CN203270020U - Organic film coating device - Google Patents
Organic film coating device Download PDFInfo
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- CN203270020U CN203270020U CN 201320335390 CN201320335390U CN203270020U CN 203270020 U CN203270020 U CN 203270020U CN 201320335390 CN201320335390 CN 201320335390 CN 201320335390 U CN201320335390 U CN 201320335390U CN 203270020 U CN203270020 U CN 203270020U
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- evaporation
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Abstract
The utility model discloses an organic film coating device. The device comprises evaporation equipment, an electron emission device and spraying equipment, wherein the evaporation equipment comprises an evaporation vessel; the evaporation vessel is a linear evaporation vessel, and uniform organic gases are generated from the evaporation vessel; the electron emission device is horizontally arranged above the evaporation vessel, so that the organic gases evaporated from the evaporation vessel are uniformly electrified to obtain electrified organic gases; and the spraying equipment drives the electrified organic gases to move toward a backboard via the acting force of an electric field to form an organic film on the backboard. The device has the beneficial effects that the utilization rate of the organic material is increased by uniformly electrifying the evaporated organic gases; and the electrified organic gases are accelerated by utilizing the electric field, are sprayed out of the spraying equipment uniformly and are deposited on the backboard via a mask, thus improving the film forming accuracy and rate and ensuring the film uniformity during large-area film forming.
Description
Technical field
The utility model relates to active matrix organic light-emitting diode processing procedure field, relates in particular to a kind of organic film plating device.
Background technology
OLED(Organic Light Emitting Diode, Organic Light Emitting Diode) indicating meter has self luminous characteristic, adopt very thin coating of organic material and glass substrate, when electric current passes through, organic materials will be luminous, and OLED display screen visible angle is large, also has the advantages such as dynamic menu of significant saving electric energy, simple structure, high-quality, has been obtained extensive concern in the industry.
At present, the OLED indicating meter strides forward to mass production just gradually, large-sized AMOLED(Active Matrix Organic Light Emitting Diode particularly, active matrix organic light-emitting diode) indicating meter attracts attention just deeply, and form the EL(electroluminescent of this indicating meter, and organic electric field luminescence also claims electroluminescent) assembly also becomes the object of main research.The main technique of organic film that forms EL assembly luminescent layer is evaporation film-forming, traditional evaporation mode be utilize single and for the vapor deposition source of point-like as vapor deposition source, because the molecule that gasifies or distil out there is no certain directivity, it is to be attached on cavity that very many organic materialss are arranged, and real evaporation is very low to the organic materials ratio of substrate.For single point-like vapor deposition source, owing to understanding the difference because of the difference of substrate location from vapor deposition source to the distance organic film formed position, therefore be difficult to form uniform film.
Because the homogeneity of organic layer is very big on the impact that luminosity and illuminant colour cause, so when making organic layer, require evaporation coating device can form big area and the splendid evaporation layer of precision.Provide a kind of and can carry out to large-area substrates the device of plated film in existing name is called the patent of " coating source, vacuum coater and coating process thereof ", comprise: container section 24, evaporative air conditioning division 25 and evaporation top board 26 3 parts, as shown in Figure 1, in addition also comprise heating unit (not showing in Fig. 1).Evaporative air conditioning division 25 has porous laminated structure, between container section 24 and evaporation top board 26, control adjusting and the direction of evaporative air, enlarge the distribution area of air-flow, final air-flow is ejected on substrate equably, form the evaporation effect that multiple spot becomes face, by regulating distribution and the diameter of jet orifice 261, the size of regulating the overlapping deposition region of each jet orifice.But the device that this patent provides and technique also can't improve the tolerance range of organic membrane in coating process, still have the problem of larger organic materials waste, and film forming speed are not improved.
Therefore selecting suitable organic materials and the good evaporation unit of design, improve utilization ratio and the tolerance range of organic materials, will be manufacturer's researchdevelopment and future competition emphasis place.At present aspect the evaporation of organic materials; there are size and precision problem owing to blocking mask, the shortcoming that the pattern errors that usually can occur depositing is very large and inhomogeneous, thus cause the chance of the mutual interference of pixel phase and short circuit; the precision of plated film reduces, and further makes yield rate reduce.
