CN207732608U - A kind of Three Degree Of Freedom locating platform - Google Patents
A kind of Three Degree Of Freedom locating platform Download PDFInfo
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- CN207732608U CN207732608U CN201820086859.2U CN201820086859U CN207732608U CN 207732608 U CN207732608 U CN 207732608U CN 201820086859 U CN201820086859 U CN 201820086859U CN 207732608 U CN207732608 U CN 207732608U
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- 238000004804 winding Methods 0.000 claims abstract description 15
- 229910000831 Steel Inorganic materials 0.000 claims description 30
- 239000010959 steel Substances 0.000 claims description 30
- 238000006073 displacement reaction Methods 0.000 claims description 14
- 230000003068 static effect Effects 0.000 claims description 11
- 238000004891 communication Methods 0.000 claims description 10
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical group [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 claims description 4
- 238000009434 installation Methods 0.000 claims 2
- 238000004519 manufacturing process Methods 0.000 abstract description 8
- 230000005672 electromagnetic field Effects 0.000 description 4
- 238000010586 diagram Methods 0.000 description 3
- 230000003014 reinforcing effect Effects 0.000 description 3
- 238000004026 adhesive bonding Methods 0.000 description 2
- 238000011161 development Methods 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 239000000853 adhesive Substances 0.000 description 1
- 230000001070 adhesive effect Effects 0.000 description 1
- 230000007246 mechanism Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
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Abstract
The utility model discloses a kind of Three Degree Of Freedom locating platform, including moving platform and silent flatform.Moving platform includes mounting base, subpart and rotary shaft.Silent flatform includes platform base, the stationary part being arranged on platform base, the X-direction the linear guide being arranged in parallel on platform base, the X-direction guide rail slide block, the X-direction pinboard that are arranged in X-direction the linear guide, and it is arranged in parallel in the Y-direction the linear guide on X-direction pinboard, the Y-direction guide rail slide block being arranged in the linear guide in the Y direction, rotation pinboard, and the support of bearing being arranged on rotation pinboard, the bearing being arranged on the support of bearing.Bearing is set in rotary shaft, and subpart is correspondingly arranged with stationary part and constitutes electromagnetic drive module.The utility model use rectangular-ambulatory-plane structure positioning platform, stator coil use concentratred winding, simplify the structure of locating platform, improve power density, it can be achieved that long stroke precision positioning, can be used for the manufacturing precision positionings of IC.
Description
Technical Field
The utility model belongs to the technical field of the precision drive, concretely relates to three degree of freedom positioning platform.
Background
The development of the current fields of IC manufacture and the like is increasingly prosperous, and the requirement of modern industry on a high-speed and high-precision positioning platform is accelerated.
At present, the three-degree-of-freedom positioning platform is widely applied to the field of manufacturing and testing. The motion of three degrees of freedom of the positioning platform is mainly realized by a mechanical structure with three degrees of freedom which is stacked and driven by a structure of 'rotating motor + screw rod'.
However, due to the limitation of creep and rotation driving modes of the screw rod, the existing three-degree-of-freedom motion platform is slow in response, poor in precision, small in effective load and large in size, and the development of the manufacturing industry and other industries is greatly restricted.
SUMMERY OF THE UTILITY MODEL
The utility model aims to solve the technical problem that a novel electromagnetic drive's three degree of freedom positioning platform is provided, can realize displacement along the X axle in the XY plane, the displacement and the plane internal rotation motion of Y axle, its positioning accuracy is high, small, the mechanism is simple, stability is high.
