CN203069515U - Device for detecting surface and subsurface optical absorption of solid material - Google Patents
Device for detecting surface and subsurface optical absorption of solid material Download PDFInfo
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- CN203069515U CN203069515U CN 201320030207 CN201320030207U CN203069515U CN 203069515 U CN203069515 U CN 203069515U CN 201320030207 CN201320030207 CN 201320030207 CN 201320030207 U CN201320030207 U CN 201320030207U CN 203069515 U CN203069515 U CN 203069515U
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Abstract
The utility model discloses a device for detecting surface and subsurface optical absorption of a solid material. A sample is irradiated through pump beams so as to stimulate infrared radiation of the solid material, and the optical absorption characteristics of the surface and subsurface of the solid material on the pump beams are obtained by utilizing the physical characteristics that penetration depth of the solid materials in specified band through the infrared radiation stimulated by the pump beams is limited. The device can be applied to fields of photo-thermal nondestructive inspection, photo-thermal precision testing, absorption characteristic detection of the surface and subsurface of the solid material and the like.
Description
Technical field
The utility model relates to solid material optical absorption field of detecting, specifically is a kind of device of surveying solid material surface and the absorption of inferior surface optics.
Background technology
Solid material can be introduced surface contamination, surface imperfection and subsurface defect inevitably in its process, thereby influences material at the optical absorption characteristic on its surface and inferior surface.For a lot of optical materials, for example be usually used in fused silica glass in the strong laser system and KDP crystal etc., because pollution and the defective in processes such as material cutting, grinding, polishing, introduced, the optical absorption on its surface and inferior surface often can be several times as much as interior absorption of body of associated materials, thereby make the surface of related elements and inferior surface in a lot of the application, become the limiting element bottleneck of performance, the easiest of the weak link of damage from laser such as in strong laser system, becoming.Searching surface and inferior surface absorb, and improve surface and the inferior character of surface of material on this basis in conjunction with processing technology, and very important meaning is arranged.
The detection method of solid material optical absorption has a lot, comprises the photometric method to bigger absorption sample, to laser calorimetry, photoacoustic method and all kinds of optical thermo methods etc. of fainter absorption sample.Photometric method and laser calorimetry all are to survey sample surfaces, inferior surface and the systemic comprehensive effect of sample body as a rule, are difficult to special searching surface and inferior surperficial the absorption.Optoacoustic and various optical thermo method calculate by rational experimental design and model, to a certain extent can to absorb in the body with surface, inferior surface be absorbed with punish.For example, utilize the photothermal deflection method of mirage effect just can to come to absorb and take disciplinary action absorbing in the body with surface, inferior surface by the photo-thermal signal of measuring and analyzing under the different pumping modulating frequency; But its resolution characteristic at depth direction depends on the photo-thermal characteristic of sample, concrete experiment parameter and the accuracy of the model that is used for calculating.Though therefore possible in theory, difficulty is very big in fact in the practical application.Still do not have in fact at present a kind of good method can be used for surface and the inferior surface of direct detection solid material generally and absorb, particularly surface and the inferior surface of the fainter transparent solid material of absorptance absorb.
The utility model content
The technical problems to be solved in the utility model provides a kind of device of surveying solid material surface and the absorption of inferior surface optics, shine the infrared radiation that solid material excites solid material by pump beam, the infrared radiation that utilizes pump beam to excite simultaneously obtains solid material surface and inferior surperficial optical absorption characteristic to pump beam at specific band to the very limited physical characteristics of some solid material penetration depths.
The technical solution of the utility model is:
A kind of device of surveying solid material surface and the absorption of inferior surface optics, include the pump light source that relative solid material front surface arranges, the first infrared radiation gathering-device that relative solid material front surface arranges, be set in turn in the first infrared absorption filter wave apparatus and first infrared detection device of the first infrared radiation gathering-device rear end, the relative second infrared radiation gathering-device that arranges of solid material rear surface is set in turn in the second infrared absorption filter wave apparatus and second infrared detection device of the second infrared radiation gathering-device rear end.
The detecting band that sees through wave band, first infrared detection device and second infrared detection device of the satisfied first infrared absorption filter wave apparatus of the selection of the described first infrared absorption filter wave apparatus, the second infrared absorption filter wave apparatus, first infrared detection device and second infrared detection device and the second infrared absorption filter wave apparatus is consistent with the strong absorption bands of infrared radiation of solid material.
The device that described detection solid material surface and inferior surface optics absorb also includes pump beam modulating device and the pump beam cosmetic treatment apparatus that is arranged between pump light source transmitting terminal and the solid material front surface.
