CN201528464U - Novel atmospheric pressure jet flow cold plasma generator - Google Patents

Novel atmospheric pressure jet flow cold plasma generator Download PDF

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Publication number
CN201528464U
CN201528464U CN2009201876510U CN200920187651U CN201528464U CN 201528464 U CN201528464 U CN 201528464U CN 2009201876510 U CN2009201876510 U CN 2009201876510U CN 200920187651 U CN200920187651 U CN 200920187651U CN 201528464 U CN201528464 U CN 201528464U
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CN
China
Prior art keywords
metal electrode
insulated tube
insulated pipe
plasma generator
cold plasma
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Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
CN2009201876510U
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Chinese (zh)
Inventor
倪国华
程诚
兰彦
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Cas New World Environmental Protection Technology Co ltd
Hefei Institutes of Physical Science of CAS
Original Assignee
Institute of Plasma Physics of CAS
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
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Publication date
Application filed by Institute of Plasma Physics of CAS filed Critical Institute of Plasma Physics of CAS
Priority to CN2009201876510U priority Critical patent/CN201528464U/en
Application granted granted Critical
Publication of CN201528464U publication Critical patent/CN201528464U/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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  • Physical Or Chemical Processes And Apparatus (AREA)

Abstract

The utility model discloses a novel atmospheric pressure jet flow cold plasma generator, which comprises an insulated pipe which is characterized in that a circular turnover is arranged on the external side on the front end of the insulated pipe; the circular turnover is provided with a circular sheet shape external metal electrode; the end of the insulated pipe is curved to form an air inlet; an internal metal electrode penetrates inside the insulated pipe; one end of the internal metal electrode passes by the curved end of the insulated pipe; and the other end of the internal metal electrode extends to the front end of the insulated pipe; a jet flow plasma area is formed on the front end outlet of the insulated pipe; and the internal metal electrode is located in the center of the insulated pipe. The utility model could reduce the discharge area without decreasing the plasma jet flow quantity, lowers operating temperature, facilitates to be hand-held and operated, and has simple structure and reliable operation.