In order to solve the technical problem, the utility model adopts the technical scheme that the three-degree-of-freedom positioning platform comprises a movable platform and a static platform, wherein the movable platform comprises a mounting seat, a rotor part arranged on the mounting seat and a rotating shaft;
the quiet platform includes:
a platform base;
a stator portion disposed on the stage base;
the X-direction linear guide rail is arranged on the platform base in parallel, and the X-direction guide rail sliding block and the X-direction adapter plate are arranged on the X-direction linear guide rail;
the Y-direction linear guide rail is arranged on the X-direction adapter plate in parallel, and the Y-direction guide rail sliding block and the rotary adapter plate are arranged on the Y-direction linear guide rail;
the bearing support is arranged on the rotary adapter plate, and the bearing is arranged on the bearing support;
the bearing is sleeved on the rotating shaft, and the rotor part and the stator part are correspondingly arranged to form an electromagnetic driving module.
Furthermore, the utility model discloses still provide following subsidiary technical scheme.
Preferably, the X-direction linear guide rails at least comprise two X-direction guide rail sliding blocks which are respectively connected onto the two X-direction linear guide rails in a sliding mode, the two X-direction adapter plates are respectively arranged on the two X-direction guide rail sliding blocks, and the reinforcing strips are connected onto the two X-direction adapter plates which are arranged in parallel through bolts.
Preferably, the Y-direction linear guide rails include at least two Y-direction linear guide rails, the Y-direction linear guide rails are perpendicular to the X-direction linear guide rails, the two Y-direction guide rail sliders are respectively connected to the two Y-direction linear guide rails in a sliding manner, and two ends of the rotary adapter plate are respectively arranged on the two Y-direction guide rail sliders.
Preferably, the stator part comprises four stator cores arranged in a shape like a Chinese character 'hui', and the rotor part comprises S-level magnetic steel and N-level magnetic steel which are arranged corresponding to the stator.
Preferably, coil windings are embedded in the stator cores, and concentrated winding structures are adopted.
Preferably, a groove is formed in the center of the mounting seat, and the magnetic steel positioning block is fixedly mounted in the groove.
Preferably, the S-level magnetic steel and the N-level magnetic steel are fixed at the groove of the mounting seat and are arranged in a staggered mode.
Preferably, the electromagnetic driving module includes an X-direction electromagnetic driving module and a Y-direction electromagnetic driving module.
Preferably, the three-degree-of-freedom positioning platform further comprises a positioning platform control system.
Preferably, the positioning platform control system comprises a PC, a CAN bus communication module, an X-direction DSP controller, a Y-direction DSP controller, an X-direction laser displacement sensor, and a Y-direction laser displacement sensor.
Preferably, the PC gives a control instruction, and sends the control instruction to the X-direction DSP controller through the CAN bus communication module, so that the X-direction electromagnetic driving module moves along the X direction; the signal is sent to a Y-direction DSP controller to realize the movement of the Y-direction electromagnetic driving module along the Y direction; when control instructions are sent to the X-direction DSP controller and the Y-direction DSP controller at the same time according to rules, the four electromagnetic driving modules in the shape of a Chinese character hui are driven to cooperatively move, and therefore the rotary motion of the positioning platform can be achieved.
Compared with the prior art, the utility model has the advantages of: the utility model discloses a three degree of freedom positioning platform relies on linear electromagnetic drive principle and slider, slide rail, the electromagnetic field that the coil winding circular telegram of the quiet platform of positioning platform produced with move the S level magnet steel on the platform, the permanent magnet magnetic field interact of N level magnet steel produces drive power to the drive moves the platform and carries out the motion of three degree of freedom in the XY plane, is a new motion decoupling zero device, has broken through the restriction that current three degree of freedom positioning platform simple motion linear motion module and rotating electrical machines pile up.
The utility model discloses a return font structure positioning platform, stator coil adopt concentrated winding, have simplified positioning platform's structure greatly, have improved power density, can realize the precision positioning of long stroke.
The utility model discloses three degree of freedom positioning platform, flexible good, simple manufacture can be used to the accurate positioning of IC manufacturing. The application of straight line electromagnetic drive principle and linear slide rail slider has greatly simplified the utility model discloses three degree of freedom positioning platform's mechanical structure.
Drawings
Fig. 1 is a schematic perspective view of the three-degree-of-freedom positioning platform of the present invention.
