CN203124966U - Device for performing quartz crystal frequency modulation through ultrafast laser - Google Patents
Device for performing quartz crystal frequency modulation through ultrafast laser Download PDFInfo
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- CN203124966U CN203124966U CN2013200940056U CN201320094005U CN203124966U CN 203124966 U CN203124966 U CN 203124966U CN 2013200940056 U CN2013200940056 U CN 2013200940056U CN 201320094005 U CN201320094005 U CN 201320094005U CN 203124966 U CN203124966 U CN 203124966U
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Abstract
The utility model provides a device for performing quartz crystal frequency modulation through ultrafast laser. The device comprises a material containing frame for placing a quartz crystal group to be processed and a computer control system and further comprises a frequency measurement collecting module, an on-line position detection module, an ultrafast laser device and an automatic material feeding mechanism. The frequency modulation collecting module is used for measuring the resonant frequency of a quartz crystal and is arranged on the material containing frame. The on-line position detection module is arranged on the material containing frame. The ultrafast laser device projects generated laser onto the quartz crystal for etching through an X/Y axis scanning galvanometer. The automatic feeding mechanism transmits the quartz crystal group to be processed to a processing position and can move on a Z axis vertically, and the automatic feeding mechanism is electrically connected with the computer control system. The device etches a silvered film on the surface of the quartz crystal and quartz crystal materials under the silvered film through the ultrafast laser device to change the surface quality of the quartz crystal, accordingly large-range accurate frequency modulation of the quartz crystal frequency can be achieved, and frequency stability of finished crystals can be improved.
Description
Technical field
The utility model relates to quartz crystal production equipment field, particularly a kind of equipment that utilizes ultrafast laser to carry out quartz crystal frequency modulation.
Background technology
Quartz crystal resonant element device has characteristics such as volume is little, precision is high, frequency stability is good, be widely used in the various circuit, because the discreteness of processing technology and material behavior, and the requirement of quartz crystal resonator components high freuqency accuracy, need that in process of production it is carried out frequency adjustment and reach and put forward fixed frequency rated value and error range.Principle to quartz-crystal resonator frequency adjustment institute foundation is the Sauerbrey equation, this equation points out that quartz-crystal resonance frequency changes and the variation of plane of crystal attachment material quality is reverse proportionate relationship, so the frequency adjusting method to quartz crystal is mainly realized by changing its surface mass quality, existing commonly used subtract quality method and equipment mainly contains: manual by wheel grinding quartz crystal two arm surfaces to remove quartz material and surperficial institute silver coating, automatic machine electric system and frequency measurement circuit carry out quartz crystal automatic grinding frequency modulation according to the frequency measurement result by emery wheel, and by common Long Pulse LASER irradiation quartz crystal electroplate layer, make the method for its vaporization realize the quartz-crystal resonance frequency fine setting.
Above-mentioned mode to the adjustment of quartz-crystal resonator frequency has shortcoming: 1. manual wheel grinding frequency modulation labour intensity is big, and production efficiency is low, and speed of production and frequency adjustment error range are processed peopleware to be influenced greatly; 2. automatically wheel grinding is once removed quartz crystal and electroplate layer amount is difficult to accurate control, uses more fine grain emery wheel to carry out material and removes that then production efficiency is low, and emery wheel is processed the dust and the micro-crack that produce simultaneously can influence the quartz crystal unit quality; 3. Long Pulse LASER shines quartz crystal electroplate layer, make the method for its vaporization can realize fine adjustment, but because Long Pulse LASER can only be removed surface silver layer and not influence the bottom quartz material, and silver layer quality relative scale is low, so frequency adjustment range is little, because the frequency-distributed that domestic crystal generates is big, so be difficult to realize that by Long Pulse LASER primary frequency modulation reaches the purpose of rated frequency; 4. adopting emery wheel processing and Long Pulse LASER processing is a kind of processing method of utilizing mechanical grinding and laser thermal effect, and this method can be produced material re cast layer or micro-crack effect to quartz crystal and electroplate layer, thereby influences crystal finished product frequency stability; 5. the quartz-crystal resonance frequency temperature influence is big, so the heat that the processing fuel factor produces will have a strong impact on measurement result, thus the finished product frequency-distributed after the influence processing.
