CN201364885Y - Identifying tool - Google Patents
Identifying tool Download PDFInfo
- Publication number
- CN201364885Y CN201364885Y CNU2009200668332U CN200920066833U CN201364885Y CN 201364885 Y CN201364885 Y CN 201364885Y CN U2009200668332 U CNU2009200668332 U CN U2009200668332U CN 200920066833 U CN200920066833 U CN 200920066833U CN 201364885 Y CN201364885 Y CN 201364885Y
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- CN
- China
- Prior art keywords
- wafer
- brace table
- swash plate
- crystal
- identification facility
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
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- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Abstract
The utility model provides an identifying tool used for identifying the label of a wafer stored inside a wafer cassette. The identifying tool comprises a supporting table used for bearing the wafer cassette, a driving device arranged inside the supporting table, and an oblique plate arranged inside the supporting table in the position corresponding to the bottom of the wafer cassette and connected with the driving device, wherein the driving device pushes the oblique plate to move up along the supporting table so that the wafer is ejected out of the wafer cassette. The identifying tool can easily and rapidly identify the label of the wafer inside the wafer cassette, thereby effectively saving time and avoiding the risk of destroying the wafer.
Description
Technical field
The utility model relates to integrated circuit and makes the field, particularly a kind of identification facility in order to the identification wafer mark.
Background technology
In semiconductor fabrication, wafer is optionally carried out also repeatedly processing procedures such as photoetching, etching, diffusion, chemical vapour deposition (CVD), ion injection and metal deposition, on wafer, to form at least a in conductive layer, semiconductor layer and the non-conductive layer, form semiconductor device thus.
When making semiconductor device, for the safe storage of guaranteeing wafer, move, avoid damaged and pollute, extensively use carrying and the means of transportation of crystal-boat box (pod), and need according to the mark (wafer mark) of wafer wafer is loaded in the crystal-boat box in regular turn as wafer.Specifically please refer to Fig. 1, it is the schematic diagram of wafer and marked region thereof, and there is a marked region 11 in the corner on the wafer 10, is indicating the mark of wafer 10.Generally, the wafer in the crystal-boat box is in turn to be placed according to flag sequence, helps like this when needs are spot-check a certain wafer, can conveniently search out the wafer of required selective examination.
Normally used identification facility is a vacuum WAND in the prior art.At first, vacuum WAND is inserted into space between two wafer, holds the surface of a wafer then gently and haul out sub-fraction,, after having discerned,, and then descend the inspection of a slice again with the wafer pushed home and put down with the mark of identification wafer.At present, the mark that uses vacuum WAND to discern a wafer probably needs tens seconds time, if fill 25 wafer in the crystal-boat box, check out whole wafers, need expend about tens minutes, lose time very much, and the time of checking process cost is long more, the probability that wafer stains particle and other pollutant is high more, the easy more defective that occurs.In addition, use vacuum WAND to draw in the process of wafer, if operating personnel shake hand accidentally, or the vacuum section of inhaling pen breaks down, and all makes wafer break away from vacuum WAND easily, and causes the generation of fragmentation situation, brings great loss.
The utility model content
In view of this, the purpose of this utility model provides a kind of identification facility, is used to discern the mark that leaves the wafer in the crystal-boat box in, shortening recognition time, and can avoid the generation of fragmentation situation.
The utility model proposes a kind of identification facility, the mark in order on the wafer in the identification crystal-boat box comprises: brace table, in order to place described crystal-boat box; Drive unit is arranged in the described brace table; And swash plate, swash plate is arranged at the interior position corresponding to the crystal-boat box bottom of described brace table, is connected with described drive unit; Wherein, described drive unit promotes described swash plate and rises along described brace table, so that described wafer is ejected described crystal-boat box.
Optionally, described drive unit comprises: motor is arranged in the described brace table; Leading screw is arranged in the described brace table, and by described driven by motor rotation; And slide block, be installed on the described leading screw, be slidingly connected with described swash plate,, and promote described swash plate and rise or descend along described leading screw linear movement by the drive of described motor along described brace table.
Optionally, described drive unit also comprises a guide rail, and itself and described slide block are slidingly connected, and be arranged in parallel with described leading screw.
Optionally, described brace table has a holding part, and the cross section of described holding part is " V " type.
Optionally, described swash plate is trapezoidal or triangle.
Optionally, the material of described brace table is a metal.
