CN203426856U - Polishing pad arranging device and polishing device - Google Patents
Polishing pad arranging device and polishing device Download PDFInfo
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- CN203426856U CN203426856U CN201320509981.3U CN201320509981U CN203426856U CN 203426856 U CN203426856 U CN 203426856U CN 201320509981 U CN201320509981 U CN 201320509981U CN 203426856 U CN203426856 U CN 203426856U
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- grinding
- abrasive disk
- polishing
- disc
- pad
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Abstract
The utility model discloses a polishing pad arranging device and a polishing device. The polishing device comprises an inner polishing disc, an annular outer polishing disc, an inner disc rotary motor, an outer disc rotary motor, an inner disc supporting frame and an outer disc supporting frame. One end of the inner disc supporting frame is fixedly connected with a non-working surface of the inner polishing disc, the other end of the inner disc supporting frame is connected with the inner disc rotary motor, one end of the outer disc supporting frame is fixedly connected with a non-working surface of the outer polishing disc, the other end of the outer disc supporting frame is connected with the outer disc rotary motor, the outer diameter of the inner polishing disc is smaller than the inner diameter of the outer polishing disc, the inner polishing disc and the outer polishing disc are coaxially arranged, and the inner polishing disc and the outer polishing disc can independently move up and down relative to each other. The polishing pad arranging device and the polishing device can solve the problem that due to the fact that the polishing disc is too large, polishing fluid by-products on the surface of the polishing disc cannot be removed easily, and can shorten the distribution time of the polishing fluid on a polishing pad, and therefore the arranging effect and efficiency of the polishing pad are effectively improved.
Description
Technical field
The utility model relates to the field of milling that semiconductor is manufactured, and relates in particular to a kind of grinder pad finisher and lapping device.
Background technology
CMP technique refers to chemical mechanical milling tech (Chemical Mechanical Polishing), or is called chemical-mechanical planarization technique (Chemical Mechanical Planarization).Chemical mechanical milling tech is a complicated technical process, it is that crystal column surface is contacted with the lapped face of grinding pad, then, by the relative motion between crystal column surface and lapped face by flattening wafer surface, conventionally adopt chemical-mechanical grinding device, also referred to as lapping device, carry out chemical mechanical milling tech.
Existing lapping device generally includes grinding head, grinding pad, lapping liquid supply pipe and grinder pad finisher.While carrying out grinding technics, the wafer that will grind is attached on grinding head, the to be ground of this wafer faces down and contacts counterrotating grinding pad, the downforce that grinding head provides is pressed onto this wafer on grinding pad, described grinding pad is pasted on grinding plate, while rotating under the drive of this grinding plate at motor, grinding head is followed grinding plate and is rotated; Meanwhile, lapping liquid is transported on grinding pad by lapping liquid supply pipe, and is evenly distributed on grinding pad by centrifugal force.The lapping liquid that grinding technics is used generally includes chemical mordant and abrasive grains, chemical reaction by chemical mordant and described surface to be ground generates softer easy to be removed material, then by mechanical friction, these softer materials are removed from being polished the surface of wafer, to reach the effect of overall planarization.
When grinding, need to adopt grinder pad finisher to arrange grinding pad, on the one hand, grinder pad finisher can, so that grinding pad is coarse, be guaranteed the grinding effect to wafer; On the other hand, grinder pad finisher can be so that the lapping liquid on grinding pad be more even, further to improve the grinding effect of wafer.
Existing lapping device comprises grinder pad finisher, grinding pad, grinding plate, grinding head and mill liquid supply pipe, described grinding pad is layed on described grinding plate, described grinding head and described lapping liquid supply pipe are arranged at respectively on described grinding pad, and described grinder pad finisher is also arranged at described grinding pad top.Existing grinder pad finisher comprises dish bracing frame, abrasive disk and drive motors, and described drive motors drives described dish bracing frame rotation, and described abrasive disk is arranged in described dish bracing frame.Because existing abrasive disk is larger, therefore, the lapping liquid accessory substance of abrasive disk is not easy to discharge, especially the lapping liquid accessory substance that is positioned at abrasive disk centre is not easy to discharge more, can affect grinding effect, but abrasive disk is too little and only have one, also can affect grinding efficiency and grinding effect.
Therefore, how providing a kind of lapping liquid accessory substance of can getting rid of is in time those skilled in the art's technical problems urgently to be resolved hurrily to improve grinder pad finisher and the lapping device of grinding efficiency and grinding effect.
