CN202748041U - Optical fiber Fabry-Perot sensor - Google Patents
Optical fiber Fabry-Perot sensor Download PDFInfo
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- CN202748041U CN202748041U CN201220482196.9U CN201220482196U CN202748041U CN 202748041 U CN202748041 U CN 202748041U CN 201220482196 U CN201220482196 U CN 201220482196U CN 202748041 U CN202748041 U CN 202748041U
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Abstract
The utility model discloses an optical fiber Fabry-Perot (FP) sensor, which comprises an optical fiber and an optical fiber to be connected; the end surface of the optical fiber and/or the optical fiber to be connected is provided with micro grooves; the optical fiber and the optical fiber to be connected are connected in a butt joint mode; the micro grooves form FP cavities ; the optical emission surfaces of the FP cavities are flat surfaces; the outer end surface of the optical fiber Fabry-Perot sensor is processed into a thin slice; and a convex cylinder is etched at the middle position of the thin slice. According to the optical fiber Fabry-Perot sensor, simple multiplexing of the sensor can be realized, that is, two different Fabry-Perot cavities are made on one sensing head, double-parameter measurement can be realized through the two different Fabry-Perot cavities, the property that an air cavity is not sensitive to the temperature is used for measuring the pressure or acceleration, and simultaneously the property that a solid cavity is sensitive to the temperature is used for realizing temperature measurement.
Description
Technical field
The utility model belongs to technical field of optical fiber sensing, is specifically related to a kind of design of measuring multiple parameters optical fiber F-P sensor.
Background technology
In recent years, fast development along with fields such as biology, medical science, the energy, environment, space flight and aviation, military affairs, the microminiaturization of sensor, lightweight, low energy consumption, adverse environment resistant ability etc. are proposed very urgent requirement, and the micro-nano sensor has become one of international great Environment Science focus.Therefore the fast development of laser micro-machining technology provides new technological means for studying micro-nano fiber senser element of new generation, how to use the modern micro-nano process technology such as laser and realizes that at optical fiber the functional sensor component of various micro-nanos is the important trend of following Fibre Optical Sensor development.Test environment in the various complexity of reply such as fields such as Aero-Space, is also proposing urgent requirement to sensor to the characteristic under the high temperature, how to solve sensor measurement at high temperature and be in the sensor field one very forward position and great science problem.Under hot environment, measure temperature parameter and have the meaning of no less important, how to realize that sensor also is in the sensor field one very forward position and great science problem to the measurement of temperature parameter when measuring designated parameter.
In Fibre Optical Sensor, mainly be bragg grating (Fiber Bragg Grating as temperature, acceleration and tonometric sensor, FBG) and enamel amber (Fabry Perot, FP) chamber interferometer, FBG because its temperature and other measured cross-sensitivity and under large strain spectrum distortion make its application be subject to larger restriction.F-P sensor is because the little characteristics of temperature and other measured cross-sensitivity are well suited for temperature, acceleration and pressure survey.But in CN200810305317.0, proposed a kind of optical fiber F-P sensor with Laser Processing acceleration measurement and pressure before the applicant, a kind of good in optical property, optical fiber F-P sensor that range is adjustable are provided
FBG is because its temperature and other measured cross-sensitivity have been subject to larger restriction, so measure when single FBG sensor can't be realized temperature and other parameters.F-P sensor is because the little characteristics of temperature and other measured cross-sensitivity are well suited for temperature, acceleration and pressure survey, but what can realize at present the simultaneously-measured F-P sensor employing of temperature and other parameters is the method for a plurality of sensor multiplexings, the structure relative complex.
The utility model content
For the problems referred to above, a purpose of the present utility model provide a kind of can be to temperature and pressure or temperature and the simultaneously-measured optical fiber F-P sensor of acceleration.
The technical solution of the utility model is: a kind of optical fiber F-P sensor, comprise: optical fiber and quilt are connect optical fiber, be provided with microflute at described optical fiber or/and connect the end face of optical fiber, described optical fiber and quilt are connect fiber alignment and are linked together, described microflute forms the FP chamber, the optical emitting face in described FP chamber is the plane, and thin slice is processed in the outer face of described optical fiber F-P sensor, etches the right cylinder of a projection in described thin slice centre position.
Further, the thickness of described thin slice is less than 60 microns.
Further, described cylindrical thickness is 10 to 30 microns, 10 to 60 microns of diameters.
Further, described optical fiber and to be connect optical fiber be single mode or the multimode optical fiber that adopts quartz, polymkeric substance, jewel or photon crystal material to make.
