CN203530486U - Polycrystalline silicon ingot furnace thermal field structure - Google Patents
Polycrystalline silicon ingot furnace thermal field structure Download PDFInfo
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- CN203530486U CN203530486U CN201320715208.2U CN201320715208U CN203530486U CN 203530486 U CN203530486 U CN 203530486U CN 201320715208 U CN201320715208 U CN 201320715208U CN 203530486 U CN203530486 U CN 203530486U
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- polycrystalline silicon
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Abstract
The utility model discloses a polycrystalline silicon ingot furnace thermal field structure capable of shortening the melting time of a silicon material. The polycrystalline silicon ingot furnace thermal field structure comprises a furnace body, wherein a lower supporting insulation board and an insulation cover are arranged in the furnace body; the lower supporting insulation board and the insulation cover form an insulation cage; a lifting rod is connected onto the insulation cover; a crucible, a crucible guard board, a graphite bottom plate, a graphite cover plate, a lateral heater, a top heater and a heat exchange platform are arranged in the insulation cage; the width of the lateral heater is greater than that of the crucible guard board, so that the heat transmitted to all parts of the crucible guard board is uniform, the temperature in all parts of the crucible further tends to be uniform, the silicon material in the crucible can be melted simultaneously, the melting time of the whole silicon material is shortened, and the production process of an entire polycrystalline silicon cast ingot is shortened; in addition, the energy consumption is reduced and energy is saved. The polycrystalline silicon ingot furnace thermal field structure is suitable for being popularized and applied in the field of polycrystalline silicon production equipment.
Description
Technical field
The utility model relates to production of polysilicon apparatus field, especially a kind of thermal field structure of polycrystalline silicon casting furnace.
Background technology
Solar cell can be electric energy by transform light energy, is an emphasis of modern Energy-saving Society development.According to the difference of body material, existing solar cell is divided into polysilicon solar cell, monocrystaline silicon solar cell and class monocrystaline silicon solar cell.Wherein, the transformation efficiency of monocrystaline silicon solar cell is high, but production cost is also high, the transformation efficiency of polysilicon solar cell is than the low 1%-2% of monocrystaline silicon solar cell, but its production cost is also low, and class monocrystaline silicon solar cell is the battery between monocrystalline silicon battery and polysilicon solar cell.Consider, solar cell in the market still be take polysilicon solar cell as main.
The existing polycrystal silicon ingot for the production of polysilicon solar cell adopts casting ingot process system conventionally, casting ingot process is generally realized by thermal field structure of polycrystalline silicon casting furnace, existing thermal field structure of polycrystalline silicon casting furnace comprises, comprise body of heater, on body of heater, be provided with aspirating hole, in described body of heater, be provided with subiculum warming plate and stay-warm case, stay-warm case is placed on subiculum warming plate, stay-warm case and subiculum warming plate form heat insulating cage jointly, on described stay-warm case, be connected with the elevating lever that can make stay-warm case move up and down, in described heat insulating cage, be provided with crucible, crucible guard boards, graphite base plate, graphite cover plate, sidepiece well heater, top heater, heat exchange platform, described graphite base plate is placed on heat exchange platform, crucible is placed on graphite base plate, crucible guard boards is arranged on crucible outside, sidepiece well heater is arranged on the outside of crucible guard boards, graphite cover plate is arranged on crucible top, top heater is arranged on graphite cover plate top, described heat exchange platform is fixed on bottom of furnace body by graphite column, the upper end of crucible guard boards is provided with exhaust emissions hole, also comprise inlet pipe, described inlet pipe is successively through body of heater, stay-warm case, top heater, after graphite cover plate, stretch in crucible.
Current casting ingot process, is first after spraying-stocking process, then enters ingot casting operation.
Spraying: can react with crucible after silicon material high temperature melting, introduce impurity, and cause sticky pot, affect the quality of silicon ingot, so need to spray one deck silicon nitride solution between crucible and silicon material, utilize silicon nitride can effectively isolate silicon material and crucible, after silicon nitride solution spraying completes, carry out hyperthermia drying, the moisture evaporation by silicon nitride solution, just can make crucible inwall adhere to one deck silicon nitride coating again.
Charging: after crucible is dried, by fragmentary silicon material, in order, requirement and weight packs silicon material in crucible into.
The crucible of charged just can carry out next step casting ingot process, first charged crucible is packed in the body of heater of ingot furnace, after installing on request, by ingot furnace closing lid, the ingot furnace that closing lid is later, just forms the chamber of a sealing, the sealed crucible that installs silicon material is inner at ingot furnace, the casting ingot process that brings into operation, whole casting ingot process divides 6 processes, vacuumizes-heats-melt-grow brilliant-annealing-cooling.
