CN1943010A - Stackable tray for integrated circuit chips - Google Patents

Stackable tray for integrated circuit chips Download PDF

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Publication number
CN1943010A
CN1943010A CN 200580011567 CN200580011567A CN1943010A CN 1943010 A CN1943010 A CN 1943010A CN 200580011567 CN200580011567 CN 200580011567 CN 200580011567 A CN200580011567 A CN 200580011567A CN 1943010 A CN1943010 A CN 1943010A
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pallet
integrated circuit
chip
support component
ridge
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Granted
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CN 200580011567
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CN100505150C (en
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罗德尼·克里斯普
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Illinois Tool Works Inc
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Illinois Tool Works Inc
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Abstract

A stacking tray for electrical components, such as integrated circuits, particularly those of the ball grid array (BGA) type. The tray is stackable and includes an upper side and a lower side. More particularly, both upper and lower sides of the trays include support elements forming ledges of equal uniform height and ridges to support the integrated circuit element and stabilize the integrated circuit element in the X-Y directions. In the unstacked configuration, whether the tray is presented in the right side up or upside down configuration, the integrated circuit elements are stabilized in the X-Y directions at two diagonally opposed corners, and hence all four sides of the chip. This is important for automated placement, such as 'pick and place'. Moreover, in a stacked configuration, such as would be used for shipping and transportation, the laterally inwardly offset ridges of a tray immediately downwardly adjacent from the integrated circuit restrain and stabilize the integrated circuit in the X-Y directions by engaging a first pair of diagonally opposed corners of the integrated circuit. Likewise, the laterally inwardly offset ridges of a tray immediately upwardly adjacent from the integrated circuit restrain and stabilize the integrated circuit in the X-Y directions by engaging a second pair of diagonally opposed corners of the integrated circuit so that all four corners are stabilized in the X-Y directions. In this stacked configuration, the integrated circuit chip is restrained in the Z direction by being restrained and stabilized between the ledges of the support elements of the immediately upwardly adjacent tray and the ledges of the support elements of the immediately downwardly adjacent tray.

Description

The Stackable pallel that is used for integrated circuit (IC) chip
Technical field
The present invention relates to be used for the pallet of integrated circuit, especially the pallet of ball grid array (BGA) type.Pallet is stackable and comprises upper side and downside, and wherein the upper side of each pallet and downside all have storage lattice zone, and when with stackable pallet, these zones are aimed at mutually.Especially, the upper side of pallet and downside all comprise support component, form the ledge and the ridge of identical consistent height, ledge is used at Z direction (perpendicular to the direction of substrate) restriction and securing integrated circuit chip, and ridge is used at X-Y direction (direction that is parallel to substrate) restriction and securing integrated circuit chip.The relative diagonally angle of the first couple of the ridge securing integrated circuit chip on the face of pallet, and the relative diagonally angle of the second couple of the ridge securing integrated circuit chip on the another side of adjacent pallet.
Background technology
In the prior art, it is known using Stackable pallel storage and transportation integrated circuit, especially ball grid array (BGA) integrated circuit.These Stackable pallels are useful on the storage lattice of the dispersion of the single chip of storage usually.In addition, these pallets are gone back conduct sometimes in order to check the carrying use of settling chip with automatic assembling device.Check to require sphere upwards usually, and assembling requires sphere downward usually.Therefore, die is not placed in the pallet of configuration in normal placement or counter-rotating, and integrated chip fixedly is very important in the X-Y direction.That is, pallet should be " turnover ", in other words can be with arbitrary towards supporting chip.
In addition, these pallets are necessary for chip firm machinery and static/electromagnetic protection are provided.
Some examples of prior art Stackable pallel can find in following patent: U.S. Patent number 5,400,904, and name is called " Tray for Ball Terminal Integrated Circuits ", is presented to Maston et al. March 28 nineteen ninety-five; U.S. Patent number 5,103,976, name was called " Tray for IntegratedCircuits with Supporting Ribs ", was presented to Murphy on April 14th, 1992; U.S. Patent number 5,080,228, name was called " Integral Carrier and System for Electrical Components ", was presented to Maston et al. on January 14th, 1992; U.S. Patent number 5,000,697, name was called " CarrierSystem for PGA Electrical Components ", was presented to Murphy on March 19th, 1991; U.S. Patent number 4,765,471, name was called " Electrical Component Carrier ", was presented to Murphy on August 23rd, 1988.
