CN102371532A - 化学机械研磨工艺的返工方法 - Google Patents
化学机械研磨工艺的返工方法 Download PDFInfo
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Cited By (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN104108072A (zh) * | 2013-04-16 | 2014-10-22 | 陈炤彰 | 气体添加研磨液的供应***及其方法 |
CN105081957A (zh) * | 2014-05-14 | 2015-11-25 | 和舰科技(苏州)有限公司 | 一种用于晶圆平坦化生产的化学机械研磨方法 |
CN105364699A (zh) * | 2014-07-25 | 2016-03-02 | 中芯国际集成电路制造(上海)有限公司 | 一种化学机械研磨方法和化学机械研磨设备 |
CN109262446A (zh) * | 2017-07-12 | 2019-01-25 | 中芯国际集成电路制造(上海)有限公司 | 一种化学机械研磨方法和化学机械研磨装置 |
CN109434671A (zh) * | 2018-10-11 | 2019-03-08 | 德淮半导体有限公司 | 一种晶圆加工设备及加工方法 |
CN114473859A (zh) * | 2020-11-11 | 2022-05-13 | 中国科学院微电子研究所 | 晶片研磨装置及晶片研磨方法 |
Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
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US20030173027A1 (en) * | 2002-03-15 | 2003-09-18 | Fujitsu Limited | Deposit removing apparatus and deposit removing method |
CN1628935A (zh) * | 2003-12-18 | 2005-06-22 | 上海宏力半导体制造有限公司 | 一种高压研磨器具 |
CN101157186A (zh) * | 2006-10-08 | 2008-04-09 | 中芯国际集成电路制造(上海)有限公司 | 在铜化学机械研磨工艺中减少晶片被腐蚀的方法 |
CN101318308A (zh) * | 2007-06-08 | 2008-12-10 | 中芯国际集成电路制造(上海)有限公司 | 一种化学机械研磨装置 |
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Patent Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US20030173027A1 (en) * | 2002-03-15 | 2003-09-18 | Fujitsu Limited | Deposit removing apparatus and deposit removing method |
CN1628935A (zh) * | 2003-12-18 | 2005-06-22 | 上海宏力半导体制造有限公司 | 一种高压研磨器具 |
CN101157186A (zh) * | 2006-10-08 | 2008-04-09 | 中芯国际集成电路制造(上海)有限公司 | 在铜化学机械研磨工艺中减少晶片被腐蚀的方法 |
CN101318308A (zh) * | 2007-06-08 | 2008-12-10 | 中芯国际集成电路制造(上海)有限公司 | 一种化学机械研磨装置 |
Cited By (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN104108072A (zh) * | 2013-04-16 | 2014-10-22 | 陈炤彰 | 气体添加研磨液的供应***及其方法 |
CN105081957A (zh) * | 2014-05-14 | 2015-11-25 | 和舰科技(苏州)有限公司 | 一种用于晶圆平坦化生产的化学机械研磨方法 |
CN105364699A (zh) * | 2014-07-25 | 2016-03-02 | 中芯国际集成电路制造(上海)有限公司 | 一种化学机械研磨方法和化学机械研磨设备 |
CN109262446A (zh) * | 2017-07-12 | 2019-01-25 | 中芯国际集成电路制造(上海)有限公司 | 一种化学机械研磨方法和化学机械研磨装置 |
CN109434671A (zh) * | 2018-10-11 | 2019-03-08 | 德淮半导体有限公司 | 一种晶圆加工设备及加工方法 |
CN114473859A (zh) * | 2020-11-11 | 2022-05-13 | 中国科学院微电子研究所 | 晶片研磨装置及晶片研磨方法 |
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