WO2021243966A1 - Atmospheric pressure radio frequency thermal plasma generator based on pre-ionization ignition device - Google Patents

Atmospheric pressure radio frequency thermal plasma generator based on pre-ionization ignition device Download PDF

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WO2021243966A1
WO2021243966A1 PCT/CN2020/129398 CN2020129398W WO2021243966A1 WO 2021243966 A1 WO2021243966 A1 WO 2021243966A1 CN 2020129398 W CN2020129398 W CN 2020129398W WO 2021243966 A1 WO2021243966 A1 WO 2021243966A1
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ignition device
radio frequency
ionization
atmospheric pressure
thermal plasma
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PCT/CN2020/129398
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French (fr)
Chinese (zh)
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周秋娇
陆星铭
张永亮
江敏
黄逸凡
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深圳先进技术研究院
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Publication of WO2021243966A1 publication Critical patent/WO2021243966A1/en

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    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
    • H05H1/00—Generating plasma; Handling plasma
    • H05H1/24—Generating plasma
    • H05H1/46—Generating plasma using applied electromagnetic fields, e.g. high frequency or microwave energy
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
    • H05H1/00—Generating plasma; Handling plasma
    • H05H1/24—Generating plasma

Definitions

  • the present invention relates to the field of plasma generators, and more specifically, to an atmospheric pressure radio frequency thermal plasma generator based on a pre-ionization ignition device.
  • the main method of low-temperature plasma generation is gas discharge.
  • the current gas discharge is mainly carried out under vacuum. From the perspective of application, the vacuum system equipment required for plasma generated in a vacuum environment is complicated, expensive and demanding.
  • the discharge plasma under atmospheric pressure does not require an expensive and complicated vacuum system, which is particularly beneficial for industrial applications, and not only improves efficiency, but also significantly reduces production costs.
  • the plasma generated under atmospheric pressure includes cold plasma and hot plasma. Their essence is that the mechanism of the electromagnetic field in the plasma transferring energy to electrons is different.
  • Atmospheric cold plasma is a typical non-equilibrium plasma.
  • the gas temperature is very low, even close to room temperature. It is mainly used for thin film preparation, material surface modification, biological purification and other fields. Because the temperature of cold plasma is very low, cold plasma cannot be used for processing high melting point materials.
  • the gas temperature of thermal plasma can reach 3000-10000 K, which can be used in large-area solid waste treatment, spraying, and synthesis of high melting point materials.
  • Common methods for generating thermal plasma include DC arc and RF inductively coupled thermal plasma.
  • DC arc torch has the disadvantages of impurity contamination due to electrode ablation.
  • RF thermal plasma is large in volume, high in energy density, and clean (no electrode) .
  • the application in the fields of powder densification, purification, synthesis, spheroidization, etc. has grown rapidly.
  • Using radio frequency thermal plasma method for material synthesis and spheroidization can obtain high-performance, high-quality advanced materials that are difficult to achieve by traditional methods, such as rare metals, high melting point metal oxide ceramics, nitrides, hydride micro-nano particles, etc.
  • the breakdown and sustaining voltage are relatively high, and it is usually necessary to introduce auxiliary ignition equipment such as Tesla coils to generate small-area discharge through the coil terminal by boosting; or A metal rod is extended into the discharge area, and the discharge breakdown effect is achieved at a power of several hundred watts by means of thermionic emission from the metal tip.
  • the existing auxiliary ignition method has impurity pollution, small auxiliary discharge area, and low overall concentration of ionized particles. After ignition, it is necessary to manually remove the Tesla coil or metal rod placed in the radio frequency thermal plasma discharge area.
  • the purpose of the present invention is to overcome the above-mentioned shortcomings of the prior art and provide an atmospheric pressure radio frequency thermal plasma generator based on a pre-ionization ignition device, which can achieve gas stabilization that is difficult to directly break down under atmospheric pressure at a lower breakdown voltage Discharge provides a convenient and practical new technical solution for the breakdown and ignition of atmospheric pressure radio frequency thermal plasma.
  • the present invention provides an atmospheric pressure radio frequency thermal plasma generator based on a pre-ionization ignition device.
  • the generator is an atmospheric pressure radio frequency inductively coupled plasma generator, comprising: a pre-ionization ignition device and an inductively coupled plasma torch, wherein
  • the inductively coupled plasma torch includes an inner tube, an intermediate tube, an outer tube, and a metal coil surrounding the outer tube;
  • the pre-ionization ignition device is used to provide seed electrons for the thermal plasma, which is placed in the In the inner tube, a positive electrode wrapped by an insulating dielectric layer coaxial with the inner tube and a ground electrode surrounding the inner tube constitute a double dielectric barrier discharge structure.
  • the pre-ionization ignition device takes the center of the length direction of the inner tube as a reference and is arranged at an upstream position of the inner tube.
  • the electrode of the pre-ionization ignition device is connected to a radio frequency power supply or a high-voltage power supply capable of providing pre-ionization discharge.
  • the density of seed electrons provided by the pre-ionization ignition device is controlled by adjusting the voltage and radio frequency power connected to the pre-ionization ignition device or adjusting the distance between the positive electrode and the ground electrode.
  • the distance between the bottom of the positive electrode and the ground electrode is set to 2 cm.
  • the ground electrode in the pre-ionization ignition device is set to at least one.
  • the plasma generator further includes an insulating support for supporting the inductively coupled plasma torch.
  • the metal coil is a multi-turn water-cooled coil used to connect to a power source. With the center of the outer tube in the length direction as a reference, the metal coil surrounds the outer tube in a cylindrical spiral shape. The downstream position of the pipe.
  • the insulating dielectric layer is a heat-resistant insulating tape attached to the surface of the positive electrode or a silicone grease or a quartz glass tube attached to the surface of the positive electrode.
