume and weight is all very large, is not suitable for being applied in the occasion in little space, and because intermediate link leading screw has maximum (top) speed restriction and backlass, is difficult to realize high speed, high-precision location.
Summary of the invention
Based on this, be necessary the problem for the shortcoming of prior art, a kind of direct-drive type micromotion platform is provided, simple in structure, reduced the movement inertia of micromotion platform, eliminate intermediate transmission mechanism link elastic deformation and gap, to have efficiency high, precision is high, responds fast feature.
A kind of direct-drive type micromotion platform, comprise base and be located at the workbench on described base, in described workbench, be provided with three groups of straight line modules, three groups of straight line modules are circumference array form and are fixed on described base, and described in every two groups, the angle of straight line module is 60 degree; The travel mechanism that described straight line module comprises voice coil motor and is connected with described voice coil motor, described voice coil motor is located on described base, and described travel mechanism is connected in described workbench; One side of described straight line module is electrically connected with grating scale, and the opposite side of described straight line module is electrically connected with optoelectronic switch.
Therein in an embodiment, described travel mechanism comprises connecting plate, support member, folder and duplex bearing, described connecting plate is connected in described voice coil motor, described support member is located on described connecting plate, described support member is L-shaped, described folder is positioned on described support member, and described bearing is located at position between described support member and folder.
In an embodiment, offer one first deep-slotted chip breaker on described support member therein, offer the second deep-slotted chip breaker on described folder, described the first deep-slotted chip breaker is relative with the second deep-slotted chip breaker position, forms an accepting groove, and described duplex bearing is positioned at described accepting groove.
In an embodiment, described duplex bearing comprises the bearing of two overlapping storings therein, and the central part of two bearings is penetrated with axle center.
In an embodiment, described voice coil motor comprises stator and mover therein, and described stator is fixed on described base, and described mover is connected in described travel mechanism, and when voice coil motor work, described mover drives described travel mechanism moving linearly back and forth.
In an embodiment, described workbench is flexibly connected with described base therein, and described workbench is circular, the top transparent of described workbench.
In an embodiment, described folder is secured by bolts in described support member therein.
Above-mentioned direct-drive type micromotion platform, simple in structure, be easy to process and assemble, low cost of manufacture, has saved the intermediate transmission such as electric rotating machine and leading screw link, has simplified frame for movement, the median error that does not have mechanical connection to bring. Three groups of straight line modules form equilateral triangle and drive, and symmetrical structure is stable, and adopts grating scale as position feedback elements, movable information directly feeds back, detect the position of micromotion platform, and undertaken spacingly by described optoelectronic switch, ensured the accuracy and runtime of micromotion platform.
Brief description of the drawings
Fig. 1 is structural perspective of the present invention.
Fig. 2 is structure top view of the present invention.
Fig. 3 is straight line modular structure schematic diagram of the present invention.
The force direction figure that Fig. 4 produces for three straight line modules of the present invention.
Another force direction figure that Fig. 5 produces for three straight line modules of the present invention.
Below parts sign flag explanation of the present invention:
Base 10, workbench 20, straight line module 30, voice coil motor 31, stator 311, mover 312, travel mechanism 32, connecting plate 321, support member 322, folder 323, duplex bearing 324, accepting groove 325, axle center 326, grating scale 40, optoelectronic switch 50.
Detailed description of the invention
For further understanding feature of the present invention, technological means and the specific purposes that reach, function, resolve the advantages and spirit of the present invention, by below in conjunction with accompanying drawing and detailed description of the invention, detailed description of the present invention being further understood.
A kind of direct-drive type micromotion platform, comprises base 10 and is located at the workbench 20 on base 10. Workbench 20 is flexibly connected with base 10, can on base 10, move. This workbench 20 is circular, and the top of workbench 20 is transparent.
In workbench 20, be provided with 30, three groups of straight line modules 30 of three groups of straight line modules and be circumference array form and be fixed on base 10, and the angle of every two groups of straight line modules 30 is 60 degree. Three straight line modules 30 operate produced force direction and form an equilateral triangle. This symmetrical configuration and stable, simple in structure.