Utility model content
The purpose of this utility model is to provide a kind of grinder pad finisher and lapping device, can get rid of in time lapping liquid accessory substance, improves grinding efficiency and grinding effect.
To achieve the above object, the utility model adopts following technical scheme:
A kind of grinder pad finisher, comprise interior abrasive disk, the outer grinding dish of annular, inside turn rotating motor, inverted position turn rotating motor, inner disc bracing frame and outer disk bracing frame, one end of described inner disc bracing frame is fixedly connected with the inoperative surface of described interior abrasive disk, the other end is connected with described inside turn rotating motor, one end of described outer disk bracing frame is fixedly connected with the inoperative surface of described outer grinding dish, the other end is connected with described inverted position turn rotating motor, the external diameter of described interior abrasive disk is less than the internal diameter of described outer grinding dish, described interior abrasive disk and described outer grinding dish coaxially arrange, described interior abrasive disk and described outer grinding dish can relatively independently move up and down.
Preferably, in above-mentioned grinder pad finisher, also comprise the first pneumatic tube and the second pneumatic tube, described the first pneumatic tube drives described inner disc bracing frame to move up and down, and described the second pneumatic tube drives described outer disk bracing frame to move up and down.
Preferably, in above-mentioned grinder pad finisher, the working surface of described outer grinding dish is provided with some runners of dispersing from inside to outside, and described some runners of dispersing from inside to outside evenly arrange around the center of circle of described outer grinding dish.
Preferably, in above-mentioned grinder pad finisher, described runner is that the bending direction of parabolic type and described runner is consistent with the direction of rotation of described outer grinding dish.
Preferably, in above-mentioned grinder pad finisher, the width of described runner broadens from inside to outside gradually.
Preferably, in above-mentioned grinder pad finisher, the working surface of described interior abrasive disk is provided with some runners of dispersing from inside to outside, and described some runners of dispersing from inside to outside evenly arrange around the center of circle of described interior abrasive disk.
Preferably, in above-mentioned grinder pad finisher, described runner is parabolic type, and the bending direction of described runner and the direction of rotation of described interior abrasive disk consistent.
Preferably, in above-mentioned grinder pad finisher, the width of described runner broadens from inside to outside gradually.
Preferably, in above-mentioned grinder pad finisher, described outer disk bracing frame is cylindric, and the inside of described outer disk bracing frame is provided with the through hole passing through for described interior abrasive disk, and described inverted position turn rotating motor is provided with the shrinkage pool moving up and down for described inside turn rotating motor.
The invention also discloses a kind of lapping device, comprise grinding pad, grinding plate and grinding head, described grinding pad is layed on described grinding plate, described grinding head is arranged on described grinding pad, described lapping device comprises grinder pad finisher as above, and described grinder pad finisher is arranged on described grinding pad.
The grinder pad finisher that the utility model provides and lapping device, by changing an existing large abrasive disk into an annular outer grinding dish and interior abrasive disk, the external diameter of described interior abrasive disk is less than the internal diameter of described outer grinding dish, described interior abrasive disk and described outer grinding dish coaxially arrange, described interior abrasive disk and described outer grinding dish can relatively independently move up and down, so, not only can use outer grinding dish and interior abrasive disk to arrange grinding pad simultaneously, can also use in turn outer grinding dish and interior abrasive disk to arrange grinding pad, avoid excessive its surperficial lapping liquid accessory substance of abrasive disk to be not easy the problem of getting rid of, with in time, effectively get rid of lapping liquid accessory substance, improve arrangement efficiency and the effect of grinding pad, and then raising grinding efficiency and effect.
Accompanying drawing explanation
Grinder pad finisher of the present utility model and lapping device are provided by following embodiment and accompanying drawing.
Fig. 1 is the structural representation of the lapping device of the utility model one embodiment.
Fig. 2 is the structural representation of the grinder pad finisher of the utility model one embodiment.
Fig. 3 is the working surface schematic diagram of the grinder pad finisher of the utility model one embodiment.
In figure, 1-grinder pad finisher, abrasive disk, 20-outer grinding dish, 30-inner disc bracing frame, 40-outer disk bracing frame, 50-inside turn rotating motor, 60-inverted position turn rotating motor in 10-, 70-the first pneumatic tube, 80-the second pneumatic tube, 90-lapping liquid accessory substance, 2-grinding pad, 3-grinding head, 4-lapping liquid supply pipe.