  • the positive electrode, the insulating dielectric layer, the inner tube, the outer tube and the intermediate tube are coaxially arranged.
  • the present invention has the advantage that by providing a pre-ionization ignition device inside the plasma generator, it can achieve stable gas discharge that is difficult to directly break down under atmospheric pressure at a lower breakdown voltage, replacing the traditional
  • the metal electrode ignition device not only avoids the introduction of other metal impurities, but also eliminates the need to remove the ignition device after successful ignition.
  • the invention provides a convenient and practical new technical scheme for the breakdown ignition problem of atmospheric pressure radio frequency thermal plasma, and also increases the plasma volume and realizes the pretreatment of the feed.
  • Fig. 1 is a schematic diagram of an atmospheric pressure radio frequency thermal plasma generator based on a pre-ionization ignition device according to an embodiment of the present invention
  • Fig. 2 is a schematic diagram of a dual dielectric barrier engineering structure of a pre-ionization ignition device according to an embodiment of the present invention.
  • the radio frequency thermal plasma generator of the embodiment of the present invention is an atmospheric pressure radio frequency inductively coupled plasma generator, including a pre-ionization ignition device, an inductively coupled plasma torch, wherein the inductively coupled plasma
  • the body torch is provided with three layers of tubes, which are an inner tube 10, a middle tube 20, and an outer tube 30.
  • the insulating and heat-resistant material 3 and the metal coil 4 of the inner tube, the middle tube and the outer tube are assembled.
  • the pre-ionization ignition device includes a positive electrode 1 And ground electrode 2 (also called ground electrode or negative electrode).
  • the pre-ionization ignition device structure is formed at the upstream position of the inner tube 10 (that is, the upper half of the length of the inner tube).
  • the structure is composed of an insulating medium layer placed in the inner tube and coaxial with the inner tube. 5
  • the positive electrode 1 in the pre-ionization ignition device can be used to connect a high-voltage power supply or a radio frequency power supply, etc. (also called a high-voltage/radio frequency electrode), or connect to other power supplies capable of providing pre-ionization discharge, both of which can achieve the purpose of pre-ionization of the working gas. For example, using radio frequency power with a frequency of 13.56 MHz or other tunable radio frequency range.
  • the ground electrode 2 may be provided in one or more.
  • the density of seed electrons provided by the pre-ionization ignition device can be controlled by adjusting the voltage and radio frequency power connected to the pre-ionization ignition device or adjusting the distance between the positive electrode 1 and the ground electrode 2.
  • the distance between the bottom of the positive electrode 1 and the ground electrode 2 is set to 2 cm, 3 cm or other values.
  • the pre-ionization ignition device is set at the upstream position of the inner tube, and adopts a double dielectric barrier discharge structure, that is, the structure is composed of a dielectric insulator (or insulation) placed in the inner tube and coaxial with the inner tube.
  • a double dielectric barrier discharge structure formed by the high-voltage/RF electrode wrapped by the dielectric layer and the ground electrode surrounding the inner tube. When a sufficiently high voltage is applied between the electrodes, the gas between the electrodes will be broken down to produce a discharge, that is, a dielectric barrier discharge is produced.
  • the dielectric insulator arranged on the outer surface of the electrode is a heat-resistant insulating layer to isolate the electrode from the air.
  • the metal coil 4 is used to connect to a radio frequency power supply, for example, a multi-turn (such as 4 turns or 5 turns, etc.) water-cooled coils, which surround the outer tube in a cylindrical spiral shape in a downstream position.
  • a radio frequency power supply for example, a multi-turn (such as 4 turns or 5 turns, etc.) water-cooled coils, which surround the outer tube in a cylindrical spiral shape in a downstream position.
  • the inductively coupled plasma torch is a three-layer coaxial quartz glass tube.
  • cooling argon gas can be passed into the outer tube 30 to prevent the plasma torch from burning the quartz tube.
  • the middle tube 20 can be ventilated with argon gas to maintain the plasma.
  • the inner tube 10 uses a carrier gas to introduce the sample aerosol from the inner tube into the plasma.
  • the cooling argon gas is introduced tangentially to the outer tube of the torch, and the auxiliary gas argon is introduced axially (or tangentially) into the middle tube, and the pre-ionization ignition device is used to excite seed electrons.
  • an insulating support (not shown) is also included for supporting the three-layer coaxial quartz glass tube.
  • the lengths of the outer tube, the middle tube and the inner tube of the inductively coupled plasma torch are set to 16.5cm, 9cm, 15cm, the outer diameters are 35mm, 22mm, 6mm, and the inner diameters are 31mm, 20mm, respectively. 4mm.
  • the pre-ionization of the working gas by the pre-dual dielectric barrier discharge is used to provide seed electrons for the radio frequency thermal plasma discharge.
  • radio frequency thermal plasma discharge there are two discharge modes, one is E-type discharge, the other is H-type discharge, E-type discharge is the discharge caused by the electrostatic field generated by the surface charge of the coil, such as capacitively coupled plasma Discharge in the body.
  • H-type discharge is a magnetic field induced by the current in the coil, and then the magnetic field induces an electric field, so that the plasma can sustain the discharge.
  • the radio frequency thermal plasma is in the E-type discharge at the initial discharge stage. As the applied power increases and reaches a certain value, the E-type discharge will jump to the H-type discharge.
  • the plasma discharge is caused by collisions (the electrons collide with the background gas multiple times before reaching the wall).
  • the present invention provides additional seed electrons through pre-ionization, which can provide effective assistance for the breakdown of radio frequency thermal plasma , So as to realize the direct realization of radio frequency thermal plasma discharge that can hardly be broken down under atmospheric pressure under the condition of large discharge gap and low breakdown voltage; and the metastable particles in the pre-ionization discharge, the active reaction environment, and the Play a role in providing pre-treatment for the synthesis of materials.
