CN203083106U - Novel electric heater - Google Patents
Novel electric heater Download PDFInfo
- Publication number
- CN203083106U CN203083106U CN 201220617397 CN201220617397U CN203083106U CN 203083106 U CN203083106 U CN 203083106U CN 201220617397 CN201220617397 CN 201220617397 CN 201220617397 U CN201220617397 U CN 201220617397U CN 203083106 U CN203083106 U CN 203083106U
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- heater
- heat carrier
- vacuum chamber
- temperature
- novel electric
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Abstract
The utility model relates to the technical field of solar cell piece manufacture and electric heaters for plasma enhanced chemical vapor deposition plate-type (PECVD) devices, in particular to a novel electric heater. The novel electric heater comprises a vacuum chamber lateral wall, a heater outer surface which is placed in the vacuum chamber lateral wall and a water cooling flow passage. The heater outer surface is respectively connected with a power line connector and a temperature sensor signal line connector through a line outgoing drivepipe, a flange sealing element is arranged outside the line outgoing drivepipe in a sleeved mode, and the temperature sensor signal line connector is connected with an over-temperature protective sensor and a temperature accuracy control sensor. The heater outer surface is formed by connecting a first heat conductor and a second heat conductor in a sealing mode through a heat conductor plate connecting structure. The surfaces of the heat conductors are processed, protective films which are corrosion resistant and high temperature resistant are formed, and therefore temperature inside a vacuum chamber body can be kept uniform. Through the design of a binding post sealing structure, the vacuum chamber body is kept clean, environmental pollution is reduced, and the service life of the heater is prolonged.
Description
Technical field
The utility model relates to the solar battery sheet manufacturing, the board-like PECVD of plasma enhanced chemical vapor deposition (Plasma Enhanced Chemical Vapor Deposition) device-specific electric heater technical field, especially a kind of novel electric heater.
Background technology
Board-like PECVD equipment is main efficient film-forming apparatus in the current solar battery sheet manufacturing process.In order to obtain uniform, fine and close, high-quality rete, electric heater is housed in the vacuum chamber, and keeps the stability and the uniformity of vacuum cavity temperature.At present, the conventional electric heating device is to adopt stainless steel armouring electric heating tube, and electric heating tube (heater) is straight-through with the process gas in the vacuum chamber.Its major defect is: 1, because near heat-generating pipe surface temperature height, two heat-generating pipe middle part temperature are minimum, form the wave-like of surface temperature value, cause electric heater surface temperature uniformity not high, thereby influence the uniformity of rete; 2, because of the electric heater heating pipe contacts with technological reaction gas, cause the chemical attack and the electrochemical corrosion on heat-generating pipe surface, and form metal ion pollution, influence the quality of product film forming, the service life of also having reduced electric heater simultaneously; 3, the conventional electric heating device is to adopt stainless steel armored electric heating tube at present, or electric heating tube (heater) is interior straight-through with vacuum chamber, and the cleaning of vacuum cavity cleaning inside and electric heater body is difficulty very.
The utility model content
In order to overcome the deficiency of conventional electric heating device, the utility model provides a kind of novel electric heater.
The technical scheme that its technical problem that solves the utility model adopts is: a kind of novel electric heater; comprise the vacuum chamber sidewall and place vacuum chamber sidewall interior heater outer surface and water-cooled runner; wire terminal is connected described heater outer surface with temperature sensor signal with power cord connector respectively by the outlet sleeve pipe; described outlet sleeve pipe outer cover is managed blue seal; described temperature sensor signal wire terminal connects the overtemperature prote sensor and temperature is accurately controlled sensor, and described heater outer surface is by heat carrier one; heat carrier two forms through sealed connection by heat carrier plate connecting structure.
To the both sides distribution gradient, spacing is by rare and close by the center of heater outer surface for described stainless steel electric heating tube arrangement pitch, and power density is by little and big.Stainless steel electric heating tube (heater) and overtemperature prote sensor and temperature are accurately controlled sensor and are implanted in the heat carrier; heat carrier is that thermal conductivity factor is big, fast Al-alloy metal material conducts heat; by the heat carrier surface is handled; form corrosion-resistant, resistant to elevated temperatures porcelain aluminium oxide diaphragm; based on the power density distribution design of electric heating tube in heat carrier of boundary effect, temperature can keep uniformity in the vacuum cavity.