The quartz-crystal resonator of realization high-precision requirement is processed general preceding road and is adopted emery wheel at present, the road adopted the method for fine grinding wheel to carry out frequency coarse adjustment and fine setting after back road adopted Long Pulse LASER or preceding road to adopt coarse plain emery wheel, but operation is many and complicated like this, and production efficiency is low.
A kind of " shining the method and apparatus that quartz crystal is finely tuned with laser " disclosed in the prior art, see that publication number is: 1412606, open day be: the Chinese patent of 2003-04-23, this method is with laser irradiation quartz crystal electroplate layer, and the method for its vaporization is finely tuned quartz-crystal resonance frequency.Quartz-crystal resonance frequency is gathered as feedback signal the control laser output parameter with the fast frequency dynamic collect system.After Computerized analysis system receives frequency data, compare with setting value, frequency-splitting is converted into the difference that needs irradiation power, adjust pulse width, calculate pulse number, the output of control laser power reaches required value up to the frequency of quartz crystal.Be that probe is transmitted to the fast frequency dynamic collect system with quartz-crystal resonance frequency by lead specifically, form closed-loop control thus and reach the effect that improves trimming precision.Arrive the quartz crystal surface by the optical fibre transmission laser beam, it is vaporized to reach the purpose of regulating frequency.But this invention can only be handled at quartz crystal electroplate layer, can not handle the quartz crystal material below the silver coating, and silver layer quality relative scale is low, so the frequency adjustment range that can carry out is little, because the original frequency that domestic crystal generates and the deviation value between the rated frequency differ greatly, so be difficult to realize that by Long Pulse LASER primary frequency modulation reaches the purpose of rated frequency.
Summary of the invention
The technical problems to be solved in the utility model is to provide a kind of equipment that utilizes ultrafast laser to carry out quartz crystal frequency modulation, realizes the frequency modulation with a wide range of precise to quartz crystal frequency, thereby improves crystal finished product frequency stability.
The utility model is achieved in that a kind of equipment that utilizes ultrafast laser to carry out quartz crystal frequency modulation, comprise for skid bed and the computer control system of placing quartz crystal group to be processed, this equipment comprises that also one is used for measuring the frequency measurement acquisition module of quartz-crystal resonance frequency, this frequency measurement acquisition module is arranged on the skid bed, and is electrically connected with described computer control system;
The one online position detecting module for detection of the quartz crystal position, this online position detecting module are arranged at the skid bed top, and are electrically connected with described computer control system;
One ultrafast laser, this ultrafast laser are projeced into quartz crystal by an X/Y axle scanning galvanometer with the laser that produces and carry out etching, and this ultrafast laser is electrically connected with described computer control system;
And the automatic feed mechanism that quartz crystal group to be processed is sent to Working position and can moves up and down at the Z axle, this automatic feed mechanism is electrically connected with described computer control system.
Further, described ultrafast laser is to realize that the pulse width of material non-selectivity processing is the laser instrument of psec or femtosecond.
Further, described automatic feed mechanism comprises: hopper, vibrating mechanism, material conveying road, material pluging machine tool hand and be used for the control skid bed and carry out the Z axle travel mechanism that the Z axle moves up and down, described hopper is located on the vibrating mechanism, the material conveying road is arranged at the side-lower of hopper, material pluging machine tool hand is used for realizing one group of quartz crystal to be processed is inserted described skid bed, and Z axle travel mechanism can drive skid bed and realize moving up and down.
Advantage of the present utility model is: 1. the pulse duration has only the ultrafast laser of several psecs or femtosecond to have high peak power, has high electric-field intensity, be enough to make quartz crystal and electroplate layer generation ionization, can realize quartz material and electroplate layer are carried out the effect of meticulous removal simultaneously, thereby realize the meticulous adjustment of wide range of frequencies;
2. adopt the process of quartz crystal to be processed after the utility model can be realized putting on the shelf to finish the frequency modulation index, need not gradation and carry out frequency coarse adjustment and fine setting multiple working procedure, can enhance productivity;
3. ultrafast laser processing is a kind of cold working method, and its heat-affected zone is little, and no material damage is non-microcracked, no melt region, and no re cast layer, no splash and burr are so processing back finished product frequency stability is good;
4. the cold working effect of ultrafast laser can reduce resonance frequency temperature drift characteristic, thereby improves the processing real-time accuracy, so the finished product frequency-distributed is good.
