CN203641407U - Multi-stage transmission device of vacuum ion plating machine - Google Patents

Multi-stage transmission device of vacuum ion plating machine Download PDF

Info

Publication number
CN203641407U
CN203641407U CN201420030258.1U CN201420030258U CN203641407U CN 203641407 U CN203641407 U CN 203641407U CN 201420030258 U CN201420030258 U CN 201420030258U CN 203641407 U CN203641407 U CN 203641407U
Authority
CN
China
Prior art keywords
transmission
rotation
level
wheel
rotating
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
CN201420030258.1U
Other languages
Chinese (zh)
Inventor
李飞
李兰民
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
ZUNHUA CITY TRANSCEND TI-GOLD EQUIPMENT Co Ltd
Original Assignee
ZUNHUA CITY TRANSCEND TI-GOLD EQUIPMENT Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by ZUNHUA CITY TRANSCEND TI-GOLD EQUIPMENT Co Ltd filed Critical ZUNHUA CITY TRANSCEND TI-GOLD EQUIPMENT Co Ltd
Priority to CN201420030258.1U priority Critical patent/CN203641407U/en
Application granted granted Critical
Publication of CN203641407U publication Critical patent/CN203641407U/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)

Abstract

The utility model relates to vacuum ion plating machines, in particular to a multi-stage transmission device of vacuum ion plating machine comprising a main transmission shaft, a first revolution disc, a first transmission wheel, a plurality of first rotating shafts, first rotating wheels, second revolution discs and second transmission wheels. The first revolution disc and the first transmission wheel are mounted on the main transmission shaft, the first rotating shafts are mounted on the first revolution disc, the first rotating wheels are mounted on the first rotating shafts and match with the first transmission wheel in a transmission manner, a plurality of second rotating shafts are evenly distributed on the circumferences of the second revolution discs, and each second rotating shaft is provided with a second rotating wheel matching with the second transmission wheel in a transmission manner. By the aid of the multi-stage transmission device, requirements of workpiece surface film evenness, small color differences and thickness consistence are met, the device is particularly adaptive to transmission of plating parts, the transmission performance of the main shaft is more stable and reliable, plating quality is improved, loading capacity of plating is increased, operating efficiency is improved, and production cost is reduced.

Description

Vaccum ion coater multi-range transmission
Technical field
The utility model relates to vaccum ion coater, specifically a kind of vaccum ion coater multi-range transmission.
Background technique
Coater main drive shaft provides revolution and the rotation of workpiece.At present, the main transmission shaft device of vacuum multi-arc ion plating machine is one-level revolution and rotation, in coating process, can rotation owing to can not reaching all workpiece surface, cause workpiece surface rete inhomogeneous, occur that aberration and variable thickness cause, especially in the time performance of plating loose mail obviously,, for ensureing that coating quality has to reduce useful load, cause reduction manufacturing efficiency, increase energy consumption, strengthen cost of production.
Model utility content
Problem to be solved in the utility model is, a kind of traditional spindle pattern that changes is provided, and adopts twin-stage or multistage revolution and rotation mode, yields poorly, aberration is large, the vaccum ion coater multi-range transmission of rete problem of non-uniform while solving loose mail plated film.
The technical solution adopted in the utility model is:
A kind of vaccum ion coater multi-range transmission, comprise main drive shaft, be arranged on one-level rotary table and one-level drive wheel on main drive shaft, be arranged on the multiple one-level axis of rotation on one-level rotary table, be arranged on the one-level self-rotation wheel on the one-level axis of rotation, described one-level self-rotation wheel coordinates with the transmission of described one-level drive wheel, also comprise: secondary rotary table and the stage transmission wheel of on each one-level axis of rotation, installing respectively, on described secondary rotary table, circumference uniform distribution is provided with multiple secondary axis of rotation, on each secondary axis of rotation, secondary self-rotation wheel is housed respectively, described secondary self-rotation wheel coordinates with described stage transmission wheel transmission.
The utility model that adopts technique scheme, compared with prior art, its beneficial effect is:
The utility model adopts twin-stage or multistage revolution and Self-rotation structure, make all energy rotations of workpiece, realized the requirement of the little and consistency of thickness of workpiece surface even film layer, aberration, the transmission while being especially applicable to plating loose mail, makes the spindle performance more reliable and more stable, improve coating quality, the useful load that has increased plated film, has improved working efficiency, reduces production costs, meet coating process requirement completely, there is the wide market space.
As preferably, this Shi by the further technological scheme of Xin Xing Eng is:
Described multiple one-level self-rotation wheel and described one-level drive wheel form primary planet pinion drive mechanism.
Described multiple secondary self-rotation wheel and described stage transmission wheel form secondary planetary gear drive mechanism.
Brief description of the drawings
Fig. 1 is the utility model example structure schematic diagram.
In figure: mounting bracket 1, motor 2, retarder 3, main drive shaft 4, one-level rotary table 5, one-level fixed gear 6, one-level rotating gear 7, the one-level axis of rotation 8, one-level protective housing 9, secondary protective housing 10, the secondary axis of rotation 11, secondary rotary table 12, secondary fixed gear 13, secondary rotating gear 14.
Embodiment
Below in conjunction with embodiment, the utility model is described in further detail, and object is only better to understand the utility model content.Therefore, the cited case unrestricted protection domain of the present utility model.
Referring to Fig. 1, vaccum ion coater multi-range transmission integral installation fits on mounting bracket 1, can be placed in coating chamber top, forms upper driving, also can be placed in coating chamber bottom, forms underdrive.Figure 1 shows that upper driving mode, belong to twin-stage revolution and Self-rotation structure.Motor 2 and retarder 3 are assemblied in the top of mounting bracket 1, one-level rotary table 5 and one-level fixed gear 6 are installed on main drive shaft 4, on one-level rotary table 5, circumference uniform distribution is provided with multiple one-level axis of rotation 8, the top of each one-level axis of rotation 8 is all provided with one-level rotating gear 7, one-level rotating gear 7 and one-level fixed gear 6 engagement driving, form primary planet pinion drive mechanism; The bottom of each one-level axis of rotation 8 is separately installed with secondary rotary table 12 and secondary fixed gear 13, on secondary rotary table 12, circumference uniform distribution is provided with multiple secondary axis of rotation 11, on each secondary axis of rotation 11, secondary rotating gear 14 is all housed, secondary rotating gear 14 and secondary fixed gear 13 engagement driving, form secondary planetary gear drive mechanism.
Described primary planet pinion drive mechanism is provided with one-level protective housing 9; Described secondary planetary gear drive mechanism is provided with secondary protective housing 10.
Workpiece plated film is treated in the described secondary axis of rotation 11 lower end hangings.

