CN203530495U - Polycrystalline silicon ingot casting device - Google Patents
Polycrystalline silicon ingot casting device Download PDFInfo
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- CN203530495U CN203530495U CN201320715234.5U CN201320715234U CN203530495U CN 203530495 U CN203530495 U CN 203530495U CN 201320715234 U CN201320715234 U CN 201320715234U CN 203530495 U CN203530495 U CN 203530495U
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- crucible
- heater
- polycrystalline silicon
- ingot casting
- casting device
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Abstract
The utility model discloses a polycrystalline silicon ingot casting device which is capable of effectively reducing the probability of accident that a furnace body is burnt out. The polycrystalline silicon ingot casting device comprises a furnace body, wherein the furnace body is internally provided with a lower support heat preservation plate and a heat preservation cover; a heat preservation insulating cage is formed by the heat preservation cover and the lower support heat preservation plate together; lifting rods are connected with the heat preservation cover; the heat preservation insulating cage is internally provided with crucibles, crucible protecting plates, a graphite bottom plate, a graphite cover plate, side heaters, top heaters and a heat exchange platform; an overflowing blanket is mounted at the bottom of the furnace body; the overflowing blanket adopts a four-layer structure which consists of a knitted ceramic fiber blanket layer, a knitted ceramic fiber blanket layer, a ceramic fiber blanket layer and a carbon felt layer from top to bottom in sequence. Due to the adoption of the overflowing blanket of the four-layer structure, the possibility that the overflowing blanket is burnt out by an overflowing silicon liquid is greatly reduced, so that the probability of accident that the furnace body is burnt out is effectively reduced. The polycrystalline silicon ingot casting device is applicable to popularization and application in the field of polycrystalline silicon production equipment.
Description
Technical field
The utility model relates to production of polysilicon apparatus field, especially a kind of polycrystalline silicon ingot casting device.
Background technology
Solar cell can be electric energy by transform light energy, is an emphasis of modern Energy-saving Society development.According to the difference of body material, existing solar cell is divided into polysilicon solar cell, monocrystaline silicon solar cell and class monocrystaline silicon solar cell.Wherein, the transformation efficiency of monocrystaline silicon solar cell is high, but production cost is also high, the transformation efficiency of polysilicon solar cell is than the low 1%-2% of monocrystaline silicon solar cell, but its production cost is also low, and class monocrystaline silicon solar cell is the battery between monocrystalline silicon battery and polysilicon solar cell.Consider, solar cell in the market still be take polysilicon solar cell as main.
The existing polycrystal silicon ingot for the production of polysilicon solar cell adopts casting ingot process system conventionally, casting ingot process is generally realized by polycrystalline silicon ingot casting device, existing polycrystalline silicon ingot casting device comprises, comprise body of heater, on body of heater, be provided with aspirating hole, in described body of heater, be provided with subiculum warming plate and stay-warm case, stay-warm case is placed on subiculum warming plate, stay-warm case and subiculum warming plate form heat insulating cage jointly, on described stay-warm case, be connected with the elevating lever that can make stay-warm case move up and down, in described heat insulating cage, be provided with crucible, crucible guard boards, graphite base plate, graphite cover plate, sidepiece well heater, top heater, heat exchange platform, described graphite base plate is placed on heat exchange platform, crucible is placed on graphite base plate, crucible guard boards is arranged on crucible outside, sidepiece well heater is arranged on the outside of crucible guard boards, graphite cover plate is arranged on crucible top, top heater is arranged on graphite cover plate top, described heat exchange platform is fixed on bottom of furnace body by graphite column, the upper end of crucible guard boards is provided with exhaust emissions hole, also comprise inlet pipe, described inlet pipe is successively through body of heater, stay-warm case, top heater, after graphite cover plate, stretch in crucible.
Current casting ingot process, is first after spraying-stocking process, then enters ingot casting operation.
Spraying: can react with crucible after silicon material high temperature melting, introduce impurity, and cause sticky pot, affect the quality of silicon ingot, so need to spray one deck silicon nitride solution between crucible and silicon material, utilize silicon nitride can effectively isolate silicon material and crucible, after silicon nitride solution spraying completes, carry out hyperthermia drying, the moisture evaporation by silicon nitride solution, just can make crucible inwall adhere to one deck silicon nitride coating again.
