CN102252417B - Heater for corrosive liquid - Google Patents

Heater for corrosive liquid Download PDF

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Publication number
CN102252417B
CN102252417B CN 201110137941 CN201110137941A CN102252417B CN 102252417 B CN102252417 B CN 102252417B CN 201110137941 CN201110137941 CN 201110137941 CN 201110137941 A CN201110137941 A CN 201110137941A CN 102252417 B CN102252417 B CN 102252417B
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China
Prior art keywords
water tank
lower inner
upper cover
inner cap
heater
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CN 201110137941
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Chinese (zh)
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CN102252417A (en
Inventor
金海涛
吉保国
卞福良
段小楠
沈俊然
黄宏君
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Changzhou Ruize Microelectronics Technology Co., Ltd.
WUXI DISI MICROELECTRONIC CO., LTD.
Original Assignee
CHANGZHOU RUIZE MICROELECTRONICS TECHNOLOGY Co Ltd
Wuxi China Resources Microelectronics Co Ltd
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Priority to CN 201110137941 priority Critical patent/CN102252417B/en
Publication of CN102252417A publication Critical patent/CN102252417A/en
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Publication of CN102252417B publication Critical patent/CN102252417B/en
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Abstract

The invention relates to a heater for corrosive liquid. The heater comprises a water tank, heating components, an upper inner cover, a lower inner cover and a water temperature sensor, wherein the water tank is a cylinder with openings at two ends; and the inner wall of the water tank is provided with a fluorine plastic layer or the water tank is made of fluorine plastic; a liquid inlet and a liquid outlet are formed on upper and lower sides of the water tank respectively; the heating components comprise a metal conductor of which an external peripheral wall is provided with the fluorine plastic layer, and more than two electrical heating rods; each electrical heating rod is arranged in the metal conductor; the upper inner cover and the lower inner cover of which the external peripheral walls are provided with the fluorine plastic layer respectively or which are made of the fluorine plastic are arranged at two ends of the metal conductor; and the upper inner cover and the lower inner cover are in seal connection with the water tank respectively; an electrode of the electrical heating rod passes through the upper inner cover or the lower inner cover in a seal manner; a liquid cavity is arranged between the periphery of the metal conductor and the inner wall of the water tank; a sensor seat is arranged on the upper part of the water tank; and the water temperature sensor is arranged at the liquid outlet of the water tank. The heater has the advantages of reliable work, uniform heating temperature for the liquid, convenience for maintenance and small volume.