The another one example can be in the total U.S. Patent Application Serial Number 10/414 of right, find in 617, this application proposed on April 16th, 2003, and name is called " Stackable Tray for IntegratedCircuits with Comer Support Elements and Lateral Support Elements FormingMatrix Tray Capture System ".
Summary of the invention
The purpose of this invention is to provide and to pile up the pallet that the storage lattice are provided for electronic chip (such as but not limited to BGA (ball grid array) chip).
Further aim of the present invention provides pallet, and placement or counter-rotating are placed and can both be offered automatic manufacturing (for example " pick up and place ") at the fixing electronic chip of X-Y direction no matter pallet faces up.That is, the purpose of this invention is to provide " turnover " pallet.
Therefore further aim of the present invention provides storage, transportation that is used for electronic chip and the pallet of placing automatically, and wherein pallet provides machinery, static and the electromagnetic protection of raising to the chip in being placed on.
Therefore further aim of the present invention is for electronic chip provides pallet, can keep the simple shape that forms with simple forming step and low material requirements when stating purpose in realization.
By a kind of pallet is provided, wherein the upper side of pallet and downside all comprise having the equal ledge of unifying height and the support component of ridge in each storage lattice of pallet, ledge is used at the angle of Z direction securing integrated circuit, and ridge is used for the angle at the X-Y plane securing integrated circuit.For every pair of adjacent storage lattice, for storage lattice, ridge is laterally inwardly biasing on two relative diagonally angles, thereby definition is used for the storage lattice of chip and limits and securing integrated circuit in X-Y direction (the substrate direction that is parallel to pallet), and laterally outwards biasing of the ridge on other two diagonal angles of storage lattice, thereby provide X-Y to fix at contiguous storage lattice.Ledge on ledge on the tray upper surface and the pallet lower surface is directly aimed at, thereby by between the ledge of the support component of adjacent trays, catching chip that the fixing of Z direction is provided.Yet the ridge on the ledge of ridge on the ledge of tray upper surface and pallet lower surface is at opposite horizontal direction upper offset.
In non-stack arrangement, no matter be to be to be in the configuration that faces up or reverse at pallet, this makes that being in the X-Y direction at two relative diagonally angles has fixed integrated circuit (IC) chip, thereby has fixed all four edges of chip.This uses for automatic placement is useful especially, for example " picks up and places ".
In stack arrangement, the ridge of laterally inwardly setovering of the pallet that the direct below of integrated circuit is adjacent limits and has fixed integrated circuit by the relative diagonally angle of the first couple of securing integrated circuit in the X-Y direction.Equally, the ridge of laterally inwardly setovering of the pallet that the direct top of integrated circuit is adjacent limits and has fixed integrated circuit by other second pair of relative diagonally angle of securing integrated circuit in the X-Y direction.Therefore, in stack arrangement, when placing the pallet of sequence stack, all limit and fixed all four angles of integrated circuit (IC) chip.
Second embodiment is by alternately reaching same effect between the two following: at first, have the support component that the fixing ledge of Z direction is provided for an angle of all adjacent storage lattice, secondly, an angle that has for all adjacent storage lattice provides fixing ledge of Z direction and the support component that the ridge of fixing on the X-Y direction is provided.
Tray conforms JEDEC standard, this standard code pallet profile, storage case are put, outer fence (rail) height and stack arrangement, this stack arrangement makes integrated circuit (IC) chip be arranged in the lattice of storage fully that bottom memory lattice and top memory lattice limit, thus since above directly the ledge of the support component of adjacent pallet and direct below limit and be fixed on the Z direction between the ledge of support component of adjacent pallet.
Description of drawings
Description and claim and accompanying drawing in conjunction with hereinafter can be more clearly visible further aim of the present invention and advantage.
