CN106439042A - Vacuum slit valve - Google Patents
Vacuum slit valve Download PDFInfo
- Publication number
- CN106439042A CN106439042A CN201611109537.7A CN201611109537A CN106439042A CN 106439042 A CN106439042 A CN 106439042A CN 201611109537 A CN201611109537 A CN 201611109537A CN 106439042 A CN106439042 A CN 106439042A
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- China
- Prior art keywords
- valve
- valve body
- vacuum
- sealing
- board assembly
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000007789 sealing Methods 0.000 claims abstract description 105
- 230000007704 transition Effects 0.000 claims description 8
- 239000007769 metal material Substances 0.000 claims description 6
- 229910000838 Al alloy Inorganic materials 0.000 claims description 3
- 229910000975 Carbon steel Inorganic materials 0.000 claims description 3
- 229910000831 Steel Inorganic materials 0.000 claims description 3
- 239000010962 carbon steel Substances 0.000 claims description 3
- 239000010959 steel Substances 0.000 claims description 3
- 230000006378 damage Effects 0.000 description 4
- 238000004519 manufacturing process Methods 0.000 description 4
- 239000000463 material Substances 0.000 description 4
- 238000001771 vacuum deposition Methods 0.000 description 3
- 230000000694 effects Effects 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 241000208340 Araliaceae Species 0.000 description 1
- 240000007594 Oryza sativa Species 0.000 description 1
- 235000007164 Oryza sativa Nutrition 0.000 description 1
- 235000005035 Panax pseudoginseng ssp. pseudoginseng Nutrition 0.000 description 1
- 235000003140 Panax quinquefolius Nutrition 0.000 description 1
- 238000005452 bending Methods 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 235000008434 ginseng Nutrition 0.000 description 1
- 238000009413 insulation Methods 0.000 description 1
- 238000002955 isolation Methods 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000007747 plating Methods 0.000 description 1
- 235000009566 rice Nutrition 0.000 description 1
- 238000005096 rolling process Methods 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K1/00—Lift valves or globe valves, i.e. cut-off apparatus with closure members having at least a component of their opening and closing motion perpendicular to the closing faces
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K1/00—Lift valves or globe valves, i.e. cut-off apparatus with closure members having at least a component of their opening and closing motion perpendicular to the closing faces
- F16K1/32—Details
- F16K1/34—Cutting-off parts, e.g. valve members, seats
- F16K1/36—Valve members
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K1/00—Lift valves or globe valves, i.e. cut-off apparatus with closure members having at least a component of their opening and closing motion perpendicular to the closing faces
- F16K1/32—Details
- F16K1/34—Cutting-off parts, e.g. valve members, seats
- F16K1/42—Valve seats
Landscapes
- Engineering & Computer Science (AREA)
- General Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Sliding Valves (AREA)
- Details Of Valves (AREA)
Abstract
The invention relates to a vacuum slit valve which comprises a valve body. The valve body is provided with a channel for conveying a strip, and a vacuum accommodating cavity is disposed in the valve body. A valve body assembly and a valve plate assembly are placed in the vacuum accommodating cavity, and an executor connected with the valve plate assembly is arranged outside the valve body assembly. The valve body assembly is provided with a channel for conveying the strip, and the channel arranged on the valve body assembly is communicated with the channel arranged on the valve body, an included angle between the sealing surface of the valve body assembly and the working direction of the strip is 10-45 degrees, and at least one compressible sealing element surrounds a channel outlet of the sealing surface of the valve body assembly. An included angle between the sealing surface of the valve plate assembly and the working direction of the strip is 10-45 degrees, and the sealing surface of the valve plate assembly is provided with compressible sealing elements corresponding to the sealing elements on the sealing surface of the valve body assembly. According to the vacuum slit valve, under the conditions that the strip is not damaged, vacuum sealing of different vacuum chamber parts is achieved.
