CN202676735U - Probe cantilever vibration device of atomic force microscope - Google Patents
Probe cantilever vibration device of atomic force microscope Download PDFInfo
- Publication number
- CN202676735U CN202676735U CN 201220341620 CN201220341620U CN202676735U CN 202676735 U CN202676735 U CN 202676735U CN 201220341620 CN201220341620 CN 201220341620 CN 201220341620 U CN201220341620 U CN 201220341620U CN 202676735 U CN202676735 U CN 202676735U
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- cantilever
- force microscope
- atomic force
- probe
- groove
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Abstract
The utility model provides a probe cantilever vibration device of an atomic force microscope, comprising an organic glass module and a stainless steel module, wherein the organic glass module is provided with two rectangular grooves respectively for placing a probe and an indium tin oxide conductive glass, the metal-plated back of a probe cantilever and the conductive glass are used as two electrodes, alternating-current signals are applied between the two electrodes so that static electricity is generated to drive the cantilever to vibrate, and direct-current signals are further superimposed to improve the vibration amplitude of the cantilever; and the stainless steel module is used for stabilizing the device and reducing the drift. According to the utility model, a device increasing the vibration amplitude by superimposing direct-current bias voltage is developed on the basis of driving the probe cantilever of the atomic force microscope to vibrate by electrostatic force; the device is simple in structure and convenient to operate; the force is directly applied to the cantilever, the emergence of miscellaneous peaks in a cantilever vibration spectrum is avoided, the vibration amplitude is increased and the signal-to-noise ratio of vibration signals is increased; and the device is helpful for locking the real resonant frequency of the cantilever and the resolution of an instrument can be improved.
Description
Technical field
The utility model relates to atomic force microscope probe cantilever vibration field, and is particularly related to a kind of atomic force microscope probe cantilever vibration device.
Background technology
Atomic force microscope (Atomic Force Microscope, AFM) a kind ofly can be used to study the solid material surface construction analysis instrument that comprises insulator.It studies surface structure and the character of material by detecting atomic weak interaction between atoms power between testing sample surface and the miniature force sensitive element.Micro-cantilever one end of a pair of faint power extreme sensitivity is fixed, and the small needle point of the other end is near sample, at this moment it will with its interaction, acting force will so that micro-cantilever generation deformation or motion state change.During scanning samples, utilize sensor to detect these variations, just can obtain distribution of forces information, thereby obtain surface structure information with nanometer resolution.
For traditional commercial atomic force microscope (AFM), the liquid tank that is used for placing probe is equipped with piezoelectric ceramics, when being operated in solution environmental when rapping pattern, causes that by add alternating voltage at piezoelectric ceramics its deformation drives the probe vibration.Because piezoelectric ceramics is embedded in the liquid tank, when probe vibrated, whole liquid tank also can produce mechanical vibration like this, observe spectrogram, can see assorted peak like a lot of forests, reduced signal to noise ratio (S/N ratio), and owing to the existence at assorted peak, select sometimes the resonant frequency of wrong probe.Drive the method for AFM cantilever vibration for the electrostatic force of new development, avoided the generation at assorted peak, but because weak electrostatic force, the cantilever vibration amplitude is less, thus signal to noise ratio (S/N ratio) is lower, has hindered the application of this new technology.
The utility model content
The utility model proposes a kind of atomic force microscope probe cantilever vibration device, be used for solving with the less problem of electrostatic force driving AFM cantilever vibration amplitude.
In order to achieve the above object, the utility model proposes a kind of atomic force microscope probe cantilever vibration device, comprising:
The organic glass substrate;
The first groove and the second groove are arranged at respectively in the described organic glass substrate;
Probe is arranged at described the first groove;
Electro-conductive glass is arranged at described the second groove.
Further, described the first groove and the second groove are the rectangle groove.
Further, described electro-conductive glass is indium gallium glass.
Further, described probe is fixed by copper sheet and screw.
Further, be provided with conducting strip and described probe cantilever metal layer on back electrical contact in described the first groove.
Further, described conducting strip is crossed enamel covered wire and the electrical connection of the first copper electrode.
Further, the conductive layer of described electro-conductive glass is by enamel covered wire and the electrical connection of the second copper electrode.