  • the present invention applies the pre-ionization ignition device to the atmospheric pressure radio frequency thermal plasma generator, which can work stably under atmospheric pressure. Its advantages include at least: the use of radio frequency power to achieve uniform and stable H-shaped discharge under atmospheric pressure to form high temperature radio frequency thermal plasma Torch; can achieve argon, even nitrogen and other gas discharges at a lower breakdown voltage, directly achieve radio-frequency thermal plasma discharge that can hardly be broken down under atmospheric pressure; avoid the introduction of other metal impurities; increase the plasma volume ,
  • the metastable particles in the pre-ionization discharge and the active reaction environment can also play a role in pretreatment of the material in the application.
  • the present invention applies the pre-ionization ignition device to the radio frequency thermal plasma generator, which can realize the gas discharge that is difficult to directly break down under atmospheric pressure, such as argon and nitrogen, at a lower breakdown voltage.
  • the present invention reduces the breakdown and maintenance voltage of thermal plasma, can generate uniform and stable discharge, and avoid the introduction of other metal impurities.
  • a large discharge gap achieves a radio frequency thermal plasma discharge that can hardly be broken down under atmospheric pressure with a lower breakdown voltage, which provides a convenient and practical solution to the breakdown and ignition problem of atmospheric radio frequency thermal plasma.
  • the technical solution proposed by the present invention will greatly promote the practical application of atmospheric pressure radio frequency thermal plasma in the fields of material processing, powder densification, purification, synthesis, spheroidization, etc., and show its clean, efficient, and rapid processing capabilities.

Abstract

An atmospheric pressure radio frequency thermal plasma generator based on a pre-ionization ignition device. The generator is an atmospheric pressure radio frequency inductively coupled plasma generator and comprises: the pre-ionization ignition device and an inductively coupled plasma torch tube, wherein the inductively coupled plasma torch tube comprises an inner tube (10), a middle tube (20), an outer tube (30) and a metal coil (4) surrounding the outer tube (30); and the pre-ionization ignition device is used for providing seed electrons for thermal plasma and is of a double-dielectric barrier discharge structure consisting of a positive electrode (1) and a grounding electrode (2), wherein the positive electrode is arranged in the inner tube (10) and is wrapped in an insulating dielectric layer (5) which is coaxial with the inner tube (10), and the grounding electrode surrounds the inner tube. The pre-ionization ignition device is additionally arranged in the generator, such that convenience and practicability are provided for the problem of breakdown ignition of the atmospheric pressure radio frequency thermal plasma, the volume of the plasma is increased, and the pretreatment of fed-in materials is realized.

Description

基于预电离点火装置的大气压射频热等离子体发生器Atmospheric pressure radio frequency thermal plasma generator based on pre-ionization ignition device 技术领域Technical field
本发明涉及等离子体发生器领域，更具体地，涉及一种基于预电离点火装置的大气压射频热等离子体发生器。The present invention relates to the field of plasma generators, and more specifically, to an atmospheric pressure radio frequency thermal plasma generator based on a pre-ionization ignition device.
背景技术Background technique
低温等离子体产生的主要方式是气体放电。目前的气体放电主要是在真空下进行的，从应用角度看，真空环境产生的等离子体所需要的真空***设备复杂、费用高、条件苛刻。而大气压下的放电等离子体无须昂贵复杂的真空***，特别有利于工业化的应用，不但效率提高且生产成本显著降低。The main method of low-temperature plasma generation is gas discharge. The current gas discharge is mainly carried out under vacuum. From the perspective of application, the vacuum system equipment required for plasma generated in a vacuum environment is complicated, expensive and demanding. The discharge plasma under atmospheric pressure does not require an expensive and complicated vacuum system, which is particularly beneficial for industrial applications, and not only improves efficiency, but also significantly reduces production costs.
目前在大气压条件下产生的等离子体有冷等离子体和热等离子体，它们的本质在于等离子体中电磁场向电子传递能量的机理不一样。大气压冷等离子体属于典型的非平衡等离子体，气体温度很低，甚至接近于室温，主要用于薄膜制备，材料表面改性，生物净化等领域。由于冷等离子体温度很低，因此，对于高熔点材料不能采用冷等离子体进行处理。而热等离子体的气体温度能达到3000—10000 K，可以用于大面积固废处理、喷涂、高熔点材料合成等领域。产生热等离子体的常用方式包括直流电弧和射频感应耦合热等离子体，直流电弧炬存在因电极烧蚀而引起杂质污染的弊端，射频热等离子体的体积大、能量密度高、清洁（无电极），在粉末稠密化、提纯、合成、球化等领域的应用增长快速。使用射频热等离子体方法进行材料合成、球化可获得传统方法难以实现的高性能、高品质的先进材料，如稀有金属、高熔点金属氧化物陶瓷、氮化物、氢化物的微纳颗粒等。At present, the plasma generated under atmospheric pressure includes cold plasma and hot plasma. Their essence is that the mechanism of the electromagnetic field in the plasma transferring energy to electrons is different. Atmospheric cold plasma is a typical non-equilibrium plasma. The gas temperature is very low, even close to room temperature. It is mainly used for thin film preparation, material surface modification, biological purification and other fields. Because the temperature of cold plasma is very low, cold plasma cannot be used for processing high melting point materials. The gas temperature of thermal plasma can reach 3000-10000 K, which can be used in large-area solid waste treatment, spraying, and synthesis of high melting point materials. Common methods for generating thermal plasma include DC arc and RF inductively coupled thermal plasma. DC arc torch has the disadvantages of impurity contamination due to electrode ablation. RF thermal plasma is large in volume, high in energy density, and clean (no electrode) , The application in the fields of powder densification, purification, synthesis, spheroidization, etc. has grown rapidly. Using radio frequency thermal plasma method for material synthesis and spheroidization can obtain high-performance, high-quality advanced materials that are difficult to achieve by traditional methods, such as rare metals, high melting point metal oxide ceramics, nitrides, hydride micro-nano particles, etc.