Fig. 2 is a schematic structural diagram of the three-degree-of-freedom positioning platform of the present invention.
Fig. 3 is a schematic structural diagram of the moving platform of the three-degree-of-freedom positioning platform of the present invention.
Fig. 4 is a schematic diagram of a control system of the three-degree-of-freedom positioning platform of the present invention.
Wherein,
100. moving platform 200. static platform
1. Platform base 2. stator core
3. Coil winding 4. stator core
5. Bearing support 6, bearing
7. X-direction linear guide rail 8. X-direction guide rail slide block
9.X direction adapter plate 10. stator core
11. Stator core 12.Y direction linear guide rail
13. Y-direction guide rail slide block of rotary adapter plate 14
15. Reinforcing bar 16, mounting seat
17, S-level magnetic steel 18, N-level magnetic steel
19. Magnetic steel positioning block 20. rotary shaft
21. Bolt 22.PC machine
CAN bus communication module 24.X direction DSP controller
Y-direction DSP controller 26X-direction electromagnetic drive module
X-direction electromagnetic drive module 28. Y-direction electromagnetic drive module
29. Y-direction electromagnetic driving module 30. X-direction laser displacement sensor
Y-direction laser displacement sensor 32. Y-direction laser displacement sensor
Detailed Description
The following non-limiting detailed description of the present invention is provided in connection with the preferred embodiments and accompanying drawings.
Referring to fig. 1 to 4, the three-degree-of-freedom positioning platform of the present invention includes a movable platform 100, a stationary platform 200, and a positioning platform control system.
As further shown in fig. 1 and 2, the static platform 200 includes a platform base 1 having a substantially rectangular shape and having four corners subjected to chamfering treatment. Of course, the platform base 1 may have other shapes as well, and the shapes that can realize the functions of the present invention are all within the protection scope of the present invention.
The stationary platform 200 further comprises a stator portion arranged on said platform base 1. The stator part comprises four sets of stator cores 2, 4, 10, 11. The four sets of stator cores 2, 4, 10, 11 are each fixed to the platform base 1 by bolts. When the iron cores are installed, four groups of iron cores need to be ensured to be arranged in a shape like a Chinese character 'hui'. The four groups of stator cores 2, 4, 10 and 11 are respectively embedded with a coil winding 3, and a concentrated winding form is adopted, so that the power density of the electromagnetic driving module can be increased.
The static platform 200 further comprises an X-direction linear guide rail 7, an X-direction guide rail slide block 8 and an X-direction adapter plate 9. The X-direction linear guide rails 7 at least comprise two and are respectively fixed on the platform base 1 through bolts. In order to ensure the smooth movement of the positioning platform in the X direction, the two X-direction linear guide rails 7 need to be arranged in parallel during assembly. The two X-direction guide rail sliding blocks 8 are respectively connected on the two X-direction linear guide rails 7 in a sliding manner.
The two X-direction adapter plates 9 are fixed to the two X-direction guide rail sliders 8 by bolts, respectively. The reinforcing bar 15 is connected to the two X-direction adapter plates 9 by bolts. During assembly, the two adapter plates 9 in the X direction need to be arranged in parallel, so that the X movement direction and the Y movement direction are further ensured to be arranged vertically.
The static platform 200 further includes a Y-direction linear guide 12 and a Y-direction guide slider 14. Two Y direction linear guide 12 pass through the bolt fastening respectively on two X direction keysets 9 and reinforcement strip 15, in order to realize the steady motion of Y direction, during the assembly, need ensure two sets of Y direction linear guide 12 parallel arrangement, and Y direction linear guide 12 sets up with X direction linear guide 7 is perpendicular.