S11, vacuumize: the air in body of heater is taken away from aspirating hole, and airborne oxygen and silicon material generation oxidizing reaction in the process that prevents from heating up, affect silicon ingot quality.Vacuumizing is to utilize vacuum pump that the air in body of heater is extracted out, until reach opening of device requirement.
S12, heating: after having vacuumized, enter the heating phase, heating is to approach temperature of fusion in order to make fast silicon material heat up, now the environment in furnace chamber is vacuum environment, can be conducive to, by being attached to the water vapour on silicon material surface, by the method vacuumizing, extract out, and be rapidly heated.
S13, fusing: in melting process, need in the chamber of sealing, fill argon gas, avoid being attached to the silicon nitride coating generation decomposition reaction of crucible inwall, argon gas is to be filled with in body of heater by inlet pipe.After fusing starts, in body of heater, start inflation, by processing sequence, be inflated to after specified pressure, start dynamically to keep.
S14, long brilliant: the silicon material having melted, start long crystalline substance, long brilliant process is to rising by the stay-warm case of body of heater inside, liquid-state silicon starts heat radiation from bottom, the liquid-state silicon of bottom becomes solid state si, and be accompanied by the rising of stay-warm case and scattering and disappearing of heat, slowly upwards solidify, until whole silicon ingot has solidified.
S15, annealing: because long brilliant process starts in bottom, and follow stay-warm case to rise, until top, push up like this because the reason of heat radiation at the end, will exist must temperature head, produces internal stress.The effect of annealing is exactly to guarantee, under isoperibol, to eliminate temperature head, thereby eliminates internal stress.
S16, cooling: quick cooling silicon ingot is to tapping temperature in furnace chamber.
The thermal source of thermal field structure of polycrystalline silicon casting furnace is sidepiece well heater and top heater, existing its width of sidepiece well heater is generally all less than the width of crucible guard boards, Here it is makes the heat that transmits in the edge of crucible guard boards less, and then cause four jiaos of place's temperature of crucible lower slightly compared with other positions, make the silicon material at four jiaos, crucible place melt the required time longer, cause the fusing time of whole silicon material longer, not only extended the time of whole polycrystalline silicon ingot casting production process, simultaneously, the energy consuming is also more, energy dissipation is more serious, in addition, also make the fusing of silicon material in crucible inhomogeneous, cause last ingot quality and the performance forming not to be guaranteed.
Utility model content
Technical problem to be solved in the utility model is to provide a kind of thermal field structure of polycrystalline silicon casting furnace that can shorten silicon material fusing time.
The utility model solves the technical scheme that its technical problem adopts: this thermal field structure of polycrystalline silicon casting furnace, comprise body of heater, on body of heater, be provided with aspirating hole, in described body of heater, be provided with subiculum warming plate and stay-warm case, stay-warm case is placed on subiculum warming plate, stay-warm case and subiculum warming plate form heat insulating cage jointly, on described stay-warm case, be connected with the elevating lever that can make stay-warm case move up and down, in described heat insulating cage, be provided with crucible, crucible guard boards, graphite base plate, graphite cover plate, sidepiece well heater, top heater, heat exchange platform, described graphite base plate is placed on heat exchange platform, crucible is placed on graphite base plate, crucible guard boards is arranged on crucible outside, sidepiece well heater is arranged on the outside of crucible guard boards, graphite cover plate is arranged on crucible top, top heater is arranged on graphite cover plate top, described heat exchange platform is fixed on bottom of furnace body by graphite column, the upper end of crucible guard boards is provided with exhaust emissions hole, also comprise inlet pipe, described inlet pipe is successively through body of heater, stay-warm case, top heater, after graphite cover plate, stretch in crucible, the width of described sidepiece well heater is greater than the width of crucible guard boards.
Further, described sidepiece well heater joins end to end and forms a whole successively.
Further, on described graphite cover plate, be provided with a plurality of through holes.
Be further, described bottom of furnace body is provided with overflow blanket, described overflow blanket is four-layer structure, be followed successively by from top to bottom knitting ceramic fiber blanket layer, knitting ceramic fiber blanket layer, ceramic fiber blanket layer, carbon carpet veneer, the thickness of described knitting ceramic fiber blanket layer is that the thickness of 10mm, knitting ceramic fiber blanket layer is that the thickness of 10mm, ceramic fiber blanket layer is that the thickness of 25mm, carbon carpet veneer is 10mm.
Further, the upper surface of described overflow blanket is provided with overflow silk.
Further, between adjacent graphite column, be provided with overflow silk.