Description

Cold plasma generator is flowed in a kind of novel air injection
Technical field
The utility model relates to the plasma processing apparatus field, is specifically related to a kind of novel air injection stream cold plasma generator field.
Background technology
The plasma that atmospheric dielectric barrier discharge produces has a wide range of applications at aspects such as material surface modifying, sterilization, plasma clean, but because the spacing of dielectric barrier discharge electrode gap generally has only several millimeters, therefore processed body form is restricted, thereby has limited the application of atmospheric dielectric barrier discharge.And adopt dielectric barrier discharge to produce the jet cold plasma mainly is to form long jet cold plasma at the jet hole place of device, processed like this object can be placed on the jet hole place can be by plasma treatment, and body form no longer is subjected to the restriction of electrode spacing.Yet, the device of present most of jet cold plasma dielectric barrier discharges adopts the coaxial outer tubular electrode of cylindrical interior electrode and close length to form mostly, separates with quartz or earthenware between two electrodes, interior electrode and radio-frequency power are coupled or connect high voltage source high-pressure side, external electrode ground connection.Although this device nozzle mouth position can produce the jet cold plasma, but the discharge of very most plasma is to produce between two electrodes, and this is that we are unwanted generally speaking, and the higher temperature that produces owing to interelectrode discharge, cause generally need taking cooling provision, be not easy to the handheld portable operation.
The utility model content
The technical problems to be solved in the utility model provides a kind of novel air injection stream cold plasma generator, can avoid or reduce interelectrode discharge, thereby reduce power in interelectrode loss, reduce the device operating temperature, improve the stable and portable of device operation.
For addressing the above problem, the technical solution of the utility model is as follows:
Cold plasma generator is flowed in a kind of novel air injection, include insulated tube, it is characterized in that: described insulated tube front end is placed with the annular slice metal electrode, and be insulated the cover coating, the afterbody of described insulated tube has an air admission hole, crossed interior metal electrode in the described insulated tube, metal electrode one end passes the end of described insulated tube in described, the metal electrode other end is stretched over the front end of described insulated tube in described, and in formation jet plasma district, described insulated tube front end exit place, described interior metal electrode is positioned at the insulated tube center.
Cold plasma generator is flowed in described novel air injection, it is characterized in that: when cold plasma generator is flowed in described novel air injection for two medium discharge, described in the metal electrode outer wall also be coated with one deck insulative.
Cold plasma generator is flowed in described novel air injection, it is characterized in that: metal electrode is cylindrical in described.
Cold plasma generator is flowed in described novel air injection, it is characterized in that: when cold plasma generator is flowed in described novel air injection for two medium discharge, described in the metal electrode outer wall also be coated with one deck insulative.
Cold plasma generator is flowed in described novel air injection, it is characterized in that: metal electrode is cylindrical in described.
The beneficial effects of the utility model:
The utility model can reduce region of discharge under the prerequisite that does not reduce the plasma jet size, reduced working temperature, is convenient to the hand-portable operation, and is simple in structure, and reliable.
Description of drawings
Fig. 1 is the utility model (single dielectric barrier discharge) structural representation.
Fig. 2 is the utility model (double-dielectric barrier discharge) structural representation.
Embodiment
Referring to Fig. 1,2, cold plasma generator is flowed in a kind of novel air injection, include insulated tube 1, it is characterized in that: the outside of insulated tube 1 front end comprises insulating case 2, be placed with the outer metal electrode 3 of annular slice in the insulating case 2, the afterbody of insulated tube 1 is opened an air admission hole 4, cylindrical in metal electrode 5 inwardly through insulated tube 1 and extend to the front end of insulated tube 1, and in formation jet plasma district, insulated tube 1 front end exit place 6, cylindrical interior metal electrode 5 is positioned at the insulated tube center.
When cold plasma generator is flowed in the novel air injection for two medium discharge, cylindrical in metal electrode 5 outer walls also be coated with one deck insulative 7.
Interior metal electrode 5 is placed in the insulated tube 1, one end is in the jet plasma district 6 of insulated tube 1 front end, another termination high voltage source high-pressure side (or ground), outer metal electrode 3 is placed on insulated tube 1 front end, and be insulated cover and 2 coating, spacing between two electrodes comprises that the thickness of insulated tube and gap several millimeters scopes, can do corresponding adjustment according to actual needs, when the afterbody air inlet 4 from insulated tube 1 feeds plasma working gas (as: He, Ar, CF 4, N 2, air etc.), connect simultaneously high-frequency and high-voltage power supply (exemplary operation voltage be several kv between the 20kv, frequency 20k~100kHz), jet plasma district 6 forms jet plasmas.

Claims (3)

1. cold plasma generator is flowed in a novel air injection, include insulated tube, it is characterized in that: described insulated tube front end is placed with the annular slice metal electrode, and be insulated the cover coating, the afterbody of described insulated tube has an air admission hole, crossed interior metal electrode in the described insulated tube, metal electrode one end passes the end of described insulated tube in described, the metal electrode other end is stretched over the front end of described insulated tube in described, and in formation jet plasma district, described insulated tube front end exit place, described interior metal electrode is positioned at the insulated tube center.
2. cold plasma generator is flowed in novel air injection according to claim 1, it is characterized in that: when cold plasma generator is flowed in described novel air injection for two medium discharge, described in the metal electrode outer wall also be coated with one deck insulative.
3. cold plasma generator is flowed in novel air injection according to claim 1, it is characterized in that: metal electrode is cylindrical in described.
CN2009201876510U 2009-09-18 2009-09-18 Novel atmospheric pressure jet flow cold plasma generator Expired - Fee Related CN201528464U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN2009201876510U CN201528464U (en) 2009-09-18 2009-09-18 Novel atmospheric pressure jet flow cold plasma generator

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN2009201876510U CN201528464U (en) 2009-09-18 2009-09-18 Novel atmospheric pressure jet flow cold plasma generator

Publications (1)

Publication Number Publication Date
CN201528464U true CN201528464U (en) 2010-07-14