The static platform 200 further comprises a rotary adapter plate 13, a bearing support 5 arranged on the rotary adapter plate 13, and a bearing 6 arranged on the bearing support 5. During assembly, the bearing 6 is mounted on the bearing bracket 5, and an over-fit mounting mode is adopted. After that, the bearing bracket 5 is connected to the rotary adapter plate 13 by bolts. After the assembly is completed, two ends of the rotary adapter plate 13 are respectively fixed to the Y-direction guide rail sliding blocks 14 through bolts, and it is necessary to ensure that the two Y-direction guide rail sliding blocks 14 are arranged in parallel.
Referring to fig. 3, the movable platform 100 includes a mount 16, a mover part provided on the mount 16, and a rotation shaft 20.
The moving part of the moving platform 100 is arranged corresponding to the stator part of the static platform 200 and forms four groups of electromagnetic driving modules. Referring to fig. 4, the four sets of electromagnetic driving modules are X-direction electromagnetic driving modules 26 and 27 and Y-direction electromagnetic driving modules 28 and 29, respectively.
The moving part of the moving platform 100 comprises S-level magnetic steel 17 and N-level magnetic steel 18 which are arranged corresponding to the stator cores 2, 4, 10 and 11 and the winding coil 3.
The center of the mounting base 16 is provided with a recess. During assembly, the magnetic steel positioning block 19 is fixed in the groove in the center of the mounting base 16 through structural adhesive bonding, and the structural adhesive bonding is ensured to be firm. Of course, the magnetic steel positioning block 19 may also be installed in a groove at the center of the mounting seat 16 by other fixing methods.
And then, the S-level magnetic steel 17 and the N-level magnetic steel 18 are fixed at the groove of the mounting base 16 through structural adhesive, and the S-level magnetic steel 17 and the N-level magnetic steel 18 are arranged in a staggered manner, so that the normal work of the electromagnetic driving module is ensured. Of course, the S-stage magnetic steel 17 and the N-stage magnetic steel 18 may also be mounted in the groove of the mounting base 16 by other fixing methods.
After the assembly is completed, the rotating shaft 20 is fixed to the center of the magnetic steel positioning block 19 by a bolt 21. After the assembly is completed, the movable platform 100 of the positioning platform shown in fig. 3 is sleeved into the bearing 6 of the static platform 200 shown in fig. 2 through the rotating shaft 20, and is locked at the bottom through a bolt, so that the reliable connection is ensured, and the stable rotation of the movable platform 100 is ensured.
As shown in fig. 4, the three-degree-of-freedom positioning platform of the present invention further includes a positioning platform control system. The positioning platform control system comprises a PC (personal computer) 22, a CAN (controller area network) bus communication module 23, an X-direction DSP (digital signal processor) controller 24, X-direction electromagnetic driving modules 26 and 27, a Y-direction DSP controller 25, Y-direction electromagnetic driving modules 28 and 29, an X-direction laser displacement sensor 30 and Y-direction laser displacement sensors 31 and 32. The PC 22 is the upper computer of the utility model.
The utility model discloses three degree of freedom positioning platform's theory of operation as follows.
The PC 22 gives a control instruction, the control instruction is sent to the X-direction DSP controller 24 through the CAN bus communication module 23, coil windings on the stator cores 2 and 10 of the static platform 200 are electrified to generate an electromagnetic field which interacts with a sinusoidal alternating magnetic field generated by S-level and N-level magnetic steels matched according to a certain groove level, a driving force is generated, the X-direction electromagnetic driving modules 26 and 27 move along the X direction, and at the moment, the movable platform 100 moves along the X-direction linear guide rail 7 along the X direction.
The PC 22 gives a control instruction, sends the control instruction to the Y-direction DSP controller 25 through the CAN bus communication module 23, coil windings on the stator cores 4 and 11 of the static platform 200 are electrified to generate an electromagnetic field which interacts with a sinusoidal alternating magnetic field generated by S-level and N-level magnetic steels matched according to a certain slot level, a driving force is generated, the Y-direction electromagnetic driving modules 28 and 29 move along the Y direction, and at the moment, the movable platform 100 moves along the Y-direction linear guide rail 12 along the Y direction.
