CN103115900A - Method and device for detecting surface and subsurface optical absorption of solid material - Google Patents
Method and device for detecting surface and subsurface optical absorption of solid material Download PDFInfo
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- CN103115900A CN103115900A CN2013100210626A CN201310021062A CN103115900A CN 103115900 A CN103115900 A CN 103115900A CN 2013100210626 A CN2013100210626 A CN 2013100210626A CN 201310021062 A CN201310021062 A CN 201310021062A CN 103115900 A CN103115900 A CN 103115900A
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Abstract
The invention discloses a method and a device for detecting surface and subsurface optical absorption of a solid material. According to the method and the device, infrared radiation of the solid material is stimulated by a pumping light beam irradiating a sample, and the optical absorption characteristic of the surface and subsurface of the solid material to the pumping light beam is obtained through the physical property that the infrared radiation stimulated by the pumping light beam penetrates some solid materials with a very limited depth in a specific wave band. The method and the device can be used in multiple fields such as optothermal nondestructive inspection, optothermal precision detection, and surface and subsurface absorption characteristic detection of the solid material.
Description
Technical field
The present invention relates to solid material optical absorption field of detecting, specifically a kind of method and device of surveying solid material surface and the absorption of inferior surface optics.
Background technology
Solid material inevitably can be introduced surface contamination, surface imperfection and subsurface defect in its process, thereby affects material at the optical absorption characteristic on its surface and inferior surface.For a lot of optical materials, such as being usually used in fused silica glass in strong laser system and KDP crystal etc., due to pollution and the defective introduced in the processes such as material cutting, grinding, polishing, the optical absorption on its surface and inferior surface often can be several times as much as interior absorption of body of associated materials, thereby make the surface of related elements and inferior surface become the bottleneck of limiting element performance in a lot of the application, the easiest of the weak link of damage from laser such as becoming in strong laser system.Searching surface and inferior Surface absorption, and on this basis in conjunction with surface and the inferior character of surface of processing technology improvement material, very important meaning is arranged.
The detection method of solid material optical absorption has a lot, comprises the photometric method to larger absorption sample, to laser calorimetry, photoacoustic method and all kinds of optical thermo methods etc. than the Weak Absorption sample.Photometric method and laser calorimetry are all to survey sample surfaces, inferior surface and the systemic comprehensive effect of sample body as a rule, are difficult to special searching surface and inferior Surface absorption.Optoacoustic and various optical thermo method calculate by rational experimental design and model, can punish to some extent absorbing in body with surface, inferior Surface absorption to a certain extent.For example, utilize the photothermal deflection method of mirage effect just can take disciplinary action to absorbing in body with surface, inferior Surface absorption by the Photothermal Signals of measuring and analyzing under the different pumping modulating frequency; But its resolution characteristic at depth direction depends on the Photothermal characterisation In of sample, concrete experiment parameter and the accuracy of the model that is used for calculating.Although therefore possible in theory, in practical application, difficulty is in fact very large.Still do not have in fact at present generally a kind of good method can be used for surface and the inferior Surface absorption of the surface of direct detection solid material and the fainter transparent solid material of inferior Surface absorption, particularly absorptance.
Summary of the invention
The technical problem to be solved in the present invention is to provide a kind of method and device of surveying solid material surface and the absorption of inferior surface optics, shine by pump beam the infrared radiation that solid material excites solid material, utilize simultaneously the infrared radiation that pump beam excites at specific band, the very limited physical characteristics of some solid material penetration depths to be obtained solid material surface and inferior surperficial optical absorption characteristic to pump beam.
Technical scheme of the present invention is:
A kind of method of surveying solid material surface and the absorption of inferior surface optics comprises the following steps:
(1), shine the front surface of solid material with pump beam, this pump beam incides inside of solid material and from the rear surface outgoing, the front surface of solid material and front inferior surf zone, interior zone, rear surface and rear inferior surface all can produce because of solid material local temperature and raise also and then produce infrared radiation to the absorption of pump beam energy;
(2), the infrared radiation of the front surface of solid material and front inferior surf zone is collected, is also incided detection analysis on infrared detection device after the filtering of process infrared absorption filter wave apparatus by the infrared radiation gathering-device of the front surface setting of relative solid material;
(3), the infrared radiation of the rear surface of solid material and rear inferior surf zone is collected, is also incided detection analysis on infrared detection device after the filtering of process infrared absorption filter wave apparatus by the infrared radiation gathering-device of the rear surface setting of relative solid material.
