CN201559121U

CN201559121U - Grinding wheel spindle using air bearing

Info

Publication number: CN201559121U
Application number: CN2009202588760U
Authority: CN
Inventors: 储湘华; 蒋书运; 朱金虎
Original assignee: Wuxi Machine Tools Co Ltd
Current assignee: Wuxi Machine Tools Co Ltd
Priority date: 2009-11-20
Filing date: 2009-11-20
Publication date: 2010-08-25
Anticipated expiration: 2019-11-20

Abstract

The utility provides a grinding wheel spindle using an air bearing, which can greatly improve the precision, and can simultaneously reduce vibration and noise. The grinding wheel spindle using the air bearing includes a rotor spindle, a spindle shell, a spindle flange, a motor, a rotator, the back cover of the spindle, the front cover of the spindle, and a cooling water joint. The grinding wheel spindle using the air bearing is characterized in that the spindle of the air bearing is sleeved into an cavity formed between the spindle shell and the rotor spindle; the inner round surface of the bearing sleeve is uniformly provided with radial orifices; each radial orifice is mutually communicated with the air path inside the spindle shell through the spindle of the air bearing; and the spindle shell is provided with an air inlet and an air outlet communicated with the radical orifices.

Description

A kind of grinding wheel spindle that uses air bearing

(1) technical field

The utility model relates to semiconductor wafer manufacturing equipment field, is specially a kind of grinding wheel spindle that uses air bearing.

(2) background technology

Domestic existing electric main shaft is mainly by mechanical bearing supporting, and high speed whirling vibration, noise are big, and its required precision simultaneously can not reach the instructions for use of wafer grinding machine grinding wheel spindle.

(3) summary of the invention

At the problems referred to above, the utility model provides a kind of grinding wheel spindle that uses air bearing, can improve precision greatly, can reduce vibration and noise simultaneously.

Its technical scheme is such: it comprises rotor main shaft, main shaft housing, spindle flange, motor, revolves change device, main shaft bonnet, main shaft protecgulum, warter connection, it is characterized in that: air bearing spindles is set in described main shaft housing and the formed cavity of rotor main shaft, be evenly equipped with radially throttle orifice on the inner headed face of described bearing holder (housing, cover), each described radially throttle orifice is interconnected by the gas circuit of described air bearing spindles and described main shaft enclosure interior, has the air inlet, the gas outlet that are communicated with described radially throttle orifice on the described main shaft housing.

It is further characterized in that: the nose circle face is equipped with bearing holder (housing, cover) on the described spindle flange, following nose circle face is equipped with thrust bearing, described going up is equipped with thrust bearing gas lid between thrust bearing and described main shaft protecgulum, described bearing holder (housing, cover), last thrust bearing inside all has the axial throttle orifice of upper-lower position symmetry, described bearing holder (housing, cover), the gas circuit of last thrust bearing inside is communicated with each described axial throttle orifice of its inside respectively, described spindle flange periphery end is set with thrust bearing gap adjustment ring, the described gas circuit that goes up thrust bearing inside is communicated with the gas circuit of described bearing holder (housing, cover) inside by the gas circuit of described thrust bearing gap adjustment ring inside, the gas circuit of described bearing holder (housing, cover) inside is communicated with the gas circuit in the described main shaft housing, the described gas circuit that goes up thrust bearing inside is communicated with the described thrust bearing of going up, the assemblage gap of thrust bearing gas lid and described rotor main shaft, the described thrust bearing of going up, thrust bearing gas lid is communicated with the assemblage gap of described thrust bearing gas lid and described main shaft protecgulum with the gap that surrounds of described rotor main shaft, described thrust bearing gas lid is communicated with extraneous air with the assemblage gap of described main shaft protecgulum;

In described radially throttle orifice, the axial throttle orifice flow controller is installed all;

Described motor is specially the permanent magnet brshless DC motor, and described main shaft housing has the stator that water injection hole is communicated with described motor, and described stator outer wall has helicla flute, and described motor is connected with the described change device that revolves;

Described main shaft bonnet center is set with warter connection, described warter connection inside has gas circuit, described gas circuit is communicated with the air inlet of described main shaft bonnet, described warter connection is communicated with the gas circuit of described warter connection inside with the assemblage gap of described rotor main shaft, described warter connection is communicated with the assemblage gap of described rotor main shaft and described main shaft bonnet with the assemblage gap of described rotor main shaft, described rotor main shaft is communicated with described rotor main shaft and the described assemblage gap that becomes device that revolves with the assemblage gap of described main shaft bonnet, described rotor main shaft is communicated with the fixing clearance of the described motor in its underpart with the described assemblage gap that revolves the change device, the fixing clearance of described motor is communicated with the steam vent of described main shaft bonnet inside;

Described main shaft housing is the duralumin material.