在现有技术中，对于大气压下的射频热等离子体来说，击穿与维持电压较高，通常需要引入辅助点火设备如特斯拉线圈，通过升压方式经由线圈终端产生小区域放电；或将一根金属棒伸入放电区域，通过金属尖端热电子发射的方式在几百瓦功率下达到放电击穿效果。现有的辅助点火方式，存在杂质污染、辅助放电区域小、电离粒子整体浓度低，并且点火完毕后需要手动移除放进射频热等离子体放电区域内的特斯拉线圈或金属棒，这对于一些需要控制气氛而配有腔室的等离子体***来说并不现实，因而极大限制了大气压射频热等离子体技术的应用。In the prior art, for the radio frequency thermal plasma under atmospheric pressure, the breakdown and sustaining voltage are relatively high, and it is usually necessary to introduce auxiliary ignition equipment such as Tesla coils to generate small-area discharge through the coil terminal by boosting; or A metal rod is extended into the discharge area, and the discharge breakdown effect is achieved at a power of several hundred watts by means of thermionic emission from the metal tip. The existing auxiliary ignition method has impurity pollution, small auxiliary discharge area, and low overall concentration of ionized particles. After ignition, it is necessary to manually remove the Tesla coil or metal rod placed in the radio frequency thermal plasma discharge area. Some plasma systems that require a controlled atmosphere and are equipped with a chamber are not realistic, which greatly limits the application of atmospheric pressure radio frequency thermal plasma technology.
发明内容Summary of the invention
本发明的目的是克服上述现有技术的缺陷，提供了一种基于预电离点火装置的大气压射频热等离子体发生器，能够在较低的击穿电压下实现大气压下难以直接击穿的气体稳定放电，为大气压射频热等离子体的击穿点火问题提供方便、实用的新型技术方案。The purpose of the present invention is to overcome the above-mentioned shortcomings of the prior art and provide an atmospheric pressure radio frequency thermal plasma generator based on a pre-ionization ignition device, which can achieve gas stabilization that is difficult to directly break down under atmospheric pressure at a lower breakdown voltage Discharge provides a convenient and practical new technical solution for the breakdown and ignition of atmospheric pressure radio frequency thermal plasma.
本发明提供一种基于预电离点火装置的大气压射频热等离子体发生器，所述发生器是大气压射频感应耦合等离子体发生器，包括：预电离点火装置和感应耦合等离子体炬管，其中，所述感应耦合等离子体炬管包括内管、中间管、外管和环绕于所述外管的金属线圈；所述预电离点火装置用于为热等离子体提供种子电子，其是由置于所述内管中与内管同轴的绝缘介质层包裹着的正电极和环绕所述内管的地电极所构成的双介质阻挡放电结构。The present invention provides an atmospheric pressure radio frequency thermal plasma generator based on a pre-ionization ignition device. The generator is an atmospheric pressure radio frequency inductively coupled plasma generator, comprising: a pre-ionization ignition device and an inductively coupled plasma torch, wherein The inductively coupled plasma torch includes an inner tube, an intermediate tube, an outer tube, and a metal coil surrounding the outer tube; the pre-ionization ignition device is used to provide seed electrons for the thermal plasma, which is placed in the In the inner tube, a positive electrode wrapped by an insulating dielectric layer coaxial with the inner tube and a ground electrode surrounding the inner tube constitute a double dielectric barrier discharge structure.
在一个实施例中，所述预电离点火装置以所述内管长度方向的中心为参考，设置于所述内管的上游位置。In one embodiment, the pre-ionization ignition device takes the center of the length direction of the inner tube as a reference and is arranged at an upstream position of the inner tube.
在一个实施例中，所述预电离点火装置的电极连接能够提供预电离放电的射频电源或高压电源。In one embodiment, the electrode of the pre-ionization ignition device is connected to a radio frequency power supply or a high-voltage power supply capable of providing pre-ionization discharge.
在一个实施例中，通过调节所述预电离点火装置连接的电压、射频功率或调节所述正电极和地电极之间的距离来控制所述预电离点火装置的提供的种子电子的密度。In one embodiment, the density of seed electrons provided by the pre-ionization ignition device is controlled by adjusting the voltage and radio frequency power connected to the pre-ionization ignition device or adjusting the distance between the positive electrode and the ground electrode.
在一个实施例中，将所述正电极底部与所述地电极之间的距离设置为2cm。In one embodiment, the distance between the bottom of the positive electrode and the ground electrode is set to 2 cm.
在一个实施例中，所述预电离点火装置中的地电极设置为至少一个。In one embodiment, the ground electrode in the pre-ionization ignition device is set to at least one.
在一个实施例中，该等离子体发生器还包括绝缘支架，用于支撑所述感应耦合等离子体炬管。In an embodiment, the plasma generator further includes an insulating support for supporting the inductively coupled plasma torch.
在一个实施例中，所述金属线圈是用于连接电源的多匝水冷线圈，以所述外管的长度方向的中心为参考，所述金属线圈以圆筒螺旋状圆柱型环绕在所述外管的下游位置。In one embodiment, the metal coil is a multi-turn water-cooled coil used to connect to a power source. With the center of the outer tube in the length direction as a reference, the metal coil surrounds the outer tube in a cylindrical spiral shape. The downstream position of the pipe.