The utility model content
The technical problem that (one) will solve
For defects, the technical problems to be solved in the utility model is how to improve traditional evaporation coating device and technique, make organic materials be attached to equably on backboard, improve tolerance range and the rate of film build of plated film, guarantee the homogeneity of thickness, improve the utilization ratio of organic materials, prevent the waste of organic materials.
(2) technical scheme
For addressing the above problem, the utility model provides a kind of organic film plating device, comprising: evaporated device 91, electron emitting device 5 and sprinkling equipment 92;
Wherein said evaporated device comprises container for evaporation 3, and described container for evaporation 3 is the linear evaporation container, produces uniform organic gas from described container for evaporation 3;
Described electron emitting device 5 is horizontally set on the top of described container for evaporation 3, makes the organic gas uniform charged that evaporates from described container for evaporation 3, obtains charged organic gas;
Described sprinkling equipment 92 makes described charged organic gas toward backboard 13 motions by the reactive force of electric field, forms organic membrane on described backboard 13.
Further, described evaporated device also comprises: heating source 1, and described heating source 1 is linear heating source or a plurality of heating source arranged side by side, is arranged on the bottom of described container for evaporation 3, organic materialss 2 in described container for evaporation 3 are heated, for the evaporation of described organic materials 2 provides uniform heat.
Further, the top of described container for evaporation 3 has the evaporation mouth 15 of slit-shaped, and the electron emission mouth of described electron emitting device 5 is positioned at the top of described evaporation mouth 15.
Further, a side of described evaporation mouth 15 arranges baffle plate 4, and described baffle plate 4 can be regulated, and can control opening and closing of described evaporation mouth 15, realizes regulating the output of organic gas in described container for evaporation 3.
Further, the surrounding of described container for evaporation 3 arranges cooling tube, and the refrigeration agent of circulation is equipped with in the inside of described cooling tube, makes described container for evaporation 3 keep constant temp.
Further, described electron emitting device 5 is linear electron beam gun, or the even neat miniature electric rifle of a plurality of arrangement, outside electron emission equably.
Further, described sprinkling equipment specifically comprises: battery lead plate 7, spray chamber 8 and mouth spray 11;
Wherein said battery lead plate 7 is arranged on the top of described spray chamber 8 chambers, described mouth spray 11 is positioned at the bottom in described spray chamber 8, described battery lead plate 7 produces electric field when externally power supply provides bias voltage, the electrical forces effect that described charged organic gas is subject to straight down moves to the bottom by the top of described spray chamber 8 chambers, until from described mouth spray 11 ejections.
Further, the large I of bias voltage that provides of described external power source is regulated according to the film forming situation of described organic membrane.
Further, between described container for evaporation 3 and described spray chamber 8, gas passage 9 is set, described electron emission mouth ejected electron is the described evaporation mouthful 15 organic gas uniform chargeds that evaporate, described charged organic gas by described gas passage 9 by 15 tangential movements of described evaporation mouth in the chamber in described spray chamber 8.
Further, between described battery lead plate 7 and described spray chamber 8, insulation division 6 is set.
Further, between described mouth spray 11 and described backboard 13, mask is set.
Further, the relative movement that remains a constant speed in the horizontal direction between described device and described backboard 13.
Further, described charged organic gas sprays from the top down from described sprinkling equipment inside, and spray forms organic membrane on described backboard on described backboard.
(3) beneficial effect
The utility model proposes a kind of organic film plating device, by traditional evaporation coating device is improved, in container for evaporation, organic materials is carried out linear evaporation, the electronics uniform charged of being launched by electron emitting device after evaporation, charged organic gas moves to and sprays in the chamber, move downward under the effect of the electrical forces that battery lead plate produces, and from spraying the mouth spray ejection of bottom, chamber, complete at last plated film by mask deposition on backboard.Compare with the evaporation mode of prior art, advantage of the present utility model is as follows:
(1) the utility model is charged again after organic materials flashes to organic gas, and is combined with the electron-emitting devices such as electron beam gun and makes the organic gas of evaporation charged, makes organic gas charged more even;
(2) produce electric field in the utility model and only realize with a battery lead plate, form potential difference by positive bias or negative bias are provided on battery lead plate, can save the space in sprinkling equipment, save the manufacturing cost of equipment;
(3) the utility model arranges container for evaporation and sprays independently structure of chamber two portions, completes the plated film of organic materials, guarantees the homogeneity of organic gas and the homogeneity of the organic membrane that spray forms.