Description

The heater that is used for corrosive liquids
Technical field
The present invention relates to a kind of heater for corrosive liquids, belong to the heating liquid technical field.
Background technology
Electric heater mostly adopts pottery or quartz, and this heating material is not only easily broken, and the efficiency of heating surface is not high, and can not add the corrosive liquids of the strong oxidizers such as hot acid, alkali.Some electric heaters that are used for the heating corrosive liquids are that thermo electric material is arranged in the metal sleeve, be provided with burning magnesium between metal sleeve and the heating wire, coat polytetrafluoroethylene (PTFE) at the metal sleeve outer wall, although electric heater has the characteristics of corrosion resistance, but therefore the defective that also has the not high and maintaining inconvenience of heating power is not suitable for the requirement that industrialization produces in the chemical attack of semiconductor devices and the cleaning.For satisfying the requirement of semiconductor devices suitability for industrialized production, liquid heater adopts four fluoroplastics screw rods to form frame structure with being connected after a connecting rod connects at present, be coated with the heating wire winding of fluoroplastics on the fluoroplastics screw rod, improve the temperature homogeneity that adds liquid and the reliability of use with this, but the heating wire of this kind structure can't make its diameter keep identical in making and installation process, so or existence is generated heat inhomogeneous and power is not high and the larger problem of volume electric heater.
Summary of the invention
The purpose of this invention is to provide a kind of reliable operation, even to the heating liquid temperature, be convenient to the little heater that is used for corrosive liquids of maintaining, volume.
The present invention is that the technical scheme that achieves the above object is: a kind of heater for corrosive liquids, it is characterized in that: comprise water tank, heating component and inward upper cover, lower inner cap and water temperature sensor, described water tank is the cylindrical shell of both ends open, and the inwall of water tank has fluoroplastic layer or water tank is made by fluoroplastics, and the up and down both sides of water tank are respectively equipped with liquid outlet and inlet; Described heating component comprises that periphery wall has metallic conductor and the plural electrically heated rod of fluoroplastic layer, each electrically heated rod is installed in the metallic conductor, the two ends of metallic conductor have fluoroplastic layer with periphery wall or are connected with lower inner cap by the inward upper cover that fluoroplastics are made, and inward upper cover is connected with tank seal respectively with lower inner cap, the electrode sealing of electrically heated rod passes inward upper cover or lower inner cap, is provided with sap cavity between metallic conductor periphery wall and the tank inner wall; Liquid outlet place on the described water tank is equipped with the water temperature sensor.
The present invention adopts plural electrically heated rod and is arranged in the metallic conductor, therefore can increase the power of heater, the heat of electrically heated rod is by heating liquid again behind the metallic conductor, heated liquid is more even, because corrosive liquids does not contact with electrically heated rod, has improved the dependability of heater yet.That water tank of the present invention, inward upper cover and lower inner cap and metallic conductor all adopt is antiacid, alkali resistant and resistant to elevated temperatures fluoroplastic layer, the use that has improved heater is reliable, because heating component is arranged in the water tank, can not only reduce the volume of heater, and water tank and heater integrated, can make heater realize modularization, make things convenient for the technique adjustment.The present invention is installed in the water tank two ends with inward upper cover and the sealing of lower inner cap, convenient care and maintenance to heater.The present invention is provided with the water temperature sensor at the liquid outlet place of water tank, can not only conveniently regulate the power of heater, and can play a protective role to heater.
Description of drawings
Below in conjunction with accompanying drawing embodiments of the invention are described in further detail.
Fig. 1 is structural representation of the present invention.
Fig. 2 is the plan structure schematic diagram of Fig. 1.
Wherein: 1-loam cake, 2-sealing ring, 3-inward upper cover, 4-heat conduction temperature sensor, 5-electrically heated rod, the 6-metallic conductor, 7-sap cavity, 8-water tank, 8-1-liquid outlet, 8-2-inlet, inner cap under the 9-, 10-lower cover, 11-water temperature sensor, 12-sensor holder, 13-holder.
The specific embodiment
See shown in Fig. 1,2 that the heater for corrosive liquids of the present invention comprises water tank 8, heating component and inward upper cover 3, lower inner cap 9 and water temperature sensor 11.Water tank 8 of the present invention is the cylindrical shell of both ends open, and the inwall of water tank 8 has fluoroplastic layer or water tank 8 and is made by fluoroplastics, make water tank 8 have advantages of acid-fast alkali-proof, the up and down both sides of this water tank 8 are respectively equipped with liquid outlet 8-1 and inlet 8-2, liquid outlet 8-1 and inlet 8-2 are equipped with screwed hole, and liquid pipe connection can be screwed in liquid outlet 8-1 and the inlet 8-2 place of casing.See Fig. 1, shown in 2, heating component of the present invention comprises that periphery wall has metallic conductor 6 and the plural electrically heated rod 5 of fluoroplastic layer, can be such as Fig. 1, shown in 2, can adopt three electrically heated rods 5, electrically heated rod 5 heatings after the energising, each electrically heated rod 5 is installed in the metallic conductor 6, and uniform being installed on the metallic conductor 6, this metallic conductor 6 can adopt the high copper of thermal conductivity factor or and alloy material, the two ends of metallic conductor 6 have fluoroplastic layer with periphery wall or are connected with lower inner cap 9 by the inward upper cover 3 that fluoroplastics are made, and inward upper cover 3 and lower inner cap 9 are tightly connected with water tank 8 respectively by the sealing ring 2 that is installed on the metallic conductor 6, the present invention is in order conveniently to install inner cap 3 and lower inner cap 9, metallic conductor 6 two ends are respectively equipped with male and fomale(M﹠F), and also be provided with corresponding male and female face on inward upper cover 3 and the lower inner cap 9, male and female face on male and fomale(M﹠F) on metallic conductor 6 two ends and inward upper cover 3 and the lower inner cap 9 joins, the present invention is provided with the installing hole that electrically heated rod 5 is located at inward upper cover 3 or lower inner cap 9, securing member is installed in inward upper cover 3 and lower inner cap 9 at the two ends of metallic conductor 6, water tank 8 two ends also are equipped with loam cake 1 and lower cover 10, this loam cake 1 and lower cover 10 cover on respectively on inward upper cover 3 and the lower inner cap 9, be provided with sap cavity 7 between metallic conductor 6 periphery walls and the tank inner wall, when being heated liquid by this sap cavity 7 and heated by metallic conductor 6.
See shown in Fig. 1,2, the present invention is the heating-up temperature of in time understanding liquid, the liquid outlet 8-1 place of water tank 8 is equipped with on the sensor holder 12, the liquid outlet 8-1 place of water tank 8 is equipped with sensor holder 12, this sensor holder 12 is screwed on the installing hole of water tank 8, and water temperature sensor 11 is inserted on the sensor holder 12 by holder 13.See shown in Fig. 1,2; the present invention also establishes heat conduction temperature sensor 4 on metallic conductor 6; heat conduction temperature sensor 4 is positioned at the same side of electrically heated rod 5; and the sealing of the holding wire of heat conduction temperature sensor 4 passes inward upper cover 3 or lower inner cap 9, and the present invention plays two protective effects by 4 pairs of heaters of heat conduction temperature sensor of water temperature sensor 11.