在一个实施例中，所述绝缘介质层是贴附在所述正电极表面的耐热绝缘胶带或涂附在所述正电极表面的硅脂或石英玻璃管。In one embodiment, the insulating dielectric layer is a heat-resistant insulating tape attached to the surface of the positive electrode or a silicone grease or a quartz glass tube attached to the surface of the positive electrode.
在一个实施例中，所述正电极、所述绝缘介质层、所述内管、所述外管和所述中间管为同轴设置。In one embodiment, the positive electrode, the insulating dielectric layer, the inner tube, the outer tube and the intermediate tube are coaxially arranged.
与现有技术相比，本发明的优点在于，通过在等离子体发生器的内部设置预电离点火装置，能够在较低的击穿电压下实现大气压下难以直接击穿的气体稳定放电，替代传统的金属电极点火装置，不仅避免引入其他金属杂质，并且无需在点火成功后移除点火装置。本发明为大气压射频热等离子体的击穿点火问题提供了方便、实用的新型技术方案，而且增大了等离子体体积，实现了对进料的预处理。Compared with the prior art, the present invention has the advantage that by providing a pre-ionization ignition device inside the plasma generator, it can achieve stable gas discharge that is difficult to directly break down under atmospheric pressure at a lower breakdown voltage, replacing the traditional The metal electrode ignition device not only avoids the introduction of other metal impurities, but also eliminates the need to remove the ignition device after successful ignition. The invention provides a convenient and practical new technical scheme for the breakdown ignition problem of atmospheric pressure radio frequency thermal plasma, and also increases the plasma volume and realizes the pretreatment of the feed.
通过以下参照附图对本发明的示例性实施例的详细描述，本发明的其它特征及其优点将会变得清楚。Through the following detailed description of exemplary embodiments of the present invention with reference to the accompanying drawings, other features and advantages of the present invention will become clear.
附图说明Description of the drawings
被结合在说明书中并构成说明书的一部分的附图示出了本发明的实施例，并且连同其说明一起用于解释本发明的原理。The drawings incorporated in the specification and constituting a part of the specification illustrate the embodiments of the present invention, and together with the description are used to explain the principle of the present invention.
图1是根据本发明一个实施例的基于预电离点火装置的大气压射频热等离子体发生器的示意图；Fig. 1 is a schematic diagram of an atmospheric pressure radio frequency thermal plasma generator based on a pre-ionization ignition device according to an embodiment of the present invention;
图2是根据本发明一个实施例的预电离点火装置的双介质阻挡工程结构示意图。Fig. 2 is a schematic diagram of a dual dielectric barrier engineering structure of a pre-ionization ignition device according to an embodiment of the present invention.
具体实施方式detailed description
现在将参照附图来详细描述本发明的各种示例性实施例。应注意到：除非另外具体说明，否则在这些实施例中阐述的部件和步骤的相对布置、数字表达式和数值不限制本发明的范围。Various exemplary embodiments of the present invention will now be described in detail with reference to the accompanying drawings. It should be noted that unless specifically stated otherwise, the relative arrangement, numerical expressions and numerical values of the components and steps set forth in these embodiments do not limit the scope of the present invention.
以下对至少一个示例性实施例的描述实际上仅仅是说明性的，决不作为对本发明及其应用或使用的任何限制。The following description of at least one exemplary embodiment is actually only illustrative, and in no way serves as any limitation to the present invention and its application or use.
对于相关领域普通技术人员已知的技术、方法和设备可能不作详细讨论，但在适当情况下，所述技术、方法和设备应当被视为说明书的一部分。The techniques, methods, and equipment known to those of ordinary skill in the relevant fields may not be discussed in detail, but where appropriate, the techniques, methods, and equipment should be regarded as part of the specification.
在这里示出和讨论的所有例子中，任何具体值应被解释为仅仅是示例性的，而不是作为限制。因此，示例性实施例的其它例子可以具有不同的值。In all examples shown and discussed herein, any specific value should be interpreted as merely exemplary, rather than as a limitation. Therefore, other examples of the exemplary embodiment may have different values.
应注意到：相似的标号和字母在下面的附图中表示类似项，因此，一旦某一项在一个附图中被定义，则在随后的附图中不需要对其进行进一步讨论。It should be noted that similar reference numerals and letters indicate similar items in the following drawings, therefore, once an item is defined in one drawing, it does not need to be further discussed in the subsequent drawings.
参见图1和图2所示，本发明实施例的射频热等离子体发生器是大气压射频感应耦合等离子体发生器，包括前置的预电离点火装置、感应耦合等离子体炬管，其中感应耦合等离子体炬管设有三层管，分别是内管10、中间管20和外管30，组装内管、中间管和外管的绝缘耐热材料3和金属线圈4，预电离点火装置包括正电极1和地电极2（也称为接地极或负电极）。1 and 2, the radio frequency thermal plasma generator of the embodiment of the present invention is an atmospheric pressure radio frequency inductively coupled plasma generator, including a pre-ionization ignition device, an inductively coupled plasma torch, wherein the inductively coupled plasma The body torch is provided with three layers of tubes, which are an inner tube 10, a middle tube 20, and an outer tube 30. The insulating and heat-resistant material 3 and the metal coil 4 of the inner tube, the middle tube and the outer tube are assembled. The pre-ionization ignition device includes a positive electrode 1 And ground electrode 2 (also called ground electrode or negative electrode).