In sum, the utility model is when evaporating organic materials, carry out linear evaporation, improved the utilization ratio of organic materials, utilize electric field to accelerate organic gas, improve the film forming speed of organic gas, shorten the production cycle of plated film, the direction of motion that guarantees simultaneously organic gas is consistent, keeps the homogeneity of film forming.When organic gas sprays, adopt top-down evaporation mode at last, mask is set on backboard, avoid the elastic fatigue that produces owing to expanding with heat and contract with cold or saggingly cause contraposition inaccurate, the accuracy that improves plated film.Further, at the evaporation mouth place of container for evaporation, baffle plate is set, seals evaporation mouthful with baffle plate when stopping evaporating, prevent that organic gas from continuing to volatilize in container, reduce the waste of organic materials, save cost.
Description of drawings
Fig. 1 is organic materials evaporation coating device structural representation of the prior art;
Fig. 2 is the structural representation of a kind of organic film plating device in the utility model embodiment;
Fig. 3 is that in the utility model embodiment, organic gas deposits to the schematic cross-section of back plate surface from spraying the chamber;
Fig. 4 be in the utility model embodiment the organic gas plated film to the schematic perspective view of backboard process.
Wherein respectively number representative structure as follows:
1, heating source, 2, organic materials, 3, container for evaporation, 4, baffle plate, 5, electron emitting device, 6, insulation division, 7, battery lead plate, 8, the spray chamber, 9, gas passage, 10, spray chamber wall, 11, mouth spray, 12, mask, 13, backboard, 14, substrate, 15, evaporation mouthful, Q, charged organic gas, V, substrate motion direction, 24, container section, 25, the evaporative air conditioning division, 26, the evaporation top board, 261, jet orifice, 91, evaporated device, 92, sprinkling equipment.
Embodiment
Below in conjunction with drawings and Examples, embodiment of the present utility model is described in further detail.Following examples are used for explanation the utility model, but are not used for limiting scope of the present utility model.
A kind of organic film plating device is provided in the utility model embodiment, and structural representation comprises following structure as shown in Figure 2: evaporated device 91, electron emitting device 5 and sprinkling equipment 92.
Wherein evaporated device comprises container for evaporation 3, and container for evaporation 3 is the linear evaporation container, produces uniform organic gas from container for evaporation 3.Container for evaporation 3 is linear container, so-called linearity is exactly that container for evaporation is in the situation that linear heating source 1 provides heat energy can produce linear organic gas in container, realize the linear evaporation of organic materials, container for evaporation 3 is generally made by stainless material, and section accommodates set organic materials 2 within it.
Also comprise in evaporated device: heating source 1, heating source 1 are linear heating source or a plurality of heating source arranged side by side, are arranged on the bottom of container for evaporation 3, the organic materialss 2 in container for evaporation 3 are heated, for the evaporation of organic materials 2 provides uniform heat.Heating source 1 is comprised of set coil, utilizes the AC power be arranged on container for evaporation 3 outsides this coil to be applied the voltage of alternating current of set frequency, can control exactly Heating temperature, thereby guarantee that organic materials can thermally equivalent.
Container for evaporation 3 is the linear evaporation container, has the evaporation mouth 15 of slit-shaped due to the top of container for evaporation 3.The surrounding of container for evaporation 3 arranges cooling tube (showing in Fig. 2), and the refrigeration agent of circulation (as gas) is equipped with in the inside of cooling tube, makes container for evaporation 3 keep constant temp, reduces the possibility of organic materials thermo-cracking or generation chemical reaction.
