CN202171526U - Performance detecting device of static-pressure air floating guide rail - Google Patents
Performance detecting device of static-pressure air floating guide rail Download PDFInfo
- Publication number
- CN202171526U CN202171526U CN2010207002895U CN201020700289U CN202171526U CN 202171526 U CN202171526 U CN 202171526U CN 2010207002895 U CN2010207002895 U CN 2010207002895U CN 201020700289 U CN201020700289 U CN 201020700289U CN 202171526 U CN202171526 U CN 202171526U
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- probe
- guide rail
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- pedestal
- horizontal motion
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Abstract
The utility model discloses a performance detecting device of a static-pressure air floating guide rail, which is characterized in that: a vertical movement frame (5), a horizontal movement frame (11), a rotating shaft (6) and a rotating disc (7) adjust location relation between a probe I (81), a probe II (82) as well as a probe III (83) and a detected air floating guide rail (K); detecting mechanisms (M) are arranged on the left side and the right side of the detected air floating guide rail (K). When a sliding sleeve (16) moves along a guide rail (15), distances between the probe I (81), the probe II (82) as well as the probe III (83) and a scale (17) arranged on the sliding sleeve (16) are measured, so that straightness of the left and right sides as well as straightness of the upper and lower sides of the air floating guide rail are measured, and rolling, pitching and deflecting performances of the guide rail are detected.
Description
Technical field:
The present invention relates to a kind of device for detecting performance of static pressure air-float guide rail, belong to the Performance Detection field of precision equipment.
Background technology:
Static pressure air-float guide rail is with the gas of the certain pressure subsonic flow a kind of support component that does not have friction/extremely low friction as lubricant medium; Have precision height, no wearing and tearing, cleaning, pollution-free, characteristics such as the life-span long, non-maintaining, low heating, flexible, the anti-height/low temperature of structural design and atomic radiation, be widely used in manipulation, assembling and precision positioning, the processing and other fields of three coordinate measuring machine, NC machining, biochip technology, fiber alignment and micromachine part.Along with the develop rapidly of manufacturing process and measuring technique, process technology constantly strides forward to limit processing, superhigh precision and more high efficiency direction, impels process equipment to maximize day by day even hugeization.Air-float guide rail supports because of being fit to big stroke, high precision, high resolving power, high-speed motion positions, in large-scale ultraprecise process equipment, has obtained widespread use in recent years, and has become a kind of development trend.
But, receiving the influence of many factors such as throttling form, air-film thickness, preload mode, geometric configuration, machining precision, supply gas pressure and operating mode, gas flow state in the extremely short time takes place repeatedly to change.Simultaneously, because gas has compressibility, the load-bearing capacity and the rigidity of air-float guide rail are relatively low, and guide rail not only produces displacement along the driving force direction, also has the rotation of the minute angle of relative driving force direction.The size of corner and change frequency receive the influence of the factors such as load-bearing capacity, angular rigidity, driving force size, load variations, movement velocity and acceleration of guide rail, and be also closely related with linearity, machining precision and the guide rail deflection under external force of big stroke guide rail simultaneously.The machining precision that therefore, can reduce lathe owing to the load-bearing capacity and the relatively low motion positions error that causes of rigidity of air-float guide rail or produce measuring error.
To the problems referred to above, the present invention proposes a kind of device for detecting performance of static pressure air-float guide rail, is convenient to study linearity, pitching, rolling and the deflection characteristic of ultraprecise air-float guide rail, and is significant to the precision that improves the air supporting kinematic system.
Summary of the invention:
The present invention's purpose is: propose a kind of device for detecting performance of static pressure air-float guide rail, be convenient to detect linearity, pitching, rolling and the deflection characteristic of static pressure air-float guide rail.
In order to realize the present invention's purpose, intend and adopt following technical scheme:
The present invention is by adjusted spanner, upper reducer, down-feed screw, vertical guide rail, vertical movement frame, rotating shaft, rotating disc, probe, probe I, probe I I and probe I II, horizontal guide rail, pedestal, Horizontal Motion Carriage, horizontal screw lead, the testing agency that formed of speed reduction unit and following adjusting spanner down; It is characterized in that: described adjusted spanner is installed on the input shaft of upper reducer; Upper reducer is installed on the Horizontal Motion Carriage; Down-feed screw is installed on the Horizontal Motion Carriage and with the output shaft of upper reducer and is connected; The vertical movement frame is arranged on the down-feed screw and through the vertical guide rail that is arranged on the Horizontal Motion Carriage and links to each other with Horizontal Motion Carriage; Following adjusting spanner is installed in down on the input shaft of speed reducer; Following speed reduction unit is installed on the pedestal; Horizontal screw lead is installed on the pedestal and with the output shaft of following speed reduction unit and is connected, and Horizontal Motion Carriage is arranged on the horizontal screw lead and through the horizontal guide rail that is arranged on the pedestal and is connected with pedestal, and the vertical movement frame is connected through rotating shaft with rotating disc; Probe is arranged on the rotating disc; Probe I, probe I I and probe I II all are arranged on the probe,---above-mentioned probe I, probe I I and probe I II is capacitive displacement transducer or inductive displacement transducer or optical displacement sensor, and above-mentioned upper reducer, following speed reduction unit are harmonic speed reducer or planetary reduction gear.