Description
Technical field
The invention belongs to technical field of vacuum plating, it is related to vacuum chamber isolation technology, specifically, be related to one kind and be used for rolling up
Vacuum slot valve to isolated vacuum room in volume flexible strip vacuum coating production line.
Background technology
In volume to volume flexible strip vacuum coating production line, the length of band reaches thousands of rice, and the two ends of equipment are cylinders
The material retractable platform of shape, due to the requirement of film layer structure, production line is up to tens meters.During carrying out plated film, band is sequentially
Pass in and out one or more vacuum chambers.At the end of producing, the coating process area in the middle part of equipment needs to continue to keep vacuum state, and
The material retractable platform of equipment needs to recover atmospheric condition.Therefore vacuum slot valve needs in the case of not turning off destruction band, real
The vacuum insulation of existing adjacent vacuum room.
The width of band is far longer than its thickness, and the notch profile that band passes through is also that width is more than its height.Therefore, exist
The valve that generally will be provided with this feature in the art is referred to as " slit valve ".
The Chinese invention patent of Publication No. CN 102374295 A discloses a kind of slit valve for vacuum chamber module,
Specifically disclose a kind of slit to be provided for being attached to vacuum chamber module with the wall portion in make position seal modules
In channel opening, and provide by the path of channel opening in open position.This valve module includes rotatable axle, and it is being opened
Driven by rotary actuator between position of rotation and closure position of rotation.Elongation sealing plate in the closure position of rotation of axle
Seal against module wall portion on channel opening.At least one arm members makes sealing plate connect with axle.Arm members are revolved together with axle
Turn and be pivotally attached on sealing plate.Sealing plate is biased to articulated position with respect to arm members.This patent of invention
In slit valve closure when, sealing plate with substrate direction of advance in vertical state, if using in volume to volume flexible strip vacuum
Coating film production line easily causes to band to damage, and can cut off band what is more.There is compressible sealing member on its sealing plate, and close
Front cover is incompressible rigid surface, if clip band and seal together, meeting between band and incompressible rigid surface
Produce not sealable dead band, thus producing gas leakage, leading to poorly sealed, causing vacuum sealing effect bad.
Content of the invention
The present invention is directed to the problems referred to above such as the damage band of prior art presence, vacuum sealing effect difference, there is provided a kind of
Vacuum slot valve, this valve, in the case of not destroying band, solves the vacuum sealing between different vacuum chambers.
In order to achieve the above object, the invention provides a kind of vacuum slot valve, including：
Valve body, valve body is provided with the passage for conveying band, is provided with vacuum accommodating chamber inside valve body；
It is positioned over the valve component that vacuum accommodates intracavity, valve component is provided with the passage for conveying band, and located at valve
Passage on body assembly and the channel connection on valve body；Valve component sealing surface with the angle of band direction of advance is
10-45 degree, the channel outlet of valve component sealing surface is surrounded with least one compressible sealing member；
It is positioned over the valve board assembly within vacuum accommodating chamber, described valve board assembly and described valve component cooperation, valve plate group
The angle of part sealing surface and band direction of advance is 10-45 degree, valve board assembly sealing surface be provided with valve component sealing surface on
The corresponding compressible sealing member of sealing member；
It is arranged at the executor outside valve body, the drive rod of described executor passes through valve body with valve board assembly even
Connect, for driving valve board assembly to move.
Further, the channel entrance of the valve component joint face being connected with valve body is surrounded with least one sealing
Part, valve component is tightly connected with valve body by sealing member.
Further, it is provided with sealing device between described executor and valve body, the drive rod of described executor passes through
Sealing device is connected with described valve board assembly.
Preferably, described sealing device includes seal receptacle and the sealing ring being installed in seal receptacle.
Further, it is connected with transition buffer device between the drive rod of described executor and valve board assembly.
Preferably, described transition buffer device includes the base being installed on valve board assembly and the drive rod with executor connects
The transitional hinge connecing, transitional hinge is connected with base by bearing pin.