Optionally, the material of described swash plate is a Teflon.
The utility model proposes a kind of identification facility, can conveniently discern the mark of wafer in the crystal-boat box, can effectively save time, and do not have the danger of fragmentation.
Description of drawings
Fig. 1 is the schematic diagram of wafer and marked region thereof;
The perspective view of the identification facility that Fig. 2 is provided for the utility model one embodiment;
The use schematic diagram of the identification facility that Fig. 3 A to Fig. 3 C is provided for the utility model one embodiment.
Embodiment
Below in conjunction with the drawings and specific embodiments the identification facility that the utility model proposes is described in further detail.According to the following describes and claims, advantage of the present utility model and feature will be clearer.It should be noted that accompanying drawing all adopts very the form of simplifying and all uses non-ratio accurately, only in order to convenient, the purpose of aid illustration the utility model embodiment lucidly.
Please refer to Fig. 2, the perspective view of the identification facility that it is provided for the utility model one embodiment, described identification facility 100 comprises: the brace table 110 of hollow, drive unit 120 and swash plate 130, wherein, brace table 110 has a holding part 111, the cross section of described holding part 111 is V-shaped, drive unit 120 is arranged at brace table 110 inside, swash plate 130 is arranged on the brace table 110, be connected with drive unit 120, be preferably trapezoidally, it has an inclined plane with respect to the crystal-boat boxes 20 that are placed in the V-arrangement holding part 111.
Detailed, drive unit 120 comprises: motor 121, leading screw 122 and slide block 123, wherein, motor 121 is arranged in the brace table 110, and leading screw 122 is arranged in the brace table 110, and by motor 121 driven rotary, slide block 123 is installed on the leading screw 122, itself and swash plate 130 are slidingly connected, and slide block 123, and promotes swash plate 130 and rises along the holding part 111 of brace table 110 along leading screw 122 linear movements by the drive of motor 121.In addition, drive unit 120 also comprises a guide rail 124, and it is a sliding thick stick, is slidingly connected with slide block 123, and be arranged in parallel with leading screw 122, the stability when described guide rail 124 can increase slide block 123 motions.
Please continue the C with reference to figure 3A to Fig. 3, the use schematic diagram of the identification facility that it is provided for the utility model one embodiment need to prove, the crystal-boat box 20 that do not draw among Fig. 3 B and Fig. 3 C, but by illustrating easy its actual operation principle of understanding.The process that the mark of 100 pairs of wafers 30 of identification facility that use the utility model one embodiment is provided is discerned is as follows: at first, the crystal-boat box 20 of loaded with wafers 30 is positioned in the holding part 111 of brace table 110, then, starter motor 121, the rotation of the rotating band movable wire thick stick 122 of motor 121, the rotation of leading screw 122 drives slide block 123 again along leading screw 122 linear movements, the motion of slide block 123 then promotes swash plate 130 and rises along brace table 110, wherein, the bottom of crystal-boat box 20 can be passed for swash plate 130, the inclined plane of swash plate 130 and the periphery of wafer 30 are offseted, and wafer 30 is ejected crystal-boat box 20 slightly, to expose the mark on the wafer 30, and second wafer can be howed outstanding than first wafer, so that discern the mark of second wafer, and that the 3rd wafer can be howed than second wafer is outstanding, so that discern the mark of the 3rd wafer, by that analogy until last a slice.Then, once discerned the mark of all wafers in the crystal-boat box 20.Wherein, the cross section of holding part 111 is a V-arrangement, and fixedly crystal-boat box 20, avoids crystal-boat box 20 to produce slip in operating process, and can prevent that the wafer 30 that is ejected from dropping out outside brace table 110, and causes producing the fragmentation situation.
The brace table 110 of the identification facility 100 that the utility model one embodiment is provided is metal material, supporting heavy crystal-boat box 20, as for the material of swash plate 130 Teflon for having some softnesses then, wafer is caused damage when avoiding it to contact with wafer.
In sum, identification facility provided by the utility model leaves the mark of the wafer in the crystal-boat box in order to identification, and described identification facility comprises: brace table, in order to place described crystal-boat box; Drive unit is arranged in the described brace table; Swash plate is arranged at the interior position corresponding to the crystal-boat box bottom of described brace table, is connected with described drive unit; Wherein, described drive unit promotes described swash plate and rises along described brace table, so that described wafer is ejected described crystal-boat box.Identification facility provided by the utility model can conveniently be discerned the mark of wafer in the crystal-boat box, effectively saves time, and does not have the danger of fragmentation.