Further, be provided with the stainless steel stabilising arrangement in the described organic glass substrate.
The atomic force microscope probe cantilever vibration device that the utility model proposes, produce electrostatic force by between indium gallium (ITO) electro-conductive glass and conducting probe cantilever, applying alternating voltage, electrostatic force acts directly on and drives cantilever vibration on the cantilever, only produces single level and smooth resonance peak in spectrogram; Apply simultaneously Dc bias, improve the cantilever amplitude, thereby increase the signal to noise ratio (S/N ratio) of probe cantilever vibration signal, be conducive to lock real cantilever resonant frequency, thereby improve the resolution of instrument.
Measurement mechanism of the present utility model compared with prior art, not only apparatus structure is fairly simple, and is easy to operate, and electrostatic force acts directly on the cantilever, avoided the appearance at assorted peak, in spectrogram, obtained level and smooth single resonance peak, the resonant frequency when selecting easily probe work.Add Dc bias, improve amplitude, increase the resolution that has improved instrument owing to signal to noise ratio (S/N ratio).
Description of drawings
Figure 1 shows that the atomic force microscope probe cantilever vibration apparatus structure schematic diagram of the utility model preferred embodiment.
Figure 2 shows that the rear view of the atomic force microscope probe cantilever vibration apparatus structure schematic diagram of Fig. 1.
Embodiment
In order more to understand technology contents of the present utility model, especially exemplified by specific embodiment and cooperate appended graphic being described as follows.
The purpose of this utility model is to solve with electrostatic force and drives the less problem of AFM cantilever vibration amplitude, particularly traditional liquid tank that piezoelectric ceramics is housed when driving the probe vibration because mechanical vibration produce many assorted peaks except probe cantilever resonance peak, affect the selection of probe resonant frequency, and because signal to noise ratio (S/N ratio) reduces the problem that causes instrumental resolution to reduce.For above-mentioned shortcoming, the utility model has developed the device of a kind of electrostatic force a driven atom force microscope (AFM) probe cantilever vibration on the basis of conventional ADS driving probe vibration, this apparatus structure is simple, easy to operate, add alternating voltage and produce electrostatic force between ITO electro-conductive glass and conduction cantilever, electrostatic force acts directly on and drives the probe cantilever vibration on the cantilever; The Dc bias that superposes simultaneously improves amplitude.
Please refer to Fig. 1 and Fig. 2, Figure 1 shows that the atomic force microscope probe cantilever vibration apparatus structure schematic diagram of the utility model preferred embodiment, Figure 2 shows that the rear view of the atomic force microscope probe cantilever vibration apparatus structure schematic diagram of Fig. 1.The utility model proposes a kind of atomic force microscope probe cantilever vibration device, comprising: organic glass substrate 100; The first groove 200 and the second groove 300 are arranged at respectively in the described organic glass substrate 100; Probe is arranged at described the first groove 200; Electro-conductive glass is arranged at described the second groove 300.
According to the utility model preferred embodiment, described the first groove 200 and the second groove 300 are the rectangle groove, settle respectively AFM probe and ITO (indium gallium) electro-conductive glass, cantilever metal plating layer on back and electro-conductive glass are as two electrodes, thereby between these two electrodes, apply AC signal generation electrostatic force and drive cantilever vibration, apply Dc bias, improve amplitude.Described probe is fixed by copper sheet 400 and screw, be provided with conducting strip 500 and described probe cantilever metal layer on back electrical contact in described the first groove 200, described conducting strip 500 is crossed enamel covered wire and 600 electrical connections of the first copper electrode, the conductive layer of described electro-conductive glass is by enamel covered wire and 700 electrical connections of the second copper electrode, described two metal electrodes 600,700, place in the groove of these device organic glass substrate 100 parts, described two metal electrodes 600,700 are connected with signal generator, be added on cantilever and the ito glass for generation of alternating voltage, drive cantilever vibration thereby produce electrostatic force; Add Dc bias, improve amplitude.