Charging: after crucible is dried, by fragmentary silicon material, in order, requirement and weight packs silicon material in crucible into.
The crucible of charged just can carry out next step casting ingot process, first charged crucible is packed in the body of heater of ingot furnace, after installing on request, by ingot furnace closing lid, the ingot furnace that closing lid is later, just forms the chamber of a sealing, the sealed crucible that installs silicon material is inner at ingot furnace, the casting ingot process that brings into operation, whole casting ingot process divides 6 processes, vacuumizes-heats-melt-grow brilliant-annealing-cooling.
S11, vacuumize: the air in body of heater is taken away from aspirating hole, and airborne oxygen and silicon material generation oxidizing reaction in the process that prevents from heating up, affect silicon ingot quality.Vacuumizing is to utilize vacuum pump that the air in body of heater is extracted out, until reach opening of device requirement.
S12, heating: after having vacuumized, enter the heating phase, heating is to approach temperature of fusion in order to make fast silicon material heat up, now the environment in furnace chamber is vacuum environment, can be conducive to, by being attached to the water vapour on silicon material surface, by the method vacuumizing, extract out, and be rapidly heated.
S13, fusing: in melting process, need in the chamber of sealing, fill argon gas, avoid being attached to the silicon nitride coating generation decomposition reaction of crucible inwall, argon gas is to be filled with in body of heater by inlet pipe.After fusing starts, in body of heater, start inflation, by processing sequence, be inflated to after specified pressure, start dynamically to keep.
S14, long brilliant: the silicon material having melted, start long crystalline substance, long brilliant process is to rising by the stay-warm case of body of heater inside, liquid-state silicon starts heat radiation from bottom, the liquid-state silicon of bottom becomes solid state si, and be accompanied by the rising of stay-warm case and scattering and disappearing of heat, slowly upwards solidify, until whole silicon ingot has solidified.
S15, annealing: because long brilliant process starts in bottom, and follow stay-warm case to rise, until top, push up like this because the reason of heat radiation at the end, will exist must temperature head, produces internal stress.The effect of annealing is exactly to guarantee, under isoperibol, to eliminate temperature head, thereby eliminates internal stress.
S16, cooling: quick cooling silicon ingot is to tapping temperature in furnace chamber.
Polycrystalline silicon ingot casting device in use, there is sometimes the phenomenon of silicon hydrorrhea stream, once there is silicon hydrorrhea stream, the silicon liquid overflowing can flow on the subiculum warming plate of below along heat exchange platform, then silicon liquid drops onto the bottom of body of heater again from the edge of subiculum warming plate, because silicon liquid temp is higher, thereby it is accidents caused that silicon liquid is easy to body of heater to burn, silicon liquid for fear of overflow burns body of heater, conventionally all can overflow blanket be installed at described bottom of furnace body, existing overflow blanket is all one deck tapetum fibrosum, although existing polycrystalline silicon ingot casting device has all been laid one deck tapetum fibrosum at bottom of furnace body, but due to its thickness low LCL, material is single, the silicon liquid overflowing is easy to be burnt, and then body of heater is burnt and had an accident.
Utility model content
Technical problem to be solved in the utility model is to provide a kind of can effectively reduction the polycrystalline silicon ingot casting device that body of heater burns accident probability occurs.