Characteristics of the present invention:
Through vertical movement frame, Horizontal Motion Carriage, rotating shaft and rotating disc adjustment probe I, probe I I, probe I II and the left and right sides face of tested air-float guide rail and the position relation of two sides up and down, detect linearity, pitching, rolling and the deflection characteristic of air-float guide rail for realization the present invention and created condition.The present invention is simple in structure, and is easy to use, is easy to realize.
Description of drawings:
State when Fig. 1 has illustrated that probe of the present invention is positioned at the left and right sides of tested air-float guide rail.
Fig. 2 has illustrated a kind of one-piece construction embodiment of the present invention.
Fig. 3 is the front elevation of Fig. 2.
State when Fig. 4 has illustrated that three probes of the present invention are in level.
Fig. 5 has illustrated three probes of the present invention to be in the state when vertical.
State when Fig. 6 has illustrated that probe of the present invention is positioned at the both sides up and down of tested air-float guide rail.
1, adjusted spanner; 2, upper reducer; 3, down-feed screw; 4, vertical guide rail; 5, vertical movement frame; 6, rotating shaft; 7, rotating disc; 8, probe; 81, probe I; 82, probe I I; 83, probe I II; 9, horizontal guide rail; 10, pedestal; 11, Horizontal Motion Carriage; 12, horizontal screw lead; 13, following speed reduction unit; 14, following adjusting spanner; 15, guide rail; 16, sliding sleeve; 17, scale; K, tested air-float guide rail; M, testing agency.
Embodiment:
Adjusted spanner 1 of the present invention is installed on the input shaft of upper reducer 2; Upper reducer 2 is installed on the Horizontal Motion Carriage 11; Down-feed screw 3 is installed on the Horizontal Motion Carriage 11 and with the output shaft of upper reducer 2 and is connected; Vertical movement frame 5 is arranged on the down-feed screw 3 and through the vertical guide rail 4 that is arranged on the Horizontal Motion Carriage 11 and links to each other with Horizontal Motion Carriage 11; Following adjusting spanner 14 is installed in down on the input shaft of speed reduction unit 13, and following speed reduction unit 13 is installed on the pedestal 10, and horizontal screw lead 12 is installed on the pedestal 10 and with the output shaft of following speed reduction unit 13 and is connected; Horizontal Motion Carriage 11 is arranged on the horizontal screw lead 12 and through the horizontal guide rail 9 that is arranged on the pedestal 10 and is connected with pedestal 10; Vertical movement frame 5 is connected through rotating shaft 6 with rotating disc 7, and probe 8 is arranged on the rotating disc 7, and probe I 81, probe I I82 and probe I II83 all are arranged on the probe 8.
Above-mentioned down-feed screw 3 is connected with pedestal 10 with Horizontal Motion Carriage 11 respectively with horizontal screw lead 12; Above-mentioned probe I 81 is positioned at the top of probe I I82; Probe I II83 is positioned at the left side of probe I I82; Above-mentioned probe I 81, probe I I82, probe I II83 are capacitive displacement transducer or inductive displacement transducer or optical displacement sensor, and above-mentioned upper reducer 2, speed reduction unit 13 is harmonic speed reducer or planetary reduction gear down.
When the present invention need detect tested air-float guide rail K, at first, two identical M of testing agency are fixed on symmetrically the both sides of tested air-float guide rail K; Through the vertical movement frame 5 of the adjusted spanner 1 adjustment M of testing agency, the Horizontal Motion Carriage 11 of the following adjusting spanner 14 adjustment M of testing agency, rotating shaft 6; Make the probe I 81, probe I I82 and the probe I II83 that are arranged on the probe 8 be in the left and right sides of horizontal direction near the sliding sleeve 16 of tested air-float guide rail K; Drive sliding sleeve 16 and move along guide rail 15, measuring probe I81, probe I I82 and probe I II83 be arranged on the distance of sliding sleeve 16 left and right sides scales 17, thereby record the linearity of the air-float guide rail left and right sides, the rolling and the deflection characteristic of guide rail; Through rotating rotating disc 7; Change probe I 81, probe I I82 and probe I II83 take multiple measurements with respect to the position of probe 8, to improve measuring accuracy, then; Vertical movement frame 5 through the adjusted spanner 1 adjustment M of testing agency; The Horizontal Motion Carriage 11 of the following adjusting spanner 14 adjustment M of testing agency, rotating shaft 6 makes the probe I 81, probe I I82 and the probe I II83 that are arranged on the probe 8 be in hard Nogata to the both sides up and down near the sliding sleeve 16 of tested air-float guide rail K; Driving sliding sleeve 16 moves along guide rail 15; Measuring probe I81, probe I I82 and probe I II83 be arranged on the distance of sliding sleeve both sides scale 17 16 about, thereby record the air-float guide rail up and down linearity, the rolling and the pitching characteristic of guide rail of both sides, through rotation rotating disc 7; Change probe I 81, probe I I82 and probe I II83 take multiple measurements with respect to the position of probe (8), to improve measuring accuracy.
