CN201707202U - Performance detector for static pressure gas bearings - Google Patents
Performance detector for static pressure gas bearings Download PDFInfo
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- CN201707202U CN201707202U CN2010202002297U CN201020200229U CN201707202U CN 201707202 U CN201707202 U CN 201707202U CN 2010202002297 U CN2010202002297 U CN 2010202002297U CN 201020200229 U CN201020200229 U CN 201020200229U CN 201707202 U CN201707202 U CN 201707202U
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Abstract
A performance detector for static pressure gas bearings at least comprises a base (1), a film pressure sensor (2), a pressure regulating valve (3), a gas inlet pipe (4), a gas pressure gauge (5), a tested static pressure gas bearing (6), a pressing plate (7), a bearing fixing component (8), a bearing connecting component (9), a linear driver connecting component (10), a limit bolt (11), a linear driver (12), a framework (13), a support (14), a force sensor (15), a displacement sensor (16), a driven gear (17), a driving gear (18), a driving motor (19) and a rotary encoder (20). The performance detector can detect bearing capacity, stiffness and pressure change in the bearings when the static pressure gas bearings are under different gas supplying pressure and different gas film thickness so as to detect performance of the static pressure gas bearings and optimize structural parameters of the bearings conveniently.
Description
Technical field:
The present invention relates to a kind of device for detecting performance of static-pressure air bearing, belong to the Performance Detection field of precision equipment.
Background technology:
Static-pressure air bearing is with the gas of the certain pressure subsonic flow a kind of support component that does not have friction/extremely low friction as lubricant medium, have precision height, no wearing and tearing, cleaning, pollution-free, characteristics such as the life-span long, non-maintaining, low heating, flexible, the anti-high/low temperature of structural design and atomic radiation, be widely used in manipulation, assembling and precision positioning, the processing and other fields of three coordinate measuring machine, NC machining, biochip technology, fiber alignment and micromachine part.Along with the develop rapidly of manufacturing process and measuring technique, process technology constantly strides forward to limit processing, superhigh precision and more high efficiency direction, impels process equipment to maximize day by day even hugeization, and the precision of process equipment improves constantly.Therefore, more and more higher requirement has been proposed performance index such as the load-bearing capacity of static-pressure air bearing and rigidity.
For satisfying the requirement of industrial circle to static-pressure air bearing, need quantitatively and qualitative analysis influences each factor of bearing performance, and carry out integrated parameter optimization according to its influence degree, make the performance index of bearing reach optimum.Yet present pick-up unit can only detect the performance of static-pressure air bearing and the shape of bearing, throttle style, concern between geometric parameter and the supply gas pressure, and influencing the direct factor of bearing performance: the pressure distribution of gas can't directly detect in the bearing, can not directly analyze the pressure changing that above-mentioned each factor causes gas in the bearing, be difficult to accurately draw the immediate cause that influences gaseous tension distribution in the bearing, can't be optimized bearing structure parameter and duty in view of the above, give the performance evaluation of bearing, the experimental verification of structure parameter optimizing and static-pressure air bearing theoretical analysis has brought difficulty.
At the problems referred to above, the present invention proposes a kind of static-pressure air bearing performance detection device, can detect the different geometries static-pressure air bearing under different supply gas pressures and different air-film thicknesses, the pressure distribution of gas in the load-bearing capacity of bearing and rigidity and the bearing, qualitative and quantitative analysis influences the factor that gaseous tension distributes in the bearing, and is all significant for the optimal design of bearing structure parameter, the performance that improves static-pressure air bearing and the experimental verification of theoretical analysis etc.
Summary of the invention:
The present invention's purpose is: propose a kind of device for detecting performance of static-pressure air bearing, can detect the different geometries static-pressure air bearing under different supply gas pressures, air-film thickness, the pressure distribution of gas in the load-bearing capacity of bearing, rigidity and the bearing.
In order to realize the present invention's purpose, intend by the following technical solutions:
Structure of the present invention comprises at least:
Pedestal, diaphragm pressure sensor, pressure regulator valve, draft tube, gas gauge, tested static-pressure air bearing, pressing plate, bearing fixing part, bearing connection, Linear actuator web member, caging bolt, Linear actuator, frame, support, force transducer, displacement transducer, follower gear, driving gear, drive motor and rotary encoder
It is characterized in that:
Above-mentioned diaphragm pressure sensor is fixed on the pedestal, pressure regulator valve and gas gauge are installed on the draft tube, tested static-pressure air bearing passes through pressing plate, the bearing fixing part, bearing connection, Linear actuator web member and caging bolt are installed on the Linear actuator, Linear actuator and frame are fixed, frame is fixed on the support, force transducer is fixed on the Linear actuator web member, displacement transducer be fixed on the tested static-pressure air bearing and pedestal on, drive motor is fixed on the pedestal, rotary encoder is installed in the drive motor bottom, and drive motor rotates by driving gear and follower gear driving arm.