Description of drawings
Fig. 1 is theory structure schematic diagram of the present utility model.
The specific embodiment
See also shown in Figure 1, the utility model is a kind of equipment that utilizes ultrafast laser to carry out quartz crystal frequency modulation, comprise for skid bed 1 and the computer control system 2 of placing quartz crystal group to be processed, this equipment comprises that also one is used for measuring the frequency measurement acquisition module 3 of quartz-crystal resonance frequency, this frequency measurement acquisition module 3 is arranged on the skid bed 1, and is electrically connected with described computer control system 2;
The one online position detecting module 4 for detection of the quartz crystal position, this online position detecting module 4 is arranged at skid bed 1 top, and is electrically connected with described computer control system 2;
One ultrafast laser 5, this ultrafast laser 5 are projeced into quartz crystal by an X/Y axle scanning galvanometer 6 with the laser that produces and carry out etching, and this ultrafast laser 5 is electrically connected with described computer control system 2;
And the automatic feed mechanism 7 that quartz crystal group to be processed is sent to Working position and can moves up and down at the Z axle, this automatic feed mechanism 7 is electrically connected with described computer control system 2.
In the utility model, described ultrafast laser 5 is to realize that the pulse width of material non-selectivity processing is the laser instrument of psec or femtosecond.Described automatic feed mechanism 7 comprises: hopper (not shown), vibrating mechanism (not shown), material conveying road (not shown), material pluging machine tool hand (not shown) and be used for the control skid bed and carry out the Z axle travel mechanism (not shown) that the Z axle moves up and down, described hopper is located on the vibrating mechanism, the material conveying road is arranged at the side-lower of hopper, material pluging machine tool hand is used for realizing one group of quartz crystal to be processed is inserted described skid bed, and Z axle travel mechanism can drive skid bed and realize moving up and down.
Wherein, the ultrafast laser that ultrafast laser is sent is incident upon the lip-deep circular light spot of quartz crystal certain diameter range, and certain depth of focus arranged, thereby go out a small cylindrical tank in the quartz crystal surface etch, this circular groove volume has determined the quality of materials that position laser ablation can be removed, thereby determines the frequency adjustment amount of a position.
Its frequency measurement acquisition module can accurately be measured the quartz-crystal resonance frequency of processing, thereby calculates the difference on the frequency that needs adjustment.According to difference on the frequency, by change small cylindrical tank quantity and twice circular groove center, front and back X/Y axle or Z axle step distance, thereby realize different frequency adjustment amounts.
Online position detecting module is by the accurate measurement of machine vision localization method realization to quartz crystal module to be processed position, thereby accurately frequency modulation is realized fast in guide Laser Processing position.
Computer control system is used for realization to the intelligent comprehensive control of above each module.Concrete adjustment scheme is the adjustment amount corresponding with each small cylindrical tank according to the frequency difference of wafer to be adjusted, beats the mode of groove by ultrafast laser multi-point multi-layer etching and can carry out frequency trim.When the adjustment amount of needs during less than the adjustment amount of a unit small cylindrical tank, level that can be by reducing adjacent circular groove apart from or vertically realize apart from dwindling etch amount.
The utility model utilizes ultrafast laser material processed independence, ultrafast laser is incident upon on the quartz crystal, accurately control laser spot position by X/Y axle scanning galvanometer and Z axle mobile platform, can realize the accurate mass of quartz crystal electroplate layer and crystalline material is removed, thereby the realization frequency is accurately adjusted, because the utility model not only can be removed quartz crystal electroplate layer, also can remove the quartz crystal material below the silver coating, so when keeping the frequency modulation accuracy, can realize frequency modulation on a large scale.