The utility model solves the technical scheme that its technical problem adopts: this polycrystalline silicon ingot casting device, comprise body of heater, on body of heater, be provided with aspirating hole, in described body of heater, be provided with subiculum warming plate and stay-warm case, stay-warm case is placed on subiculum warming plate, stay-warm case and subiculum warming plate form heat insulating cage jointly, on described stay-warm case, be connected with the elevating lever that can make stay-warm case move up and down, in described heat insulating cage, be provided with crucible, crucible guard boards, graphite base plate, graphite cover plate, sidepiece well heater, top heater, heat exchange platform, described graphite base plate is placed on heat exchange platform, crucible is placed on graphite base plate, crucible guard boards is arranged on crucible outside, sidepiece well heater is arranged on the outside of crucible guard boards, graphite cover plate is arranged on crucible top, top heater is arranged on graphite cover plate top, described heat exchange platform is fixed on bottom of furnace body by graphite column, the upper end of crucible guard boards is provided with exhaust emissions hole, also comprise inlet pipe, described inlet pipe is successively through body of heater, stay-warm case, top heater, after graphite cover plate, stretch in crucible, described bottom of furnace body is provided with overflow blanket, described overflow blanket is four-layer structure, be followed successively by from top to bottom knitting ceramic fiber blanket layer, knitting ceramic fiber blanket layer, ceramic fiber blanket layer, carbon carpet veneer.
Further, the thickness of described knitting ceramic fiber blanket layer is that the thickness of 10mm, knitting ceramic fiber blanket layer is that the thickness of 10mm, ceramic fiber blanket layer is that the thickness of 25mm, carbon carpet veneer is 10mm.
Further, the upper surface of described overflow blanket is provided with overflow silk.
Further, between adjacent graphite column, be provided with overflow silk.
Further, on described subiculum warming plate, be provided with a plurality of overflow weirs.
Further, between described crucible and crucible guard boards, be provided with carbon felt.
Further, described exhaust emissions hole is circular hole.
The beneficial effects of the utility model are: by overflow blanket, be set to four-layer structure, be followed successively by from top to bottom knitting ceramic fiber blanket layer, knitting ceramic fiber blanket layer, ceramic fiber blanket layer, carbon carpet veneer, the overflow blanket of four-layer structure greatly reduces the possibility that overflow silicon liquid is burnt, and then effectively reduces and body of heater occurs burn the probability of accident.
Accompanying drawing explanation
Fig. 1 is the structural representation of the utility model polycrystalline silicon ingot casting device;
Fig. 2 is the structural representation of overflow blanket described in the utility model;
Fig. 3 is the structural representation of crucible guard boards described in the utility model;
In figure, be labeled as: body of heater 1, aspirating hole 2, subiculum warming plate 3, stay-warm case 4, elevating lever 5, crucible 6, crucible guard boards 7, graphite base plate 8, graphite cover plate 9, sidepiece well heater 10, top heater 11, heat exchange platform 12, exhaust emissions hole 13, inlet pipe 14, overflow blanket 18, overflow silk 19, overflow weir 20, carbon felt 21, graphite column 22.
Embodiment
Below in conjunction with accompanying drawing, the utility model is further illustrated.
As shown in Figures 1 to 3, this polycrystalline silicon ingot casting device, comprise body of heater 1, on body of heater 1, be provided with aspirating hole 2, in described body of heater 1, be provided with subiculum warming plate 3 and stay-warm case 4, stay-warm case 4 is placed on subiculum warming plate 3, stay-warm case 4 and the common formation heat insulating of subiculum warming plate 3 cage, on described stay-warm case 4, be connected with the elevating lever 5 that can make stay-warm case 4 move up and down, in described heat insulating cage, be provided with crucible 6, crucible guard boards 7, graphite base plate 8, graphite cover plate 9, sidepiece well heater 10, top heater 11, heat exchange platform 12, described graphite base plate 8 is placed on heat exchange platform 12, crucible 6 is placed on graphite base plate 8, crucible guard boards 7 is arranged on crucible 6 outsides, sidepiece well heater 10 is arranged on the outside of crucible guard boards 7, graphite cover plate 9 is arranged on crucible 6 tops, top heater 11 is arranged on graphite cover plate 9 tops, described heat exchange platform 12 is fixed on body of heater 1 bottom by graphite column 22, the upper end of crucible guard boards 7 is provided with exhaust emissions hole 13, also comprise inlet pipe 14, described inlet pipe 14 is successively through body of heater 1, stay-warm case 4, top heater 11, after graphite cover plate 9, stretch in crucible 6, described body of heater 1 bottom is provided with overflow blanket 18, described overflow blanket 18 is four-layer structure, be followed successively by from top to bottom knitting ceramic fiber blanket layer, knitting ceramic fiber blanket layer, ceramic fiber blanket layer, carbon carpet veneer, by overflow blanket 18 is set to four-layer structure, be followed successively by from top to bottom knitting ceramic fiber blanket layer, knitting ceramic fiber blanket layer, ceramic fiber blanket layer, carbon carpet veneer, the overflow blanket of four-layer structure greatly reduces the possibility that overflow silicon liquid is burnt, and then effectively reduce and body of heater occurs burn the probability of accident.In order to guarantee that silicon liquid does not burn under the prerequisite of overflow blanket 18, reduce costs to greatest extent, the thickness of described overflow blanket 18 each layers is preferably: the thickness of described knitting ceramic fiber blanket layer is that the thickness of 10mm, knitting ceramic fiber blanket layer is that the thickness of 10mm, ceramic fiber blanket layer is that the thickness of 25mm, carbon carpet veneer is 10mm.
