CN202582492U - Auxiliary device for measuring performance parameters of semiconductor machine platform - Google Patents
Auxiliary device for measuring performance parameters of semiconductor machine platform Download PDFInfo
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- CN202582492U CN202582492U CN 201120573650 CN201120573650U CN202582492U CN 202582492 U CN202582492 U CN 202582492U CN 201120573650 CN201120573650 CN 201120573650 CN 201120573650 U CN201120573650 U CN 201120573650U CN 202582492 U CN202582492 U CN 202582492U
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Abstract
According to the existing technique for measuring the performance parameters of a semiconductor machine platform, the retention time of a platform after being moved to a given position and the triggering time of a measurement device need to be determined in advance, or the measurement on the platform already moved to the given position needs to be started by means of manual intervention. The utility model provides an auxiliary device for measuring the performance parameters of a semiconductor machine platform. The auxiliary device comprises a sensor for measuring a single which indicates the motion state of the platform after the platform is driven to move to a given position; a processor for judging whether the platform is stabilized or not according to the signal, and controlling a trigger to produce a trigger signal based on the judgment that the platform is stabilized; and a trigger for producing and sending a trigger signal to a measurement device which indicates the performance parameters of the platform, and indicating the measurement device to start the measurement. The auxiliary device can automatically judge whether a platform is stabilized or not without the need of figuring out the retention time and the triggering time in advance or adopting the manual intervention. Meanwhile, the measurement accuracy and rapidity are ensured and the automatic measurement is realized.
Description
Technical field
The utility model relates to semiconductor applications, particularly the measuring technique of the platform property parameter of semiconductor board.
Background technology
Precision movement platform is the core subsystem of optical detection processing and the many visual plants of semiconductor manufacturing; It is in motion process; Might produce direction of principal axis, laterally, vertically, the position deviation of pitching (pitch) direction, deflection (yaw) direction, this six-freedom degree direction of rolling (roll) direction; Examine goods, during breakdown maintenance, usually need measure these position deviations in Machine Design, buying, to guarantee that platform is issued to nano grade positioning precision in very high speed and acceleration.
The common equipment of measuring above-mentioned deviation at present is a laser interferometer; It utilizes laser as length standard, is a kind of fine measuring instrument that positional precision (bearing accuracy, repetitive positioning accuracy etc.), geometric accuracy (flatness, linearity etc.) are carried out precision measurement.Its measuring principle is: laser is divided into two light beam through half-reflecting mirror, and stationary mirror of a branch of directive forms reference path, and a branch of directive movably catoptron forms measuring route.The light that two catoptrons are reflected; Get back in the half-reflecting mirror again and join, be merged into one light beam and produce interference fringe and be incident upon photoelectric sensor, the light and shade that sensor senses these stripeds changes; Through after the level signal processing circuit handle, can calculate the distance that mobile mirror moves.
By laser interferometer, the existing method of measuring motion platform bearing accuracy and repeatability is: motion control card transmits control signal to drive system, and the motor-driven platform motion stays for some time to desired location.In at this moment, after laser interferometer detects platform and arrives the target location according to the predefined triggering residence time and site error band, write down the actual position value of platform automatically.After the residence time finished, platform motion repeated above recording process to next target location point, until accomplishing all desired location points, obtained the bearing accuracy and the repeated result (through the laser interferometer software processes) of platform.Measuring process need be confirmed two material time parameters, and promptly the platform residence time and laser interferometer trigger the residence time.The platform residence time is provided with too short, can cause laser interferometer record position value in time, test crash; The triggering residence time is too short, and meeting is the record position value when the stable as yet arrival of platform precalculated position, influences the accuracy of measurement result.Therefore, above-mentioned two time spans generally need repeatedly to attempt confirming, have reduced efficiency of measurement and accuracy, and if between platform motion speed or two measurement points distance change, time span needs to confirm again.