Claims (5)

1. heater that is used for corrosive liquids, it is characterized in that: comprise water tank (8), heating component and inward upper cover (3), lower inner cap (9) and water temperature sensor (11), described water tank (8) is the cylindrical shell of both ends open, and the inwall of water tank (8) has fluoroplastic layer or water tank (8) is made by fluoroplastics, and the up and down both sides of water tank (8) are respectively equipped with liquid outlet (8-1) and inlet (8-2); Described heating component comprises that periphery wall has the metallic conductor of fluoroplastic layer (6) and plural electrically heated rod (5), each electrically heated rod (5) is installed in the metallic conductor (6), the two ends of metallic conductor (6) have fluoroplastic layer with periphery wall or the inward upper cover (3) made by fluoroplastics is connected with lower inner cap (9), and inward upper cover (3) and lower inner cap (9) are tightly connected with water tank (8) respectively, the electrode sealing of electrically heated rod (5) passes inward upper cover (3) or lower inner cap (9), is provided with sap cavity (7) between metallic conductor (6) periphery wall and water tank (8) inwall; Liquid outlet (8-1) on the described water tank (8) locates to be equipped with water temperature sensor (11).
2. the heater for corrosive liquids according to claim 1, it is characterized in that: the two ends of described metallic conductor (6) join by the male and female face on male and fomale(M﹠F) and inward upper cover (3) and the lower inner cap (9) respectively, and inward upper cover (3) or lower inner cap (9) are provided with the installing hole to electrically heated rod (5) location, and securing member is installed in inward upper cover (3) and lower inner cap (9) at the two ends of metallic conductor (6).
3. the heater for corrosive liquids according to claim 1, it is characterized in that: also establish heat conduction temperature sensor (4) on the described metallic conductor (6), and heat conduction temperature sensor (4) is positioned at the same side of electrically heated rod (5), and the holding wire sealing of heat conduction temperature sensor (4) passes inward upper cover (3) or lower inner cap (9).
4. the heater for corrosive liquids according to claim 1 is characterized in that: described water tank (8) two ends also are equipped with loam cake (1) and lower cover (10) and cover on respectively on inward upper cover (3) and the lower inner cap (9).
5. the heater for corrosive liquids according to claim 1, it is characterized in that: the liquid outlet (8-1) of described water tank (8) locates to be equipped with sensor holder (12), and water temperature sensor (11) is inserted on the sensor holder (12) by holder (13).
CN 201110137941 2011-05-26 2011-05-26 Heater for corrosive liquid Active CN102252417B (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN 201110137941 CN102252417B (en) 2011-05-26 2011-05-26 Heater for corrosive liquid