Fig. 1 is the birds-eye perspective of Stackable pallel of the present invention;
Fig. 2 is the detail section of the perspective view of Fig. 1;
Fig. 3 is the face upwarding view of Stackable pallel of the present invention;
Fig. 4 is the detail section of the perspective view of Fig. 3;
Fig. 5 is the top plan view of Stackable pallel of the present invention;
Fig. 6 is the side-looking plan view of Stackable pallel of the present invention;
Fig. 7 is the profile along the plane 7-7 of Fig. 5;
Fig. 8 is the face upwarding view of Stackable pallel of the present invention;
Fig. 9 is the detail section of the profile of Fig. 7;
Figure 10 is the plan view of the part of the bight storage lattice that form of the upper side by Stackable pallel of the present invention;
Figure 11 is the profile along the plane 11-11 of Figure 10;
Figure 12 is the profile along the plane 12-12 of Figure 10;
Figure 13 is the plan view of the part of the bight storage lattice that form of the downside by Stackable pallel of the present invention;
Figure 14 is the plan view of interior section of upper side that comprises the Stackable pallel of the present invention of internal vacuum;
Figure 15 is the profile along the plane 15-15 of Figure 14;
Figure 16 is the profile of two pallets that pile up of the present invention, has placed integrated circuit between the pallet that piles up;
Figure 17 is the perspective view of two pallets that pile up of the present invention, has placed integrated circuit between the pallet that piles up;
Figure 18 is the perspective view of the pallet that piles up of two counter-rotatings of the present invention, has placed integrated circuit between the pallet that counter-rotating is piled up;
Figure 19 is the top plan view of second embodiment of Stackable pallel of the present invention;
Figure 20 be Stackable pallel of the present invention second embodiment look up plan view;
Figure 21 is the plan view of the part of the bight storage lattice that form of the upper side by second embodiment of Stackable pallel of the present invention;
Figure 22 is the profile along the plane 22-22 of Figure 21;
Figure 23 is the profile along the plane 23-23 of Figure 21;
Figure 24 is the plan view of the part of the bight storage lattice that form of the downside by second embodiment of Stackable pallel of the present invention.
Embodiment
Now with reference to the accompanying drawings detailed, wherein same numbering is indicated same element in several views, and Fig. 1 is the birds-eye perspective of pallet 10 of the present invention.Pallet 10 meets the standard of JEDEC (Joint ElectronDevice Engineering Council, U.S. joint electron device engineering council), is surrounded by long limit 12,16 and minor face 14,18, and wherein planar substrates 20 provides internal structure.Downwards peripheral shirt rim 22 (see figure 9)s of extending are round the limit 12,14,16,18, and peripheral shirt rim 22 further comprises the upside recess 24 of the peripheral shirt rim 22 that is used to receive the top adjacent trays, thereby allows to pile up pallet 10.On minor face 14 and 18, provide the flange 26 and 28 of mutual biasing according to JEDEC, thereby the indication of pallet front and back is provided.Note whole peripheral structure, comprise peripheral shirt rim 22, upside recess 24 and flange 26 and 28, all be according to the JEDEC standard construction, thereby get ready for pallet 10 standardized automatic processing.
Limit 12 and 14 intersection form bight 30. Limit 14 and 16 intersection form bight 32. Limit 16 and 18 intersection form bight 34. Limit 12 and 18 intersection form bight 36.Inboard place (Fig. 1,5 and 10) and the inboard L shaped support component 40 that is formed with plane (that is, not having ridge) adjacent to the place of bight 30 and 34 of lower surface (Fig. 3 and 8) on the upper surface adjacent to bight 32 and 36.The upper surface inboard is formed with the L shaped support component 42 that has ridge on place (Fig. 1,2 and 5) and the lower surface inboard place (Fig. 3,4,8 and 13) adjacent to bight 32 and 36 adjacent to bight 30 and 34.The inboard is formed with T shape support component 44 adjacent to 12,14,16,18 places, limit, and X-shaped support component 46 is formed on the inside of pallet 10, presses the storage lattice 101-124 that row and column is arranged thereby defined in rectangle (also can be square or other shape) pallet 10.Storage lattice 105,111,114,120 comprise solid planar substrates 20, thereby form vacuum storage lattice, make vacuumizing equipment can be attached to pallet, and remaining storage lattice are removed the major part of planar substrates 20.
As Fig. 5, shown in 8,10 and 13, X-shaped support component 46 comprises the L shaped ridge 50 and 52 of two lateral offset.Thereby the L shaped ridge 50 and 52 of lateral offset be oriented to for given storage lattice laterally inwardly biasing play effect at this lattice internal fixation chip, thereby simultaneously for adjacent storage lattice laterally outwards biasing do not provide fixed function for adjacent storage lattice.For example, in Figure 10, the L shaped ridge 50 of lateral offset is laterally inwardly biasing for storage lattice 119, so that catch the angle of the chip in the storage lattice 119, but be laterally outwards biasing for storage lattice 120 and 122, thereby do not play or seldom rise fixed function for the chip in these storage lattice.Similarly, the L shaped ridge 52 of lateral offset is laterally inwardly biasing for storage lattice 123 among Figure 10, and is laterally outwards biasing for storage lattice 120 and 122.Figure 14 similarly describes this order that replaces inside and outside lateral offset in detail.Similarly, the L shaped support component 42 that has ridge comprises the L shaped ridge 54 of lateral offset, as illustrated in fig. 1 and 2, with they be configured to upper surface in the storage lattice 101 and 124 laterally inwardly the L shaped ridge 52 of biasing is relative diagonally, and shown in Fig. 3,4 and 13, with they be configured to lower surface in the storage lattice 103 and 122 laterally inwardly the L shaped ridge 52 of biasing is relative diagonally.Similarly, shown in Figure 10 and 13, T shape support component 44 comprises the L shaped ridge 50 or 52 of lateral offset, is positioned at the L shaped ridge 50 of the similar laterally inside biasing that is used for given storage lattice or 52 relative diagonally place, angle.