Different with bearing accuracy and repetition measurement; Measurement method of parameters such as motion platform flatness, linearity are: the motion of control card control-driven system drive motor, and when platform arrives desired location, necessary manual operation laser interferometer software records positional value; Therefore; Need to drop into manpower, and owing to introduce artificial factor of judgment, existing method exposes shortcomings such as measurement result is inaccurate, time-consuming, poor efficiency.
The utility model content
Need to attempt in advance confirming the residence time and triggered time that in order to solve prior art perhaps need the technical matters of manual intervention, the technology that proposes a kind of platform property parameter of automatic measurement semiconductor board will be very favourable.
According to first aspect of the utility model, a kind of servicing unit that is used to measure the platform property parameter of semiconductor board is provided, said platform can be actuated to motion, it is characterized in that, comprising:
-sensor is used for after said platform is driven to given position, measures the signal of the motion state of the said platform of indication;
-processor links to each other with said sensor, is used for judging according to said signal whether said platform is stable, is judging that stable back control trigger produces trigger pip; And
-trigger links to each other with said processor, is used for producing trigger pip to the measuring equipment of indication one platform property parameter, and this this measuring equipment of trigger pip indication begins to measure the performance parameter of said platform.
According to this aspect, can automatically judge platform stable, and automatically trigger measuring equipment after stable and begin to measure; Need not to test out in advance the residence time and triggered time; Do not need manual intervention yet, guaranteed accuracy and the rapidity measured simultaneously, realized the measurement of robotization.
According to one preferred embodiment, said sensor comprises:
Said sensor comprises:
-position transducer is used to produce the position signalling relevant with the physical location of said platform;
Said processor be used for following at least each:
-calculate the difference of said position signalling and certain position, when said difference remains in the preset range, judge said platform stable;
-confirm whether said position signalling keeps within the specific limits, when keeping, judge said platform stable.
Preferred embodiment said position transducer is installed on said platform according to one, wherein, comprises following arbitrary situation:
Said position transducer is installed on the driving mechanism of said platform, is used to measure the position of said driving mechanism in stroke;
Said position transducer is installed on the movable body of said platform, is used to measure the position of the movable body of said platform.
This embodiment provides a kind of embodiment of judging that this platform is whether stable, and the use location sensor is judged the embodiment that this platform is whether stable, can judge more accurately.
According to one preferred embodiment, said sensor comprises:
-laser interferometer system is used to shine the reflective mirror on the movable body that is arranged at said platform, and measures the optical signalling that said reflective mirror provides; And/or,
Said processor is used for confirming whether said optical signalling keeps within the specific limits, when keeping, judges said platform stable.
This embodiment provides the another kind of embodiment of judging that this platform is whether stable, and the optical signalling that uses laser interferometer system to gather is judged, because the resolution of optical signalling is higher, therefore can judge more accurately.
According to one preferred embodiment, said measuring equipment comprises laser interferometer system.
According to one preferred embodiment, said processor and trigger are implemented in the control card of platform control system of semiconductor board; And/or,
This servicing unit also comprises:
-interface arrangement links to each other with said trigger, is used to be connected to said measuring equipment, converts said trigger pip into form that said measuring equipment can be discerned, and isolates said servicing unit and said measuring equipment.
This embodiment has provided the utility model has been implemented in the embodiment in the actual semiconductor board, need not make big change to the semiconductor board of reality, has good compatibility.
Description of drawings
Through reading the detailed description of doing with reference to following accompanying drawing that non-limiting example is done, the other features, objects and advantages of the utility model will become more apparent:
Fig. 1 is that an embodiment according to the utility model is implemented in the synoptic diagram in the semiconductor board;
Fig. 2 is that the variant according to an embodiment of the utility model is implemented in the synoptic diagram in the semiconductor board;
Fig. 3 is the process flow diagram according to the method for an embodiment of the utility model;
Fig. 4 is that another embodiment according to the utility model is implemented in the synoptic diagram in the semiconductor board.