Further, described vacuum receiving intracavity is also placed with the stopping means for limiting valve board assembly motion, described
Stopping means are installed on valve component edge.
Preferably, it is rectangular channel located at the passage on valve body and the passage on valve component.
Preferably, described valve component and valve member are made by metal material.
Preferably, described metal material is one or more of carbon steel, rustless steel, aluminium alloy.
Further, when the channel outlet of valve component sealing surface is surrounded with least two compressible sealing members, valve body
It is connected with vacuum between adjacent two sealing members between adjacent two sealing members or on valve board assembly sealing surface on assembly sealing surface
Pump, in valve closing, starting vacuum pump makes to be formed gradient vacuum between sealing member.
Compared with prior art, beneficial effects of the present invention are：
(1), in vacuum slot valve of the present invention, valve component sealing surface and valve board assembly sealing surface are inclined-plane, and with band
The angle of material direction of advance is 10-45 degree, and when valve closes, valve component is fitted tightly with valve board assembly, and band only occurs
Low-angle gentle bending, will not damage band, and the sealing member between valve component and valve board assembly compresses simultaneously, due to
Band relatively thin (thickness about below 0.4mm), can achieve and carry sealing secretly.
(2) present invention is used for the sealing member of sealing simultaneously located at valve component and valve board assembly, when being sealed, valve body
Sealing member on assembly is interacted with the sealing member on valve board assembly, and all under valve board assembly, backwardness is compressed, and increases close
Contact area between sealing, reduces gas leakage space, improves sealing effectiveness it is ensured that pressure differential between adjacent vacuum room.
(3) sealing device is adopted to seal between executor of the present invention and valve body, the gas to outside atmosphere and executor
The sealing it is ensured that cylinder of executor and valve body is sealed between cylinder and between outside atmosphere and valve body,
Guarantee the vacuum state of vacuum accommodating chamber, further increase sealing effectiveness.
Brief description
Fig. 1 is the structural representation of valve body in one embodiment of the invention.
Fig. 2 is the structural representation of valve component in one embodiment of the invention.
Fig. 3 is the cross-sectional view of valve component in one embodiment of the invention.
Fig. 4 is the structural representation of valve board assembly in one embodiment of the invention.
Fig. 5 is the cross-sectional view of valve board assembly in one embodiment of the invention.
Fig. 6 is the structural representation of executor in one embodiment of the invention.
Fig. 7 is the structural representation of valve component in one embodiment of the present invention.
Fig. 8 is the structural representation of sealing device in another embodiment of the present invention.
Fig. 9 is the structural representation of transition buffer device in further embodiment of this invention.
Figure 10 is the structural representation of the present invention one optimum embodiment.
Figure 11 is the view after valve opening when transmitting band in embodiment illustrated in fig. 10 of the present invention.
Figure 12 is the view after valve closure when transmitting band in embodiment illustrated in fig. 10 of the present invention.
In figure, 1, valve body, 101, first passage, 102, second channel, 103, vacuum accommodating chamber, 2, band, 3, valve
Body assembly, 301, third channel, 302, valve component sealing surface, 303, first seal, 304, second seal, 305, valve body
Assembly joint face, the 306, the 5th sealing member, 4, valve board assembly, 401, valve board assembly sealing surface, the 402, the 3rd sealing member, 403,
Four sealing members, 5, executor, 501, cylinder rod, 6, sealing device, 601, seal receptacle, 602, sealing ring, 7, transition buffer device,
701st, base, 702, transitional hinge, 703, bearing pin, 8, stopping means.
Specific embodiment
Below, by exemplary embodiment, the present invention is specifically described.It should be appreciated, however, that not entering one
In the case of step narration, the element in an embodiment, structure and features can also be advantageously incorporated into other embodiment
In.