The device that described detection solid material surface and inferior surface optics absorb also comprises the pump light absorption plant that relative solid material rear surface arranges.
The device that described detection solid material surface and inferior surface optics absorb also includes the sample clamping scanister for the fixed solid material.
Described detection solid material is transparent to the pumping laser bundle.
Described detection solid material absorbs bigger to the infrared radiation of pumping laser Shu Jifa at selected wave band.
Principle of work of the present utility model is: the pump beam bundle through ovennodulation incides on the solid material, and the energy of solid material absorptive pumping light beam causes that local temperature changes, thereby causes the variation of solid material infrared emanation.The infrared emanation that pump beam irradiation causes is relevant with substance characteristics such as the absorption coefficient of sample, thermal diffusion coefficients, shines the infrared radiation signal that causes by measuring pump beam, can obtain the substance characteristics such as absorption coefficient, thermal diffusion coefficient of sample.
When the optical heat radiation technology is used for the solid material Characteristics Detection, according to the difference of solid material to the pump beam absorption characteristic, solid material can roughly be divided into two big classes: first kind solid material is very big to the absorption of pump beam, pump beam is very little to the penetration depth of solid material, as each metalloid material, the optical heat radiation signal of this class material is mainly derived from the absorption on sample surfaces and inferior surface (in the pump beam penetration depth); The second class solid material is less to the absorption of pump beam, and pump beam is bigger to the penetration depth of solid material, as optically transparent material of a lot of semiconductor materials and all kinds of faint absorptions etc.
The utility model is primarily aimed at the second class solid material, to this class material, pump beam is at material surface, inferior surface, and all can be absorbed in the body and and then produce all kinds of photo-thermal signals, comprise the optical heat radiation signal, so the utility model can be used for surface and the inferior surface of the direct detection second class solid material and absorb, its ultimate principle is as shown in Figure 1: solid material is the above-mentioned second class solid material, be that its absorption to pump beam is less, therefore pump beam 1 can have very dark penetration depth after front surface incides solid material, even directly is transmitted to the rear surface of sample.Inferior surf zone 2 before the solid material front surface reaches under this condition, interior zone 3, the inferior surface 4 in rear surface and back all can produce the local temperature rising also and then produce infrared radiation because of solid material to the absorption of pump beam 1 energy, be called for short optical heat radiation; The optical heat radiation of inferior surf zone incides on first infrared detection device 9 by 7 collections of the first infrared radiation gathering-device and after through the first infrared absorption filter wave apparatus filtering 8 before the solid material front surface reaches, and pump beam 1 is in solid material rear surface direction light path symmetry fully, and optical heat radiation is collected by the second infrared radiation gathering-device 11 by the optical heat radiation of the inferior surf zone in solid material rear surface and back and through inciding on second infrared detection device 13 after 12 filtering of the second infrared absorption filter wave apparatus.
Because above-mentioned solid material has certain absorption to the infrared radiation that pump beam 1 excites, and this to be absorbed in different infrared wavelengths be different.Suppose that above-mentioned solid material is α (cm to pump beam 1 absorption coefficient that excite, that can see through the wave band of infrared absorption filter wave apparatus 8
-1), then the penetration depth of this wave band infrared radiation in sample is α
-1(cm).So, only at the solid material front surface with apart from front surface α
-1(cm) can pass through the solid material front surface with the infrared radiation 6 of interior inferior surf zone 2 and finally incide on first infrared detection device 9, and will be absorbed by solid material self at the infrared radiation 5 of inside of solid material 3, can not arrive first infrared detection device 9, thereby to the not contribution of first infrared detection device, 9 detected optical heat radiation signals.
Be placed on the similar of the detection light path of solid material rear surface and front surface, only in the solid material rear surface with apart from rear surface α
-1(cm) can pass through the solid material rear surface with the infrared radiation 10 of interior inferior surf zone 4 and finally incide on second infrared detection device 13, and will be absorbed by solid material self at the infrared radiation 5 of sample interior 3, can not arrive second infrared detection device 13, thereby to the not contribution of second infrared detection device, 13 detected optical heat radiation signals.
In sum, method shown in Figure 1 can be surveyed sample surfaces and the degree of depth is α
-1(cm) with the absorption information on interior inferior surface, wherein α is the mean absorption coefficient of that part of photo-thermal infrared radiation in sample that can see through the infrared absorption filter wave apparatus.The concrete numerical value of α depends on following factor: the infrared intrinsic property of (1) sample; (2) infrared detection device 9 or 14 detection wavelength; And (3) infrared absorption filter wave apparatus 8 or 13 see through wave band.