Further, on described subiculum warming plate, be provided with a plurality of overflow weirs.
Further, between described crucible and crucible guard boards, be provided with carbon felt.
Further, described exhaust emissions hole is circular hole.
The beneficial effects of the utility model are: by improving sidepiece well heater, make the width of sidepiece well heater be greater than the width of crucible guard boards, this just makes all can uniformity at the transferring heat at each position of crucible guard boards, and then in assurance crucible, each local temperature reaches unanimity, silicon material in crucible can be melted simultaneously, shortened the fusing time of whole silicon material, not only saved the time of whole polycrystalline silicon ingot casting production process, simultaneously, also reduced the consumption of the energy, saved the energy, in addition, also make the fusing uniformity of silicon material in crucible, guarantee that last ingot quality and the performance forming reaches specified requirement.
Accompanying drawing explanation
Fig. 1 is the structural representation of the utility model thermal field structure of polycrystalline silicon casting furnace;
Fig. 2 is the structural representation of graphite cover plate described in the utility model;
Fig. 3 is the structural representation of overflow blanket described in the utility model;
Fig. 4 is the structural representation of crucible guard boards described in the utility model;
In figure, be labeled as: body of heater 1, aspirating hole 2, subiculum warming plate 3, stay-warm case 4, elevating lever 5, crucible 6, crucible guard boards 7, graphite base plate 8, graphite cover plate 9, sidepiece well heater 10, top heater 11, heat exchange platform 12, exhaust emissions hole 13, inlet pipe 14, through hole 17, overflow blanket 18, overflow silk 19, overflow weir 20, carbon felt 21, graphite column 22.
Embodiment
Below in conjunction with accompanying drawing, the utility model is further illustrated.
As shown in Figures 1 to 4, this thermal field structure of polycrystalline silicon casting furnace, comprise body of heater 1, on body of heater 1, be provided with aspirating hole 2, in described body of heater 1, be provided with subiculum warming plate 3 and stay-warm case 4, stay-warm case 4 is placed on subiculum warming plate 3, stay-warm case 4 and the common formation heat insulating of subiculum warming plate 3 cage, on described stay-warm case 4, be connected with the elevating lever 5 that can make stay-warm case 4 move up and down, in described heat insulating cage, be provided with crucible 6, crucible guard boards 7, graphite base plate 8, graphite cover plate 9, sidepiece well heater 10, top heater 11, heat exchange platform 12, described graphite base plate 8 is placed on heat exchange platform 12, crucible 6 is placed on graphite base plate 8, crucible guard boards 7 is arranged on crucible 6 outsides, sidepiece well heater 10 is arranged on the outside of crucible guard boards 7, graphite cover plate 9 is arranged on crucible 6 tops, top heater 11 is arranged on graphite cover plate 9 tops, described heat exchange platform 12 is fixed on body of heater 1 bottom by graphite column 22, the upper end of crucible guard boards 7 is provided with exhaust emissions hole 13, also comprise inlet pipe 14, described inlet pipe 14 is successively through body of heater 1, stay-warm case 4, top heater 11, after graphite cover plate 9, stretch in crucible 6, the width of described sidepiece well heater 10 is greater than the width of crucible guard boards 7.By improving sidepiece well heater 10, make the width of sidepiece well heater 10 be greater than the width of crucible guard boards 7, this just makes all can uniformity at the transferring heat at crucible guard boards 7 each positions, and then guarantee that in crucible 6, each local temperature reaches unanimity, silicon material in crucible 6 can be melted simultaneously, shortened the fusing time of whole silicon material, not only saved the time of whole polycrystalline silicon ingot casting production process, simultaneously, also reduced the consumption of the energy, saved the energy, in addition, also make the fusing uniformity of the interior silicon material of crucible 6, guarantee that last ingot quality and the performance forming reaches specified requirement.In order better to make each local temperature in crucible 6 reach unanimity, avoid occurring temperature dead angle, described sidepiece well heater 10 joins end to end and forms a whole successively.