Embodiment
Be elaborated through specific embodiment below.Need to prove that under the situation of not conflicting, embodiment and the characteristic among the embodiment among the application can make up each other.
Fig. 1 and Fig. 2 show semiconductor board, and this board has the system according to the platform property parameter that is used to measure of the embodiment of the utility model.
As shown in the figure, whole kinematic system generally comprises following several parts: control card, driver, driving mechanism (comprising motor) and the movable body that is positioned on the motion are formed.Control card links to each other with driver, and driver links to each other with driving mechanism, and driving mechanism is connected to movable body.After the control signal that control card provides converted the drive signal of motor into through driver, the movable body of drives platform was realized the motion of X, Y, Z and Theta four direction.
In this embodiment, the servicing unit of measuring the platform property parameter of semiconductor board comprises basically:
-sensor is used for after platform is driven to given position, measures the signal of the motion state of indication platform;
-processor links to each other with sensor, is used for judging according to signal whether said platform is stable, is judging that stable back control trigger produces trigger pip;
-trigger links to each other with processor, is used for producing trigger pip to the measuring equipment of indication one platform property parameter, and this this measuring equipment of trigger pip indication begins the performance parameter of measuring table.
The method that is used to measure the platform property parameter of semiconductor board comprises the steps:
I. driving said platform moves;
Ii. drive said platform to given position, detect the signal of the motion state of the said platform of indication;
Iii. judge according to this signal whether said platform is stable; And
Iv. after judging said platform stable, measure the performance parameter of said platform.
To and change through two embodiments below the utility model will be detailed.
First embodiment
In the first embodiment, the sensor position signalling that provides in use location judges whether platform is stable.Below this embodiment will be detailed.
At first, as shown in Figure 3, the control signal that control card sends offers driving mechanism after actuator mechanism amplifies, and the drives platform movable body carries out the point-to-point motion according to kinematic parameters such as the speed that is provided with, acceleration.Be appreciated that the mode that drives platform moves is different to measuring the different platforms performance parameter.For example, control card controlling and driving mechanism moves certain distance in travel range, thereby platform is moved to the precalculated position.
To the precalculated position, detect the signal of the motion state of indication platform in drives platform.In one embodiment, illustrated in figures 1 and 2, sensor is a position transducer, and it detects the position signalling relevant with the physical location of platform.In a kind of situation, as shown in Figure 1, position transducer is installed on the movable body of platform, is used for the position at measuring table movable body place.In another kind of situation, as shown in Figure 2, this position transducer can be installed on driving mechanism, is used to measure the position of driving mechanism in its travel range, and this position is relevant with the movable body position of platform.
After measuring position signalling, judge according to this signal whether platform is stable.In one embodiment, judge according to this signal whether platform is stable by the processor that links to each other with sensor.
In one case; As shown in Figure 1, what position transducer was measured is the position at platform motion body place, and then processor calculates the difference of the desired locations that this physical location and this platform need be driven to; In the time of in difference remains on preset range, judge platform stable.For example; When the platform motion body is driven to desired locations, maybe be at this position double swerve, when the scope of rocking continues to be decreased to a certain degree; When promptly the difference of this physical location and this given position remains in the preset range, on the precision of measuring equipment, can think that this platform is stable.The size of this scope can be confirmed in advance.
Under another kind of situation, as shown in Figure 2, what position transducer was measured is the position of driving mechanism in its travel range, owing to the platform motion body links to each other with driving mechanism, so the stability of driving mechanism itself can reflect the stability of platform motion body.Therefore, difference between the physical location of processor calculating driving mechanism and the desired locations of drive unit in the time of in difference remains on preset range, is judged platform stable.
If processor judges that this difference still outside the preset range, prove that the platform motion body does not also settle out, then sensor continues to measure, and processor continues judgement, is within the preset range until this difference.