Because the infrared intrinsic property of solid material is fixed specifying solid material, the size of the inferior probing surface degree of depth of the utility model depends on the selection of first infrared detection device 9 and second infrared detection device 13, and the design of the first infrared absorption filter wave apparatus 8 and the second infrared absorption filter wave apparatus 12.
Be example with common optical material fused quartz.Fused quartz all is substantially transparent to ultraviolet to the pump beam of near-infrared band, belongs to the typical second class solid material described in the utility model.Fused quartz can produce the optical heat radiation effect under pump light excites.If the detection of this optical heat radiation effect is selected for use the common infrared detection device of 3-5 micron, then its investigation depth (α
-1) arrive centimetre magnitude at millimeter; And if the another kind of common infrared detection device of selection 8-14 micron, then its investigation depth (α
-1) be micron dimension.If when selecting 8-14 micron infrared detection device, mix 9 microns arrowband infrared fileter again, then its investigation depth (α
-1) will be approximately 300 nanometers (fused quartz is about 300 nanometers to the absorption length of 9 micron wave lengths).The surperficial 300nm of distance is typical inferior surf zone to the degree of depth of micron dimension.
In sum, the utility model utilizes the optical heat radiation technology and comes spectral band and the infrared absorption filter wave apparatus of choose reasonable infrared detection device in conjunction with the concrete property of detecting material, can carry out direct detection and not be subjected to the influence of inside of solid material absorption signal surface and inferior surface optics absorption characteristic.
The utility model can also be surveyed the absorption of front and rear surfaces and inferior surf zone simultaneously except can direct detection surface and inferior surface absorb.Since under same incident laser irradiation, the optical field distribution difference of sample front and rear surfaces and relevant inferior surf zone, and this contrast test has important meaning to understanding laser damage, reason and loss mechanism and absorption Analysis on defects.
Description of drawings
Fig. 1 is principle schematic of the present utility model, wherein, 1 is pump beam, 2 is inferior surf zone before the solid material, 3 is the inside of solid material zone, 4 is inferior surf zone behind the solid material, and 5 is the inside of solid material infrared radiation, and 6 are front surface and preceding inferior surface red external radiation, 7 is the first infrared radiation gathering-device, 8 is the first infrared absorption filter wave apparatus, and 9 is first infrared detection device, and 10 is rear surface and the inferior surface red external radiation in back, 11 is the second infrared radiation gathering-device, 12 is the second infrared absorption filter wave apparatus, and 13 is second infrared detection device, α
-1Be the relevant penetration depth of wave band infrared radiation in solid material.
Fig. 2 is the structural representation of surveying the device of solid material surface and the absorption of inferior surface optics in the embodiment of the present utility model, wherein, 1 is pump light source, 2 is the pump beam modulating device, 3 is the pump beam cosmetic treatment apparatus, 4 is solid material, 5 is the first infrared radiation gathering-device, 6 is the first infrared absorption filter wave apparatus, and 7 is first infrared detection device, and 8 is the second infrared gathering-device, 9 is the second infrared absorption filter wave apparatus, 10 is second infrared detection device, and 11 is sample clamping scanister, and 12 is the pump light absorption plant.
Embodiment
See Fig. 2, a kind of device of surveying solid material surface and the absorption of inferior surface optics, include the pump light source 1 that relative solid material front surface arranges, be arranged at pump beam modulating device 2 and pump beam cosmetic treatment apparatus 3 between pump light source 1 transmitting terminal and solid material 4 front surfaces, the first infrared radiation gathering-device 5 that relative solid material 4 front surfaces arrange, be set in turn in the first infrared absorption filter wave apparatus 6 and first infrared detection device 7 of the first infrared radiation gathering-device, 5 rear ends, the second infrared radiation gathering-device 8 that relative solid material 5 rear surfaces arrange, be set in turn in the second infrared absorption filter wave apparatus 9 and second infrared detection device 10 of the second infrared radiation gathering-device, 8 rear ends, the pump light absorption plant 12 that relative solid material 5 rear surfaces arrange is for the sample clamping scanister 11 of fixed solid material 5.