For being known in time, operator whether there is silicon hydrorrhea stream, the upper surface of described overflow blanket 18 is provided with overflow silk 19, once there is silicon hydrorrhea stream, the silicon liquid overflowing will blow the overflow silk 19 that is arranged on overflow blanket 18 surfaces after dropping on overflow blanket 18, after overflow silk 19 blows, can send guard signal, alert is carried out relating operation.Because the silicon liquid of overflow is easy to along graphite column 22 to dirty, therefore, in order to monitor quickly the generation of overflow phenomena, between adjacent graphite column 22, be provided with overflow silk 19.Because flowing to the edge that will flow to subiculum warming plate 3 after subiculum warming plate 3, could continue to dirty the silicon liquid of overflow, so just cause overflow phenomena to occur just can monitor after for some time, so just increased the probability having an accident, therefore, for whether monitoring quickly there is silicon hydrorrhea flow phenomenon, on described subiculum warming plate 3, be provided with a plurality of overflow weirs 20, by overflow weir 20 is set on subiculum warming plate 3, after flowing to subiculum warming plate 3, silicon liquid can directly from overflow weir 20, flow to the overflow blanket 18 of below, and then blow being arranged on the overflow silk 19 arranging on overflow blanket 18, thereby reach the object of fast monitored.
In addition, it is more even for crucible 6 is heated, between described crucible 6 and crucible guard boards 7, be provided with carbon felt 21, the heat of sidepiece well heater 10 passes to crucible 6 through carbon felt 21 after seeing through crucible guard boards 7 again, because carbon felt 21 has good heat preservation and insulation, therefore, heat can not see through fast carbon felt 21 and be delivered in crucible 6, can make like this heat obtain homogenizing when seeing through carbon felt 21, thereby crucible 6 is heated evenly, can improve the qualification rate of product.
In order to be better conducive to the volatilization of impurity, described exhaust emissions hole 13 is circular hole, original exhaust emissions hole 13 is square slotted eye, when tail gas is discharged from square slotted eye, the air flow line of tail gas is more at random, irregular, be unfavorable for the volatilization of impurity, changed into after circular hole, can make the air flow line of tail gas regular, thereby be conducive to the volatilization of impurity.
Claims (7)
1. a polycrystalline silicon ingot casting device, comprise body of heater (1), on body of heater (1), be provided with aspirating hole (2), in described body of heater (1), be provided with subiculum warming plate (3) and stay-warm case (4), stay-warm case (4) is placed on subiculum warming plate (3), stay-warm case (4) forms heat insulating cage jointly with subiculum warming plate (3), on described stay-warm case (4), be connected with the elevating lever (5) that can make stay-warm case (4) move up and down, in described heat insulating cage, be provided with crucible (6), crucible guard boards (7), graphite base plate (8), graphite cover plate (9), sidepiece well heater (10), top heater (11), heat exchange platform (12), described graphite base plate (8) is placed on heat exchange platform (12), crucible (6) is placed on graphite base plate (8), crucible guard boards (7) is arranged on crucible (6) outside, sidepiece well heater (10) is arranged on the outside of crucible guard boards (7), graphite cover plate (9) is arranged on crucible (6) top, top heater (11) is arranged on graphite cover plate (9) top, described heat exchange platform (12) is fixed on body of heater (1) bottom by graphite column (22), the upper end of crucible guard boards (7) is provided with exhaust emissions hole (13), also comprise inlet pipe (14), described inlet pipe (14) is successively through body of heater (1), stay-warm case (4), top heater (11), after graphite cover plate (9), stretch in crucible (6), described body of heater (1) bottom is provided with overflow blanket (18), it is characterized in that: described overflow blanket (18) is four-layer structure, be followed successively by from top to bottom knitting ceramic fiber blanket layer, knitting ceramic fiber blanket layer, ceramic fiber blanket layer, carbon carpet veneer.