In describing the invention, it should be noted that term " interior ", " outward ", "left", "right", " on ", the instruction such as D score
Orientation or position relationship be based on position relationship shown in the drawings, be for only for ease of description the present invention and simplify description, and
It is not instruction or the hint device of indication or element must have specific orientation, with specific azimuth configuration and operation, therefore
It is not considered as limiting the invention.Additionally, term " first ", " second ", " the 3rd ", " the 4th ", " the 5th " are only used for retouching
State purpose, and it is not intended that indicating or hint relative importance.
Referring to Fig. 1 to Fig. 6, in an embodiment of the present invention, there is provided a kind of vacuum slot valve, including：
Valve body 1, valve body 1 is provided with the passage for conveying band 2, and described passage is included on the left of valve
First passage 101 on wall and the second channel on valve right side wall 102, are provided with vacuum accommodating chamber inside valve body 1
103, first passage 101 is all connected with vacuum accommodating chamber 103 with second channel 102；
It is positioned over the valve component 3 in vacuum accommodating chamber 103, valve component 3 is provided with the third channel for conveying band 2
301, and third channel 301 connected with first passage 101；Valve component sealing surface 302 is 30 with the angle of band 2 direction of advance
Degree, the channel outlet of valve component sealing surface 302 is surrounded with two compressible sealing members, respectively first seal 303 He
Second seal 304；
It is positioned over the valve board assembly 4 in vacuum accommodating chamber 103, described valve board assembly 4 is coordinated with described valve component 3, valve
Board component sealing surface 401 is 30 degree with the angle of band 2 direction of advance, and valve board assembly sealing surface 401 is provided with and valve component
The corresponding compressible sealing member of sealing surface 302 upper seal, the respectively the 3rd sealing member 402 and the 4th sealing member 403, its
In, the 3rd sealing member 402 is corresponding with first seal 303, and the 4th sealing member 403 is corresponding with second seal 304；
It is arranged at the executor 5 outside valve body 1, described executor 5 is cylinder, the drive rod position gas of described executor
The cylinder rod 501 of cylinder, the cylinder rod 501 of cylinder is connected through valve body 1 with valve board assembly 4, for driving valve board assembly 4 to move
Dynamic.
For the sealing between valve component and valve body, referring to Fig. 7, in a preferred embodiment, with valve
The channel entrance of the valve component joint face 305 that door body 1 connects is surrounded with a sealing member, is the 5th sealing member 306, valve body
Assembly 3 is tightly connected with valve body 1 by the 5th sealing member 306.
In order to realize the sealing between outside atmosphere and executor and valve body, in an alternative embodiment of the invention, institute
State and between executor 5 and valve body 1, be provided with sealing device, the cylinder rod 501 of described executor 5 pass through sealing device with described
Valve board assembly 4 connects.Referring to Fig. 8, in a preferred embodiment, described sealing device includes seal receptacle 601 and installs
Sealing ring 602 in seal receptacle 601.
After executor is when driving valve board assembly to fall, valve board assembly meeting compressive seal, in order that seal loading is equal
Even, in still another embodiment of the process, between the cylinder rod of described executor and valve board assembly, it is connected with transition buffer device.Ginseng
See Fig. 9, in a preferred embodiment, described transition buffer device includes base 701 He being installed on valve board assembly 4
The transitional hinge 702 being connected with the cylinder rod 501 of executor 5, transitional hinge 702 is connected with base 701 by bearing pin 703.
In order that the sealing member on valve board assembly is corresponding with the sealing member on valve component, referring to Figure 10, in the present invention
In one embodiment, in described vacuum accommodating chamber 103, it is additionally provided with the stopping means 8 for limiting valve board assembly 4 motion, described spacing
Device 8 is installed on valve component 3 edge.
For the sealing effectiveness being further ensured that between valve component and valve board assembly, in a certain preferred embodiment of the present invention
In, connect between first seal 303 and second seal 304 or between the 3rd sealing member 402 and the 4th sealing member 403
Vacuum pump, in valve closing, starting vacuum pump makes to be formed gradient vacuum between sealing member.