According to another embodiment of the present utility model, comprise that further described heat carrier plate connecting structure comprises connection double-screw bolt and double-screw bolt pad, the both sides of described heat carrier plate connecting structure are by seal welding cover plate one and two sealings of seal welding cover plate.
According to another embodiment of the present utility model, comprise that further described heater outer surface and outlet sleeve pipe are tightly connected by going out the spool plumb joint.The binding post design of Sealing Structure has solved the cleaning problems of vacuum cavity cleaning inside and electric heater body, has prolonged the service life of heater.
The beneficial effects of the utility model are, by the heat carrier surface is handled, form corrosion-resistant, resistant to elevated temperatures diaphragm, make that temperature can keep uniformity in the vacuum cavity.By the binding post design of Sealing Structure, kept the cleaning in the vacuum cavity, reduced environmental pollution, prolonged the service life of heater.
Description of drawings
Below in conjunction with drawings and Examples the utility model is further specified.
(a) is structural representation of the present utility model among Fig. 1, (b) is the structural representation of heater;
Fig. 2 is a heater A-A profile;
Fig. 3 is a heater I zoomed-in view;
Fig. 4 is a heater II zoomed-in view;
Fig. 5 is a heater III zoomed-in view;
Fig. 6 is heater heating wire, temperature probe plane of arrangement figure;
Fig. 7 is that heater is installed view;
Fig. 8 is a heater B-B profile;
Among the figure 1; the heater outer surface, 2; the outlet sleeve pipe, 3; flange seal spare; 4; power cord connector, 5; heat carrier one, 6; heat carrier two; 7; heat carrier plate connecting structure, 8; the stainless steel electric heating tube, 9; seal welding cover plate one; 10; seal welding cover plate two, 11; connect double-screw bolt, 12; the double-screw bolt pad; 13; outlet sleeve pipe plumb joint; 14; the overtemperature prote sensor, 15; temperature is accurately controlled sensor, 16; the vacuum chamber sidewall; 17; the vacuum cavity flange; 18; the sealing spacer flanger, 19; the sealing gland flange, 20; glue sealing ring one; 21; glue sealing ring two; 22; the water-cooled runner, 23; the flange connecting screw, 24; the temperature sensor signal wire terminal.
The specific embodiment
As Fig. 1 (a); (b) and shown in Figure 2; a kind of novel electric heater comprises vacuum chamber sidewall 16 and the heater outer surface 1 and the water-cooled runner 22 that place in the vacuum chamber sidewall 16; described heater outer surface 1 is connected with temperature sensor signal wire terminal 24 with power cord connector 4 respectively by outlet sleeve pipe 2; described outlet sleeve pipe 2 outer cover are managed blue seal 3; described temperature sensor signal wire terminal 24 connects overtemperature prote sensor 14 and temperature is accurately controlled sensor 15, and described heater outer surface 1 is by heat carrier 1; heat carrier 26 forms through sealed connection by heat carrier plate connecting structure 7.
Heater outer surface 1 is formed through sealed connection by aluminium alloy heat carrier 1, heat carrier 26 heat carriers, and the heat carrier outer surface is carried out the pottery oxidation processes, forms high temperature resistant, corrosion-resistant, insulation compact protective film layer.The material of outlet sleeve pipe 2, surface treatment mode and heat carrier 1, heat carrier 26 are identical.Because of heater is in vacuum state, and inner and atmosphere UNICOM, heat carrier plate connecting structure 7 is for preventing that heat carrier 1, heat carrier 26 are because of the pressure reduction distortion.
