CN203223611U - Electromagnetic gate valve mechanism for vacuum coating equipment - Google Patents
Electromagnetic gate valve mechanism for vacuum coating equipment Download PDFInfo
- Publication number
- CN203223611U CN203223611U CN 201320199023 CN201320199023U CN203223611U CN 203223611 U CN203223611 U CN 203223611U CN 201320199023 CN201320199023 CN 201320199023 CN 201320199023 U CN201320199023 U CN 201320199023U CN 203223611 U CN203223611 U CN 203223611U
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- valve
- valve plate
- electromagnetic coil
- electromagnetic
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Abstract
The utility model discloses an electromagnetic gate valve mechanism for vacuum coating equipment. The electromagnetic gate valve mechanism comprises a driving part and a gate valve part. The driving part comprises a coupler and a driving motor which are connected together, and the coupler and the driving motor are installed above a vacuum chamber top plate; the gate valve part comprises a valve body, a valve plate and a transmission shaft, wherein the valve body and the valve plate are matched with each other, the transmission shaft is installed below the vacuum chamber top plate and connected with the coupler, the valve plate and the transmission shaft are connected together in a threaded connection mode, one face, close to the valve plate, of the valve body is provided with an electromagnetic coil, and a protection plate separating the electromagnetic coil from the valve plate is arranged on the external of the electromagnetic coil; an optoelectronic switch is arranged on the vacuum chamber top plate, and a positioning block is installed on the valve plate. According to the electromagnetic gate valve mechanism of the special structure and for the vacuum coating equipment, the electromagnetic coil is installed in the valve body in an uniformly distributed mode, so even though a fixed amount of deformation of the valve plate is generated, the valve plate can still keep the original state under adsorption of the electromagnetic valve body, and stable leakproofness is guaranteed.
Description
Technical field
The utility model relates to the vacuum coating equipment field, especially relates to a kind of electromagnetic door valve system for vacuum coating equipment.
Background technique
Traditional vacuum coating equipment family of power and influence drives valve plate by drive part valve body is closed, and this kind mode of closing is to close by the drive part applied force fully, and its major defect is that sealing is stable inadequately.Because valve plate is under the hot operation state for a long time, so can not avoid its metaboly that expands with heat and contract with cold, in case distortion has taken place valve plate, the power by drive part is to be difficult to guarantee the stable of its sealing with the end face that valve plate fits in valve body fully.
The model utility content
Technical problem to be solved in the utility model is to provide a kind of electromagnetic door valve system for vacuum coating equipment at problems of the prior art, its objective is by at the uniform installation electromagnetic coil of valve inner, guarantee the stable of valve plate and valve body applying sealing.
The technical solution of the utility model is the electromagnetic door valve system that this kind is used for vacuum coating equipment, described electromagnetic door valve system comprises drive part and family of power and influence's part, described drive part comprises coupling and the drive motor that links together, and coupling and drive motor are installed in the top of vacuum chamber top board; The described family of power and influence partly comprises valve body and the valve plate that cooperatively interacts, and the transmission shaft that is installed in vacuum chamber top board below and is connected with coupling, described valve plate links together by the mode that is threaded with transmission shaft, near the one side of valve plate electromagnetic coil is installed on the described valve body, and the outside of electromagnetic coil is provided with the backplate that electromagnetic coil and valve plate are separated; Described vacuum chamber top board is provided with optoelectronic switch, on the described valve plate positioning block is installed.
The position that electromagnetic coil is installed on the described valve body is groove structure, and described electromagnetic coil is installed in this groove.
Described electromagnetic coil is evenly distributed in the groove.
The electromagnetic door valve system that this kind with said structure is used for vacuum coating equipment is by at the uniform installation electromagnetic coil of valve inner, and when this valve body was carried out closing motion at valve plate, its electromagnetic coil got and electric valve plate is adsorbed on its end face firmly; Because the electromagnetic coil in the valve body is the uniform valve inner that is installed in, so the suffered adsorption force of valve plate is even, even valve plate has produced a certain amount of distortion, under the absorption of electromagnetic valve body, still make it guarantee original state, thereby guaranteed the stable of sealing.
Description of drawings
The utility model is described in further detail below in conjunction with accompanying drawing:
Fig. 1 is the structural representation of the utility model valve plate closed condition.
Fig. 2 is the structural representation of the utility model valve plate open mode.
Fig. 3 is the structural representation of valve body in the utility model.
Fig. 4 is the A-A direction sectional view of structure shown in Figure 3.
In Fig. 1-4,1: valve body; 2: electromagnetic coil; 3: backplate; 4: valve plate; 5: transmission shaft; 6: the vacuum chamber top board; 7: optoelectronic switch; 8: coupling; 9: drive motor; 10: positioning block.