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Application Number Priority Date Filing Date Title
CN 201110137941 CN102252417B (en) 2011-05-26 2011-05-26 Heater for corrosive liquid

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CN102252417B true CN102252417B (en) 2013-03-06

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Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102883485B (en) * 2012-09-24 2016-03-30 张昌盛 Fluoroplastics heating element and fluorine plastic heater
CN103808000B (en) * 2014-02-27 2016-05-18 常州瑞择微电子科技有限公司 Thick film heater

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN2682329Y (en) * 2004-03-29 2005-03-02 陈桂军 Household central air conditioning aided electric heater
CN201081390Y (en) * 2007-08-17 2008-07-02 李庆杰 Household electromagnetic heating stove
CN101726112A (en) * 2008-10-21 2010-06-09 Bsh博施及西门子家用器具有限公司 Storage apparatus, especially hot water preparing device
CN201522078U (en) * 2009-10-27 2010-07-07 王轩泽 Energy-saving quick electric water heater
CN202057027U (en) * 2011-05-26 2011-11-30 常州瑞择微电子科技有限公司 Heater for corrosive liquid

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57196037A (en) * 1981-05-28 1982-12-01 Omron Tateisi Electronics Co Controlling device of water heater operated by midnight electric power
JPS58124143A (en) * 1982-01-20 1983-07-23 Mitsubishi Electric Corp Controlling apparatus of hot water storage type electric water heater

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN2682329Y (en) * 2004-03-29 2005-03-02 陈桂军 Household central air conditioning aided electric heater
CN201081390Y (en) * 2007-08-17 2008-07-02 李庆杰 Household electromagnetic heating stove
CN101726112A (en) * 2008-10-21 2010-06-09 Bsh博施及西门子家用器具有限公司 Storage apparatus, especially hot water preparing device
CN201522078U (en) * 2009-10-27 2010-07-07 王轩泽 Energy-saving quick electric water heater
CN202057027U (en) * 2011-05-26 2011-11-30 常州瑞择微电子科技有限公司 Heater for corrosive liquid

Non-Patent Citations (2)

* Cited by examiner, † Cited by third party
Title
JP昭57-196037A 1982.12.01
JP昭58-124143A 1983.07.23

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Address after: 213022, Changzhou, Jiangsu province north of the Yangtze River North Road No. 3 Building No. 25, West first floor

Co-patentee after: Wuxi China Resources Microelectronics Co., Ltd.

Patentee after: Changzhou Ruize Microelectronics Technology Co., Ltd.

Address before: 213022, No. 25 middle Yangtze Road, Xinbei District, Jiangsu, Changzhou 3-318

Co-patentee before: Wuxi China Resources Microelectronics Co., Ltd.

Patentee before: Changzhou Ruize Microelectronics Technology Co., Ltd.

TR01 Transfer of patent right
TR01 Transfer of patent right

Effective date of registration: 20180706

Address after: 213022 west of West Tower 3, No. 25 Changjiang North Road, Xinbei District, Changzhou, Jiangsu, China

Co-patentee after: WUXI DISI MICROELECTRONIC CO., LTD.

Patentee after: Changzhou Ruize Microelectronics Technology Co., Ltd.

Address before: 213022 west of West Tower 3, No. 25 Changjiang North Road, Xinbei District, Changzhou, Jiangsu, China

Co-patentee before: Wuxi China Resources Microelectronics Co., Ltd.

Patentee before: Changzhou Ruize Microelectronics Technology Co., Ltd.