When the PC 22 gives a control instruction and sends the control instruction to the X-direction DSP controller 24 and the Y-direction DSP controller 25 at the same time according to a rule through the CAN bus communication module 23, the X-direction electromagnetic driving modules 26 and 27 and the Y-direction electromagnetic driving modules 28 and 29, which are arranged in a zigzag shape, are driven, and the four electromagnetic driving modules move in cooperation, so that the rotary motion of the movable platform 100 of the positioning platform CAN be realized.
The Y-direction DSP controller 25 collects position signals output by the Y-direction laser displacement sensor 31 and the Y-direction laser displacement sensor 32, and the X-direction DSP controller 24 collects position signals output by the X-direction laser displacement sensor 30, and feeds back the position signals to the PC 22 through the CAN bus communication module 23, thereby realizing closed-loop control of the positioning platform.
The utility model discloses a three degree of freedom positioning platform relies on sharp electromagnetic drive principle and slider slide rail, the electromagnetic field that the coil winding circular telegram of positioning platform 'S quiet platform 200 produced with move the S level magnet steel on the platform 100, the permanent magnet magnetic field interact of N level magnet steel produces drive power, thereby drive positioning platform' S the motion that platform 100 carried out three degree of freedom in the XY plane, be a new motion decoupling zero device, broken through the simple motion linear motion module of current three degree of freedom positioning platform and the accumulational limitation of rotating electrical machines.
The utility model discloses a return font structure positioning platform, stator coil adopt concentrated winding, have simplified positioning platform's structure greatly, have improved power density, can realize the precision positioning of long stroke.
The utility model discloses three degree of freedom positioning platform, flexible good, simple manufacture can be used to the accurate positioning of IC manufacturing. The application of straight line electromagnetic drive principle and linear slide rail slider has greatly simplified the utility model discloses three degree of freedom positioning platform's mechanical structure.
It should be noted that the above-mentioned preferred embodiments are only for illustrating the technical concepts and features of the present invention, and the purpose thereof is to enable those skilled in the art to understand the contents of the present invention and to implement the present invention accordingly, and the protection scope of the present invention cannot be limited thereby. All equivalent changes and modifications made according to the spirit of the present invention should be covered by the protection scope of the present invention.
Claims (10)
1. A three-degree-of-freedom positioning platform comprises a movable platform (100) and a static platform (200), and is characterized in that:
the movable platform (100) comprises an installation base (16), a movable part arranged on the installation base (16) and a rotating shaft (20);
the stationary platform (200) comprises:
a platform base (1);
a stator portion provided on the platform base (1);
an X-direction linear guide rail (7) arranged on the platform base (1) in parallel, an X-direction guide rail sliding block (8) arranged on the X-direction linear guide rail (7), and an X-direction adapter plate (9); and
a Y-direction linear guide rail (12) arranged on the X-direction adapter plate (9) in parallel, a Y-direction guide rail sliding block (14) arranged on the Y-direction linear guide rail (12), and a rotary adapter plate (13);
the bearing support (5) is arranged on the rotary adapter plate (13), and the bearing (6) is arranged on the bearing support (5);
the bearing (6) is sleeved on the rotating shaft (20), and the rotor part and the stator part are correspondingly arranged to form an electromagnetic driving module.
2. The three degree-of-freedom positioning platform of claim 1, wherein: x direction linear guide (7) include two at least, and two X direction guide slider (8) sliding connection respectively are in on two X direction linear guide (7), two X direction keysets (9) set up respectively on two X direction guide slider (8), strengthen strip (15) through bolted connection on two X direction keysets (9) of parallel arrangement.
3. The three degree-of-freedom positioning platform of claim 1, wherein: y direction linear guide (12) include two at least, Y direction linear guide (12) with X direction linear guide (7) set up perpendicularly, two Y direction guide slider (14) sliding connection respectively on two Y direction linear guide (12), the both ends of rotatory keysets (13) set up respectively on two Y direction guide slider (14).