The travel mechanism 32 that this straight line module 30 comprises voice coil motor 31 and is connected with voice coil motor 31. Voice coil motor 31 is located on base 10, and travel mechanism 32 is connected in workbench 20, and this travel mechanism 32 is double-deck bearing arrangement, has eliminated gap, and precision is higher. Voice coil motor 31 comprises stator 311 and mover 312, and stator 311 is fixed on base 10, and mover 312 is connected in travel mechanism 32. In the time that voice coil motor 31 is worked, this mover 312 drives travel mechanism 32 moving linearly back and forth.
Travel mechanism 32 comprises connecting plate 321, support member 322, folder 323 and duplex bearing 324. Connecting plate 321 is connected in the mover 312 of voice coil motor 31, and support member 322 is fixed on connecting plate 321, and support member 322 is L-shaped. Folder 323 is positioned on support member 322, is secured by bolts on support member 322. Bearing is located at position between support member 322 and folder 323.
On support member 322, offer one first deep-slotted chip breaker, on folder 323, offer the second deep-slotted chip breaker. The first deep-slotted chip breaker is relative with the second deep-slotted chip breaker position, forms an accepting groove 325, and duplex bearing 324 is positioned at described accepting groove 325. Duplex bearing 324 comprises the bearing of two overlapping storings, and the central part of two bearings is penetrated with axle center 326. When assembling, first two bearings is installed on this axle center 326, then by bolt, described folder 323 and support member 322 is locked, can realize the extruding to duplex bearing 324, eliminate gap, realize high accuracy.
One side of straight line module 30 is electrically connected with grating scale 40, by grating scale 40, straight line module 30 is operated and is fed back. The opposite side of straight line module 30 is electrically connected with optoelectronic switch 50, carries out positive and negative spacing by optoelectronic switch 50 to straight line module 30.
In the time that use is of the present invention, after energising, described voice coil motor 31 comes into operation, and the mover 312 of voice coil motor 31 drives described travel mechanism 32 to operate, and then travel mechanism 32 drives described workbench 20 to move. As shown in Figure 4, in the time that three groups of straight line modules 30 operate, described travel mechanism 32 simultaneously to away from or stator 311 directions that approach voice coil motor 31 move, workbench 20 rotates. As shown in Figure 5, when the travel mechanism 32 of arbitrary two groups of straight line modules 30 wherein simultaneously to away from or stator 311 directions that approach voice coil motor 31 move, and the travel mechanism 32 of another straight line module 30 being to approaching or moving away from stator 311 directions of voice coil motor 31, workbench 20 running that is in line. Finally, the running direction of the travel mechanism 32 of the present invention by changing three groups of straight line modules 30 reaches control work rotation or rectilinear motion.
In sum, above-mentioned direct-drive type micromotion platform, simple in structure, be easy to process and assemble, low cost of manufacture, elastic deformation and the gap of eliminating intermediate transmission mechanism link, reduced the movement inertia of micromotion platform. Three groups of straight line modules 30 form equilateral triangle and drive, and symmetrical structure is stable, and adopts grating scale 40 as position feedback elements, movable information directly feeds back, and detects the position of micromotion platform, and is undertaken spacing by described optoelectronic switch 50, have efficiency high, precision is high, responds fast feature.
The above embodiment has only expressed several embodiment of the present invention, and it describes comparatively concrete and detailed, but can not therefore be interpreted as the restriction to the scope of the claims of the present invention. It should be pointed out that for the person of ordinary skill of the art, without departing from the inventive concept of the premise, can also make some distortion and improvement, these all belong to protection scope of the present invention. Therefore, the protection domain of patent of the present invention should be as the criterion with claims.
Claims (5)
1. a direct-drive type micromotion platform, is characterized in that, comprises base and is located at the work on described basePlatform, is provided with three groups of straight line modules in described workbench, three groups of straight line modules are circumference array form and are fixed on instituteState on base, and described in every two groups, the angle of straight line module is 60 degree; Described straight line module comprises voice coil loudspeaker voice coil electricityMachine and the travel mechanism being connected with described voice coil motor, described voice coil motor is located on described base, described in moveActuation mechanism is connected in described workbench; One side of described straight line module is electrically connected with grating scale, described straight lineThe opposite side of module is electrically connected with optoelectronic switch, and described travel mechanism comprises connecting plate, support member, folderAnd duplex bearing, described connecting plate is connected in described voice coil motor, and described support member is located on described connecting plate,Described support member is L-shaped, and described folder is positioned on described support member, described bearing be located at described support member andPosition between folder; Described voice coil motor comprises stator and mover, and described stator is fixed on described base,Described mover is connected in described travel mechanism, and when voice coil motor work, described mover drives described travel mechanismMoving linearly back and forth.
