CN201364885Y - Identifying tool - Google Patents
Identifying tool Download PDFInfo
- Publication number
- CN201364885Y CN201364885Y CNU2009200668332U CN200920066833U CN201364885Y CN 201364885 Y CN201364885 Y CN 201364885Y CN U2009200668332 U CNU2009200668332 U CN U2009200668332U CN 200920066833 U CN200920066833 U CN 200920066833U CN 201364885 Y CN201364885 Y CN 201364885Y
- Authority
- CN
- China
- Prior art keywords
- wafer
- brace table
- swash plate
- crystal
- identification facility
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Images
Landscapes
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Abstract
Description
Claims (7)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CNU2009200668332U CN201364885Y (en) | 2009-01-13 | 2009-01-13 | Identifying tool |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CNU2009200668332U CN201364885Y (en) | 2009-01-13 | 2009-01-13 | Identifying tool |
Publications (1)
Publication Number | Publication Date |
---|---|
CN201364885Y true CN201364885Y (en) | 2009-12-16 |
Family
ID=41475556
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CNU2009200668332U Expired - Lifetime CN201364885Y (en) | 2009-01-13 | 2009-01-13 | Identifying tool |
Country Status (1)
Country | Link |
---|---|
CN (1) | CN201364885Y (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2017156951A1 (en) * | 2016-03-15 | 2017-09-21 | 张甘霖 | Silicon wafer securing apparatus |
CN111554599A (en) * | 2020-04-27 | 2020-08-18 | 厦门通富微电子有限公司 | Tool for bearing wafer material box, wafer material box device and method for loading wafer |
-
2009
- 2009-01-13 CN CNU2009200668332U patent/CN201364885Y/en not_active Expired - Lifetime
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2017156951A1 (en) * | 2016-03-15 | 2017-09-21 | 张甘霖 | Silicon wafer securing apparatus |
CN111554599A (en) * | 2020-04-27 | 2020-08-18 | 厦门通富微电子有限公司 | Tool for bearing wafer material box, wafer material box device and method for loading wafer |
CN111554599B (en) * | 2020-04-27 | 2022-07-26 | 厦门通富微电子有限公司 | Tool for bearing wafer material box, wafer material box device and method for loading wafer |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
C14 | Grant of patent or utility model | ||
GR01 | Patent grant | ||
ASS | Succession or assignment of patent right |
Owner name: SEMICONDUCTOR MANUFACTURING INTERNATIONAL (BEIJING Free format text: FORMER OWNER: SEMICONDUCTOR MANUFACTURING INTERNATIONAL (SHANGHAI) CORPORATION Effective date: 20130226 |
|
C41 | Transfer of patent application or patent right or utility model | ||
COR | Change of bibliographic data |
Free format text: CORRECT: ADDRESS; FROM: 201203 PUDONG NEW AREA, SHANGHAI TO: 100176 DAXING, BEIJING |
|
TR01 | Transfer of patent right |
Effective date of registration: 20130226 Address after: 100176 No. 18, Wenchang Avenue, Beijing economic and Technological Development Zone Patentee after: Semiconductor Manufacturing International (Beijing) Corporation Address before: 201203 No. 18 Zhangjiang Road, Shanghai Patentee before: Semiconductor Manufacturing International (Shanghai) Corporation |
|
CX01 | Expiry of patent term |
Granted publication date: 20091216 |
|
CX01 | Expiry of patent term |