A kind of device of surveying solid material surface and the absorption of inferior surface optics, include the pump light source that relative solid material front surface arranges, the first infrared radiation gathering-device that relative solid material front surface arranges, be set in turn in the first infrared absorption filter wave apparatus and first infrared detection device of the first infrared radiation gathering-device rear end, relative the second infrared radiation gathering-device of arranging of solid material rear surface is set in turn in the second infrared absorption filter wave apparatus and second infrared detection device of the second infrared radiation gathering-device rear end.
The detecting band that sees through wave band, the first infrared detection device and the second infrared detection device of satisfied the first infrared absorption filter wave apparatus of the selection of described the first infrared absorption filter wave apparatus, the second infrared absorption filter wave apparatus, the first infrared detection device and the second infrared detection device and the second infrared absorption filter wave apparatus is consistent with the strong absorption bands of infrared radiation of solid material.
Described detection solid material is transparent to the pumping laser bundle.
Described detection solid material absorbs larger to the infrared radiation of pumping laser Shu Jifa at selected wave band.
The device that described detection solid material surface and inferior surface optics absorb also includes pump beam modulating device and the pump beam cosmetic treatment apparatus that is arranged between pump light source transmitting terminal and solid material front surface.
The device that described detection solid material surface and inferior surface optics absorb also comprises the pump light absorption plant of relative solid material rear surface setting.
The device that described detection solid material surface and inferior surface optics absorb also includes the sample clamping scanister for the fixed solid material.
Principle of work of the present invention is: the pump beam through ovennodulation incides on solid material, and the energy of solid material absorptive pumping light beam causes that local temperature changes, thereby causes the variation of solid material infrared emanation.The infrared emanation that pump beam irradiation causes is relevant with substance characteristics such as the absorption coefficient of sample, thermal diffusion coefficients, shines by measuring pump beam the infrared radiation signal that causes, can obtain the substance characteristics such as absorption coefficient, thermal diffusion coefficient of sample.
When the optical heat radiation technology is used for the solid material Characteristics Detection, according to the difference of solid material to the pump beam absorption characteristic, solid material can roughly be divided into two large classes: first kind solid material is very large to the absorption of pump beam, pump beam is very little to the penetration depth of solid material, as each metalloid material, the optical heat radiation signal of this class material is mainly derived from the absorption on sample surfaces and inferior surface (in the pump beam penetration depth); The Equations of The Second Kind solid material is less to the absorption of pump beam, and pump beam is larger to the penetration depth of solid material, as optically transparent material of a lot of semiconductor materials and all kinds of Weak Absorptions etc.
the present invention is mainly for the Equations of The Second Kind solid material, to this class material, pump beam is at material surface, inferior surface, and all can be absorbed in body and and then produce all kinds of Photothermal Signals, comprise the optical heat radiation signal, so the present invention can be used for direct detection Equations of The Second Kind solid material the surface and inferior Surface absorption, its ultimate principle is as shown in Figure 1: solid material is above-mentioned Equations of The Second Kind solid material, be that its absorption to pump beam is less, therefore pump beam 1 can have very dark penetration depth after front surface incides solid material, even directly be transmitted to the rear surface of sample.Solid material front surface and front inferior surf zone 2 under this condition, interior zone 3, rear surface and rear inferior surface 4 all can produce because of solid material local temperature and raise also and then produce infrared radiation to the absorption of pump beam 1 energy, be called for short optical heat radiation; Optical heat radiation at solid material front surface and front inferior surf zone incides on the first infrared detection device 9 by the first infrared radiation gathering-device 7 collections and after through the first infrared absorption filter wave apparatus filtering 8, and pump beam 1 is at solid material rear surface direction light path full symmetric, and optical heat radiation is collected by the second infrared radiation gathering-device 11 by the optical heat radiation of solid material rear surface and rear inferior surf zone and through inciding on the second infrared detection device 13 after the second infrared absorption filter wave apparatus 12 filtering.