The specific embodiment
Below will be described in further detail grinder pad finisher of the present utility model and lapping device.
Below with reference to accompanying drawings the utility model is described in more detail, has wherein represented preferred embodiment of the present utility model, should be appreciated that those skilled in the art can revise the utility model described here and still realize advantageous effects of the present utility model.Therefore, following description is appreciated that extensively knowing for those skilled in the art, and not as to restriction of the present utility model.
For the purpose of this utility model, feature are become apparent, below in conjunction with accompanying drawing, the specific embodiment of the present utility model is further described.It should be noted that, accompanying drawing all adopts very the form of simplifying and all uses non-ratio accurately, only in order to convenient, the object of aid illustration the utility model embodiment lucidly.
Refer to Fig. 1, Figure 1 shows that the structural representation of the lapping device of the utility model one embodiment.This lapping device, comprise grinding pad 2, grinding plate (not shown), grinding head 3 and lapping liquid supply pipe 4, described grinding pad 2 is layed on described grinding plate, described grinding head 3 is arranged on described grinding pad 2, described lapping device also comprises a grinder pad finisher 1, and described grinder pad finisher 1 is arranged on described grinding pad 2.
Refer to Fig. 2 and Fig. 3, and incorporated by reference to Fig. 2, wherein, Fig. 2 is the structural representation of the grinder pad finisher of the utility model one embodiment; Fig. 3 is the working surface schematic diagram of the grinder pad finisher of the utility model one embodiment.This grinder pad finisher, comprise interior abrasive disk 10, the outer grinding dish 20 of annular, inner disc bracing frame 30, outer disk bracing frame 40, inside turn rotating motor 50 and inverted position turn rotating motor 60, one end of described inner disc bracing frame 30 is fixedly connected with the upper surface that the inoperative surface of described interior abrasive disk 10 is the interior abrasive disk 10 in Fig. 2, the other end is connected with described inside turn rotating motor 50, one end of described outer disk bracing frame 40 is fixedly connected with the upper surface that the inoperative surface of described outer grinding dish 20 is the outer grinding dish 20 in Fig. 2, the other end is connected with described inverted position turn rotating motor 60, the external diameter of described interior abrasive disk 10 is less than the internal diameter of the outer grinding dish 20 of described annular, and described interior abrasive disk 10 coaxially arranges with described outer grinding dish 20, described interior abrasive disk 10 and described outer grinding dish 20 can relatively independently move up and down.By an existing large abrasive disk being changed into annular outer grinding dish 20 and the interior abrasive disk 10 of coaxial setting, the external diameter of described interior abrasive disk is less than the internal diameter of described outer grinding dish, described interior abrasive disk 10 and described outer grinding dish 20 can relatively independently move up and down, so, not only can use 10 pairs of grinding pads 2 of outer grinding dish 20 and interior abrasive disk to arrange simultaneously, can also use in turn 10 pairs of grinding pads 2 of outer grinding dish 20 and interior abrasive disk to arrange, avoid excessive its surperficial lapping liquid accessory substance 90 of abrasive disk to be not easy the problem of getting rid of, with in time, effectively get rid of lapping liquid accessory substance, improve arrangement efficiency and the effect of grinding pad 2, and then raising grinding efficiency and effect.
Preferably, in the grinder pad finisher of the present embodiment, also comprise the first pneumatic tube 70 and the second pneumatic tube 80, described the first pneumatic tube 70 drives described inner disc bracing frame 30 to move up and down, and described the second pneumatic tube 80 drives described outer disk bracing frame 40 to move up and down.By the first pneumatic tube 70 and the second pneumatic tube 80 are set, can realize respectively the driving up and down to inner disc bracing frame 30 and outer disk bracing frame 40.Certainly, the drive form up and down of inner disc bracing frame 30 and outer disk bracing frame 40 also can adopt other forms to realize.
Preferably, in the grinder pad finisher of the present embodiment, the working surface of described outer grinding dish 20 is that lower surface is provided with some runners of dispersing from inside to outside 201, described some runners of dispersing from inside to outside 201 evenly arrange around the center of circle of described outer grinding dish 20, thereby can so that lapping liquid to surrounding Uniform Flow, reduce lapping liquid and on grinding pad 2, realize the eliminating that is uniformly distributed the required time and accelerates lapping liquid accessory substance 90, thereby can improve grinding efficiency and grinding effect.