In long brilliant process, crucible 6 inside need to have certain thermograde from top to bottom, be that temperature in crucible 6 reduces from the top down gradually, thermograde changes more obvious, the speed of growth of ingot casting is faster, the temperature of crucible 6 internal upper parts is mainly to provide by top heater 11, the heat of top heater 11 is delivered in crucible 6 after seeing through graphite cover plate 9 again, due to the obstruct through graphite cover plate 9, the temperature of graphite cover plate 9 tops will be higher than the temperature of graphite cover plate 9 belows, because the sidepiece well heater 10 of existing thermal field structure of polycrystalline silicon casting furnace and top heater 11 are all unified controls, and in the long brilliant stage, temperature must be controlled at certain scope, Here it is makes sidepiece well heater 10 and the top heater 11 all can only be with identical power work, that is to say that the heat that sidepiece well heater 10 and top heater 11 provide is certain, if make the temperature of crucible 6 internal upper parts higher, just must make more heats can see through graphite cover plate 9 is delivered in crucible 6, thereby the interior thermograde of crucible 6 is changed obviously, the utility model provides a kind of simple and effective way to reach the interior thermograde of crucible 6 to change obvious object, on described graphite cover plate 9, be provided with a plurality of through holes 17, by a plurality of through holes 17 are set on graphite cover plate 9, the heat of top heater 11 can be unseparated the through hole 17 that passes through be delivered in crucible 6, the temperature of crucible 6 internal upper parts can be increased for original, thereby the thermograde in crucible 6 is changed obviously, and then the speed of growth of increase ingot casting, this mode only need be beaten several through holes 17 on original graphite cover plate 9, substantially can not increase cost, repacking is also very convenient simultaneously.
Thermal field structure of polycrystalline silicon casting furnace in use, there is sometimes the phenomenon of silicon hydrorrhea stream, once there is silicon hydrorrhea stream, the silicon liquid overflowing can flow on the subiculum warming plate 3 of below along heat exchange platform 12, then silicon liquid drops onto the bottom of body of heater 1 again from the edge of subiculum warming plate 3, because silicon liquid temp is higher, thereby silicon liquid is easy to body of heater 1 to burn accidents caused, silicon liquid for fear of overflow burns body of heater 1, described body of heater 1 bottom is provided with overflow blanket 18, overflow blanket 18 separates the silicon liquid overflowing and body of heater 1, effectively avoided silicon liquid that body of heater 1 is burnt, even if silicon liquid burns overflow blanket 18, now the temperature of silicon liquid is also lower, can not cause too large loss to body of heater 1.In order to prevent that silicon liquid from burning overflow blanket 18, described overflow blanket 18 is four-layer structure, be followed successively by from top to bottom knitting ceramic fiber blanket layer, knitting ceramic fiber blanket layer, ceramic fiber blanket layer, carbon carpet veneer, the thickness of described knitting ceramic fiber blanket layer is that the thickness of 10mm, knitting ceramic fiber blanket layer is that the thickness of 10mm, ceramic fiber blanket layer is that the thickness of 25mm, carbon carpet veneer is 10mm.
For being known in time, operator whether there is silicon hydrorrhea stream, the upper surface of described overflow blanket 18 is provided with overflow silk 19, once there is silicon hydrorrhea stream, the silicon liquid overflowing will blow the overflow silk 19 that is arranged on overflow blanket 18 surfaces after dropping on overflow blanket 18, after overflow silk 19 blows, can send guard signal, alert is carried out relating operation.Because the silicon liquid of overflow is easy to along graphite column 22 to dirty, therefore, in order to monitor quickly the generation of overflow phenomena, between adjacent graphite column 22, be provided with overflow silk 19.Because flowing to the edge that will flow to subiculum warming plate 3 after subiculum warming plate 3, could continue to dirty the silicon liquid of overflow, so just cause overflow phenomena to occur just can monitor after for some time, so just increased the probability having an accident, therefore, for whether monitoring quickly there is silicon hydrorrhea flow phenomenon, on described subiculum warming plate 3, be provided with a plurality of overflow weirs 20, by overflow weir 20 is set on subiculum warming plate 3, after flowing to subiculum warming plate 3, silicon liquid can directly from overflow weir 20, flow to the overflow blanket 18 of below, and then blow being arranged on the overflow silk 19 arranging on overflow blanket 18, thereby reach the object of fast monitored.
In addition, it is more even for crucible 6 is heated, between described crucible 6 and crucible guard boards 7, be provided with carbon felt 21, the heat of sidepiece well heater 10 passes to crucible 6 through carbon felt 21 after seeing through crucible guard boards 7 again, because carbon felt 21 has good heat preservation and insulation, therefore, heat can not see through fast carbon felt 21 and be delivered in crucible 6, can make like this heat obtain homogenizing when seeing through carbon felt 21, thereby crucible 6 is heated evenly, can improve the qualification rate of product.
In order to be better conducive to the volatilization of impurity, described exhaust emissions hole 13 is circular hole, original exhaust emissions hole 13 is square slotted eye, when tail gas is discharged from square slotted eye, the air flow line of tail gas is more at random, irregular, be unfavorable for the volatilization of impurity, changed into after circular hole, can make the air flow line of tail gas regular, thereby be conducive to the volatilization of impurity.