在一个优选实施例中，预电离点火装置结构形成于内管10的上游位置（即内管长度方向的上半部分），该结构是由置于内管中与内管同轴的绝缘介质层5包裹着的正电极，以及环绕内管的地电极所构成的双介质阻挡放电结构，其中正电极1和地电极2均可由绝缘介质层包裹，例如，绝缘介质层可以是贴附在电极表面的耐热绝缘胶带或涂附在电极表面的硅脂或石英玻璃管等。In a preferred embodiment, the pre-ionization ignition device structure is formed at the upstream position of the inner tube 10 (that is, the upper half of the length of the inner tube). The structure is composed of an insulating medium layer placed in the inner tube and coaxial with the inner tube. 5 The wrapped positive electrode and the double dielectric barrier discharge structure formed by the ground electrode surrounding the inner tube, wherein the positive electrode 1 and the ground electrode 2 can be wrapped by an insulating dielectric layer, for example, the insulating dielectric layer can be attached to the surface of the electrode Heat-resistant insulating tape or silicone grease or quartz glass tube coated on the surface of the electrode.
预电离点火装置中的正电极1可用于连接高压电源或射频电源等(也称为高压/射频电极)，或连接能够提供预电离放电的其他电源，均能实现对工作气体预电离的目的。例如，采用射频电源，频率为13.56MHz或其他可调谐射频频率范围。地电极2可设置为一个或多个。The positive electrode 1 in the pre-ionization ignition device can be used to connect a high-voltage power supply or a radio frequency power supply, etc. (also called a high-voltage/radio frequency electrode), or connect to other power supplies capable of providing pre-ionization discharge, both of which can achieve the purpose of pre-ionization of the working gas. For example, using radio frequency power with a frequency of 13.56 MHz or other tunable radio frequency range. The ground electrode 2 may be provided in one or more.
通过调节预电离点火装置连接的电压、射频功率或调节正电极1和地电极2之间的距离能够控制预电离点火装置所提供的种子电子的密度。例如，将正电极1最底部与地电极2之间的距离设置为2cm、3cm或其他值。The density of seed electrons provided by the pre-ionization ignition device can be controlled by adjusting the voltage and radio frequency power connected to the pre-ionization ignition device or adjusting the distance between the positive electrode 1 and the ground electrode 2. For example, the distance between the bottom of the positive electrode 1 and the ground electrode 2 is set to 2 cm, 3 cm or other values.
在本发明实施例中，预电离点火装置设置在内管的上游位置，采用的是双介质阻挡放电结构，即所述结构由置于内管中与内管同轴的介质绝缘体(或称绝缘介质层)包裹着的高压/射频电极，以及环绕内管的地电极所构成的双介质阻挡放电结构。当电极间施加足够高的电压时，电极间的气体会被击穿而产生放电，即产生了介质阻挡放电。设置在电极外表面的介质绝缘体是耐热的绝缘层，使电极与空气隔绝。In the embodiment of the present invention, the pre-ionization ignition device is set at the upstream position of the inner tube, and adopts a double dielectric barrier discharge structure, that is, the structure is composed of a dielectric insulator (or insulation) placed in the inner tube and coaxial with the inner tube. A double dielectric barrier discharge structure formed by the high-voltage/RF electrode wrapped by the dielectric layer and the ground electrode surrounding the inner tube. When a sufficiently high voltage is applied between the electrodes, the gas between the electrodes will be broken down to produce a discharge, that is, a dielectric barrier discharge is produced. The dielectric insulator arranged on the outer surface of the electrode is a heat-resistant insulating layer to isolate the electrode from the air.
金属线圈4用于连接射频电源，例如是多匝（如4匝或5匝等）水冷线圈，按照圆筒螺旋状圆柱型环绕在外管下游位置。The metal coil 4 is used to connect to a radio frequency power supply, for example, a multi-turn (such as 4 turns or 5 turns, etc.) water-cooled coils, which surround the outer tube in a cylindrical spiral shape in a downstream position.
在本发明实施例中，优选地，感应耦合等离子体炬管是一个三层同轴石英玻璃管。具体地，外管30内可通入冷却氩气，以避免等离子炬烧坏石英管。中间管20可通入氩气以维持等离子体。内管10由载气将试样气溶胶从内管引入等离子。当电源与围绕在等离子体炬管外的负载感应金属线圈4接通时，感应电流流过线圈，产生轴向磁场。此时向炬管的外管内切线方向通入冷却氩气，中层管内轴向（或切向）通入辅助气体氩气，并用预电离点火装置激发产生种子电子。需说明的是，在实际应用中，还包括绝缘支架（未示出），用于支撑该三层同轴石英玻璃管。In the embodiment of the present invention, preferably, the inductively coupled plasma torch is a three-layer coaxial quartz glass tube. Specifically, cooling argon gas can be passed into the outer tube 30 to prevent the plasma torch from burning the quartz tube. The middle tube 20 can be ventilated with argon gas to maintain the plasma. The inner tube 10 uses a carrier gas to introduce the sample aerosol from the inner tube into the plasma. When the power supply is connected to the load induction metal coil 4 surrounding the plasma torch, the induced current flows through the coil, generating an axial magnetic field. At this time, the cooling argon gas is introduced tangentially to the outer tube of the torch, and the auxiliary gas argon is introduced axially (or tangentially) into the middle tube, and the pre-ionization ignition device is used to excite seed electrons. It should be noted that in practical applications, an insulating support (not shown) is also included for supporting the three-layer coaxial quartz glass tube.
在一个实施例中，感应耦合等离子体炬管的外管、中间管和内管的长度分别设置为16.5cm，9cm，15cm，外径分别是35mm，22mm，6mm，内径分别为31mm,20mm,4mm。In one embodiment, the lengths of the outer tube, the middle tube and the inner tube of the inductively coupled plasma torch are set to 16.5cm, 9cm, 15cm, the outer diameters are 35mm, 22mm, 6mm, and the inner diameters are 31mm, 20mm, respectively. 4mm.
