CN106439042A - Vacuum slit valve - Google Patents
Vacuum slit valve Download PDFInfo
- Publication number
- CN106439042A CN106439042A CN201611109537.7A CN201611109537A CN106439042A CN 106439042 A CN106439042 A CN 106439042A CN 201611109537 A CN201611109537 A CN 201611109537A CN 106439042 A CN106439042 A CN 106439042A
- Authority
- CN
- China
- Prior art keywords
- valve
- valve body
- vacuum
- sealing
- board assembly
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000007789 sealing Methods 0.000 claims abstract description 105
- 230000007704 transition Effects 0.000 claims description 8
- 239000007769 metal material Substances 0.000 claims description 6
- 229910000838 Al alloy Inorganic materials 0.000 claims description 3
- 229910000975 Carbon steel Inorganic materials 0.000 claims description 3
- 229910000831 Steel Inorganic materials 0.000 claims description 3
- 239000010962 carbon steel Substances 0.000 claims description 3
- 239000010959 steel Substances 0.000 claims description 3
- 230000006378 damage Effects 0.000 description 4
- 238000004519 manufacturing process Methods 0.000 description 4
- 239000000463 material Substances 0.000 description 4
- 238000001771 vacuum deposition Methods 0.000 description 3
- 230000000694 effects Effects 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 241000208340 Araliaceae Species 0.000 description 1
- 240000007594 Oryza sativa Species 0.000 description 1
- 235000007164 Oryza sativa Nutrition 0.000 description 1
- 235000005035 Panax pseudoginseng ssp. pseudoginseng Nutrition 0.000 description 1
- 235000003140 Panax quinquefolius Nutrition 0.000 description 1
- 238000005452 bending Methods 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 235000008434 ginseng Nutrition 0.000 description 1
- 238000009413 insulation Methods 0.000 description 1
- 238000002955 isolation Methods 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000007747 plating Methods 0.000 description 1
- 235000009566 rice Nutrition 0.000 description 1
- 238000005096 rolling process Methods 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K1/00—Lift valves or globe valves, i.e. cut-off apparatus with closure members having at least a component of their opening and closing motion perpendicular to the closing faces
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K1/00—Lift valves or globe valves, i.e. cut-off apparatus with closure members having at least a component of their opening and closing motion perpendicular to the closing faces
- F16K1/32—Details
- F16K1/34—Cutting-off parts, e.g. valve members, seats
- F16K1/36—Valve members
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K1/00—Lift valves or globe valves, i.e. cut-off apparatus with closure members having at least a component of their opening and closing motion perpendicular to the closing faces
- F16K1/32—Details
- F16K1/34—Cutting-off parts, e.g. valve members, seats
- F16K1/42—Valve seats
Landscapes
- Engineering & Computer Science (AREA)
- General Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Sliding Valves (AREA)
- Details Of Valves (AREA)
Abstract
Description
Claims (10)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201611109537.7A CN106439042B (en) | 2016-12-06 | 2016-12-06 | Vacuum slot valve |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201611109537.7A CN106439042B (en) | 2016-12-06 | 2016-12-06 | Vacuum slot valve |
Publications (2)
Publication Number | Publication Date |
---|---|
CN106439042A true CN106439042A (en) | 2017-02-22 |
CN106439042B CN106439042B (en) | 2018-07-31 |
Family
ID=58223947
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN201611109537.7A Active CN106439042B (en) | 2016-12-06 | 2016-12-06 | Vacuum slot valve |
Country Status (1)
Country | Link |
---|---|
CN (1) | CN106439042B (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN109982512A (en) * | 2019-04-08 | 2019-07-05 | 深圳市恒荣晟电子有限公司 | Selective vacuum resin hole plugging machine front door lifting device |
Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH05251361A (en) * | 1992-03-05 | 1993-09-28 | Canon Inc | Gate and vacuum treatment device |
CN201695083U (en) * | 2010-06-08 | 2011-01-05 | 湘潭宏大真空设备有限公司 | Insertion plate valve for vacuum film coating production line |
CN102374295A (en) * | 2010-08-17 | 2012-03-14 | 初星太阳能公司 | Slit valve for vacuum chamber module |
CN203223611U (en) * | 2013-04-19 | 2013-10-02 | 芜湖真空科技有限公司 | Electromagnetic gate valve mechanism for vacuum coating equipment |
CN206234368U (en) * | 2016-12-06 | 2017-06-09 | 威海蓝膜光热科技有限公司 | Vacuum slot valve |
-
2016
- 2016-12-06 CN CN201611109537.7A patent/CN106439042B/en active Active
Patent Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH05251361A (en) * | 1992-03-05 | 1993-09-28 | Canon Inc | Gate and vacuum treatment device |
CN201695083U (en) * | 2010-06-08 | 2011-01-05 | 湘潭宏大真空设备有限公司 | Insertion plate valve for vacuum film coating production line |
CN102374295A (en) * | 2010-08-17 | 2012-03-14 | 初星太阳能公司 | Slit valve for vacuum chamber module |
CN203223611U (en) * | 2013-04-19 | 2013-10-02 | 芜湖真空科技有限公司 | Electromagnetic gate valve mechanism for vacuum coating equipment |
CN206234368U (en) * | 2016-12-06 | 2017-06-09 | 威海蓝膜光热科技有限公司 | Vacuum slot valve |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN109982512A (en) * | 2019-04-08 | 2019-07-05 | 深圳市恒荣晟电子有限公司 | Selective vacuum resin hole plugging machine front door lifting device |
Also Published As
Publication number | Publication date |
---|---|
CN106439042B (en) | 2018-07-31 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
C06 | Publication | ||
PB01 | Publication | ||
C10 | Entry into substantive examination | ||
SE01 | Entry into force of request for substantive examination | ||
GR01 | Patent grant | ||
GR01 | Patent grant | ||
TR01 | Transfer of patent right |
Effective date of registration: 20180829 Address after: 264205 West Village, Huancui Town, Weihai City, Shandong Province Patentee after: WEIHAI HANZI VACUUM TECHNOLOGY Co.,Ltd. Address before: 264200 Jingshan Road, Yang Ting Town, Huancui District, Weihai, Shandong Patentee before: WEIHAI LANMO PHOTO-THERMAL TECHNOLOGY Co.,Ltd. |
|
TR01 | Transfer of patent right | ||
TR01 | Transfer of patent right |
Effective date of registration: 20240122 Address after: 104-1, Building 1, Jiake Zhongchuang Valley Park, No. 3333 Guangyi Road, Daqiao Town, Nanhu District, Jiaxing City, Zhejiang Province, 314000 Patentee after: Xiaorui Vacuum Equipment (Jiaxing) Co.,Ltd. Country or region after: China Address before: 264205 West Village, Huancui Town, Weihai City, Shandong Province Patentee before: WEIHAI HANZI VACUUM TECHNOLOGY Co.,Ltd. Country or region before: China |
|
TR01 | Transfer of patent right |