Preferably, in the grinder pad finisher of the present embodiment, the bending direction that described runner 201 is parabolic type and described runner is consistent with the direction of rotation of described outer grinding dish 20, so setting can be more smooth and easy so that lapping liquid and lapping liquid accessory substance 90 flow, can further improve the eliminating efficiency of lapping liquid accessory substance 90 and reduce lapping liquid and on grinding pad, realize the required time that distributes, thereby can further improve grinding efficiency and grinding effect.
Preferably, in the grinder pad finisher of the present embodiment, the width of described runner 201 broadens from inside to outside gradually, so arrange, can be more smooth and easy so that lapping liquid and lapping liquid accessory substance 90 flows, can further improve the eliminating efficiency of lapping liquid accessory substance and reduce lapping liquid and on grinding pad, realize the required time that distributes, thereby can further improve grinding efficiency and grinding effect.
Preferably, in the grinder pad finisher of the present embodiment, the working surface of described interior abrasive disk 10 is provided with some runners of dispersing from inside to outside 101, described some runners of dispersing from inside to outside 101 evenly arrange around the center of circle of described interior abrasive disk 10, thereby can so that lapping liquid to surrounding Uniform Flow, reduce lapping liquid and on grinding pad 2, realize the eliminating that is uniformly distributed the required time and accelerates lapping liquid accessory substance 90, thereby can improve grinding efficiency and grinding effect.
Preferably, in the grinder pad finisher of the present embodiment, described runner 101 is parabolic type, and the bending direction of described runner 101 is consistent with the direction of rotation of described interior abrasive disk, so setting can be more smooth and easy so that lapping liquid and lapping liquid accessory substance 90 flow, can further improve the eliminating efficiency of lapping liquid accessory substance and reduce lapping liquid and on grinding pad 2, realize the required time that distributes, thereby can further improve grinding efficiency and grinding effect.
Preferably, in the grinder pad finisher of the present embodiment, the width of described runner 101 broadens from inside to outside gradually, so setting can be more smooth and easy so that lapping liquid and lapping liquid accessory substance 90 flow, can further improve the eliminating efficiency of lapping liquid accessory substance 90 and reduce lapping liquid and on grinding pad 2, realize the required time that distributes, thereby can further improve grinding efficiency and grinding effect.
Preferably, in above-mentioned grinder pad finisher, described outer disk bracing frame 40 is cylindric, the inside of described outer disk bracing frame 40 is provided with the through hole for described interior abrasive disk 10, described inverted position turn rotating motor 60 is provided with the shrinkage pool moving up and down for described inside turn rotating motor 50, thereby described interior abrasive disk and the relatively independent of described outer grinding dish are moved up and down.
Please continue to refer to Fig. 1 to Fig. 3, the using method of the grinder pad finisher that the utility model provides can be as follows:
First, make inside and outside abrasive disk 10,20 contact grinding pad 2 downwards simultaneously, arrange 10 seconds left and right time;
Then, abrasive disk 10 in promoting, only outer grinding dish 20 contact grinding pads 2, arrange 10 seconds left and right time;
Then, promote outer grinding dish 20, only interior abrasive disk 10 contacts grinding pad 2 downwards, arranges 10 seconds left and right time;
Finally, upwards promote described inside and outside abrasive disk 10,20, complete the grinding pad housekeeping of one-period.
In sum, the grinder pad finisher that the utility model provides and lapping device, by changing an existing large abrasive disk into an annular outer grinding dish and interior abrasive disk, the external diameter of described interior abrasive disk is less than the internal diameter of described outer grinding dish, described interior abrasive disk and described outer grinding dish coaxially arrange, described interior abrasive disk and described outer grinding dish can relatively independently move up and down, so, not only can use outer grinding dish and interior abrasive disk to arrange grinding pad simultaneously, can also use in turn outer grinding dish and interior abrasive disk to arrange grinding pad, avoid excessive its surperficial lapping liquid accessory substance of abrasive disk to be not easy the problem of getting rid of, with in time, effectively get rid of lapping liquid accessory substance, improve arrangement efficiency and the effect of grinding pad, and then raising grinding efficiency and effect.
Obviously, those skilled in the art can carry out various changes and modification and not depart from spirit and scope of the present utility model the utility model.Like this, if within of the present utility model these are revised and modification belongs to the scope of the utility model claim and equivalent technologies thereof, the utility model is also intended to comprise these changes and modification interior.