在本发明实施例中，通过前置的双介质阻挡放电对工作气体的预电离作用，为射频热等离子体放电提供种子电子。具体地，对于射频热等离子体放电，存在着两种放电模式，一种是E型放电，一种是H型放电，E型放电是线圈表面电荷产生的静电场导致的放电，例如电容耦合等离子体中的放电。H型放电是线圈中的电流感生出的磁场，继而磁场再感应出电场，等离子体得以维持放电。射频热等离子体在初始放电阶段处于E型放电，随着施加的功率的升高，达到一定值后，E型放电会向H型放电跳跃。在E型放电阶段，等离子体放电是由碰撞引起的（电子到达壁之前与背景气体发生多次碰撞），本发明通过预电离额外提供种子电子，能够为射频热等离子体的击穿提供有效辅助，从而实现在放电间隙较大、击穿电压较低的情况下直接实现在大气压下几乎不能击穿的射频热等离子体放电；并且预电离放电中的亚稳态粒子，活性反应环境，还能起到给材料的合成提供前处理的作用。In the embodiment of the present invention, the pre-ionization of the working gas by the pre-dual dielectric barrier discharge is used to provide seed electrons for the radio frequency thermal plasma discharge. Specifically, for radio frequency thermal plasma discharge, there are two discharge modes, one is E-type discharge, the other is H-type discharge, E-type discharge is the discharge caused by the electrostatic field generated by the surface charge of the coil, such as capacitively coupled plasma Discharge in the body. H-type discharge is a magnetic field induced by the current in the coil, and then the magnetic field induces an electric field, so that the plasma can sustain the discharge. The radio frequency thermal plasma is in the E-type discharge at the initial discharge stage. As the applied power increases and reaches a certain value, the E-type discharge will jump to the H-type discharge. In the E-type discharge stage, the plasma discharge is caused by collisions (the electrons collide with the background gas multiple times before reaching the wall). The present invention provides additional seed electrons through pre-ionization, which can provide effective assistance for the breakdown of radio frequency thermal plasma , So as to realize the direct realization of radio frequency thermal plasma discharge that can hardly be broken down under atmospheric pressure under the condition of large discharge gap and low breakdown voltage; and the metastable particles in the pre-ionization discharge, the active reaction environment, and the Play a role in providing pre-treatment for the synthesis of materials.
本发明将预电离点火装置应用于大气压射频热等离子体发生器，能在大气压下稳定工作，其优点至少包括：采用射频电源在大气压下达到均匀稳定的H型放电，形成高温的射频热等离子体炬；可以在较低的击穿电压下实现氩气，甚至是氮气等气体放电，直接实现在大气压下几乎不能击穿的射频热等离子体放电；避免了引入其他金属杂质；等离子体体积增大，预电离放电中的亚稳态粒子，活性反应环境，在应用中还能起到给材料进行预处理的作用。The present invention applies the pre-ionization ignition device to the atmospheric pressure radio frequency thermal plasma generator, which can work stably under atmospheric pressure. Its advantages include at least: the use of radio frequency power to achieve uniform and stable H-shaped discharge under atmospheric pressure to form high temperature radio frequency thermal plasma Torch; can achieve argon, even nitrogen and other gas discharges at a lower breakdown voltage, directly achieve radio-frequency thermal plasma discharge that can hardly be broken down under atmospheric pressure; avoid the introduction of other metal impurities; increase the plasma volume , The metastable particles in the pre-ionization discharge and the active reaction environment can also play a role in pretreatment of the material in the application.
综上所述，本发明将预电离点火装置应用于射频热等离子体发生器，可以在较低的击穿电压下实现氩气、氮气等在大气压下难以直接击穿的气体放电。与不采用该种预电离点火装置结构设计的射频热等离子体发生器相比，本发明降低了热等离子体的击穿与维持电压，能够产生均匀稳定放电，同时避免引入其他金属杂质，直接在大气压下，大的放电间隙下以较低的击穿电压实现了在大气压下几乎不能击穿的射频热等离子体放电，为大气压射频热等离子体的击穿点火问题提供方便、实用的解决方案。本发明提出的技术方案将极大推动大气压射频热等离子体在材料处理、粉末稠密化、提纯、合成、球化等领域的实际应用，显示出其清洁、高效、快速的处理能力。To sum up, the present invention applies the pre-ionization ignition device to the radio frequency thermal plasma generator, which can realize the gas discharge that is difficult to directly break down under atmospheric pressure, such as argon and nitrogen, at a lower breakdown voltage. Compared with a radio frequency thermal plasma generator that does not use this kind of pre-ionization ignition device structure design, the present invention reduces the breakdown and maintenance voltage of thermal plasma, can generate uniform and stable discharge, and avoid the introduction of other metal impurities. Under atmospheric pressure, a large discharge gap achieves a radio frequency thermal plasma discharge that can hardly be broken down under atmospheric pressure with a lower breakdown voltage, which provides a convenient and practical solution to the breakdown and ignition problem of atmospheric radio frequency thermal plasma. The technical solution proposed by the present invention will greatly promote the practical application of atmospheric pressure radio frequency thermal plasma in the fields of material processing, powder densification, purification, synthesis, spheroidization, etc., and show its clean, efficient, and rapid processing capabilities.
以上已经描述了本发明的各实施例，上述说明是示例性的，并非穷尽性的，并且也不限于所披露的各实施例。在不偏离所说明的各实施例的范围和精神的情况下，对于本技术领域的普通技术人员来说许多修改和变更都是显而易见的。本文中所用术语的选择，旨在最好地解释各实施例的原理、实际应用或对市场中的技术改进，或者使本技术领域的其它普通技术人员能理解本文披露的各实施例。本发明的范围由所附权利要求来限定。The embodiments of the present invention have been described above, and the above description is exemplary, not exhaustive, and is not limited to the disclosed embodiments. Without departing from the scope and spirit of the described embodiments, many modifications and changes are obvious to those of ordinary skill in the art. The choice of terms used herein is intended to best explain the principles, practical applications, or technical improvements of the various embodiments in the market, or to enable other ordinary skilled in the art to understand the various embodiments disclosed herein. The scope of the invention is defined by the appended claims.