The infrared radiation that pump beam 1 is excited due to above-mentioned solid material has certain absorption, and this to be absorbed in different infrared wavelengths be different.The absorption coefficient that suppose that above-mentioned solid material is that excite to pump beam 1, can see through the wave band of infrared absorption filter wave apparatus 8 is α (cm
-1), the penetration depth of this wave band infrared radiation in sample is α
-1(cm).So, only at the solid material front surface with apart from front surface α
-1(cm) infrared radiation 6 with interior inferior surf zone 2 can pass through the solid material front surface and finally incide on the first infrared detection device 9, and will be absorbed by solid material self at the infrared radiation 5 of inside of solid material 3, can not arrive the first infrared detection device 9, thereby the optical heat radiation signal that the first infrared detection device 9 detects is not contributed.
Be placed on the similar of the detection light path of solid material rear surface and front surface, only in the solid material rear surface with apart from rear surface α
-1(cm) infrared radiation 10 with interior inferior surf zone 4 can pass through the solid material rear surface and finally incide on the second infrared detection device 13, and will be absorbed by solid material self at the infrared radiation 5 of sample interior 3, can not arrive the second infrared detection device 13, thereby the optical heat radiation signal that the second infrared detection device 13 detects is not contributed.
In sum, method shown in Figure 1 can be surveyed sample surfaces and the degree of depth is α
-1(cm) with the absorption information on interior inferior surface, wherein α is the mean absorption coefficient of part photo-thermal infrared radiation in sample that can see through the infrared absorption filter wave apparatus.The concrete numerical value of α depends on following factor: the infrared intrinsic property of (1) sample; (2) infrared detection device 9 or 14 detection wavelength; And (3) infrared absorption filter wave apparatus 8 or 13 see through wave band.
Because the infrared intrinsic property of solid material is fixed the appointment solid material, the size of the inferior probing surface degree of depth of the present invention depends on the selection of the first infrared detection device 9 and the second infrared detection device 13, and the design of the first infrared absorption filter wave apparatus 8 and the second infrared absorption filter wave apparatus 12.
Take common optical material fused quartz as example.Fused quartz is all substantially transparent to ultraviolet to the pump beam of near-infrared band, belongs to typical Equations of The Second Kind solid material of the present invention.Fused quartz excites lower meeting to produce the optical heat radiation effect at pump light.If the detection of this optical heat radiation effect is selected the common infrared detection device of 3-5 micron, its investigation depth (α
-1) arrive centimetre magnitude at millimeter; And if the another kind of common infrared detection device of selection 8-14 micron, its investigation depth (α
-1) be micron dimension.If mix again the arrowband infrared fileter of 9 microns, its investigation depth (α when selecting 8-14 micron infrared detection device
-1) will be approximately 300 nanometers (fused quartz is about 300 nanometers to the absorption length of 9 micron wave lengths).The surperficial 300nm of distance is typical inferior surf zone to the degree of depth of micron dimension.
In sum, the present invention utilizes the optical heat radiation technology and comes spectral band and the infrared absorption filter wave apparatus of choose reasonable infrared detection device in conjunction with the concrete property of detecting material, can effects on surface and inferior surface optics absorption characteristic carry out direct detection and be not subjected to the impact of inside of solid material absorption signal.
The present invention can also survey the absorption of front and rear surfaces and inferior surf zone simultaneously except can direct detection surface and inferior Surface absorption.Due under same incident laser irradiation, the optical field distribution of sample front and rear surfaces and relevant inferior surf zone is different, and this contrast test has important meaning to the analysis of understanding laser damage, reason and loss mechanism and native defect.