Obviously, those skilled in the art can carry out various changes and modification to the utility model and not break away from spirit and scope of the present utility model.Like this, if of the present utility model these are revised and modification belongs within the scope of the utility model claim and equivalent technologies thereof, then the utility model also is intended to comprise these changes and modification interior.
Claims (7)
1, a kind of identification facility, the mark in order on the wafer in the identification crystal-boat box is characterized in that, comprising:
Brace table is in order to place described crystal-boat box;
Drive unit is arranged in the described brace table; And
Swash plate is arranged at the interior position corresponding to the crystal-boat box bottom of described brace table, is connected with described drive unit;
Wherein, described drive unit promotes described swash plate and rises along described brace table, so that described wafer is ejected described crystal-boat box.
2, identification facility as claimed in claim 1 is characterized in that, described drive unit comprises:
Motor is arranged in the described brace table;
Leading screw is arranged in the described brace table, and by described driven by motor rotation; And
Slide block is installed on the described leading screw, is slidingly connected with described swash plate,, and promotes described swash plate and rises or descend along described brace table along described leading screw linear movement by the drive of described motor.
3, identification facility as claimed in claim 2 is characterized in that, described drive unit also comprises a guide rail, and itself and described slide block are slidingly connected, and be arranged in parallel with described leading screw.
4, identification facility as claimed in claim 1 is characterized in that, described brace table has a holding part, and the cross section of described holding part is " V " type.
5, identification facility as claimed in claim 1 is characterized in that, described swash plate is trapezoidal or triangle.
6, identification facility as claimed in claim 1 is characterized in that, the material of described brace table is a metal.
7, identification facility as claimed in claim 1 is characterized in that, the material of described swash plate is a Teflon.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNU2009200668332U CN201364885Y (en) | 2009-01-13 | 2009-01-13 | Identifying tool |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNU2009200668332U CN201364885Y (en) | 2009-01-13 | 2009-01-13 | Identifying tool |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN201364885Y true CN201364885Y (en) | 2009-12-16 |
Family
ID=41475556
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CNU2009200668332U Expired - Lifetime CN201364885Y (en) | 2009-01-13 | 2009-01-13 | Identifying tool |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN201364885Y (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2017156951A1 (en) * | 2016-03-15 | 2017-09-21 | 张甘霖 | Silicon wafer securing apparatus |
| CN111554599A (en) * | 2020-04-27 | 2020-08-18 | 厦门通富微电子有限公司 | Tool for bearing wafer material box, wafer material box device and method for loading wafer |
-
2009
- 2009-01-13 CN CNU2009200668332U patent/CN201364885Y/en not_active Expired - Lifetime
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2017156951A1 (en) * | 2016-03-15 | 2017-09-21 | 张甘霖 | Silicon wafer securing apparatus |
| CN111554599A (en) * | 2020-04-27 | 2020-08-18 | 厦门通富微电子有限公司 | Tool for bearing wafer material box, wafer material box device and method for loading wafer |
| CN111554599B (en) * | 2020-04-27 | 2022-07-26 | 厦门通富微电子有限公司 | Tool for bearing wafer material box, wafer material box device and method for loading wafer |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| ASS | Succession or assignment of patent right |
Owner name: SEMICONDUCTOR MANUFACTURING INTERNATIONAL (BEIJING Free format text: FORMER OWNER: SEMICONDUCTOR MANUFACTURING INTERNATIONAL (SHANGHAI) CORPORATION Effective date: 20130226 |
|
| C41 | Transfer of patent application or patent right or utility model | ||
| COR | Change of bibliographic data |
Free format text: CORRECT: ADDRESS; FROM: 201203 PUDONG NEW AREA, SHANGHAI TO: 100176 DAXING, BEIJING |
|
| TR01 | Transfer of patent right |
Effective date of registration: 20130226 Address after: 100176 No. 18, Wenchang Avenue, Beijing economic and Technological Development Zone Patentee after: Semiconductor Manufacturing International (Beijing) Corporation Address before: 201203 No. 18 Zhangjiang Road, Shanghai Patentee before: Semiconductor Manufacturing International (Shanghai) Corporation |
|
| CX01 | Expiry of patent term |
Granted publication date: 20091216 |
|
| CX01 | Expiry of patent term |