CN202047168U - Seed holder for monocrystalline silicon growth - Google Patents
Seed holder for monocrystalline silicon growth Download PDFInfo
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- CN202047168U CN202047168U CN2011201230661U CN201120123066U CN202047168U CN 202047168 U CN202047168 U CN 202047168U CN 2011201230661 U CN2011201230661 U CN 2011201230661U CN 201120123066 U CN201120123066 U CN 201120123066U CN 202047168 U CN202047168 U CN 202047168U
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- monocrystalline silicon
- seed
- seed holder
- chuck
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Abstract
The utility model provides a seed holder for monocrystalline silicon growth, which is characterized in that the seed holder is a cylindrical cavity running through from top to bottom, a thread or a pin linkage is arranged at the upper part of the cavity, and two identical round holes are arranged at the middle lower part of the cavity, are positioned on a same horizontal line, are symmetrically arranged by taking the center line of the cylindrical cavity as a center, and run through the surface of the cylinder. The seed holder not only can ensure good concentricity and is applicable to the growth of large-diameter monocrystalline silicon, but also can be convenient to process and can be popularized and used in a large scale.
Description
Technical field
The utility model relates to a kind of monocrystalline silicon growing seed chuck.
Background technology
Silicon single crystal is as a kind of semiconductor material, be mainly used in the production of unicircuit and electronic component all the time, in recent years along with the development of photovoltaic industry, as the main raw material(s) of solar cell, demand considerably beyond unicircuit and production of electronic components required.The growth of silicon single crystal mainly contains two kinds of methods: vertical pulling method (CZ) and the floating method (FZ) of melting.Wherein the CZ method has accounted for about 85%.
Grow qualified silicon single crystal, must have the silicon single crystal (also claiming seed crystal) of particular crystal orientation to do the basis.Crystal orientation commonly used has＜and 100 〉,＜110,＜111 etc., generally be shaped as cylindrical or rectangular parallelepiped, be fixed on the seed chuck by variety of way and be connected with seed shaft.Therefore in the monocrystalline silicon growing process, seed chuck is unusual important components, needs well fixedly seed crystal also to guarantee can not come off or rupture in whole process, and whole monocrystalline silicon growing process is finished smoothly.
Seed chuck is according to different seed crystals and the also difference to some extent of seed shaft structure, the more seed chuck of domestic and international at present use comprises cylindrical and rectangular parallelepiped, syndeton also mainly contains two kinds, a kind of is that upper end one side has groove, and a kind of is that the upper end is rounding platform, chamfered edge platform or the top cylinder greater than the bottom.Corresponding seed chuck also mainly is two kinds of syndetons: a kind of seed chuck lower end is shaped as hollow, upper end one side has the hole with the identical size of molybdenum pin, pack into the Kong Zhonghou of hollow of seed crystal, the groove of seed crystal one side can be relative with the circular hole on the chuck, penetrates the molybdenum pin to play ligation.The seed chuck of this kind structure causes the junction fracture easily because centrad is bad in large diameter single crystal growth process; Another seed chuck is the cavity structure of up big and down small and up/down perforation, cooperate seed crystal to form taper connection, the seed chuck of this kind structure efficiently solves the bad problem of centrad, goes for large diameter single crystal growing, but difficulty of processing is bigger, is difficult to extensive the use.
Summary of the invention
The purpose of this utility model is to provide a kind of monocrystalline silicon growing seed chuck, both can guarantee that centrad is good, and is simultaneously easy to process applicable to the large diameter single crystals growth, can popularize use on a large scale.
To achieve these goals, the technical solution of the utility model is: a kind of monocrystalline silicon growing seed chuck, it is the cylinder shape cavity of a up/down perforation, screw thread or pin connection are arranged at cavity top, on the same sea line in cavity middle and lower part, be the circular hole that centrosymmetry has two identical perforation peripheries with the cylinder shape lumen centerline.
Circle hole centreline is not justified on the tangent line in cavity, but outwards moves 1～2mm along circle tangent line in the cavity, and the Circularhole diameter size should be good with the seed crystal groove fit.
Seed chuck of the present utility model, can satisfy the development need of semiconductor silicon material, can be used for making of the production of various electronic devices and components with semiconductor grade silicon single crystal, also can be used for the production of solar level silicon single crystal, can effectively ensure the centrad of seed crystal, avoid seed crystal off normal in the crystal pulling process and rupture, reduce the risk of seed crystal fracture, in the corresponding work-ing life that prolongs seed crystal, the course of processing is simple simultaneously, can popularize use on a large scale.
Description of drawings
Fig. 1 is a structural representation of the present utility model.
Embodiment
As shown in Figure 1, a kind of monocrystalline silicon growing seed chuck is the cylinder shape cavity of a up/down perforation.Top helicitic texture or pin connecting structure are used for connecting the seed shaft of transmission system on the single crystal growing furnace; Centrosymmetric two circular holes that connect periphery pass the seed crystal groove by two cylinder shape pins on the same sea line in middle and lower part, are used for fixing seed crystal.
Circle hole centreline outwards moves 1～2mm along circle tangent line in the cavity, and the Circularhole diameter size should be good with the seed crystal groove fit.Fixing two of the seed crystal groove pins, size cooperates with the circular hole size is desirable.
Seed chuck is made by molybdenum alloy or graphite, and pin is made by molybdenum alloy.
Claims (2)
1. monocrystalline silicon growing seed chuck, it is characterized by the cylinder shape cavity of a up/down perforation, screw thread or pin connection are arranged at cavity top, on the same sea line in cavity middle and lower part, are the circular hole that centrosymmetry has two identical perforation peripheries with the cylinder shape lumen centerline.
2. monocrystalline silicon growing seed chuck as claimed in claim 1 is characterized by the circle hole centreline position and does not justify on the tangent line in cavity, but outwards moves 1～2mm along interior round tangent line, and the Circularhole diameter size should be good with the seed crystal groove fit.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2011201230661U CN202047168U (en) | 2011-04-25 | 2011-04-25 | Seed holder for monocrystalline silicon growth |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2011201230661U CN202047168U (en) | 2011-04-25 | 2011-04-25 | Seed holder for monocrystalline silicon growth |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN202047168U true CN202047168U (en) | 2011-11-23 |
Family
ID=44987485
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2011201230661U Expired - Fee Related CN202047168U (en) | 2011-04-25 | 2011-04-25 | Seed holder for monocrystalline silicon growth |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN202047168U (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102628179A (en) * | 2012-05-04 | 2012-08-08 | 杭州海纳半导体有限公司 | Seed crystal holder for producing monocrystalline silicon by straight-pulling method and usage thereof |
| CN103469297A (en) * | 2013-07-25 | 2013-12-25 | 浙江晶盛机电股份有限公司 | Sapphire seed chuck with double positioning pins |
-
2011
- 2011-04-25 CN CN2011201230661U patent/CN202047168U/en not_active Expired - Fee Related
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102628179A (en) * | 2012-05-04 | 2012-08-08 | 杭州海纳半导体有限公司 | Seed crystal holder for producing monocrystalline silicon by straight-pulling method and usage thereof |
| CN102628179B (en) * | 2012-05-04 | 2015-12-16 | 杭州海纳半导体有限公司 | Seedholder and the using method of silicon single crystal is prepared for vertical pulling method |
| CN103469297A (en) * | 2013-07-25 | 2013-12-25 | 浙江晶盛机电股份有限公司 | Sapphire seed chuck with double positioning pins |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20111123 Termination date: 20160425 |