Another purpose of the present utility model provides a kind of method for making of above-mentioned optical fiber F-P sensor, can mass makes the F-P sensor of various ranges, specifically comprises the steps:
A. processed microflute at optical fiber or/and connect the end face of optical fiber;
B. optical fiber and the end face that connect optical fiber are docking together, described microflute forms air FP chamber, and the optical reflection face in described FP chamber is end face, and this end face is first optical reflection plane;
C. optical fiber or quilt are connect a fiber cut part, made the outer face that is formed optical fiber F-P sensor by tangent plane;
D. the right cylinder of end face processing that forms in the C step, this right cylinder is solid enamel amber chamber, and the right cylinder outer face forms second optical reflection face.
Further, the described processing of steps A is to adopt Laser Processing, femtosecond laser processing, the particle beams to carve or electron beam lithography.
Further, laser welding, arc welding, plated film docking or bonding are adopted in the described docking of step B.
Further, the described cutting of step C is to adopt light processing, femtosecond laser processing, particle beams etching or electron beam lithography.
Further, the described processing of step D is to adopt light processing, femtosecond laser processing, particle beams etching or electron beam lithography.
Specific works principle of the present utility model: optical fiber F-P sensor of the present utility model pass through that formed air enamel amber resonator end surface is stressed or variation that the effect of acceleration produces realizes the measurement of corresponding pressure or acceleration, the variation that produces by formed solid enamel amber chamber temperature influence realizes the measurement to temperature.
The beneficial effects of the utility model: optical fiber F-P sensor of the present utility model has been realized the simply multiplexing of sensor, namely produce two different enamel amber chambeies at a sensing head, realize two-parameter measurement by these two different enamel amber chambeies, utilize the temperature-resistant characteristic of air chamber with its gaging pressure or acceleration, utilize simultaneously solid chamber that the sensitivity characteristic of temperature is realized measurement to temperature, can obtain the correlation parameter of temperature and pressure or temperature and acceleration by corresponding demodulation method.The Laser Processing that the utility model adopts, femtosecond laser processing, particle beams quarter or electron beam lithography processing technology are all practical to the optical fiber of any kind, and production efficiency is high, can realize extensive manufacturing.
Description of drawings
Fig. 1 is the formed F-P sensor structural representation of step 2 among the embodiment one, two, three;
Fig. 2 is the formed F-P sensor structural representation of step 3 among the embodiment one, two, three;
Fig. 3 is the formed F-P sensor synoptic diagram of step 5 among step 4 and the embodiment two, three among the embodiment one;
Fig. 4 is the formed F-P sensor texture edge of step 4 synoptic diagram among the embodiment two;
Fig. 5 is the formed F-P sensor texture edge of step 4 synoptic diagram among the embodiment three.
Description of reference numerals: 1 optical fiber, 2 cavitys, 3 optical fiber, 4 enamel amber responant diaphragms, 5 right cylinders, 6 both arms, 7 single armeds.
Embodiment
Below in conjunction with the drawings and specific embodiments the utility model is described further.
Optical fiber F-P sensor of the present utility model, specifically comprise: optical fiber and quilt are connect optical fiber, be provided with microflute at described optical fiber or/and connect the end face of optical fiber, described optical fiber and quilt are connect fiber alignment and are linked together, described microflute forms the FP chamber, the optical emitting face in described FP chamber is the plane, and thin slice is processed in the outer face of described optical fiber F-P sensor, etches the right cylinder of a projection in described thin slice centre position.Below by concrete manufacturing process this structure is elaborated.
Embodiment one:
The outer face cutting optical fibre of step 3, the microcavity 3 that forms in step 2 forms enamel amber responant diaphragm 4, and its thickness is 50 microns, namely forms a flaky texture at F-P sensor one end, as shown in Figure 2;
It is 60 microns that the end face of step 4, the enamel amber responant diaphragm 4 that forms in step 3 is processed a diameter with 157 laser instruments, and thickness is 20 microns right cylinder 5, as shown in Figure 3.
The sensor can be used as the simultaneously-measured sensor of temperature and pressure, be subject to the time spent of doing of ambient temperature and pressure when sensor, the effect enamel amber responant diaphragm 4 that is stressed changes, right cylinder 5 is subjected to temperature action and changes, and just can measure measurand by test enamel amber responant diaphragm 4 and right cylinder 5 corresponding variations.
Embodiment two:
The outer face cutting optical fibre of step 3, the microcavity 3 that forms in step 2 forms enamel amber responant diaphragm 4, and its thickness is 50 microns, as shown in Figure 2;
The end face of step 4, the enamel amber responant diaphragm 4 that forms in step 3 is processed a structure as shown in Figure 4, i.e. described sensor with 157 laser instruments.The diameter of mediate cylindrical 5 is 60 microns, and thickness is 20 microns, and the right cylinder both sides are symmetrical arm 6, and width is 25 microns, and length is 40 microns.
The sensor can be used as temperature and the simultaneously-measured sensor of acceleration, be subject to the time spent of doing of ambient temperature and acceleration when sensor, changed by acceleration effect enamel amber responant diaphragm 4, right cylinder 5 is subjected to temperature action and changes, and just can measure measurand by test enamel amber responant diaphragm 4 and right cylinder 5 corresponding variations.