As Figure 11, shown in 12,15 and 16 profile and Figure 17 and 18 the perspective view, the L shaped ridge 50 of lateral offset and 52 towards between the upper side of pallet 10 and bottom sides alternately, as between adjacent storage lattice alternately.Especially, as shown in figure 11, for shown in X-shaped support component 44, on upper side, L shaped ridge 52 is laterally inwardly setovered with respect to storage lattice 122, and outwards setovers with respect to storage lattice 119, simultaneously on bottom sides, L shaped ridge 50 is outwards setovered with respect to storage lattice 122, and inwardly setovers with respect to storage lattice 119.The stacked structure that can be used for of obtaining transports and transport, make first pair diagonally relative bight interlock by the ridge 50 and 52 of laterally inwardly setovering in the above with directly adjacent pallet 10, and, make the X-Y direction of integrated circuit (IC) chip 1000 (seeing Figure 16-18) in the storage lattice obtain laterally supporting and fixing with the laterally inwardly ridge 50 bight interlock relative diagonally of biasing of directly adjacent below pallet 10 with 52 the second couples that make.
Therefore, in this stack arrangement, the continuous pallet 10 that piles up supports also four all angles of securing integrated circuit chip 1000 in the X-Y direction.Similarly, integrated circuit (IC) chip 1000 has obtained fixing by between the support component 40,42,44 and 46 ledges that form that are positioned at the adjacent stacks pallet in Z direction (perpendicular to piling up pallet).
In addition, when pallet 10 does not pile up,, be in the X-Y direction at two relative diagonally angles and fixed integrated circuit (IC) chip 1000, thereby fixed all four edges of chip no matter be in the configuration that faces up or reverse.That is, pallet is " turning ".This automatic placement for integrated circuit (IC) chip 1000 is useful especially, for example in " pick up and place " operation.
Figure 19-24 has disclosed second embodiment of pallet 10.In this embodiment, the X-shaped support component is not with the X-shaped support component 47 that supports ridge with have between the X-shaped support component 49 that X-shaped supports ridge 51 (seeing Figure 24) and replace.In this embodiment, X-shaped support component 47 (not with support ridge) is provided for the ledge only fixed in the Z direction for integrated circuit (IC) chip on each a angle of four adjacent storage lattice.Yet on each a angle of four adjacent storage lattice, X-shaped support component 49 is provided at the fixing ledge of Z direction for integrated circuit (IC) chip, and X-shaped ridge 51 provides the fixing of X-Y direction for integrated circuit (IC) chip.Similarly, T shape support component supports the T shape of not supporting ridge with the T shape support component 41 (seeing Figure 24) that supports ridge and band between the T shape support component 43 (seeing Figure 21) of ridge 45 and replaces.T shape support component 41 (not with ridge) is provided for only at the fixing ledge of Z direction for integrated circuit (IC) chip on each a angle of two adjacent storage lattice.Similarly, on each a angle of two adjacent storage lattice, T shape support component 43 is provided at the fixing ledge of Z direction for integrated circuit (IC) chip, and T shape is supported ridge 45 and provided the fixing of X-Y direction for integrated circuit (IC) chip.
Shown in Figure 19-24, be not arranged in and the relative diagonally bight storage lattice of X-shaped support component 47 (not with supporting ridge) with the L shaped support component 35 that supports ridge.With reference to the storage lattice 101 and 122 among Figure 19 (vertical view of pallet); Storage lattice 103 and 124 among Figure 20 (upward view of pallet); And the storage lattice 122 among Figure 21 (detailed top view of pallet).Similarly, the L shaped support component 37 with L shaped support ridge 39 is arranged in the bight storage lattice relative diagonally with X-shaped support component 49 (band supports ridge 51).With reference to the storage lattice 103 and 124 among Figure 19 (vertical view of pallet); Storage lattice 101 and 122 among Figure 20 (upward view of pallet); And the storage lattice 122 among Figure 24 (detailed bottom view of pallet).L shaped support component 35 (not with supporting ridge) is used for only at the fixing ledge of Z direction for the outside angle of integrated circuit (IC) chip provides in adjacent bight storage lattice.Similarly, in adjacent bight storage lattice, L shaped support component 37 is provided at the fixing ledge of Z direction for the outside angle of integrated circuit (IC) chip, and L shaped support component 39 provides the fixing of X-Y direction for the outside angle of integrated circuit (IC) chip.