Electron emitting device 5 is horizontally set on the top of container for evaporation 3, and the electron emission mouth of electron emitting device 5 is positioned at the top of evaporation mouth 15, makes from evaporation mouthful 15 organic gas uniform chargeds that evaporate, and obtains charged organic gas (representing with Q in Fig. 2).The baffle plate 4(that one side setting of evaporation mouth 15 can freely be controlled is as being arranged to plug-type baffle plate), baffle plate 4 can be regulated, and can control opening and closing of evaporation mouth 15, realizes regulating the output of organic gas in container for evaporation 3.Just baffle plate 4 can be closed when not needing plated film, because organic materials also can continue to evaporate a part of gas under the remaining temperature effect of heating source, can cause the waste of organic materials, therefore in order to save material, baffle plate is set can in time close the evaporation mouth 15 of container for evaporation, save cost, also improve the service efficiency of material.
Electron emitting device 5 is horizontally set on the top of container for evaporation 3, and electron emitting device 5 is linear electron beam gun, or the even neat miniature electric rifle of a plurality of arrangement, outside electron emission equably.Electron attachment is on organic gas, and organic gas is by charged equably fully.Electron beam gun ejected electron energy can not be excessive, in order to avoid damage organic materials.The type of electron beam gun can be thermal electron emission tungsten filament electron beam gun, can be also awkward silence at a meeting electron emission rifle, and these two kinds of electron beam gun have more application in scanning electronic microscope at present.Wherein, make the charged method of organic gas be not limited to above-mentioned embodiment, can carry out all changes, make which kind of electric charge of organic gas band (plus or minus) also be not limited to above-mentioned embodiment.
Electron emitting device 5 makes the organic gas uniform charged that evaporates from container for evaporation 3, obtains charged organic gas.
Sprinkling equipment makes charged organic gas toward backboard 13 motions by the reactive force of electric field, forms organic membrane on backboard 13, and sprinkling equipment specifically comprises: battery lead plate 7, spray chamber 8 and mouth spray 11.
Battery lead plate 7 is arranged on the top that sprays chamber 8 chambers, mouth spray 11 is positioned at the bottom in spray chamber 8, battery lead plate 7 produces electric field when externally power supply provides bias voltage, reactive force by electric field makes charged organic gas from sprinkling equipment 92 ejections, form organic membrane on backboard 13, concrete, charged organic gas (Q in Fig. 2) is subject to electrical forces effect straight down in the present embodiment, move to the bottom by the top that sprays chamber 8 chambers, until from mouth spray 11 ejections, spray forms organic membrane on backboard 13 on backboard 13.
External power source is regulated according to the film forming situation of described organic membrane for the large I of bias voltage that battery lead plate 7 provides, and another battery lead plate is ground connection directly, also can be arranged near mouth spray 11, can also be arranged on the below of substrate 14 travelling belts.External power source can provide positive bias or negative bias for it according to condition, specifically provide positive bias also be to provide negative bias will according to charged organic gas charged positive and negative (namely electron emitting device 7 ejected electron is positive and negative) determine.If electron generating 7 emissions is positron, organic gas Q is also positively charged, and needing provides positive bias to battery lead plate 7, produces electric field vertically downward, and the organic gas Q of positively charged just is subject to reactive force vertically downward, moves downward; If electron generating 7 emissions is negatron, organic gas Q is also electronegative, and needing provides negative bias to battery lead plate 7, produces electric field vertically upward, and electronegative organic gas Q just is subject to reactive force vertically downward, moves downward.
In the present embodiment, battery lead plate 7 adopts stainless material to make, but is not limited to this material, and the large I of battery lead plate 7 designs according to the size of spray 8 upper ends, chamber.In order to make organic gas obtain enough speed, spray chamber 8 and need to keep certain distance at the height of vertical direction, in order to improve into film uniformity, horizontal direction also needs to keep certain width.Spray chamber wall 10 adopts stainless steel, but is not limited to this material.
The present embodiment is not limited to above-mentioned embodiment, can carry out all changes.For example, the quantity of the container for evaporation shown in above-mentioned embodiment, configuration, shape, configuration, the size of evaporation mouth, the size of mouth spray.
