CN201841472U - 研磨液手臂以及化学机械研磨设备 - Google Patents
研磨液手臂以及化学机械研磨设备 Download PDFInfo
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- CN201841472U CN201841472U CN2010202649235U CN201020264923U CN201841472U CN 201841472 U CN201841472 U CN 201841472U CN 2010202649235 U CN2010202649235 U CN 2010202649235U CN 201020264923 U CN201020264923 U CN 201020264923U CN 201841472 U CN201841472 U CN 201841472U
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- deionized water
- lapping liquid
- washer jet
- branch road
- grinding
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CN2010202649235U CN201841472U (zh) | 2010-07-20 | 2010-07-20 | 研磨液手臂以及化学机械研磨设备 |
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CN2010202649235U CN201841472U (zh) | 2010-07-20 | 2010-07-20 | 研磨液手臂以及化学机械研磨设备 |
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CN201841472U true CN201841472U (zh) | 2011-05-25 |
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CN2010202649235U Expired - Fee Related CN201841472U (zh) | 2010-07-20 | 2010-07-20 | 研磨液手臂以及化学机械研磨设备 |
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Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN103286676A (zh) * | 2013-05-31 | 2013-09-11 | 上海华力微电子有限公司 | 研磨液整理器 |
CN105619239A (zh) * | 2016-02-26 | 2016-06-01 | 上海华力微电子有限公司 | 防刮伤化学机械研磨装置及其化学机械研磨方法 |
CN105856056A (zh) * | 2015-01-19 | 2016-08-17 | 大族激光科技产业集团股份有限公司 | 一种异形面自动抛光装置 |
CN109940517A (zh) * | 2019-03-29 | 2019-06-28 | 长江存储科技有限责任公司 | 一种研磨液分配臂及化学机械平坦化装置 |
WO2021263043A1 (en) * | 2020-06-24 | 2021-12-30 | Applied Materials, Inc. | Cleaning system for polishing liquid delivery arm |
-
2010
- 2010-07-20 CN CN2010202649235U patent/CN201841472U/zh not_active Expired - Fee Related
Cited By (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN103286676A (zh) * | 2013-05-31 | 2013-09-11 | 上海华力微电子有限公司 | 研磨液整理器 |
CN105856056A (zh) * | 2015-01-19 | 2016-08-17 | 大族激光科技产业集团股份有限公司 | 一种异形面自动抛光装置 |
CN105856056B (zh) * | 2015-01-19 | 2018-03-02 | 大族激光科技产业集团股份有限公司 | 一种异形面自动抛光装置 |
CN105619239A (zh) * | 2016-02-26 | 2016-06-01 | 上海华力微电子有限公司 | 防刮伤化学机械研磨装置及其化学机械研磨方法 |
CN109940517A (zh) * | 2019-03-29 | 2019-06-28 | 长江存储科技有限责任公司 | 一种研磨液分配臂及化学机械平坦化装置 |
WO2021263043A1 (en) * | 2020-06-24 | 2021-12-30 | Applied Materials, Inc. | Cleaning system for polishing liquid delivery arm |
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Owner name: SEMICONDUCTOR MANUFACTURING INTERNATIONAL (BEIJING Free format text: FORMER OWNER: SEMICONDUCTOR MANUFACTURING INTERNATIONAL (SHANGHAI) CORPORATION Effective date: 20130305 |
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Effective date of registration: 20130305 Address after: 100176 No. 18, Wenchang Avenue, Beijing economic and Technological Development Zone, Beijing Patentee after: Semiconductor Manufacturing International (Beijing) Corporation Address before: 201203 Shanghai City, Pudong New Area Zhangjiang Road No. 18 Patentee before: Semiconductor Manufacturing International (Shanghai) Corporation |
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CF01 | Termination of patent right due to non-payment of annual fee | ||
CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20110525 Termination date: 20180720 |