For the ease of the transmission of band, in inventing a certain preferred embodiment, passage on valve body and located at
Passage on valve component is rectangular channel.
In the above-described embodiments, described valve component and valve member are made by metal material, preferably, institute
Stating metal material is one or more of carbon steel, rustless steel, aluminium alloy.
Referring to Figure 10, in the present invention one optimum embodiment, comprise all technical characteristics in above-described embodiment.This enforcement
In carrying out band course of conveying, when Open valve, executor drives and moves on valve board assembly vacuum slot valve in example, and
Limit the motion of valve board assembly by stopping means, after Open valve, band can pass freely through valve, the shape after valve opening
State is referring to Figure 11；When closing valve, executor drives valve board assembly to move down, and limits the fortune of valve board assembly by stopping means
Dynamic, after valve closing, valve board assembly and valve component upper seal is compressed fits tightly, sealing member carries sealing secretly, and valve closes
State after closing is referring to Figure 12.
In the above-described embodiments, described sealing member is all using O-ring seal.
In the above-described embodiments, described stopping means can have the structural member of limit function for block, lead etc..
In the above-described embodiments, valve can be adjusted according to the material of band and property design valve board assembly and valve member
Board component sealing surface and valve member sealing surface and the angle of band direction of advance, can be adjusted between 10-45 degree, can
To be adjusted to 10 degree, 15 degree, 20 degree, 25 degree, 35 degree, 40 degree, the different angles such as 45 degree, reach and can not destroy band
In the case of, solve the vacuum sealing between different vacuum chambers.
Above-described embodiment is used for explaining the present invention, rather than limits the invention, in spirit and the right of the present invention
In the protection domain requiring, any modifications and changes that the present invention is made, both fall within protection scope of the present invention.
Claims (10)
1. a kind of vacuum slot valve is it is characterised in that include：
Valve body, valve body is provided with the passage for conveying band, is provided with vacuum accommodating chamber inside valve body；
It is positioned over the valve component that vacuum accommodates intracavity, valve component is provided with the passage for conveying band, and located at valve body group
Passage on part and the channel connection on valve body；Valve component sealing surface is 10- with the angle of band direction of advance
45 degree, the channel outlet of valve component sealing surface is surrounded with least one compressible sealing member；
It is positioned over the valve board assembly that vacuum accommodates intracavity, described valve board assembly is sealed with described valve component cooperation, valve board assembly
Face is 10-45 degree with the angle of band direction of advance, and valve board assembly sealing surface is provided with and valve component sealing surface upper seal
Corresponding compressible sealing member；
It is arranged at the executor outside valve body, the drive rod of described executor is connected through valve body with valve board assembly,
For driving valve board assembly to move.
2. vacuum slot valve as claimed in claim 1 is it is characterised in that the valve component joint face that is connected with valve body
Channel entrance be surrounded with least one sealing member, valve component is tightly connected with valve body by sealing member.
3. vacuum slot valve as claimed in claim 1 or 2 is it is characterised in that set between described executor and valve body
There is sealing device, the drive rod of described executor is connected through sealing device with described valve board assembly.
4. vacuum slot valve as claimed in claim 3 is it is characterised in that described sealing device includes seal receptacle and is installed on
Sealing ring in seal receptacle.
5. the vacuum slot valve as described in claim 1 or 4 is it is characterised in that the drive rod of described executor and valve plate group
It is connected with transition buffer device between part.
6. vacuum slot valve as claimed in claim 5 is it is characterised in that described transition buffer device includes being installed on valve plate
Base on assembly and the transitional hinge being connected with the drive rod of executor, transitional hinge is connected with base by bearing pin.
7. the vacuum slot valve as described in claim 1 or 6 is also placed with use it is characterised in that described vacuum accommodates intracavity
In the stopping means limiting valve board assembly motion, described stopping means are installed on valve component edge.
8. vacuum slot valve as claimed in claim 7 is it is characterised in that passage on valve body and located at valve body
Passage on assembly is rectangular channel.