When with the stackable pallet of second embodiment, the configuration that obtains makes the support component of upper tray be in X-Y direction securing integrated circuit chip at first pair of relative diagonally angle, and the support component of lower tray is in X-Y direction securing integrated circuit chip at second pair of relative diagonally angle.Similarly, the support component of upper tray and lower tray ledge at fixing whole four angles of Z direction.In addition and first embodiment similar, second embodiment provides " turnover " configuration, for example can be used in the automatic operation of operation of " pick up and place ".
According to the thickness of the integrated circuit that will fix, when storage or securing integrated circuit chip between the support component of two adjacent trays 10, the variable thickness of different support components.In a preferred embodiment, by having a support component that supports ridge and not fixed integrated circuit (IC) chip with the similar support component storage of supporting ridge or at each angle.That is, be formed on to be located immediately at and locate above not being with the similar support component that supports ridge having the support component that supports ridge on the upper side of pallet, vice versa.
Therefore, above-mentioned purpose and advantage have effectively been obtained.Although described the preferred embodiment of invention herein in detail, need understand the present invention and all be not limited to these embodiment going up in all senses, its scope is defined by the appended claims.

Claims (25)

1. pallet that is used for integrated circuit (IC) chip comprises:
A plurality of storage lattice, described storage lattice are limited by support component at Qi Jiaochu;
Described support component comprises ledge, is used at the direction securing integrated circuit chip vertical with pallet;
Described ledge is used at the direction securing integrated circuit chip parallel with pallet at the ridge that the relative diagonally place, angle of the first couple of each storage lattice comprises inside biasing;
Described ledge comprises the ridge of outside biasing at the relative diagonally place, angle of the second couple of each storage lattice, thereby forms the ridge of the inside biasing of adjacent storage lattice, is used in adjacent storage lattice at the direction securing integrated circuit chip parallel with pallet.
2. the pallet that is used for integrated circuit (IC) chip according to claim 1, wherein pallet can with continuous similar stackable pallet.
3. the pallet that is used for integrated circuit (IC) chip according to claim 2, comprise upper side and downside, the wherein downside interlock of the upper side of pallet and top pallet successively, thus be formed for storing betwixt each storage lattice of the aligning of integrated chip.
4. the pallet that is used for integrated circuit (IC) chip according to claim 3, thereby wherein when below pallet and top stackable pallet and aim at when storing integrated chip betwixt, the storage lattice of the upper side of below pallet comprise the ridge of inside biasing, be used for fixing the relative diagonally angle of the first couple that is stored in the chip between pallet, the storage lattice of the downside of top pallet comprise the ridge of inside biasing, be used for fixing the relative diagonally angle of the second couple that is stored in the chip between pallet, thereby chip fixed in the direction parallel with pallet.
5. the pallet that is used for integrated circuit (IC) chip according to claim 4, described first pair of diagonal angle of the ridge fixed chip of the inside biasing of pallet wherein, described second pair of diagonal angle of the ridge fixed chip of the inside biasing of top pallet, thus the configuration that obtains is turning.
6. the pallet that is used for integrated circuit (IC) chip according to claim 5, wherein be stored in chip between the pallet of above and below and be fixed between the described ledge of described support component of above and below pallet, thereby chip is fixed in direction perpendicular to pallet.
7. the pallet that is used for integrated circuit (IC) chip according to claim 6, the described support component on the wherein said upper side are located immediately on the described support component on the described downside.
8. the pallet that is used for integrated circuit (IC) chip according to claim 7, the support component that has inside biasing ridge on the wherein said upper side are located immediately on the support component that has outside biasing ridge on the described downside.
9. the pallet that is used for integrated circuit (IC) chip according to claim 8, wherein form the X-shaped support component in the intersection of four storage lattice, form T shape support components in intersections, form L shaped support component at the place, exterior angle of bight storage lattice along two storage lattice on the limit of pallet.