In the said structure of the present utility model, radially throttle orifice be provided with guarantee to feed each radially the compressed air of throttle orifice act on described rotor main shaft, contact with described rotor main shaft owing to gas this moment, improve the machining accuracy of electric main shaft by homogenization, owing to there is not the machinery contact, reduce noise and vibration simultaneously.

(4) description of drawings

Fig. 1 is the structural representation of front view of the present utility model;

Fig. 2 is that the A of Fig. 1 is to enlarged drawing;

Fig. 3 is that the B of Fig. 1 is to enlarged drawing.

(5) specific embodiment

See Fig. 1, Fig. 2, Fig. 3, the utility model comprises rotor main shaft 1, main shaft housing 2, spindle flange 3, motor 4, revolves change device 5, main shaft bonnet 6, main shaft protecgulum 7, warter connection 8, air bearing spindles 9 is set in main shaft housing 2 and the rotor main shaft 1 formed cavity, be evenly equipped with radially throttle orifice 10 on the periphery of air bearing spindles 9, each radially throttle orifice 10 be interconnected by the gas circuit 21 of air bearing spindles 9 and the gas circuit 22 of main shaft housing 2 inside, have on the main shaft housing 2 and be communicated with radially air inlet 11, the gas outlet 12 of throttle orifice 10.

The nose circle face is equipped with bearing holder (housing, cover) 13 on the spindle flange 3, following nose circle face is equipped with thrust bearing 14,7 of last thrust bearing 14 and main shaft protecgulums are equipped with thrust bearing gas lid 15, bearing holder (housing, cover) 13, last thrust bearing 14 inside all have the axial throttle orifice 16 of upper-lower position symmetry, the gas circuit 17 of bearing holder (housing, cover) 13 inside is communicated with each axial throttle orifice 16 of its inside, the gas circuit 18 of last thrust bearing 14 inside is communicated with each axial throttle orifice 16 of its inside, spindle flange 3 periphery ends are set with thrust bearing gap adjustment ring 19, the gas circuit 18 of last thrust bearing 14 inside is encircled the gas circuit 17 of gas circuit 20 connection shaft bearing sleeves 13 inside of 19 inside by the adjustment of thrust bearing gap, the gas circuit 22 that the gas circuit 17 of bearing holder (housing, cover) 13 inside is communicated with in the main shaft housing 2, the gas circuit 18 of last thrust bearing 14 inside is communicated with upward thrust bearing 14, the assemblage gap 23 of thrust bearing gas lid 15 and rotor main shaft 1, last thrust bearing 14, thrust bearing gas lid 15 is communicated with the assemblage gap 24 of thrust bearing gas lid 15 and main shaft protecgulum 7 with the gap that surrounds 23 of rotor main shaft, thrust bearing gas covers 15 and is communicated with extraneous air with the assemblage gap 24 of main shaft protecgulum 7;

Radially in throttle orifice 10, the axial throttle orifice 16 flow controller 25 is installed all;

Motor 4 is specially the permanent magnet brshless DC motor, and main shaft housing 2 has the stator 27 that water injection hole 26 is communicated with motor 4, and stator 27 outer walls have helicla flute 28, and motor 4 connections are revolved and become device 5;

Warter connection 8 is equipped with in main shaft bonnet 6 centers, warter connection 8 inside have gas circuit 29, gas circuit 29 is communicated with the air inlet 30 of main shaft bonnet 6, warter connection 8 is communicated with the gas circuit 29 of warter connection 8 inside with the assemblage gap 31 of rotor main shaft 1, warter connection 8 is communicated with the assemblage gap 32 of rotor main shaft 1 and main shaft bonnet 6 with the assemblage gap 31 of rotor main shaft 1, rotor main shaft 1 is communicated with rotor main shaft 1 and revolves the assemblage gap 33 that becomes device 5 with the assemblage gap 32 of main shaft bonnet 6, rotor main shaft 1 is communicated with the fixing clearance 34 of its underpart motor 4 with the assemblage gap 33 that revolves change device 5, the fixing clearance 34 of motor 4 is communicated with the steam vent 35 of main shaft bonnets 6 inside; Main shaft housing 2 is the duralumin material.Among Fig. 1, Fig. 3 36 is intake antrum.

