CN201017692Y - Real time monitoring system for manufacturing nano detecting probe with electrochemical corrosion - Google Patents
Real time monitoring system for manufacturing nano detecting probe with electrochemical corrosion Download PDFInfo
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- CN201017692Y CN201017692Y CNU2007200953987U CN200720095398U CN201017692Y CN 201017692 Y CN201017692 Y CN 201017692Y CN U2007200953987 U CNU2007200953987 U CN U2007200953987U CN 200720095398 U CN200720095398 U CN 200720095398U CN 201017692 Y CN201017692 Y CN 201017692Y
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Abstract
The utility model provides a real-time monitoring system of an electrochemical corrosion manufactured nanometer probe, which comprises a U-shaped tube with the inner part provided with corrosion liquid, a nanometer probe immersed in one terminal port of the U-shaped tube, an electrode immersed in the other terminal port of the U-shaped tube, a micro operation instrument mutually connected with the nanometer probe and used for adjusting the position of the nanometer probe, a microscope used for observing the preparation condition of the nanometer probe, and a oscillometer mutually connected with the power and used for observing the voltage waveform. The other end of the nanometer probe and is the other end of the electrode are respectively and mutually connected with the both ends of a power, an image device is connected at the other end of the microscope, and the image device is connected with a computer. The utility model can record the manufacturing process of the probe, to carry on the tracking study, simultaneously the utility model can monitor the processing condition of the nanometer probe on line in a real time, the probe parameter is quantitatively analyzed, various control parameters in the corrosion process are adjusted in time according to the observed condition, the influence to the probe tip corrosion under the different environmental condition is studied, and the labor intensity is reduced.
Description
Technical field
The utility model relates to the real-time monitoring system that a kind of monitoring system of making nano-probe particularly relates to a kind of energy Real Time Observation and the galvanic corrosion making nano-probe of the whole process of record galvanic corrosion making nano-probe.
Background technology
Since 1986 scanning tunnel microscope (STM) inventor Binnig and since Rohrer obtains Nobel prize for physics, STM has obtained a lot of important achievements in fields such as physics, chemistry, biology, material science, microelectronics science.The structure of tunnel needle point is one of subject matter that will solve in the STM technology, and the size of needle point, shape and chemical homogeneity not only affect the resolution of STM image and the shape of image, also affects the electronic state of mensuration.Adopt the shape of needle point in the visual inspection microscope when making needle point usually or utilize circuit directly to control the making of needle point.Yet directly observe labour intensity big, tired easily, and can only estimate observed result, can't obtain quantitative result, adjust the various factors in the manufacturing process in the time of more can't be according to fructufy, as regulate position, the angle that probe enters liquid level, according to circumstances adjust the curtage of open circuit potential.
Summary of the invention
Technical problem to be solved in the utility model is that the real-time monitoring system of nano-probe is made in the galvanic corrosion that provides a kind of energy Real Time Observation and record galvanic corrosion to make the whole process of nano-probe.
The technical scheme that the utility model adopted is: set up the real-time monitoring system that nano-probe is made in a kind of galvanic corrosion, include the U type pipe that corrosive liquid is equipped with in inside; Be immersed in the nano-probe in the port of U type pipe and be immersed in electrode in another port of U type pipe, the other end of nano-probe is connected with the two ends of power supply respectively with the other end of electrode; Link to each other with the nano-probe microoperation instrument of the position that is used to regulate nano-probe also is provided with and is used to observe the microscope that nano-probe prepares situation; Be connected with camera head at the microscopical other end, camera head also connects computing machine.Also be provided with the oscillograph that is used to observe voltage waveform that is connected with power supply.Described camera head is a kind of in CCD or the mesh camera.
The real-time monitoring system of nano-probe is made in galvanic corrosion of the present utility model, can write down the manufacturing process of probe, carry out follow, can monitor the situation that nano-probe is processed by real-time online simultaneously, the parameter of quantitative test probe, and in time adjust the various controlled variable of corrosion process according to situation about observing, research varying environment condition greatly reduces labour intensity to the influence of needle point corrosion.
Description of drawings
Fig. 1 is a system architecture synoptic diagram of the present utility model.
Wherein:
1:U type pipe 2: nano-probe
3: electrode 4: power supply
5: microoperation instrument 6: oscillograph
7: microscope 8: camera head
9: computing machine
Embodiment
Provide specific embodiment below in conjunction with accompanying drawing, further specify the real-time monitoring system that nano-probe is made in galvanic corrosion of the present utility model.