Embodiment
Fig. 1 and Fig. 2 are the structural representation under the utility model valve plate opening and closing state, and Fig. 3 and Fig. 4 are the sectional structure schematic representation of valve body and valve body.By Fig. 1-structure combination shown in Figure 4 as can be known, the electromagnetic door valve system that this kind is used for vacuum coating equipment comprises drive part and family of power and influence's part, drive part comprises coupling 8 and the drive motor 9 that links together, and coupling 8 and drive motor 9 are installed in the top of vacuum chamber top board 6, and this part is in the atmospheric layer zone; The family of power and influence partly comprises valve body 1 and the valve plate 4 that cooperatively interacts, and the transmission shaft 5 that is installed in vacuum chamber top board 6 belows and is connected with coupling 8, and namely in the vacuum chamber, this part is in vacuum area; Valve plate 4 links together by the mode that is threaded with transmission shaft 5, and the one side near valve plate 4 on the valve body 1 is equipped with electromagnetic coil 2, and the outside of electromagnetic coil 2 is provided with the backplate 3 that electromagnetic coil 2 and valve plate 4 are separated; , protection apron 3 major functions are that electromagnetic coil 2 is isolated, and prevent that electromagnetic coil 2 from directly contacting with valve plate 4, plays a protective role; Vacuum chamber top board 6 is provided with optoelectronic switch 7, and positioning block 10 is installed on the valve plate 4; The position that electromagnetic coil 2 is installed on the valve body 1 is groove structure, and electromagnetic coil 2 is evenly distributed in the groove.
When family of power and influence mechanism need be in closed condition, drive motor 9 obtains signal and begins rotation by coupling 8 drive transmission shafts 5, transmission shaft 5 interconnects with valve plate 4, therefore valve plate 4 will be followed the rotation of transmission shaft 5 and be moved, when valve plate 4 arrived specified position, drive motor 9 quit work.Optoelectronic switch 7 detects the positioning block 10 that is installed on the valve plate 4, and electromagnetic coil 2 obtained signal and began electricly this moment, when electromagnetic coil 2 when electric, valve plate 4 firmly can be adsorbed on the valve body 1, thereby realize closing and sealing of electromagnetic door valve system.
When the electromagnetic door valve system need be in open mode, operator's touch control switch, electromagnetic coil 2 be dead electricity, will obtain one back current by control switch electromagnetic coil 2 simultaneously moment, this back current mainly plays demagnetizing effect, is magnetized by electromagnetic coil 2 to prevent valve plate 4.Drive motor 9 obtains signal and begins rotation by coupling 8 drive transmission shafts 5, transmission shaft 5 interconnects with valve plate 4, and valve plate 4 will be followed the rotation of transmission shaft 5 and be moved, when valve plate 4 arrives specified position, drive motor 9 quits work, and family of power and influence mechanism has realized opening action.
The electromagnetic door valve system that this kind is used for vacuum coating equipment is by at the uniform installation electromagnetic coil of valve inner, and when this valve body was carried out closing motion at valve plate, its electromagnetic coil got and electric valve plate is adsorbed on its end face firmly; Because the electromagnetic coil in the valve body is the uniform valve inner that is installed in, so the suffered adsorption force of valve plate is even, even valve plate has produced a certain amount of distortion, under the absorption of electromagnetic valve body, still make it guarantee original state, thereby guaranteed the stable of sealing.
Claims (3)
1. electromagnetic door valve system that is used for vacuum coating equipment, it is characterized in that: described electromagnetic door valve system comprises drive part and family of power and influence's part, described drive part comprises coupling (8) and the drive motor (9) that links together, and coupling (8) and drive motor (9) are installed in the top of vacuum chamber top board (6); The described family of power and influence partly comprises valve body (1) and the valve plate (4) that cooperatively interacts, and the transmission shaft (5) that is installed in vacuum chamber top board (6) below and is connected with coupling (8), described valve plate (4) links together by the mode that is threaded with transmission shaft (5), the one side that described valve body (1) is gone up near valve plate (4) is equipped with electromagnetic coil (2), and the outside of electromagnetic coil (2) is provided with the backplate (3) that electromagnetic coil (2) and valve plate (4) are separated; Described vacuum chamber top board (6) is provided with optoelectronic switch (7), and positioning block (10) is installed on the described valve plate (4).
2. a kind of electromagnetic door valve system for vacuum coating equipment according to claim 1 is characterized in that: it is groove structure that described valve body (1) is gone up the position that electromagnetic coil (2) is installed, and described electromagnetic coil (2) is installed in this groove.
3. a kind of electromagnetic door valve system for vacuum coating equipment according to claim 2, it is characterized in that: described electromagnetic coil (2) is evenly distributed in the groove.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201320199023 CN203223611U (en) | 2013-04-19 | 2013-04-19 | Electromagnetic gate valve mechanism for vacuum coating equipment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201320199023 CN203223611U (en) | 2013-04-19 | 2013-04-19 | Electromagnetic gate valve mechanism for vacuum coating equipment |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN203223611U true CN203223611U (en) | 2013-10-02 |
Family
ID=49250615
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN 201320199023 Expired - Fee Related CN203223611U (en) | 2013-04-19 | 2013-04-19 | Electromagnetic gate valve mechanism for vacuum coating equipment |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN203223611U (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106439042A (en) * | 2016-12-06 | 2017-02-22 | 威海蓝膜光热科技有限公司 | Vacuum slit valve |
| CN113662020A (en) * | 2021-08-25 | 2021-11-19 | 陕西学前师范学院 | A automatic oven for cake toasts |
-
2013
- 2013-04-19 CN CN 201320199023 patent/CN203223611U/en not_active Expired - Fee Related
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106439042A (en) * | 2016-12-06 | 2017-02-22 | 威海蓝膜光热科技有限公司 | Vacuum slit valve |
| CN106439042B (en) * | 2016-12-06 | 2018-07-31 | 威海蓝膜光热科技有限公司 | Vacuum slot valve |
| CN113662020A (en) * | 2021-08-25 | 2021-11-19 | 陕西学前师范学院 | A automatic oven for cake toasts |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20131002 Termination date: 20180419 |
|
| CF01 | Termination of patent right due to non-payment of annual fee |