2. direct-drive type micromotion platform according to claim 1, is characterized in that, on described support member, opensBe provided with one first deep-slotted chip breaker, on described folder, offer the second deep-slotted chip breaker, described the first deep-slotted chip breaker and the second arcShape groove position is relative, forms an accepting groove, and described duplex bearing is positioned at described accepting groove.
3. direct-drive type micromotion platform according to claim 1, is characterized in that, described duplex bearing comprisesThe bearing of two overlapping storings, the central part of two bearings is penetrated with axle center.
4. direct-drive type micromotion platform according to claim 1, is characterized in that, described workbench and instituteState base and be flexibly connected, described workbench is circular, the top transparent of described workbench.
5. direct-drive type micromotion platform according to claim 1, is characterized in that, described folder passes through spiral shellBolt is fixed on described support member.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201310527775.XA CN103551862B (en) | 2013-10-31 | 2013-10-31 | Direct-drive type micromotion platform |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201310527775.XA CN103551862B (en) | 2013-10-31 | 2013-10-31 | Direct-drive type micromotion platform |
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| CN103551862A CN103551862A (en) | 2014-02-05 |
| CN103551862B true CN103551862B (en) | 2016-05-25 |
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| CN201310527775.XA Active CN103551862B (en) | 2013-10-31 | 2013-10-31 | Direct-drive type micromotion platform |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109129349A (en) * | 2018-09-19 | 2019-01-04 | 燕山大学 | Six degree of freedom posture adjustment docking platform |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104385261B (en) * | 2014-09-30 | 2016-04-27 | 西安电子科技大学 | There is translation device and the method for space three-freedom |
| CN107092276B (en) * | 2017-06-26 | 2019-08-16 | 深圳市欧瑞博电子有限公司 | Scalable knob intelligence regulating switch |
| CN108406341A (en) * | 2018-03-21 | 2018-08-17 | 洛阳瑞极光电科技有限公司 | A kind of high-precision voice coil motor revolving platform |
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| CN101349870A (en) * | 2008-08-07 | 2009-01-21 | 上海微电子装备有限公司 | Two-freedom degree electric machine actuating mechanism and corresponding six-freedom degree micromotion platform |
| CN101924450A (en) * | 2010-07-22 | 2010-12-22 | 华中科技大学 | A kind of fixed voice coil motor direct drive type X-Y micro-vibration platform |
| CN103345126A (en) * | 2013-06-29 | 2013-10-09 | 中国科学院光电技术研究所 | Three degree-of-freedom nanometer positioning micro-motion wafer stage |
| CN203579208U (en) * | 2013-10-31 | 2014-05-07 | 东莞固高自动化技术有限公司 | Direct drive type micro motion platform |
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| JP2011244608A (en) * | 2010-05-19 | 2011-12-01 | Nikon Corp | Linear motor, mobile device, exposure device, device manufacturing method, and flat panel display manufacturing method |
| JP5910982B2 (en) * | 2011-11-01 | 2016-04-27 | 株式会社ニコン | MOBILE DEVICE, EXPOSURE APPARATUS, AND DEVICE MANUFACTURING METHOD |
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Patent Citations (4)
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| CN101349870A (en) * | 2008-08-07 | 2009-01-21 | 上海微电子装备有限公司 | Two-freedom degree electric machine actuating mechanism and corresponding six-freedom degree micromotion platform |
| CN101924450A (en) * | 2010-07-22 | 2010-12-22 | 华中科技大学 | A kind of fixed voice coil motor direct drive type X-Y micro-vibration platform |
| CN103345126A (en) * | 2013-06-29 | 2013-10-09 | 中国科学院光电技术研究所 | Three degree-of-freedom nanometer positioning micro-motion wafer stage |
| CN203579208U (en) * | 2013-10-31 | 2014-05-07 | 东莞固高自动化技术有限公司 | Direct drive type micro motion platform |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN109129349A (en) * | 2018-09-19 | 2019-01-04 | 燕山大学 | Six degree of freedom posture adjustment docking platform |
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| CN103551862A (en) | 2014-02-05 |
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