As shown in Figure 1, the real-time monitoring system of nano-probe is made in galvanic corrosion of the present utility model, includes the U type pipe 1 that corrosive liquid is equipped with in inside; Be immersed in the interior nano-probe 2 and the interior electrode 3 of another port that is immersed in U type pipe 1 of a port of U type pipe 1, the other end of the other end of nano-probe 2 and electrode 3 is connected with the two ends of power supply 4 respectively, and nano-probe 2 of the present utility model and electrode 3 all adopt high-purity tungsten filament; Link to each other with the nano-probe 2 microoperation instrument 5 of the position that is used to regulate nano-probe 2, it can regulate the degree of depth, angle that probe enters liquid level; Also be provided with the microscope 7 that is used for online in real time observed and recorded nano-probe 2 preparation situations, described microscope 7 can be observed the shape of needle point electrochemical corrosion course and probe; Be connected with the camera head 8 that links to each other with computing machine 9 and be subjected to computing machine 9 controls at the other end of microscope 7, described camera head 8 is a kind of in CCD or the mesh camera.The camera head 8 of computing machine 9 control can online in real time observe or the record varying environment under the corrosion situation, its result can be used to study the factor that influences needlepoint form; Also be provided with the oscillograph 6 that is used to observe voltage waveform that is connected with power supply 4, can change corrosion current or voltage, change needlepoint form, reach desirable needlepoint form according to the result of monitoring.
The real-time monitoring system principle of work that nano-probe is made in galvanic corrosion of the present utility model is: utilize tungsten filament angle and the degree of depth in galvanic corrosion solution of microoperation instrument adjustment as probe, power supply corrodes tungsten filament, pass through microscope, CCD that connection links to each other with computing machine or camera, computer screen can observe directly the process of corrosion, the situation of oscillograph display voltage variation in real time, and computing machine can write down the corrosion situation and the most advanced and sophisticated change of shape situation thereof of probe under the varying environment, is beneficial to the factor that further research influences needlepoint form.The time dependent figure of observing in the corrosion process by oscillograph of voltage can be used for changing corrosion current or voltage, to change needlepoint form, reaches desirable needlepoint form.
Claims (3)
1. the real-time monitoring system of a galvanic corrosion making nano-probe includes the U type pipe (1) that corrosive liquid is equipped with in inside; Be immersed in the nano-probe (2) in the port of U type pipe (1) and be immersed in electrode (3) in another port of U type pipe (1), the other end of the other end of nano-probe (2) and electrode (3) is connected with the two ends of power supply (4) respectively; Link to each other with nano-probe (2) the microoperation instrument (5) of the position that is used to regulate nano-probe (2) is characterized in that, also is provided with the microscope (7) that is used to observe nano-probe (2) preparation situation; The other end at microscope (7) is connected with camera head (8), and camera head (8) also connects computing machine (9).
2. the real-time monitoring system of nano-probe is made in galvanic corrosion according to claim 1, it is characterized in that, also is provided with the oscillograph that is used to observe voltage waveform (6) that is connected with power supply (4).
3. the real-time monitoring system of nano-probe is made in galvanic corrosion according to claim 1, it is characterized in that, described camera head (8) is a kind of in CCD or the mesh camera.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
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CNU2007200953987U CN201017692Y (en) | 2007-03-06 | 2007-03-06 | Real time monitoring system for manufacturing nano detecting probe with electrochemical corrosion |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
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CNU2007200953987U CN201017692Y (en) | 2007-03-06 | 2007-03-06 | Real time monitoring system for manufacturing nano detecting probe with electrochemical corrosion |
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CN201017692Y true CN201017692Y (en) | 2008-02-06 |
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CNU2007200953987U Expired - Fee Related CN201017692Y (en) | 2007-03-06 | 2007-03-06 | Real time monitoring system for manufacturing nano detecting probe with electrochemical corrosion |
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Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN102706935A (en) * | 2012-03-05 | 2012-10-03 | 胜利油田胜利勘察设计研究院有限公司 | Electrolytic cell for stereo microscope in-situ corrosion analysis |
CN107337357A (en) * | 2017-06-05 | 2017-11-10 | 东北大学 | A kind of fiber optical corrosive device of real-time inspection and control corrosion progress |
CN109916883A (en) * | 2019-03-28 | 2019-06-21 | 南京大学 | Transient state optical electro-chemistry microscope and transient state electrochemical process measurement method |
-
2007
- 2007-03-06 CN CNU2007200953987U patent/CN201017692Y/en not_active Expired - Fee Related
Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN102706935A (en) * | 2012-03-05 | 2012-10-03 | 胜利油田胜利勘察设计研究院有限公司 | Electrolytic cell for stereo microscope in-situ corrosion analysis |
CN107337357A (en) * | 2017-06-05 | 2017-11-10 | 东北大学 | A kind of fiber optical corrosive device of real-time inspection and control corrosion progress |
CN107337357B (en) * | 2017-06-05 | 2020-02-11 | 东北大学 | Optical fiber corrosion device for monitoring and controlling corrosion progress in real time |
CN109916883A (en) * | 2019-03-28 | 2019-06-21 | 南京大学 | Transient state optical electro-chemistry microscope and transient state electrochemical process measurement method |
CN109916883B (en) * | 2019-03-28 | 2021-07-09 | 南京大学 | Transient photoelectrochemical microscope and transient electrochemical process measuring method |
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C14 | Grant of patent or utility model | ||
GR01 | Patent grant | ||
C17 | Cessation of patent right | ||
CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20080206 |