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Cited By (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102361528A (en) * 2011-09-29 2012-02-22 西安交通大学 High-impermeability capillary tube discharging plasma generator
CN102595757A (en) * 2012-03-19 2012-07-18 河北大学 Three-electrode discharge device for generating large-volume atmosphere pressure plasma
CN102752951A (en) * 2012-07-04 2012-10-24 大连民族学院 Atmospheric-pressure low-temperature plasma generation device and application of device to prevention of plant disease
CN104883806A (en) * 2015-03-06 2015-09-02 苏州大学 Plasma jet device and assembly, and crystalline silicon battery surface oxidation and decontamination method
CN106231771A (en) * 2016-08-31 2016-12-14 大连民族大学 A kind of protection mechanism of plasma laryngoscope sterilizing unit
CN106856644A (en) * 2017-01-04 2017-06-16 京东方科技集团股份有限公司 Plasma jet device
DE102016209097A1 (en) * 2016-03-16 2017-09-21 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. plasma nozzle
CN108322984A (en) * 2018-01-29 2018-07-24 中国科学院电工研究所 Focus the device and method of cold plasma processing 3D objects
WO2021243966A1 (en) * 2020-06-01 2021-12-09 深圳先进技术研究院 Atmospheric pressure radio frequency thermal plasma generator based on pre-ionization ignition device

Cited By (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102361528B (en) * 2011-09-29 2012-11-28 西安交通大学 High-impermeability capillary tube discharging plasma generator
CN102361528A (en) * 2011-09-29 2012-02-22 西安交通大学 High-impermeability capillary tube discharging plasma generator
CN102595757A (en) * 2012-03-19 2012-07-18 河北大学 Three-electrode discharge device for generating large-volume atmosphere pressure plasma
CN102595757B (en) * 2012-03-19 2014-11-05 河北大学 Three-electrode discharge device for generating large-volume atmosphere pressure plasma
CN102752951A (en) * 2012-07-04 2012-10-24 大连民族学院 Atmospheric-pressure low-temperature plasma generation device and application of device to prevention of plant disease
CN104883806B (en) * 2015-03-06 2018-09-25 苏州大学 A kind of plasma jet device and component and a kind of method of crystal silicon battery surface oxidation and decontamination
CN104883806A (en) * 2015-03-06 2015-09-02 苏州大学 Plasma jet device and assembly, and crystalline silicon battery surface oxidation and decontamination method
EP3430864B1 (en) * 2016-03-16 2021-11-17 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Plasma nozzle and method of using the plasma nozzle
DE102016209097A1 (en) * 2016-03-16 2017-09-21 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. plasma nozzle
CN106231771A (en) * 2016-08-31 2016-12-14 大连民族大学 A kind of protection mechanism of plasma laryngoscope sterilizing unit
CN106856644A (en) * 2017-01-04 2017-06-16 京东方科技集团股份有限公司 Plasma jet device
CN108322984A (en) * 2018-01-29 2018-07-24 中国科学院电工研究所 Focus the device and method of cold plasma processing 3D objects
WO2021243966A1 (en) * 2020-06-01 2021-12-09 深圳先进技术研究院 Atmospheric pressure radio frequency thermal plasma generator based on pre-ionization ignition device

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Legal Events

Date Code Title Description
C14 Grant of patent or utility model
GR01 Patent grant
C41 Transfer of patent application or patent right or utility model
TR01 Transfer of patent right

Effective date of registration: 20160324

Address after: 1412, room 860, B, innovation center, Wangjiang West Road, 230000 hi tech Zone, Hefei, Anhui

Patentee after: CAS NEW WORLD ENVIRONMENTAL PROTECTION TECHNOLOGY CO.,LTD.

Address before: 230000 Dong Li, Hefei, Anhui

Patentee before: HEFEI INSTITUTES OF PHYSICAL SCIENCE, CHINESE ACADEMY OF SCIENCES

Effective date of registration: 20160324

Address after: 230000 Dong Li, Hefei, Anhui

Patentee after: HEFEI INSTITUTES OF PHYSICAL SCIENCE, CHINESE ACADEMY OF SCIENCES

Address before: 230031 Shushan Lake Road, Anhui, China, No. 350, No.

Patentee before: INSTITUTE OF PLASMA PHYSICS CHINESE ACADEMY OF SCIENCES

CF01 Termination of patent right due to non-payment of annual fee

Granted publication date: 20100714

Termination date: 20170918

CF01 Termination of patent right due to non-payment of annual fee