Claims (9)
1. thermal field structure of polycrystalline silicon casting furnace, comprise body of heater (1), on body of heater (1), be provided with aspirating hole (2), in described body of heater (1), be provided with subiculum warming plate (3) and stay-warm case (4), stay-warm case (4) is placed on subiculum warming plate (3), stay-warm case (4) forms heat insulating cage jointly with subiculum warming plate (3), on described stay-warm case (4), be connected with the elevating lever (5) that can make stay-warm case (4) move up and down, in described heat insulating cage, be provided with crucible (6), crucible guard boards (7), graphite base plate (8), graphite cover plate (9), sidepiece well heater (10), top heater (11), heat exchange platform (12), described graphite base plate (8) is placed on heat exchange platform (12), crucible (6) is placed on graphite base plate (8), crucible guard boards (7) is arranged on crucible (6) outside, sidepiece well heater (10) is arranged on the outside of crucible guard boards (7), graphite cover plate (9) is arranged on crucible (6) top, top heater (11) is arranged on graphite cover plate (9) top, described heat exchange platform (12) is fixed on body of heater (1) bottom by graphite column (22), the upper end of crucible guard boards (7) is provided with exhaust emissions hole (13), also comprise inlet pipe (14), described inlet pipe (14) is successively through body of heater (1), stay-warm case (4), top heater (11), after graphite cover plate (9), stretch in crucible (6), it is characterized in that: the width of described sidepiece well heater (10) is greater than the width of crucible guard boards (7).
2. thermal field structure of polycrystalline silicon casting furnace as claimed in claim 1, is characterized in that: described sidepiece well heater (10) joins end to end and forms a whole successively.
3. thermal field structure of polycrystalline silicon casting furnace as claimed in claim 1 or 2, is characterized in that: on described graphite cover plate (9), be provided with a plurality of through holes (17).
4. thermal field structure of polycrystalline silicon casting furnace as claimed in claim 3, it is characterized in that: described body of heater (1) bottom is provided with overflow blanket (18), described overflow blanket (18) is four-layer structure, be followed successively by from top to bottom knitting ceramic fiber blanket layer, knitting ceramic fiber blanket layer, ceramic fiber blanket layer, carbon carpet veneer, the thickness of described knitting ceramic fiber blanket layer is that the thickness of 10mm, knitting ceramic fiber blanket layer is that the thickness of 10mm, ceramic fiber blanket layer is that the thickness of 25mm, carbon carpet veneer is 10mm.
5. thermal field structure of polycrystalline silicon casting furnace as claimed in claim 4, is characterized in that: the upper surface of described overflow blanket (18) is provided with overflow silk (19).
6. thermal field structure of polycrystalline silicon casting furnace as claimed in claim 5, is characterized in that: between adjacent graphite column (22), be provided with overflow silk (19).
7. thermal field structure of polycrystalline silicon casting furnace as claimed in claim 6, is characterized in that: on described subiculum warming plate (3), be provided with a plurality of overflow weirs (20).
8. thermal field structure of polycrystalline silicon casting furnace as claimed in claim 7, is characterized in that: between described crucible (6) and crucible guard boards (7), be provided with carbon felt (21).
9. thermal field structure of polycrystalline silicon casting furnace as claimed in claim 8, is characterized in that: described exhaust emissions hole (13) is circular hole.
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| Application Number | Priority Date | Filing Date | Title |
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| CN201320715208.2U CN203530486U (en) | 2013-11-14 | 2013-11-14 | Polycrystalline silicon ingot furnace thermal field structure |
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| CN201320715208.2U CN203530486U (en) | 2013-11-14 | 2013-11-14 | Polycrystalline silicon ingot furnace thermal field structure |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112725903A (en) * | 2020-11-26 | 2021-04-30 | 南京晶升能源设备有限公司 | Thermal field of silicon carbide raw material synthesis furnace and synthesis furnace |
| CN114959917A (en) * | 2022-07-08 | 2022-08-30 | 安徽冠宇光电科技有限公司 | Solar polycrystalline silicon ingot furnace |
-
2013
- 2013-11-14 CN CN201320715208.2U patent/CN203530486U/en not_active Expired - Fee Related
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112725903A (en) * | 2020-11-26 | 2021-04-30 | 南京晶升能源设备有限公司 | Thermal field of silicon carbide raw material synthesis furnace and synthesis furnace |
| CN114959917A (en) * | 2022-07-08 | 2022-08-30 | 安徽冠宇光电科技有限公司 | Solar polycrystalline silicon ingot furnace |
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| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20140409 Termination date: 20211114 |