Fig. 3, Fig. 4, Fig. 5 are heat carrier 1, heat carrier 26 connecting structure detail drawings; Described heat carrier plate connecting structure 7 comprises connection double-screw bolt 11 and double-screw bolt pad 12, and the both sides of described heat carrier plate connecting structure 7 are by seal welding cover plate 1 and 2 10 sealings of seal welding cover plate.Described heater outer surface 1 and outlet sleeve pipe 2 are tightly connected by going out spool plumb joint 13.It is indeformable that this connects the 450C ° of long-term work in vacuum chamber of maintenance heater, leak rate＜5X10-7Pa.L/S.
Fig. 6 is heater heating wire, temperature probe plane of arrangement figure, the vacuum chamber side wall temperatures is low, in establish the water-cooled runner, if keep temperature homogeneity in the vacuum cavity (temperature is controlled 450 C ° ± 3C ° in the vacuum cavity), then form by the cavity both sides and distribute to the descending gradient of the heat exhaustion at cavity middle part, so the arrangement pitch of stainless steel electric heating tube 8 also be center by heater outer surface 1 to the both sides distribution gradient, spacing is by rare and close, power density is by little and big.
Fig. 7 is that heater is installed view, and Fig. 8 is a heater B-B profile.Flange seal spare 3 is made of by bolt and flange connecting screw 23 vacuum cavity flange 17, sealing spacer flanger 18 and sealing gland flange 19, and vacuum cavity flange 17, sealing spacer flanger 18 and sealing gland flange 19 are respectively by glue sealing ring 1 and 21 sealings of glue sealing ring.
Above content be in conjunction with concrete preferred implementation to further describing that the utility model is done, can not assert that concrete enforcement of the present utility model is confined to these explanations.For the utility model person of an ordinary skill in the technical field, under the prerequisite that does not break away from the utility model design, its framework form can be flexible and changeable, can the subseries product.Just make some simple deduction or replace, all should be considered as belonging to the scope of patent protection that the utility model is determined by claims of being submitted to.
Claims (3)
1. novel electric heater; it is characterized in that; it comprises vacuum chamber sidewall (16) and places vacuum chamber sidewall (16) interior heater outer surface (1) and water-cooled runner (22); described heater outer surface (1) is connected with temperature sensor signal wire terminal (24) with power cord connector (4) respectively by outlet sleeve pipe (2); described outlet sleeve pipe (2) outer cover is managed blue seal (3); described temperature sensor signal wire terminal (24) connects overtemperature prote sensor (14) and temperature is accurately controlled sensor (15); described heater outer surface (1) is by heat carrier one (5); heat carrier two (6) forms through sealed connection by heat carrier plate connecting structure (7); to the both sides distribution gradient, spacing is by rare and close by the center of heater outer surface (1) for stainless steel electric heating tube (8) arrangement pitch.
2. novel electric heater according to claim 1, it is characterized in that, described heat carrier plate connecting structure (7) comprises connection double-screw bolt (11) and double-screw bolt pad (12), and the both sides of described heat carrier plate connecting structure (7) are by seal welding cover plate one (9) and two (10) sealings of seal welding cover plate.
3. novel electric heater according to claim 1 is characterized in that, described heater outer surface (1) and outlet sleeve pipe (2) are tightly connected by going out spool plumb joint (13).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201220617397 CN203083106U (en) | 2012-11-21 | 2012-11-21 | Novel electric heater |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201220617397 CN203083106U (en) | 2012-11-21 | 2012-11-21 | Novel electric heater |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN203083106U true CN203083106U (en) | 2013-07-24 |
Family
ID=48828933
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN 201220617397 Expired - Lifetime CN203083106U (en) | 2012-11-21 | 2012-11-21 | Novel electric heater |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN203083106U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113237566A (en) * | 2021-04-23 | 2021-08-10 | 广州碳思科技有限公司 | Array type temperature sensor and manufacturing method thereof |
-
2012
- 2012-11-21 CN CN 201220617397 patent/CN203083106U/en not_active Expired - Lifetime
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113237566A (en) * | 2021-04-23 | 2021-08-10 | 广州碳思科技有限公司 | Array type temperature sensor and manufacturing method thereof |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CX01 | Expiry of patent term |
Granted publication date: 20130724 |
|
| CX01 | Expiry of patent term |