Because air bearing spindles 9 is set in main shaft housing 2 and the rotor main shaft 1 formed cavity, be evenly equipped with radially throttle orifice 10 on the periphery of air bearing spindles 9, radially throttle orifice 10 is by being installed on the gas circuit mutual conduction in air bearing spindles 9 and the main shaft housing 2, have on the main shaft housing 2 and be communicated with the radially air inlet of throttle orifice 10, the gas outlet, it is by to each throttle orifice 10 radially of the compressed air channel of air inlet input, radially the atmospheric pressure in the throttle orifice 10 acts on rotor main shaft 1, contact with rotor main shaft 1 owing to gas this moment, there is not the machinery contact, so its vibration and noise reduce greatly, simultaneously because homogenization has improved the machining accuracy of electric main shaft greatly.

Claims

1. grinding wheel spindle that uses air bearing, it comprises rotor main shaft, main shaft housing, spindle flange, motor, revolves change device, main shaft bonnet, main shaft protecgulum, warter connection, it is characterized in that: air bearing spindles is set in described main shaft housing and the formed cavity of rotor main shaft, be evenly equipped with radially throttle orifice on the inner headed face of described bearing holder (housing, cover), each described radially throttle orifice is interconnected by the gas circuit of described air bearing spindles and described main shaft enclosure interior, has the air inlet, the gas outlet that are communicated with described radially throttle orifice on the described main shaft housing.

2. according to the described a kind of grinding wheel spindle that uses air bearing of claim 1, it is characterized in that: the nose circle face is equipped with bearing holder (housing, cover) on the described spindle flange, following nose circle face is equipped with thrust bearing, described going up is equipped with thrust bearing gas lid between thrust bearing and described main shaft protecgulum, described bearing holder (housing, cover), last thrust bearing inside all has the axial throttle orifice of upper-lower position symmetry, described bearing holder (housing, cover), the gas circuit of last thrust bearing inside is communicated with each described axial throttle orifice of its inside respectively, described spindle flange periphery end is set with thrust bearing gap adjustment ring, the described gas circuit that goes up thrust bearing inside is communicated with the gas circuit of described bearing holder (housing, cover) inside by the gas circuit of described thrust bearing gap adjustment ring inside, the gas circuit of described bearing holder (housing, cover) inside is communicated with the gas circuit in the described main shaft housing, the described gas circuit that goes up thrust bearing inside is communicated with the described thrust bearing of going up, the assemblage gap of thrust bearing gas lid and described rotor main shaft, the described thrust bearing of going up, thrust bearing gas lid is communicated with the assemblage gap of described thrust bearing gas lid and described main shaft protecgulum with the gap that surrounds of described rotor main shaft, described thrust bearing gas lid is communicated with extraneous air with the assemblage gap of described main shaft protecgulum.

3. according to the described a kind of grinding wheel spindle that uses air bearing of claim 2, it is characterized in that: in described radially throttle orifice, the axial throttle orifice flow controller is installed all;

4. according to the described a kind of grinding wheel spindle that uses air bearing of claim 3, it is characterized in that: described motor is specially the permanent magnet brshless DC motor, described main shaft housing has the stator that water injection hole is communicated with described motor, described stator outer wall has helicla flute, and described motor is connected with the described change device that revolves.

5. according to the described a kind of grinding wheel spindle that uses air bearing of claim 4, it is characterized in that: described main shaft bonnet center is set with warter connection, described warter connection inside has gas circuit, described gas circuit is communicated with the air inlet of described main shaft bonnet, described warter connection is communicated with the gas circuit of described warter connection inside with the assemblage gap of described rotor main shaft, described warter connection is communicated with the assemblage gap of described rotor main shaft and described main shaft bonnet with the assemblage gap of described rotor main shaft, described rotor main shaft is communicated with described rotor main shaft and the described assemblage gap that becomes device that revolves with the assemblage gap of described main shaft bonnet, described rotor main shaft is communicated with the fixing clearance of the described motor in its underpart with the described assemblage gap that revolves the change device, the fixing clearance of described motor is communicated with the steam vent of described main shaft bonnet inside.

6. according to the described a kind of grinding wheel spindle that uses air bearing of claim 5, it is characterized in that: described main shaft housing is the duralumin material.