Claims (10)

  1. 一种基于预电离点火装置的大气压射频热等离子体发生器，其特征在于，所述发生器是大气压射频感应耦合等离子体发生器，包括：预电离点火装置和感应耦合等离子体炬管，其中，所述感应耦合等离子体炬管包括内管、中间管、外管和环绕于所述外管的金属线圈；所述预电离点火装置用于为热等离子体提供种子电子，其是由置于所述内管中与内管同轴的绝缘介质层包裹着的正电极和环绕所述内管的地电极所构成的双介质阻挡放电结构。 An atmospheric pressure radio frequency thermal plasma generator based on a pre-ionization ignition device, characterized in that the generator is an atmospheric pressure radio frequency inductively coupled plasma generator, comprising: a pre-ionization ignition device and an inductively coupled plasma torch, wherein, The inductively coupled plasma torch includes an inner tube, an intermediate tube, an outer tube, and a metal coil surrounding the outer tube; the pre-ionization ignition device is used to provide seed electrons for the thermal plasma, which is placed in the In the inner tube, a positive electrode wrapped by an insulating dielectric layer coaxial with the inner tube and a ground electrode surrounding the inner tube constitute a double dielectric barrier discharge structure.
  2. 根据权利要求1所述的基于预电离点火装置的大气压射频热等离子体发生器，其特征在于，所述预电离点火装置以所述内管长度方向的中心为参考，设置于所述内管的上游位置。 The atmospheric pressure radio frequency thermal plasma generator based on a pre-ionization ignition device according to claim 1, wherein the pre-ionization ignition device takes the center of the length direction of the inner tube as a reference, and is arranged at the center of the inner tube. Upstream location.
  3. 根据权利要求1所述的基于预电离点火装置的大气压射频热等离子体发生器，其特征在于，所述预电离点火装置的电极连接能够提供预电离放电的射频电源或高压电源。 The atmospheric pressure radio frequency thermal plasma generator based on a pre-ionization ignition device according to claim 1, wherein the electrode of the pre-ionization ignition device is connected to a radio frequency power supply or a high-voltage power supply capable of providing pre-ionization discharge.
  4. 根据权利要求1所述的基于预电离点火装置的大气压射频热等离子体发生器，其特征在于，通过调节所述预电离点火装置连接的电压、射频功率或调节所述正电极和地电极之间的距离来控制所述预电离点火装置的提供的种子电子的密度。 The atmospheric pressure radio frequency thermal plasma generator based on a pre-ionization ignition device according to claim 1, wherein the pre-ionization ignition device is connected to the voltage, the radio frequency power or the gap between the positive electrode and the ground electrode is adjusted. The distance to control the density of seed electrons provided by the pre-ionization ignition device.
  5. 根据权利要求4所述的基于预电离点火装置的大气压射频热等离子体发生器，其特征在于，所述正电极底部与所述地电极之间的距离设置为2cm。 The atmospheric pressure radio frequency thermal plasma generator based on a pre-ionization ignition device according to claim 4, wherein the distance between the bottom of the positive electrode and the ground electrode is set to 2 cm.
  6. 根据权利要求1所述的基于预电离点火装置的大气压射频热等离子体发生器，其特征在于，所述预电离点火装置中的地电极设置为至少一个。 The atmospheric pressure radio frequency thermal plasma generator based on the pre-ionization ignition device according to claim 1, wherein the ground electrode in the pre-ionization ignition device is set to at least one.
  7. 根据权利要求1所述的基于预电离点火装置的大气压射频热等离子体发生器，其特征在于，还包括绝缘支架，用于支撑所述感应耦合等离子体炬管。 The atmospheric pressure radio frequency thermal plasma generator based on the pre-ionization ignition device of claim 1, further comprising an insulating bracket for supporting the inductively coupled plasma torch.
  8. 根据权利要求1所述的基于预电离点火装置的大气压射频热等离子体发生器，其特征在于，所述金属线圈是用于连接电源的多匝水冷线圈，以所述外管的长度方向的中心为参考，所述金属线圈以圆筒螺旋状圆柱型环绕在所述外管的下游位置。 The atmospheric pressure radio frequency thermal plasma generator based on a pre-ionization ignition device according to claim 1, wherein the metal coil is a multi-turn water-cooled coil used to connect to a power source, and is centered in the length direction of the outer tube. For reference, the metal coil surrounds the downstream position of the outer tube in a cylindrical spiral cylindrical shape.
  9. 根据权利要求1所述的基于预电离点火装置的大气压射频热等离子体发生器，其特征在于，所述绝缘介质层是贴附在所述正电极表面的耐热绝缘胶带或涂附在所述正电极表面的硅脂或石英玻璃管。 The atmospheric pressure radio frequency thermal plasma generator based on a pre-ionization ignition device according to claim 1, wherein the insulating medium layer is a heat-resistant insulating tape attached to the surface of the positive electrode or coated on the surface of the positive electrode. Silicone grease or quartz glass tube on the surface of the positive electrode.
  10. 根据权利要求1所述的基于预电离点火装置的大气压射频热等离子体发生器，其特征在于，所述正电极、所述绝缘介质层、所述内管、所述外管和所述中间管为同轴设置。 The atmospheric pressure radio frequency thermal plasma generator based on a pre-ionization ignition device according to claim 1, wherein the positive electrode, the insulating medium layer, the inner tube, the outer tube, and the intermediate tube Set for coaxial.
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