In the embodiment of a variation, need not consider desired locations, and the situation of change of only considering position signalling itself judges whether motion platform is stable.For example, position signalling in more and more littler scope about fluctuation, promptly keep within the specific limits, can think that this platform is stable.The size of this scope can be confirmed in advance.
After judging that this platform is stable, processor control trigger produces trigger pip to the measuring equipment of indication one platform property parameter, and this this measuring equipment of trigger pip indication begins to measure, the performance parameter of computing platform.
As depicted in figs. 1 and 2, processor and trigger can be implemented in the control card.In one embodiment, can programme, with the function adding of these two devices to control card; In another embodiment, can these two devices of example, in hardware be implanted among the control card.
Purpose from trigger pip format conversion and circuit isolation; The embodiment of the utility model is between trigger and measuring equipment; Can further include an interface arrangement; Be used for converting trigger pip into form that measuring equipment can be discerned, and isolate this servicing unit and measuring equipment.
For example, measuring equipment is defaulted as high level, and negative edge triggers.Before then platform was stablized as yet, interface arrangement was output as high level, the input of measuring equipment Triggerless, not operation; After the platform stable, the output of interface arrangement is by high step-down, and the holding signal low level makes measuring equipment recognize this triggering for example greater than 2 μ s, and begins to measure.
One preferred embodiment in, measuring equipment comprises laser interferometer system, it comprises a laser interferometer measurement module that is often implemented among the PC, laser head, and the catoptron that is installed in the laser interferometer on the platform motion body.This scintilloscope is done the point-to-point motion with the platform motion body.The light that laser head sends is through shining behind the interference mirror on the catoptron; Reflected light after mirror reflects is received by laser head through interference mirror once more; Optical signalling is collected and calculating by the laser interferometer measurement module; To obtain in real time the accurately positional value of feedback motion, realize position measurement.Using the method for the platform property parameter of laser interferometer measurement semiconductor board itself is that those skilled in the art knows, and the utility model repeats no more at this.
Use laser interferometer software and the API (application programming interfaces) that provides thereof, DLL (dynamic link library) can realize following function easily: after the input interface of laser interferometer measurement module receives the negative edge trigger pip of interface arrangement output; Start laser interferometer record reading, calculate afterwards.
Second embodiment
In the embodiment of another variation, the use location sensor does not provide position signalling to judge whether platform is stable, and is to use the stronger optical signalling of resolution characteristic.To detail this embodiment below, emphasis is described is the difference with above first embodiment.
Similar with above embodiment, at first, drives platform is to given position.
Then; As shown in Figure 4; The laser interferometer measurement module can be controlled laser interferometer and come into operation; The light that sends is through shining behind the interference mirror on the catoptron, and the reflected light after mirror reflects is received by interferometer through interference mirror once more, and optical signalling is collected by the laser interferometer control system.
Because whether platform whether stablize by stable this optical signalling that directly influenced; So can confirm fluctuation about optical signalling is in more and more littler scope with the processor in the PC assembly that the laser interferometer measurement module links to each other; Promptly keep within the specific limits, can think that this platform is stable.The size of this scope can be confirmed in advance.
When judging that platform is not stablized yet, laser interferometer continues to measure, and processor continues to judge, and is stable until this optical signalling.
After judging that this platform is stable, processor control trigger produces trigger pip to laser interferometer, and this this laser interferometer system of trigger pip indication begins to measure, the performance parameter of computing platform.
Certainly; The utility model also can have other various embodiments; Under the situation that does not deviate from the utility model spirit and essence thereof; Those of ordinary skill in the art can make various corresponding changes and distortion according to the utility model, but these corresponding changes and distortion all should belong to the protection domain of the appended claim of the utility model.For example; The speed pickup that above position transducer or optical sensor can be coupled to the platform motion body replaces; When the movement velocity of the platform motion body of speed pickup indication keeps below certain speed, can judge that this motion platform is stable, and begin to measure.