The charged rear arrival spray of organic gas chamber 8, the position and the size that spray chamber 8 are not particularly limited.But in order to ensure organic gas can by fully, charged equably, spray chamber 8 and electron beam gun 5 and evaporation mouthfuls 15 need to maintain a certain distance.For this reason, gas passage 9 is set at container for evaporation 3 and spray between chamber 8, electron emission mouth ejected electron will be evaporated mouthful 15 organic gas uniform chargeds that evaporate, and charged organic gas passes through gas passage 9 by evaporating mouthful 15 tangential movements in the chamber in spray chamber 8.
Insulation division 6 is set at battery lead plate 7 and spray between chamber 8, for not affecting battery lead plate 7, insulation division 6 need to be set makes between battery lead plate 7 and spray chamber 8 and insulate, the material of insulation division 6 is not particularly limited.Organic gas Q is subject to electrical forces straight down, and the acquisition acceleration begins downward accelerated motion under the effect of electrical forces, moves to mouth spray 15 places and ejection.
To be organic gas deposit to the schematic cross-section on substrate 13 surfaces to Fig. 3 from spray chamber 8, between mouth spray 11 and backboard 13, mask is set, and after organic gas is accelerated, by mask 12, then deposits on backboard 13 and form organic membrane.Because mask 12 is positioned at backboard 13 tops, can shorten the distance of mask and substrate 14, avoid elastic fatigue that large-area metal mask produces due to the relation of expanding with heat and contract with cold or sagging, thereby avoided the inaccurate problem of contraposition, the accuracy that improves plated film.In order to realize the deposition of big area organic materials, the lateral length that sprays chamber 8 is not particularly limited.
Need in the horizontal direction the relative movement that remains a constant speed between the described organic film plating device of the present embodiment and backboard 13, organic materials deposition system operation schematic diagram as shown in Figure 4, substrate 14 keeps certain speed V to move from mouth spray 11 belows, makes whole backboard 13 be coated equably organic materials.But the utility model is not limited to mobile substrate, can also be to spray chamber 8 to keep certain speed to move.In order to reach needed organic membrane thickness, spray the chamber and also can adopt back and forth scan-type to move, thereby can be more applicable for the production in enormous quantities of large-area substrates and device, and can improve the utilising efficiency of organic materials, also can improve film forming speed.
The film coating apparatus that the present embodiment provides carries out linear evaporation when evaporating organic materials, improved the utilization ratio of organic materials.Utilize electric field to accelerate organic gas, improve the film forming speed of organic gas, shorten the production cycle of plated film, guarantee that simultaneously the direction of motion of organic gas is consistent, keep the homogeneity of film forming.When organic gas sprays, adopt top-down evaporation mode at last, mask is set on backboard, avoid the elastic fatigue that produces owing to expanding with heat and contract with cold or saggingly cause contraposition inaccurate, the accuracy that improves plated film.Further, by at the evaporation mouth, baffle plate being set, can seal the evaporation mouth with baffle plate when stopping evaporating, prevent that organic gas from continuing to volatilize in container, reduce the waste of organic materials, the saving cost.
Above embodiment only is used for explanation the utility model; and be not limitation of the utility model; the those of ordinary skill in relevant technologies field; in the situation that do not break away from spirit and scope of the present utility model; can also make a variety of changes and modification; therefore all technical schemes that are equal to also belong to category of the present utility model, and scope of patent protection of the present utility model should be defined by the claims.
Claims (13)
1. an organic film plating device, is characterized in that, comprises evaporated device, electron emitting device and sprinkling equipment;
Wherein said evaporated device comprises container for evaporation, and described container for evaporation is the linear evaporation container, produces uniform organic gas from described container for evaporation;
Described electron emitting device is horizontally set on the top of described container for evaporation, makes the organic gas uniform charged that evaporates from described container for evaporation, obtains charged organic gas;
Described sprinkling equipment makes described charged organic gas toward the backboard motion by the reactive force of electric field, forms organic membrane on described backboard.
2. device as claimed in claim 1, it is characterized in that, described evaporated device also comprises: heating source, described heating source is linear heating source or a plurality of heating source arranged side by side, be arranged on the bottom of described container for evaporation, organic materials in described container for evaporation is heated, for the evaporation of described organic materials provides uniform heat.