Claims (10)
1. a grinder pad finisher, it is characterized in that, comprise interior abrasive disk, the outer grinding dish of annular, inside turn rotating motor, inverted position turn rotating motor, inner disc bracing frame and outer disk bracing frame, one end of described inner disc bracing frame is fixedly connected with the inoperative surface of described interior abrasive disk, the other end is connected with described inside turn rotating motor, one end of described outer disk bracing frame is fixedly connected with the inoperative surface of described outer grinding dish, the other end is connected with described inverted position turn rotating motor, the external diameter of described interior abrasive disk is less than the internal diameter of described outer grinding dish, described interior abrasive disk and described outer grinding dish coaxially arrange, described interior abrasive disk and described outer grinding dish can relatively independently move up and down.
2. grinder pad finisher according to claim 1, is characterized in that, also comprises the first pneumatic tube and the second pneumatic tube, and described the first pneumatic tube drives described inner disc bracing frame to move up and down, and described the second pneumatic tube drives described outer disk bracing frame to move up and down.
3. grinder pad finisher according to claim 1, is characterized in that, the working surface of described outer grinding dish is provided with some runners of dispersing from inside to outside, and described some runners of dispersing from inside to outside evenly arrange around the center of circle of described outer grinding dish.
4. grinder pad finisher according to claim 3, is characterized in that, described runner is that the bending direction of parabolic type and described runner is consistent with the direction of rotation of described outer grinding dish.
5. grinder pad finisher according to claim 3, is characterized in that, the width of described runner broadens from inside to outside gradually.
6. grinder pad finisher according to claim 1, is characterized in that, the working surface of described interior abrasive disk is provided with some runners of dispersing from inside to outside, and described some runners of dispersing from inside to outside evenly arrange around the center of circle of described interior abrasive disk.
7. grinder pad finisher according to claim 6, is characterized in that, described runner is parabolic type, and the bending direction of described runner and the direction of rotation of described interior abrasive disk consistent.
8. grinder pad finisher according to claim 6, is characterized in that, the width of described runner broadens from inside to outside gradually.
9. grinder pad finisher according to claim 1, it is characterized in that, described outer disk bracing frame is cylindric, and the inside of described outer disk bracing frame is provided with the through hole passing through for described interior abrasive disk, and described inverted position turn rotating motor is provided with the shrinkage pool moving up and down for described inside turn rotating motor.
10. a lapping device, comprise grinding pad, grinding plate and grinding head, described grinding pad is layed on described grinding plate, described grinding head is arranged on described grinding pad, it is characterized in that, comprise that described grinder pad finisher is arranged on described grinding pad as the right grinder pad finisher as described in any one in 1～9 on request.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201320509981.3U CN203426856U (en) | 2013-08-20 | 2013-08-20 | Polishing pad arranging device and polishing device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201320509981.3U CN203426856U (en) | 2013-08-20 | 2013-08-20 | Polishing pad arranging device and polishing device |
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| Publication Number | Publication Date |
|---|---|
| CN203426856U true CN203426856U (en) | 2014-02-12 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201320509981.3U Expired - Fee Related CN203426856U (en) | 2013-08-20 | 2013-08-20 | Polishing pad arranging device and polishing device |
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| Country | Link |
|---|---|
| CN (1) | CN203426856U (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107650009A (en) * | 2017-11-20 | 2018-02-02 | 山东省科学院新材料研究所 | A kind of novel wafer polisher lapper |
| CN112518573A (en) * | 2020-11-06 | 2021-03-19 | 西安奕斯伟硅片技术有限公司 | Polishing apparatus, polishing machine, and polishing method |
-
2013
- 2013-08-20 CN CN201320509981.3U patent/CN203426856U/en not_active Expired - Fee Related
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107650009A (en) * | 2017-11-20 | 2018-02-02 | 山东省科学院新材料研究所 | A kind of novel wafer polisher lapper |
| CN107650009B (en) * | 2017-11-20 | 2023-08-25 | 山东省科学院新材料研究所 | Novel wafer grinding and polishing machine |
| CN112518573A (en) * | 2020-11-06 | 2021-03-19 | 西安奕斯伟硅片技术有限公司 | Polishing apparatus, polishing machine, and polishing method |
| CN112518573B (en) * | 2020-11-06 | 2022-06-07 | 西安奕斯伟硅片技术有限公司 | Polishing apparatus, polishing machine, and polishing method |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20140212 Termination date: 20190820 |