Claims (3)

1. a vaccum ion coater multi-range transmission, comprise main drive shaft, be arranged on one-level rotary table and one-level drive wheel on main drive shaft, be arranged on the multiple one-level axis of rotation on one-level rotary table, be arranged on the one-level self-rotation wheel on the one-level axis of rotation, described one-level self-rotation wheel coordinates with the transmission of described one-level drive wheel, it is characterized in that, also comprise: secondary rotary table and the stage transmission wheel of on each one-level axis of rotation, installing respectively, on described secondary rotary table, circumference uniform distribution is provided with multiple secondary axis of rotation, on each secondary axis of rotation, secondary self-rotation wheel is housed respectively, described secondary self-rotation wheel coordinates with described stage transmission wheel transmission.
2. vaccum ion coater multi-range transmission according to claim 1, is characterized in that, described multiple one-level self-rotation wheels and described one-level drive wheel form primary planet pinion drive mechanism.
3. vaccum ion coater multi-range transmission according to claim 1, is characterized in that, described multiple secondary self-rotation wheels and described stage transmission wheel form secondary planetary gear drive mechanism.
CN201420030258.1U 2014-01-19 2014-01-19 Multi-stage transmission device of vacuum ion plating machine Expired - Fee Related CN203641407U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN201420030258.1U CN203641407U (en) 2014-01-19 2014-01-19 Multi-stage transmission device of vacuum ion plating machine

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN201420030258.1U CN203641407U (en) 2014-01-19 2014-01-19 Multi-stage transmission device of vacuum ion plating machine

Publications (1)

Publication Number Publication Date
CN203641407U true CN203641407U (en) 2014-06-11

Family

ID=50872654

Family Applications (1)

Application Number Title Priority Date Filing Date
CN201420030258.1U Expired - Fee Related CN203641407U (en) 2014-01-19 2014-01-19 Multi-stage transmission device of vacuum ion plating machine

Country Status (1)

Country Link
CN (1) CN203641407U (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN109680140A (en) * 2019-02-14 2019-04-26 刘昊 A kind of helical feed profile and wire annealing furnace
CN110846634A (en) * 2019-11-25 2020-02-28 中国科学院光电技术研究所 Planet rotating device and coating equipment capable of realizing mass production

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN109680140A (en) * 2019-02-14 2019-04-26 刘昊 A kind of helical feed profile and wire annealing furnace
CN110846634A (en) * 2019-11-25 2020-02-28 中国科学院光电技术研究所 Planet rotating device and coating equipment capable of realizing mass production

Similar Documents

Publication Publication Date Title
CN109852939B (en) Tool coating rotating stand device of high-vacuum multi-arc ion coating machine
CN202390527U (en) Composite vacuum tube work frame for vacuum tube coating
CN201437550U (en) Magnetron sputtering coating equipment
CN203641407U (en) Multi-stage transmission device of vacuum ion plating machine
CN102560432B (en) Substrate loading device and substrate processing device applying same
CN201670871U (en) Novel high-efficient coater
CN207309326U (en) A kind of dual AC power free degree speed changer assembly line pallet
CN211734462U (en) Curved surface screen magnetron sputtering subassembly
CN107754992A (en) A kind of stratified material grinding equipment
CN201826009U (en) Planetary rotating mechanism used for coating film for curved surface reflector
CN208632638U (en) A kind of planetary three-stage cylindrical gear insert clamp device
CN202898517U (en) Double-bearing conduction roll device
CN205244262U (en) Mill adjusting device is thrown to planet gear type wheel
CN202297760U (en) Coating equipment workpiece rotating frame
CN202366650U (en) Silver paste shaking machine for vacuum coating
CN205226244U (en) Coating is with rotatory loading mechanism
CN105500161A (en) Planetary grinder for valve stems
CN207755566U (en) A kind of efficiently swing shiny-leaved yellowhorn green-keeping machine
CN203912630U (en) Bearder
CN204099512U (en) Meat grinder drive mechanism
CN206905474U (en) Biology enzyme baking oven
CN202028996U (en) Horizontal type high speed crystal edge chamfering machine
CN205839119U (en) A kind of vacuum magnetic control film coating machine
CN203700494U (en) Coating machine
CN103573968A (en) Novel gear convenient to replace

Legal Events

Date Code Title Description
C14 Grant of patent or utility model
GR01 Patent grant
CF01 Termination of patent right due to non-payment of annual fee
CF01 Termination of patent right due to non-payment of annual fee

Granted publication date: 20140611

Termination date: 20180119