Claims (3)
1. the device for detecting performance of a static pressure air-float guide rail; The testing agency (M) that it is made up of: adjusted spanner (1), upper reducer (2), down-feed screw (3), vertical guide rail (4), vertical movement frame (5), rotating shaft (6), rotating disc (7), probe (8), probe I (81), probe I I (82) and probe I II (83), horizontal guide rail (9), pedestal (10), Horizontal Motion Carriage (11), horizontal screw lead (12), time speed reduction unit (13) and following adjusting spanner (14) at least; It is characterized in that: described adjusted spanner (1) is installed on the input shaft of upper reducer (2); Upper reducer (2) is installed on the Horizontal Motion Carriage (11); Down-feed screw (3) is installed in Horizontal Motion Carriage (11) and upward and with the output shaft of upper reducer (2) is connected; Vertical movement frame (5) is arranged on down-feed screw (3) and upward and through the vertical guide rail (4) that is arranged on the Horizontal Motion Carriage (11) links to each other with Horizontal Motion Carriage (11); Following adjusting spanner (14) is installed in down on the input shaft of speed reduction unit (13); Following speed reduction unit (13) is installed on the pedestal (10); Horizontal screw lead (12) is installed in pedestal (10) and upward and with the output shaft of following speed reduction unit (13) is connected, and Horizontal Motion Carriage (11) is arranged on horizontal screw lead (12) and upward and through the horizontal guide rail (9) that is arranged on the pedestal (10) is connected with pedestal (10), and vertical movement frame (5) is connected through rotating shaft (6) with rotating disc (7); Probe (8) is arranged on the rotating disc (7), and probe I (81), probe I I (82) and probe I II (83) all are arranged on the probe (8).
2. the device for detecting performance of a kind of static pressure air-float guide rail according to claim 1, it is characterized in that: described probe I (81), probe I I (82) and probe I II (83) are capacitive displacement transducer or inductive displacement transducer or optical displacement sensor.
3. the device for detecting performance of a kind of static pressure air-float guide rail according to claim 1 is characterized in that: described upper reducer (2), speed reduction unit (13) is harmonic speed reducer or planetary reduction gear down.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2010207002895U CN202171526U (en) | 2010-12-29 | 2010-12-29 | Performance detecting device of static-pressure air floating guide rail |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2010207002895U CN202171526U (en) | 2010-12-29 | 2010-12-29 | Performance detecting device of static-pressure air floating guide rail |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN202171526U true CN202171526U (en) | 2012-03-21 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2010207002895U Expired - Lifetime CN202171526U (en) | 2010-12-29 | 2010-12-29 | Performance detecting device of static-pressure air floating guide rail |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN202171526U (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102162768A (en) * | 2010-12-29 | 2011-08-24 | 中国计量学院 | Device for detecting performance of static pressure air flotation guide rail and using method of device |
| CN108953935A (en) * | 2018-03-30 | 2018-12-07 | 国网山西省电力公司长治供电公司 | A kind of intelligent robot with partial discharge detection function |
| CN109353371A (en) * | 2018-12-12 | 2019-02-19 | 湖大海捷(湖南)工程技术研究有限公司 | A kind of contactless contour detecting device of all automatic rail |
-
2010
- 2010-12-29 CN CN2010207002895U patent/CN202171526U/en not_active Expired - Lifetime
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102162768A (en) * | 2010-12-29 | 2011-08-24 | 中国计量学院 | Device for detecting performance of static pressure air flotation guide rail and using method of device |
| CN108953935A (en) * | 2018-03-30 | 2018-12-07 | 国网山西省电力公司长治供电公司 | A kind of intelligent robot with partial discharge detection function |
| CN109353371A (en) * | 2018-12-12 | 2019-02-19 | 湖大海捷(湖南)工程技术研究有限公司 | A kind of contactless contour detecting device of all automatic rail |
| CN109353371B (en) * | 2018-12-12 | 2023-11-10 | 湖南高创海捷工程技术有限公司 | Full-automatic steel rail non-contact profile detection device |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| AV01 | Patent right actively abandoned |
Granted publication date: 20120321 Effective date of abandoning: 20120905 |