2. polycrystalline silicon ingot casting device as claimed in claim 1, is characterized in that: the thickness of described knitting ceramic fiber blanket layer is that the thickness of 10mm, knitting ceramic fiber blanket layer is that the thickness of 10mm, ceramic fiber blanket layer is that the thickness of 25mm, carbon carpet veneer is 10mm.
3. polycrystalline silicon ingot casting device as claimed in claim 2, is characterized in that: the upper surface of described overflow blanket (18) is provided with overflow silk (19).
4. polycrystalline silicon ingot casting device as claimed in claim 3, is characterized in that: between adjacent graphite column (22), be provided with overflow silk (19).
5. polycrystalline silicon ingot casting device as claimed in claim 4, is characterized in that: on described subiculum warming plate (3), be provided with a plurality of overflow weirs (20).
6. polycrystalline silicon ingot casting device as claimed in claim 5, is characterized in that: between described crucible (6) and crucible guard boards (7), be provided with carbon felt (21).
7. polycrystalline silicon ingot casting device as claimed in claim 6, is characterized in that: described exhaust emissions hole (13) is circular hole.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201320715234.5U CN203530495U (en) | 2013-11-14 | 2013-11-14 | Polycrystalline silicon ingot casting device |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201320715234.5U CN203530495U (en) | 2013-11-14 | 2013-11-14 | Polycrystalline silicon ingot casting device |
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| CN203530495U true CN203530495U (en) | 2014-04-09 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN201320715234.5U Expired - Fee Related CN203530495U (en) | 2013-11-14 | 2013-11-14 | Polycrystalline silicon ingot casting device |
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Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2018068331A1 (en) * | 2016-10-15 | 2018-04-19 | 朱红英 | Shaped piece of anti-leakage refractory fiber blankets |
| WO2018068333A1 (en) * | 2016-10-15 | 2018-04-19 | 朱红英 | Shaped piece of refractory fiber blankets |
| WO2018068334A1 (en) * | 2016-10-15 | 2018-04-19 | 朱红英 | Anti-seep irregularly-shaped piece of fiber blanket |
| CN110716006A (en) * | 2018-07-11 | 2020-01-21 | 四川赛恩思仪器有限公司 | Combustion furnace for material detection |
| CN113943976A (en) * | 2021-09-13 | 2022-01-18 | 江苏光讯电力新能源有限公司 | Polycrystalline silicon ingot furnace for producing solar equipment component |
-
2013
- 2013-11-14 CN CN201320715234.5U patent/CN203530495U/en not_active Expired - Fee Related
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2018068331A1 (en) * | 2016-10-15 | 2018-04-19 | 朱红英 | Shaped piece of anti-leakage refractory fiber blankets |
| WO2018068333A1 (en) * | 2016-10-15 | 2018-04-19 | 朱红英 | Shaped piece of refractory fiber blankets |
| WO2018068334A1 (en) * | 2016-10-15 | 2018-04-19 | 朱红英 | Anti-seep irregularly-shaped piece of fiber blanket |
| CN110716006A (en) * | 2018-07-11 | 2020-01-21 | 四川赛恩思仪器有限公司 | Combustion furnace for material detection |
| CN113943976A (en) * | 2021-09-13 | 2022-01-18 | 江苏光讯电力新能源有限公司 | Polycrystalline silicon ingot furnace for producing solar equipment component |
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Legal Events
| Date | Code | Title | Description |
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| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20140409 Termination date: 20211114 |