Description of drawings
Fig. 1 is principle schematic of the present invention, wherein, 1 is pump beam, 2 is inferior surf zone before solid material, 3 is the inside of solid material zone, 4 is inferior surf zone after solid material, and 5 is the inside of solid material infrared radiation, and 6 is front surface and front inferior surface red external radiation, 7 is the first infrared radiation gathering-device, 8 is the first infrared absorption filter wave apparatus, and 9 is the first infrared detection device, and 10 is rear surface and rear inferior surface red external radiation, 11 is the second infrared radiation gathering-device, 12 is the second infrared absorption filter wave apparatus, and 13 is the second infrared detection device, α
-1Be the relevant penetration depth of wave band infrared radiation in solid material.
Fig. 2 is the structural representation of surveying the device of solid material surface and the absorption of inferior surface optics in the specific embodiment of the present invention, wherein, 1 is pump light source, 2 is the pump beam modulating device, 3 is the pump beam cosmetic treatment apparatus, 4 is solid material, 5 is the first infrared radiation gathering-device, 6 is the first infrared absorption filter wave apparatus, and 7 is the first infrared detection device, and 8 is the second infrared collection device, 9 is the second infrared absorption filter wave apparatus, 10 is the second infrared detection device, and 11 is sample clamping scanister, and 12 is the pump light absorption plant.
Embodiment
see Fig. 2, a kind of device of surveying solid material surface and the absorption of inferior surface optics, include the pump light source 1 that relative solid material front surface arranges, be arranged at pump beam modulating device 2 and pump beam cosmetic treatment apparatus 3 between pump light source 1 transmitting terminal and solid material 4 front surfaces, the first infrared radiation gathering-device 5 that relative solid material 4 front surfaces arrange, be set in turn in the first infrared absorption filter wave apparatus 6 and first infrared detection device 7 of the first infrared radiation gathering-device 5 rear ends, the second infrared radiation gathering-device 8 that relative solid material 5 rear surfaces arrange, be set in turn in the second infrared absorption filter wave apparatus 9 and second infrared detection device 10 of the second infrared radiation gathering-device 8 rear ends, the pump light absorption plant 12 that relative solid material 5 rear surfaces arrange, the sample clamping scanister 11 that is used for fixed solid material 5.
A kind of principle of work of surveying the device of solid material surface and the absorption of inferior surface optics:
The pump beam that is sent by pump light source 1 passes through pump beam modulating device 2, pump beam cosmetic treatment apparatus 3 successively, and the pump beam after modulation incides on solid material 4, and through being absorbed by pump light absorption plant 12 after solid material 4.According to concrete test experience needs, can be the focused light that converges to sample surfaces after the pump beam Shape correction, can be also directional light.Pump light collected by the first infrared radiation gathering-device 5 at the infrared radiation that solid material 4 front surfaces and front inferior surf zone produce, surveyed by the first infrared detection device 7 after through the first infrared absorption filter wave apparatus 6; The infrared radiation that solid material 4 rear surfaces and rear inferior surf zone produce is via the second infrared collection device 8 collections, through being surveyed by the second infrared detection device 10 after the second infrared absorption filter wave apparatus 9.Solid material 4 is fixed on sample clamping scanister 11, can realize solid material 4 full detections the in front and rear surfaces zone by the pointwise two-dimensional scan.
The infrared radiation signal that the first infrared detection device 7 and the second infrared detection device 10 detect is can be analyzed by lock-in amplifier under the condition of continuous modulation at pump light; If pump light is light-pulse generator can utilizes the corresponding pulses signal to amplify analytic system.
Claims (8)
1. survey the method that solid material surface and inferior surface optics absorb for one kind, it is characterized in that: comprise the following steps:
(1), shine the front surface of solid material with pump beam, this pump beam incides inside of solid material and from the rear surface outgoing, the front surface of solid material and front inferior surf zone, interior zone, rear surface and rear inferior surface all can produce because of solid material local temperature and raise also and then produce infrared radiation to the absorption of pump beam energy;
(2), the infrared radiation of the front surface of solid material and front inferior surf zone is collected, is also incided detection analysis on infrared detection device after the filtering of process infrared absorption filter wave apparatus by the infrared radiation gathering-device of the front surface setting of relative solid material;
(3), the infrared radiation of the rear surface of solid material and rear inferior surf zone is collected, is also incided detection analysis on infrared detection device after the filtering of process infrared absorption filter wave apparatus by the infrared radiation gathering-device of the rear surface setting of relative solid material.