One of ordinary skill in the art will appreciate that all or part of step in the said method can instruct related hardware to accomplish through program, said program can be stored in the computer-readable recording medium, like ROM (read-only memory), disk or CD etc.Alternatively, all or part of step of the foregoing description also can use one or more integrated circuit to realize.Correspondingly, each the module/unit in the foregoing description can adopt the form of hardware to realize, also can adopt the form of software function module to realize.The utility model is not restricted to the combination of the hardware and software of any particular form.
Claims (5)
1. servicing unit that is used to measure the platform property parameter of semiconductor board, said platform can be actuated to motion, it is characterized in that, comprising:
-sensor is used for after said platform is driven to given position, measures the signal of the motion state of the said platform of indication;
-processor links to each other with said sensor, is used for judging according to said signal whether said platform is stable, is judging that stable back control trigger produces trigger pip; And
-trigger links to each other with said processor, is used for producing trigger pip to the measuring equipment of indication one platform property parameter, and this this measuring equipment of trigger pip indication begins to measure the performance parameter of said platform.
2. servicing unit according to claim 1 is characterized in that, said sensor comprises:
-position transducer is used to produce the position signalling relevant with the physical location of said platform.
3. servicing unit according to claim 2 is characterized in that said position transducer is installed on said platform, wherein, comprises following arbitrary situation:
Said position transducer is installed on the driving mechanism of said platform, is used to measure the position of said driving mechanism in stroke;
Said position transducer is installed on the movable body of said platform, is used to measure the position of the movable body of said platform.
4. servicing unit according to claim 1 and 2 is characterized in that, said processor and trigger are implemented in the control card of platform control system of semiconductor board;
This servicing unit also comprises:
-interface arrangement links to each other with said trigger, is used to be connected to said measuring equipment, converts said trigger pip into form that said measuring equipment can be discerned, and isolates said servicing unit and said measuring equipment;
Said measuring equipment comprises laser interferometer system.
5. servicing unit according to claim 1 and 2 is characterized in that, said sensor comprises :-laser interferometer system is used to shine the reflective mirror on the movable body that is arranged at said platform, and measures the optical signalling that said reflective mirror provides.
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| Application Number | Priority Date | Filing Date | Title |
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| CN 201120573650 CN202582492U (en) | 2011-12-31 | 2011-12-31 | Auxiliary device for measuring performance parameters of semiconductor machine platform |
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| Application Number | Priority Date | Filing Date | Title |
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| CN 201120573650 CN202582492U (en) | 2011-12-31 | 2011-12-31 | Auxiliary device for measuring performance parameters of semiconductor machine platform |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103063125A (en) * | 2012-12-26 | 2013-04-24 | 中国地震局地震研究所 | Extensometer transfer function test system and method thereof |
| CN103185548A (en) * | 2011-12-31 | 2013-07-03 | 睿励科学仪器（上海）有限公司 | Auxiliary device and method for measuring platform performance parameters of semiconductor machine |
-
2011
- 2011-12-31 CN CN 201120573650 patent/CN202582492U/en not_active Withdrawn - After Issue
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103185548A (en) * | 2011-12-31 | 2013-07-03 | 睿励科学仪器（上海）有限公司 | Auxiliary device and method for measuring platform performance parameters of semiconductor machine |
| CN103185548B (en) * | 2011-12-31 | 2016-03-09 | 睿励科学仪器（上海）有限公司 | Measure servicing unit and the method for the platform property parameter of semiconductor board |
| CN103063125A (en) * | 2012-12-26 | 2013-04-24 | 中国地震局地震研究所 | Extensometer transfer function test system and method thereof |
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| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| AV01 | Patent right actively abandoned |
Granted publication date: 20121205 Effective date of abandoning: 20160309 |
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| C25 | Abandonment of patent right or utility model to avoid double patenting |