4. The three degree-of-freedom positioning platform of claim 1, wherein: the stator part comprises four stator iron cores (2; 4; 10; 11) which are arranged in a shape like a Chinese character 'hui', and the rotor part comprises S-level magnetic steel and N-level magnetic steel which are arranged corresponding to the stator iron cores (2; 4; 10; 11).
5. The three degree-of-freedom positioning platform of claim 4, wherein: the stator cores (2; 4; 10; 11) are all embedded with coil windings (3) and all adopt concentrated winding structures.
6. The three degree-of-freedom positioning platform of claim 4, wherein: a groove is formed in the center of the mounting seat (16), and the magnetic steel positioning block (19) is fixedly mounted in the groove; the S-level magnetic steel and the N-level magnetic steel are fixed at the groove of the mounting base (16) and are arranged in a staggered mode.
7. The three degree-of-freedom positioning platform of claim 1, wherein: the electromagnetic driving module comprises an X-direction electromagnetic driving module (26; 27) and a Y-direction electromagnetic driving module (28; 29).
8. The three degree-of-freedom positioning platform of claim 7, wherein: the three-degree-of-freedom positioning platform further comprises a positioning platform control system.
9. The three degree-of-freedom positioning platform of claim 8, wherein: the positioning platform control system comprises a PC (personal computer) machine (22), a CAN bus communication module (23), an X-direction DSP controller (24), a Y-direction DSP controller (25), an X-direction laser displacement sensor (30) and a Y-direction laser displacement sensor (31; 32).
10. The three degree-of-freedom positioning platform of claim 9, wherein: the PC (22) gives a control instruction and sends the control instruction to the X-direction DSP controller (24) through the CAN bus communication module (23) to realize the movement of the X-direction electromagnetic driving module (26; 27) along the X direction; sending the data to a Y-direction DSP controller (25) to realize the movement of a Y-direction electromagnetic driving module (28; 29) along the Y direction; when control instructions are simultaneously sent to the X-direction DSP controller (24) and the Y-direction DSP controller (25) according to rules, the four electromagnetic driving modules in the shape of a Chinese character hui are driven to cooperatively move, and therefore the rotary motion of the positioning platform can be achieved.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201820086859.2U CN207732608U (en) | 2018-01-18 | 2018-01-18 | A kind of Three Degree Of Freedom locating platform |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201820086859.2U CN207732608U (en) | 2018-01-18 | 2018-01-18 | A kind of Three Degree Of Freedom locating platform |
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| Publication Number | Publication Date |
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| CN207732608U true CN207732608U (en) | 2018-08-14 |
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ID=63083121
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| CN201820086859.2U Active CN207732608U (en) | 2018-01-18 | 2018-01-18 | A kind of Three Degree Of Freedom locating platform |
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| CN (1) | CN207732608U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108173408A (en) * | 2018-01-18 | 2018-06-15 | 苏州大学 | A kind of Three Degree Of Freedom locating platform |
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2018
- 2018-01-18 CN CN201820086859.2U patent/CN207732608U/en active Active
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108173408A (en) * | 2018-01-18 | 2018-06-15 | 苏州大学 | A kind of Three Degree Of Freedom locating platform |
| CN108173408B (en) * | 2018-01-18 | 2023-10-24 | 苏州大学 | Three-degree-of-freedom positioning platform |
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Effective date of registration: 20210603 Address after: 215000 Room 305, building 2, Yangchenghu international science and Technology Pioneer Park, 116 Chengyang Road, Xiangcheng economic and Technological Development Zone, Suzhou City, Jiangsu Province Patentee after: SUZHOU LINEAR PRECISION DRIVE CONTROL TECHNOLOGY Co.,Ltd. Address before: 215104 No. 1188 Wuzhong Road, Wuzhong District, Suzhou, Jiangsu Patentee before: Suzhou University |
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