2. survey the device that solid material surface and inferior surface optics absorb for one kind, it is characterized in that: include the pump light source that relative solid material front surface arranges, the first infrared radiation gathering-device that relative solid material front surface arranges, be set in turn in the first infrared absorption filter wave apparatus and first infrared detection device of the first infrared radiation gathering-device rear end, relative the second infrared radiation gathering-device of arranging of solid material rear surface is set in turn in the second infrared absorption filter wave apparatus and second infrared detection device of the second infrared radiation gathering-device rear end.
3. a kind of device that solid material surface and inferior surface optics absorb of surveying according to claim 2 is characterized in that: it is consistent with the strong absorption bands of infrared radiation of solid material that the detecting band that sees through wave band, the first infrared detection device and the second infrared detection device of the first infrared absorption filter wave apparatus and the second infrared absorption filter wave apparatus is satisfied in the selection of described the first infrared absorption filter wave apparatus, the second infrared absorption filter wave apparatus, the first infrared detection device and the second infrared detection device.
4. a kind of device that solid material surface and inferior surface optics absorb of surveying according to claim 2, it is characterized in that: described detection solid material is transparent to the pumping laser bundle.
5. a kind of device that solid material surface and inferior surface optics absorb of surveying according to claim 2, it is characterized in that: described detection solid material absorbs larger to the infrared radiation of pumping laser Shu Jifa at selected wave band.
6. a kind of device that solid material surface and inferior surface optics absorb of surveying according to claim 2, it is characterized in that: the device that described detection solid material surface and inferior surface optics absorb also includes pump beam modulating device and the pump beam cosmetic treatment apparatus that is arranged between pump light source transmitting terminal and solid material front surface.
7. a kind of device that solid material surface and inferior surface optics absorb of surveying according to claim 2 is characterized in that: the device that described detection solid material surface and inferior surface optics absorb also comprises the pump light absorption plant that relative solid material rear surface arranges.
8. a kind of device that solid material surface and inferior surface optics absorb of surveying according to claim 2, it is characterized in that: the device that described detection solid material surface and inferior surface optics absorb also includes the sample clamping scanister for the fixed solid material.
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| CN2013100210626A CN103115900A (en) | 2013-01-21 | 2013-01-21 | Method and device for detecting surface and subsurface optical absorption of solid material |
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| CN2013100210626A CN103115900A (en) | 2013-01-21 | 2013-01-21 | Method and device for detecting surface and subsurface optical absorption of solid material |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104034704A (en) * | 2014-06-27 | 2014-09-10 | 无锡利弗莫尔仪器有限公司 | Method and device for improving infrared radiation imaging resolution ratio |
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2013
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Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN1186234A (en) * | 1996-12-21 | 1998-07-01 | 中国科学院福建物质结构研究所 | Real time high temperature infrared spectrum pump collecting system |
| US20040246477A1 (en) * | 2001-06-01 | 2004-12-09 | Moon John A. | Optical spectrum analyzer |
| WO2004008217A1 (en) * | 2002-07-11 | 2004-01-22 | Universität Siegen | Confocal 3d-scanning absorption |
| CN102721664A (en) * | 2012-04-25 | 2012-10-10 | 吴周令 | Multiple beam laser induced infrared radiation imaging apparatus and method |
| CN102721673A (en) * | 2012-04-25 | 2012-10-10 | 吴周令 | Multi-beam array light-induced reflectivity imaging device and method |
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| CN104034704A (en) * | 2014-06-27 | 2014-09-10 | 无锡利弗莫尔仪器有限公司 | Method and device for improving infrared radiation imaging resolution ratio |
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Application publication date: 20130522 |