9. the vacuum slot valve as described in claim 1 or 8 it is characterised in that described valve component and valve member by
Metal material is made.
10. vacuum slot valve as claimed in claim 9 it is characterised in that described metal material be carbon steel, rustless steel,
One or more of aluminium alloy.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201611109537.7A CN106439042B (en) | 2016-12-06 | 2016-12-06 | Vacuum slot valve |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201611109537.7A CN106439042B (en) | 2016-12-06 | 2016-12-06 | Vacuum slot valve |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN106439042A true CN106439042A (en) | 2017-02-22 |
| CN106439042B CN106439042B (en) | 2018-07-31 |
Family
ID=58223947
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201611109537.7A Active CN106439042B (en) | 2016-12-06 | 2016-12-06 | Vacuum slot valve |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN106439042B (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109982512A (en) * | 2019-04-08 | 2019-07-05 | 深圳市恒荣晟电子有限公司 | Selective vacuum resin hole plugging machine front door lifting device |
Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH05251361A (en) * | 1992-03-05 | 1993-09-28 | Canon Inc | Gate and vacuum treatment device |
| CN201695083U (en) * | 2010-06-08 | 2011-01-05 | 湘潭宏大真空设备有限公司 | Insertion plate valve for vacuum film coating production line |
| CN102374295A (en) * | 2010-08-17 | 2012-03-14 | 初星太阳能公司 | Slit valve for vacuum chamber module |
| CN203223611U (en) * | 2013-04-19 | 2013-10-02 | 芜湖真空科技有限公司 | Electromagnetic gate valve mechanism for vacuum coating equipment |
| CN206234368U (en) * | 2016-12-06 | 2017-06-09 | 威海蓝膜光热科技有限公司 | Vacuum slot valve |
-
2016
- 2016-12-06 CN CN201611109537.7A patent/CN106439042B/en active Active
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH05251361A (en) * | 1992-03-05 | 1993-09-28 | Canon Inc | Gate and vacuum treatment device |
| CN201695083U (en) * | 2010-06-08 | 2011-01-05 | 湘潭宏大真空设备有限公司 | Insertion plate valve for vacuum film coating production line |
| CN102374295A (en) * | 2010-08-17 | 2012-03-14 | 初星太阳能公司 | Slit valve for vacuum chamber module |
| CN203223611U (en) * | 2013-04-19 | 2013-10-02 | 芜湖真空科技有限公司 | Electromagnetic gate valve mechanism for vacuum coating equipment |
| CN206234368U (en) * | 2016-12-06 | 2017-06-09 | 威海蓝膜光热科技有限公司 | Vacuum slot valve |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109982512A (en) * | 2019-04-08 | 2019-07-05 | 深圳市恒荣晟电子有限公司 | Selective vacuum resin hole plugging machine front door lifting device |
Also Published As
| Publication number | Publication date |
|---|---|
| CN106439042B (en) | 2018-07-31 |
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Effective date of registration: 20180829 Address after: 264205 West Village, Huancui Town, Weihai City, Shandong Province Patentee after: WEIHAI HANZI VACUUM TECHNOLOGY Co.,Ltd. Address before: 264200 Jingshan Road, Yang Ting Town, Huancui District, Weihai, Shandong Patentee before: WEIHAI LANMO PHOTO-THERMAL TECHNOLOGY Co.,Ltd. |
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Effective date of registration: 20240122 Address after: 104-1, Building 1, Jiake Zhongchuang Valley Park, No. 3333 Guangyi Road, Daqiao Town, Nanhu District, Jiaxing City, Zhejiang Province, 314000 Patentee after: Xiaorui Vacuum Equipment (Jiaxing) Co.,Ltd. Country or region after: China Address before: 264205 West Village, Huancui Town, Weihai City, Shandong Province Patentee before: WEIHAI HANZI VACUUM TECHNOLOGY Co.,Ltd. Country or region before: China |
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