Embodiment three:
The outer face cutting optical fibre of step 3, the microcavity 3 that forms in step 2 forms enamel amber responant diaphragm 4, and its thickness is 50 microns, as shown in Figure 2;
The end face of step 4, the enamel amber responant diaphragm 4 that forms in step 3 is processed a structure as shown in Figure 5 with 157 laser instruments, namely forms described sensor.Wherein, middle right cylinder 5 diameters are 60 microns, and thickness is 20 microns, and single armed 7 width on next door are 25 microns, and length is 40 microns.
The sensor can be used as temperature and the simultaneously-measured sensor of acceleration, be subject to the time spent of doing of ambient temperature and acceleration when sensor, changed by acceleration effect enamel amber responant diaphragm 4, right cylinder 5 is subjected to temperature action and changes, and just can measure measurand by test enamel amber responant diaphragm 4 and right cylinder 5 corresponding variations.With respect to arm structure, this single arm structure is more sensitive when acceleration measurement.
Those of ordinary skill in the art will appreciate that embodiment described here is in order to help reader understanding's principle of the present utility model, should to be understood to that protection domain of the present utility model is not limited to such special statement and embodiment.Those of ordinary skill in the art can make various other various concrete distortion and combinations that do not break away from the utility model essence according to disclosed these technology enlightenments of the utility model, and these distortion and combination are still in protection domain of the present utility model.
Claims (4)
1. optical fiber F-P sensor, comprise: optical fiber and quilt are connect optical fiber, be provided with microflute at described optical fiber or/and connect the end face of optical fiber, described optical fiber and quilt are connect fiber alignment and are linked together, described microflute forms the FP chamber, the optical emitting face in described FP chamber is the plane, and thin slice is processed in the outer face of described optical fiber F-P sensor, etches the right cylinder of a projection in described thin slice centre position.
2. optical fiber F-P sensor according to claim 1 is characterized in that, the thickness of described thin slice is less than 60 microns.
3. optical fiber F-P sensor according to claim 1 is characterized in that, described cylindrical thickness is 10 to 30 microns, 10 to 60 microns of diameters.
4. optical fiber F-P sensor according to claim 1, described optical fiber and to be connect optical fiber be single mode or the multimode optical fiber that adopts quartz, polymkeric substance, jewel or photon crystal material to make.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201220482196.9U CN202748041U (en) | 2012-09-20 | 2012-09-20 | Optical fiber Fabry-Perot sensor |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201220482196.9U CN202748041U (en) | 2012-09-20 | 2012-09-20 | Optical fiber Fabry-Perot sensor |
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| CN202748041U true CN202748041U (en) | 2013-02-20 |
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Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102889901A (en) * | 2012-09-20 | 2013-01-23 | 电子科技大学 | Fabry-Perot optical fiber sensor and fabrication method of sensor |
| CN103344277A (en) * | 2013-06-26 | 2013-10-09 | 华中科技大学 | Fabry-Perot sensor capable of simultaneously detecting double parameters and detection device |
| CN105180980A (en) * | 2015-10-14 | 2015-12-23 | 南京信息工程大学 | Symmetrical all-fiber Fabry-Perot sensor and manufacturing method thereof |
| CN114485986A (en) * | 2021-12-31 | 2022-05-13 | 中国空气动力研究与发展中心超高速空气动力研究所 | Optical fiber FP temperature sensor with enhanced sensitivity of external structure and preparation method thereof |
-
2012
- 2012-09-20 CN CN201220482196.9U patent/CN202748041U/en not_active Expired - Fee Related
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102889901A (en) * | 2012-09-20 | 2013-01-23 | 电子科技大学 | Fabry-Perot optical fiber sensor and fabrication method of sensor |
| CN102889901B (en) * | 2012-09-20 | 2015-07-22 | 电子科技大学 | Fabry-Perot optical fiber sensor and fabrication method of sensor |
| CN103344277A (en) * | 2013-06-26 | 2013-10-09 | 华中科技大学 | Fabry-Perot sensor capable of simultaneously detecting double parameters and detection device |
| CN105180980A (en) * | 2015-10-14 | 2015-12-23 | 南京信息工程大学 | Symmetrical all-fiber Fabry-Perot sensor and manufacturing method thereof |
| CN114485986A (en) * | 2021-12-31 | 2022-05-13 | 中国空气动力研究与发展中心超高速空气动力研究所 | Optical fiber FP temperature sensor with enhanced sensitivity of external structure and preparation method thereof |
| CN114485986B (en) * | 2021-12-31 | 2023-05-05 | 中国空气动力研究与发展中心超高速空气动力研究所 | Optical fiber FP temperature sensor sensitized by external structure and preparation method thereof |
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