Control the distance of tested static-pressure air bearing and pedestal upper surface by the Linear actuator axially-movable, utilize diaphragm pressure sensor to measure the pressure distribution of gas in the bearing, the displacement sensor air-film thickness, the force sensor measuring Linear actuator is applied to the driving force of static-pressure air bearing, the supply gas pressure of the tested static-pressure air bearing of air inlet body gauge measurement, said apparatus detects the load-bearing capacity of tested static-pressure air bearing down for realizing different supply gas pressures and different air-film thicknesses, the pressure distribution of gas has been created condition in rigidity and the bearing, the present invention is simple in structure, easy to use, be easy to realize.
Description of drawings:
Fig. 1 has illustrated the present invention to carry out the duty of static-pressure air bearing Performance Detection.
Fig. 2 is the vertical view of Fig. 1.
Fig. 3 has illustrated the present invention not carry out the original state of static-pressure air bearing Performance Detection.
Fig. 4 is the vertical view of Fig. 3.
1, pedestal; 2, diaphragm pressure sensor; 3, pressure regulator valve; 4, draft tube; 5, gas gauge; 6, tested static-pressure air bearing; 7, pressing plate; 8, bearing fixing part; 9, bearing connection; 10, Linear actuator web member; 11, caging bolt; 12, Linear actuator; 13, frame; 14, support; 15, force transducer; 16, displacement transducer; 17, follower gear; 18, driving gear; 19, drive motor; 20, rotary encoder.
Embodiment:
When detecting the static-pressure air bearing performance, at first rotate by drive motor 19, driving gear 18 and follower gear 17 driving arms 14, static-pressure air bearing device for detecting performance of the present invention is rotated to state shown in Figure 3, force transducer 15 is fixed on the lower end of Linear actuator web member 10, tested static-pressure air bearing 6 is installed on the Linear actuator 12 by pressing plate 7, bearing fixing part 8, bearing connection 9, Linear actuator web member 10 and caging bolt 11, and displacement transducer 16 is fixed on tested static-pressure air bearing 6 and the pedestal 1.
By drive motor 19, driving gear 18 and follower gear 17 driving arms 14 rotate, the rotational angle that utilizes rotary encoder 20 to record drive motor 19 rotors is adjusted static-pressure air bearing device for detecting performance of the present invention, make it rotate to state shown in Figure 1, make tested static-pressure air bearing 6 surfaces relative with diaphragm pressure sensor 2, utilize pressure regulator valve 3 and gas gauge 5 to be adjusted to the needed supply gas pressure of bearing, by Linear actuator 12 and displacement transducer 16 tested static-pressure air bearing 6 being operated in specifies under the air-film thickness, diaphragm pressure sensor 2 is measured the pressure distribution of gas in the tested static-pressure air bearing 6, and force transducer 15 is measured the load-bearing capacity of bearing.
Utilizing Linear actuator 12 and displacement transducer 16 that tested static-pressure air bearing 6 is operated in specifies under the air-film thickness, force transducer 15 is measured the load-bearing capacity of tested static-pressure air bearing 6, diaphragm pressure sensor 2 is measured the pressure distribution of gas in the tested static-pressure air bearing 6, can obtain the influence of air-film thickness to gaseous tension in the bearing, the ratio of the load-bearing capacity of the bearing of calculating under certain supply gas pressure and different air-film thicknesses and the difference of air-film thickness can obtain the rigidity of certain supply gas pressure bearing.
Under certain air-film thickness, change supply gas pressure by pressure regulator valve 3, the pressure distribution of measuring gas in the tested static-pressure air bearing 6 by diaphragm pressure sensor 2 can get the influence that gaseous tension distributes in the supply gas pressure bearing, load-bearing capacity by force transducer 15 measurement bearings can get the influence of supply gas pressure to load-bearing capacity.
Change supply gas pressure by pressure regulator valve 3, utilizing Linear actuator 12 and displacement transducer 16 that tested static-pressure air bearing 6 is operated in specifies under the air-film thickness, measure the pressure distribution of gas in the bearing by diaphragm pressure sensor 2, force transducer 15 is measured the load-bearing capacity of bearing, can obtain the influence that supply gas pressure and air-film thickness distribute to gaseous tension in load-bearing capacity, rigidity and the bearing of bearing.
After the static-pressure air bearing Performance Detection finishes, utilize drive motor 19, by driving gear 18 and follower gear 17 driving arms 14 static-pressure air bearing device for detecting performance of the present invention is turned to state shown in Figure 3, finish the Performance Detection of static-pressure air bearing.