In a word, by ultrafast laser the quartz crystal materials under quartz crystal electroplate layer and the silver coating is carried out etching to change the quartz crystal surface quality, simultaneously can reduce re cast layer and micro-crack effect, thereby realize the frequency modulation with a wide range of precise to quartz crystal frequency, thereby improve crystal finished product frequency stability.
Though more than described the specific embodiment of the present utility model; but being familiar with those skilled in the art is to be understood that; our described specific embodiment is illustrative; rather than for the restriction to scope of the present utility model; those of ordinary skill in the art are in modification and the variation of the equivalence of doing according to thought of the present utility model, all should be encompassed in the scope that claim of the present utility model protects.
Claims (3)
1. equipment that utilizes ultrafast laser to carry out quartz crystal frequency modulation, comprise for skid bed and the computer control system of placing quartz crystal group to be processed, it is characterized in that: this equipment comprises that also one is used for measuring the frequency measurement acquisition module of quartz-crystal resonance frequency, this frequency measurement acquisition module is arranged on the skid bed, and is electrically connected with described computer control system;
The one online position detecting module for detection of the quartz crystal position, this online position detecting module are arranged at the skid bed top, and are electrically connected with described computer control system;
One ultrafast laser, this ultrafast laser are projeced into quartz crystal by an X/Y axle scanning galvanometer with the laser that produces and carry out etching, and this ultrafast laser is electrically connected with described computer control system;
And the automatic feed mechanism that quartz crystal group to be processed is sent to Working position and can moves up and down at the Z axle, this automatic feed mechanism is electrically connected with described computer control system.
2. a kind of equipment that utilizes ultrafast laser to carry out quartz crystal frequency modulation according to claim 1 is characterized in that: described ultrafast laser is to realize that the pulse width of material non-selectivity processing is the laser instrument of psec or femtosecond.
3. a kind of equipment that utilizes ultrafast laser to carry out quartz crystal frequency modulation according to claim 1, it is characterized in that: described automatic feed mechanism comprises: hopper, vibrating mechanism, material conveying road, material pluging machine tool hand and be used for the control skid bed and carry out the Z axle travel mechanism that the Z axle moves up and down, described hopper is located on the vibrating mechanism, the material conveying road is arranged at the side-lower of hopper, material pluging machine tool hand is used for realizing one group of quartz crystal to be processed is inserted described skid bed, and Z axle travel mechanism can drive skid bed and realize moving up and down.
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2013200940056U CN203124966U (en) | 2013-02-28 | 2013-02-28 | Device for performing quartz crystal frequency modulation through ultrafast laser |
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| CN2013200940056U CN203124966U (en) | 2013-02-28 | 2013-02-28 | Device for performing quartz crystal frequency modulation through ultrafast laser |
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| CN2013200940056U Expired - Fee Related CN203124966U (en) | 2013-02-28 | 2013-02-28 | Device for performing quartz crystal frequency modulation through ultrafast laser |
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Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103128451A (en) * | 2013-02-28 | 2013-06-05 | 莆田学院 | Method and equipment for utilizing ultrafast lasers for frequency modulation of quartz crystals |
| CN108988813A (en) * | 2018-07-06 | 2018-12-11 | 应达利电子股份有限公司 | The frequency trim system and its method for trimming of quartz-crystal resonator, micromatic setting |
| CN112496556A (en) * | 2020-12-01 | 2021-03-16 | 强一半导体（苏州）有限公司 | MEMS probe laser etching motor and four-dimensional table driving method |
-
2013
- 2013-02-28 CN CN2013200940056U patent/CN203124966U/en not_active Expired - Fee Related
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103128451A (en) * | 2013-02-28 | 2013-06-05 | 莆田学院 | Method and equipment for utilizing ultrafast lasers for frequency modulation of quartz crystals |
| CN108988813A (en) * | 2018-07-06 | 2018-12-11 | 应达利电子股份有限公司 | The frequency trim system and its method for trimming of quartz-crystal resonator, micromatic setting |
| CN112496556A (en) * | 2020-12-01 | 2021-03-16 | 强一半导体（苏州）有限公司 | MEMS probe laser etching motor and four-dimensional table driving method |
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| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20130814 Termination date: 20150228 |
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| EXPY | Termination of patent right or utility model |