A kind of principle of work of surveying the device of solid material surface and the absorption of inferior surface optics:
The pump beam that is sent by pump light source 1 passes through pump beam modulating device 2, pump beam cosmetic treatment apparatus 3 successively, and the pump beam after the modulation incides on the solid material 4, and is absorbed by pump light absorption plant 12 through solid material 4 backs.According to concrete test experience needs, the pump beam shaping can be the focused light that converges to sample surfaces after handling, and also can be directional light.The pump light infrared radiation that inferior surf zone produces before solid material 4 front surfaces reach is collected, is surveyed by first infrared detection device 7 through the first infrared absorption filter wave apparatus, 6 backs by the first infrared radiation gathering-device 5; The infrared radiation that the inferior surf zone in solid material 4 rear surfaces and back produces is collected, is surveyed by second infrared detection device 10 through the second infrared absorption filter wave apparatus, 9 backs via the second infrared gathering-device 8.Solid material 4 is fixed on the sample clamping scanister 11, can realize detecting solid material 4 front and rear surfaces zone is complete by the pointwise two-dimensional scan.
The infrared radiation signal that first infrared detection device 7 and second infrared detection device 10 detect can be analyzed by lock-in amplifier under the condition of pump light for modulation continuously; If pump light is light-pulse generator then can utilizes the corresponding pulses signal to amplify analytic system.
Claims (5)
1. survey the device that solid material surface and inferior surface optics absorb for one kind, it is characterized in that: include the pump light source that relative solid material front surface arranges, the first infrared radiation gathering-device that relative solid material front surface arranges, be set in turn in the first infrared absorption filter wave apparatus and first infrared detection device of the first infrared radiation gathering-device rear end, the relative second infrared radiation gathering-device that arranges of solid material rear surface is set in turn in the second infrared absorption filter wave apparatus and second infrared detection device of the second infrared radiation gathering-device rear end.
2. a kind of device that solid material surface and inferior surface optics absorb of surveying according to claim 1 is characterized in that: it is consistent with the strong absorption bands of infrared radiation of solid material that the detecting band that sees through wave band, first infrared detection device and second infrared detection device of the first infrared absorption filter wave apparatus and the second infrared absorption filter wave apparatus is satisfied in the selection of the described first infrared absorption filter wave apparatus, the second infrared absorption filter wave apparatus, first infrared detection device and second infrared detection device.
3. a kind of device that solid material surface and inferior surface optics absorb of surveying according to claim 1, it is characterized in that: the device that described detection solid material surface and inferior surface optics absorb also includes pump beam modulating device and the pump beam cosmetic treatment apparatus that is arranged between pump light source transmitting terminal and the solid material front surface.
4. a kind of device that solid material surface and inferior surface optics absorb of surveying according to claim 1, it is characterized in that: the device that described detection solid material surface and inferior surface optics absorb also comprises the pump light absorption plant that relative solid material rear surface arranges.
5. a kind of device that solid material surface and inferior surface optics absorb of surveying according to claim 1, it is characterized in that: the device that described detection solid material surface and inferior surface optics absorb also includes the sample clamping scanister for the fixed solid material.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201320030207 CN203069515U (en) | 2013-01-21 | 2013-01-21 | Device for detecting surface and subsurface optical absorption of solid material |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201320030207 CN203069515U (en) | 2013-01-21 | 2013-01-21 | Device for detecting surface and subsurface optical absorption of solid material |
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| Publication Number | Publication Date |
|---|---|
| CN203069515U true CN203069515U (en) | 2013-07-17 |
Family
ID=48768289
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN 201320030207 Expired - Lifetime CN203069515U (en) | 2013-01-21 | 2013-01-21 | Device for detecting surface and subsurface optical absorption of solid material |
Country Status (1)
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|---|---|
| CN (1) | CN203069515U (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103115900A (en) * | 2013-01-21 | 2013-05-22 | 合肥知常光电科技有限公司 | Method and device for detecting surface and subsurface optical absorption of solid material |
| RU2708708C1 (en) * | 2019-02-13 | 2019-12-11 | Дмитрий Владимирович Протасеня | Device for searching and characterization of surface defects in optical materials |
-
2013
- 2013-01-21 CN CN 201320030207 patent/CN203069515U/en not_active Expired - Lifetime
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103115900A (en) * | 2013-01-21 | 2013-05-22 | 合肥知常光电科技有限公司 | Method and device for detecting surface and subsurface optical absorption of solid material |
| RU2708708C1 (en) * | 2019-02-13 | 2019-12-11 | Дмитрий Владимирович Протасеня | Device for searching and characterization of surface defects in optical materials |
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| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CX01 | Expiry of patent term |
Granted publication date: 20130717 |
|
| CX01 | Expiry of patent term |