Claims (1)
1. the device for detecting performance of a static-pressure air bearing, which comprises at least: pedestal (1), diaphragm pressure sensor (2), pressure regulator valve (3), draft tube (4), gas gauge (5), tested static-pressure air bearing (6), pressing plate (7), bearing fixing part (8), bearing connection (9), Linear actuator web member (10), caging bolt (11), Linear actuator (12), frame (13), support (14), force transducer (15), displacement transducer (16), follower gear (17), driving gear (18), drive motor (19) and rotary encoder (20)
It is characterized in that:
Described diaphragm pressure sensor (2) is fixed on the pedestal (1), pressure regulator valve (3) and gas gauge (5) are installed on the draft tube (4), tested static-pressure air bearing (6) is by pressing plate (7), bearing fixing part (8), bearing connection (9), Linear actuator web member (10) and caging bolt (11) are installed on the Linear actuator (12), Linear actuator (12) is fixing with frame (13), frame (13) is fixed on the support (14), force transducer (15) is fixed on the Linear actuator web member (10), displacement transducer (16) be fixed on that tested static-pressure air bearing (6) is gone up and pedestal (1) on, drive motor (19) is fixed on the pedestal (1), rotary encoder (20) is installed in the bottom of drive motor (19), and drive motor (the 19th) rotates by driving gear (18) and follower gear (17) driving arm (14).
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
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CN2010202002297U CN201707202U (en) | 2010-05-24 | 2010-05-24 | Performance detector for static pressure gas bearings |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
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CN2010202002297U CN201707202U (en) | 2010-05-24 | 2010-05-24 | Performance detector for static pressure gas bearings |
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CN201707202U true CN201707202U (en) | 2011-01-12 |
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CN2010202002297U Expired - Lifetime CN201707202U (en) | 2010-05-24 | 2010-05-24 | Performance detector for static pressure gas bearings |
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Cited By (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN101852684A (en) * | 2010-05-24 | 2010-10-06 | 中国计量学院 | Performance testing device of static-pressure air bearing |
CN102226740A (en) * | 2011-04-18 | 2011-10-26 | 中国计量学院 | Bearing fault detection method based on manner of controlling stochastic resonance by external periodic signal |
CN106769036A (en) * | 2016-12-05 | 2017-05-31 | 江苏大学 | A kind of static air thrust bearing bearing test device and method |
CN110296839A (en) * | 2019-08-13 | 2019-10-01 | 中国工程物理研究院机械制造工艺研究所 | Gas film pressure test device and test method for gas bearing |
CN113090528A (en) * | 2020-01-09 | 2021-07-09 | 珠海格力电器股份有限公司 | Compressor, bearing wear degree detection method and air conditioning system |
CN114264476A (en) * | 2021-12-30 | 2022-04-01 | 哈尔滨工业大学 | Static performance testing device suitable for multi-size static pressure air bearing |
-
2010
- 2010-05-24 CN CN2010202002297U patent/CN201707202U/en not_active Expired - Lifetime
Cited By (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN101852684A (en) * | 2010-05-24 | 2010-10-06 | 中国计量学院 | Performance testing device of static-pressure air bearing |
CN102226740A (en) * | 2011-04-18 | 2011-10-26 | 中国计量学院 | Bearing fault detection method based on manner of controlling stochastic resonance by external periodic signal |
CN106769036A (en) * | 2016-12-05 | 2017-05-31 | 江苏大学 | A kind of static air thrust bearing bearing test device and method |
CN106769036B (en) * | 2016-12-05 | 2019-03-05 | 江苏大学 | A kind of static air thrust bearing bearing test device and method |
CN110296839A (en) * | 2019-08-13 | 2019-10-01 | 中国工程物理研究院机械制造工艺研究所 | Gas film pressure test device and test method for gas bearing |
CN110296839B (en) * | 2019-08-13 | 2024-02-06 | 中国工程物理研究院机械制造工艺研究所 | Air film pressure testing device and testing method for gas bearing |
CN113090528A (en) * | 2020-01-09 | 2021-07-09 | 珠海格力电器股份有限公司 | Compressor, bearing wear degree detection method and air conditioning system |
CN113090528B (en) * | 2020-01-09 | 2021-12-03 | 珠海格力电器股份有限公司 | Compressor, bearing wear degree detection method and air conditioning system |
CN114264476A (en) * | 2021-12-30 | 2022-04-01 | 哈尔滨工业大学 | Static performance testing device suitable for multi-size static pressure air bearing |
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Legal Events
Date | Code | Title | Description |
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C14 | Grant of patent or utility model | ||
GR01 | Patent grant | ||
AV01 | Patent right actively abandoned |
Granted publication date: 20110112 Effective date of abandoning: 20120404 |