10. the pallet that is used for integrated circuit (IC) chip according to claim 9, wherein pallet is the rectangle that has the row and column of storing lattice.
11. the pallet that is used for integrated circuit (IC) chip according to claim 10 comprises the planar substrates that supports described support component.
12. the pallet that is used for integrated circuit (IC) chip according to claim 11 wherein for being solid to the described planar substrates of the described storage lattice of small part, is stored lattice thereby form vacuum, makes vacuumizing equipment can be bonded to pallet.
13. a pallet that is used for integrated circuit (IC) chip comprises:
A plurality of storage lattice, described storage lattice are limited by support component at Qi Jiaochu;
Described support component comprises ledge, is used at the direction securing integrated circuit chip vertical with pallet;
The described ledge of at least a portion of described support component comprises ridge at the relative diagonally place, angle of each storage lattice, is used at the direction securing integrated circuit chip parallel with pallet.
14. the pallet that is used for integrated circuit (IC) chip according to claim 13, wherein said support component is comprising described ridge and is not comprising between the described ridge alternately.
15. the pallet that is used for integrated circuit (IC) chip according to claim 14, wherein pallet can with continuous similar stackable pallet.
16. the pallet that is used for integrated circuit (IC) chip according to claim 14, comprise upper side and downside, the wherein downside interlock of the upper side of pallet and top pallet successively, thus be formed for storing betwixt each storage lattice of the aligning of integrated chip.
17. the pallet that is used for integrated circuit (IC) chip according to claim 15, thereby wherein when below pallet and top stackable pallet and aim at when storing integrated chip betwixt, the storage lattice of the upper side of below pallet comprise ridge, be used for fixing the relative diagonally angle of the first couple that is stored in the chip between pallet, the storage lattice of the downside of top pallet comprise ridge, be used for fixing the relative diagonally angle of the second couple that is stored in the chip between pallet, thereby chip fixed in the direction parallel with pallet.
18. the pallet that is used for integrated circuit (IC) chip according to claim 16, described first pair of diagonal angle of ridge fixed chip of below pallet wherein, described second pair of diagonal angle of the ridge fixed chip of top pallet, thus the configuration that obtains is turning.
19. the pallet that is used for integrated circuit (IC) chip according to claim 17, wherein be stored in chip between the pallet of above and below and be fixed between the described ledge of described support component of above and below pallet, thereby chip is fixed in direction perpendicular to pallet.
20. the pallet that is used for integrated circuit (IC) chip according to claim 18, described support component on the wherein said upper side is located immediately on the described support component on the described downside, the support component that does not have described ridge on the wherein said downside is formed on the below that is located immediately at the support component that has ridge that forms on the described upper side, and the support component that has described ridge on the wherein said downside is formed on the below that is located immediately at the support component that does not have ridge that forms on the described upper side.
21. the pallet that is used for integrated circuit (IC) chip according to claim 19, wherein form the X-shaped support component in the intersection of four storage lattice, form T shape support components in intersections, form L shaped support component at the place, exterior angle of bight storage lattice along two storage lattice on the limit of pallet.
22. the pallet that is used for integrated circuit (IC) chip according to claim 20, wherein said ridge is an X-shaped on described X-shaped support component, is T shape on described T shape support component, is L shaped on described L shaped support component.
23. the pallet that is used for integrated circuit (IC) chip according to claim 21, wherein pallet is the rectangle that has the row and column of storing lattice.
24. the pallet that is used for integrated circuit (IC) chip according to claim 22 comprises the planar substrates that supports described support component.
25. the pallet that is used for integrated circuit (IC) chip according to claim 23 wherein for being solid to the described planar substrates of the described storage lattice of small part, is stored lattice thereby form vacuum, makes vacuumizing equipment can be bonded to pallet.
CNB2005800115678A 2004-06-02 2005-05-27 Stackable tray for integrated circuit chips Active CN100505150C (en)

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US57669404P 2004-06-02 2004-06-02
US60/576,694 2004-06-02
US11/057,343 2005-02-14

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CN102132402A (en) * 2008-08-21 2011-07-20 国家半导体公司 Thin foil semiconductor package
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CN102774574A (en) * 2011-05-10 2012-11-14 鸿富锦精密工业(深圳)有限公司 Bearing device
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CN103495533B (en) * 2013-10-09 2016-06-08 聪缙电子(昆山)有限公司 Localization tool
CN103495533A (en) * 2013-10-09 2014-01-08 聪缙电子(昆山)有限公司 Positioning jig
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