3. device as claimed in claim 1, is characterized in that, the top of described container for evaporation has the evaporation mouth of slit-shaped, and the electron emission mouth of described electron emitting device is positioned at the top of described evaporation mouth.
4. device as claimed in claim 3, is characterized in that, a side of described evaporation mouth arranges baffle plate, and described baffle plate can be regulated, and can control opening and closing of described evaporation mouth, realizes regulating the output of organic gas in described container for evaporation.
5. device as claimed in claim 1, is characterized in that, the surrounding of described container for evaporation arranges cooling tube, makes described container for evaporation keep constant temp.
6. device as claimed in claim 1, is characterized in that, described electron emitting device is linear electron beam gun, or the even neat miniature electric rifle of a plurality of arrangement, outside electron emission equably.
7. device as claimed in claim 1, is characterized in that, described sprinkling equipment specifically comprises: battery lead plate, spray chamber and mouth spray;
Wherein said battery lead plate is arranged on the top of described spray chamber chamber, described mouth spray is positioned at the bottom in described spray chamber, described battery lead plate produces electric field when externally power supply provides bias voltage, the electrical forces effect that described charged organic gas is subject to straight down moves to the bottom by the top of described spray chamber chamber, until from described mouth spray ejection.
8. device as claimed in claim 7, is characterized in that, the large I of the bias voltage that described external power source provides is regulated according to the film forming situation of described organic membrane.
9. device as described in claim 3 or 7, it is characterized in that, between described container for evaporation and described spray chamber, gas passage is set, the organic gas uniform charged that described electron emission mouth ejected electron evaporates described evaporation mouth, described charged organic gas moves in the chamber in described spray chamber by described evaporation mouthful horizontal saliva is flat by described gas passage.
10. device as claimed in claim 7, is characterized in that, between described battery lead plate and described spray chamber, insulation division is set.
11. device as claimed in claim 7 is characterized in that, between described mouth spray and described backboard, mask is set.
12. device as claimed in claim 7 is characterized in that, the relative movement that remains a constant speed in the horizontal direction between described device and described backboard.
13. device as claimed in claim 1 is characterized in that, described charged organic gas sprays from the top down from described sprinkling equipment inside, and spray forms organic membrane on described backboard on described backboard.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201320335390 CN203270020U (en) | 2013-06-09 | 2013-06-09 | Organic film coating device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201320335390 CN203270020U (en) | 2013-06-09 | 2013-06-09 | Organic film coating device |
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| Publication Number | Publication Date |
|---|---|
| CN203270020U true CN203270020U (en) | 2013-11-06 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN 201320335390 Expired - Lifetime CN203270020U (en) | 2013-06-09 | 2013-06-09 | Organic film coating device |
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| CN (1) | CN203270020U (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103305794A (en) * | 2013-06-09 | 2013-09-18 | 京东方科技集团股份有限公司 | Organic film coating device and method |
| WO2019037546A1 (en) * | 2017-08-24 | 2019-02-28 | 京东方科技集团股份有限公司 | Vapor deposition device and vapor deposition method |
-
2013
- 2013-06-09 CN CN 201320335390 patent/CN203270020U/en not_active Expired - Lifetime
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103305794A (en) * | 2013-06-09 | 2013-09-18 | 京东方科技集团股份有限公司 | Organic film coating device and method |
| WO2014198112A1 (en) * | 2013-06-09 | 2014-12-18 | 京东方科技集团股份有限公司 | Organic film coating device and film coating method |
| CN103305794B (en) * | 2013-06-09 | 2016-03-02 | 京东方科技集团股份有限公司 | A kind of organic film plating device and method |
| WO2019037546A1 (en) * | 2017-08-24 | 2019-02-28 | 京东方科技集团股份有限公司 | Vapor deposition device and vapor deposition method |
| US11118259B2 (en) | 2017-08-24 | 2021-09-14 | Hefei Xinsheng Optoelectronics Technology Co., Ltd. | Evaporation device and evaporation method |
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| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
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Granted publication date: 20131106 |