Further, be provided with stainless steel stabilising arrangement 800 in the described organic glass substrate 100.Further, this electrostatic force drive unit also comprises other parts of atomic force microscope (AFM), is used for imaging.Further, this electrostatic force drive unit also comprises data collecting card, is used for gathering the vibration signal of cantilever, by Fourier transform time-domain signal is transformed to frequency-region signal, thereby produces the spectrogram of cantilever vibration.Described data collecting card sample frequency is 5MHz, and hits is 1M.
In sum, measurement mechanism of the present utility model compared with prior art, not only apparatus structure is fairly simple, easy to operate, and electrostatic force acts directly on the cantilever, avoided the appearance at assorted peak except probe cantilever resonance peak, in spectrogram, obtained level and smooth single resonance peak, the resonant frequency when selecting easily probe work.Because vibration amplitude increases, thereby signal to noise ratio (S/N ratio) increases the resolution that has improved instrument.
Although the utility model discloses as above with preferred embodiment, so it is not to limit the utility model.Have in the technical field under the utility model and usually know the knowledgeable, within not breaking away from spirit and scope of the present utility model, when being used for a variety of modifications and variations.Therefore, protection domain of the present utility model is as the criterion when looking claims person of defining.
Claims (8)
1. an atomic force microscope probe cantilever vibration device is characterized in that, comprising:
The organic glass substrate;
The first groove and the second groove are arranged at respectively in the described organic glass substrate;
Probe is arranged at described the first groove;
Electro-conductive glass is arranged at described the second groove.
2. atomic force microscope probe cantilever vibration device according to claim 1 is characterized in that, described the first groove and the second groove are the rectangle groove.
3. atomic force microscope probe cantilever vibration device according to claim 1 is characterized in that, described electro-conductive glass is indium gallium glass.
4. atomic force microscope probe cantilever vibration device according to claim 1 is characterized in that, described probe is fixed by copper sheet and screw.
5. atomic force microscope probe cantilever vibration device according to claim 1 is characterized in that, is provided with conducting strip and described probe cantilever metal layer on back electrical contact in described the first groove.
6. atomic force microscope probe cantilever vibration device according to claim 5 is characterized in that, described conducting strip is crossed enamel covered wire and the electrical connection of the first copper electrode.
7. atomic force microscope probe cantilever vibration device according to claim 6 is characterized in that, the conductive layer of described electro-conductive glass is by enamel covered wire and the electrical connection of the second copper electrode.
8. atomic force microscope probe cantilever vibration device according to claim 1 is characterized in that, is provided with the stainless steel stabilising arrangement in the described organic glass substrate.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201220341620 CN202676735U (en) | 2012-07-13 | 2012-07-13 | Probe cantilever vibration device of atomic force microscope |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201220341620 CN202676735U (en) | 2012-07-13 | 2012-07-13 | Probe cantilever vibration device of atomic force microscope |
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| Publication Number | Publication Date |
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| CN202676735U true CN202676735U (en) | 2013-01-16 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN 201220341620 Expired - Lifetime CN202676735U (en) | 2012-07-13 | 2012-07-13 | Probe cantilever vibration device of atomic force microscope |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103336149A (en) * | 2013-06-25 | 2013-10-02 | 苏州新锐博纳米科技有限公司 | Atomic force microscopy micro cantilever and application based on nanometer particle lattice quantum transportation |
| CN111811939A (en) * | 2020-07-21 | 2020-10-23 | 上海交通大学 | High-precision nano-mechanics detection system in ultralow temperature environment |
-
2012
- 2012-07-13 CN CN 201220341620 patent/CN202676735U/en not_active Expired - Lifetime
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103336149A (en) * | 2013-06-25 | 2013-10-02 | 苏州新锐博纳米科技有限公司 | Atomic force microscopy micro cantilever and application based on nanometer particle lattice quantum transportation |
| CN103336149B (en) * | 2013-06-25 | 2015-07-29 | 苏州新锐博纳米科技有限公司 | Based on atomic force microscopy micro-cantilever and the application of nano particle dot array Quantum Transport |
| CN111811939A (en) * | 2020-07-21 | 2020-10-23 | 上海交通大学 | High-precision nano-mechanics detection system in ultralow temperature environment |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CX01 | Expiry of patent term | ||
| CX01 | Expiry of patent term |
Granted publication date: 20130116 |