CN1834733B - Method and device for inspecting color unevenness - Google Patents
Method and device for inspecting color unevenness Download PDFInfo
- Publication number
- CN1834733B CN1834733B CN2006100080105A CN200610008010A CN1834733B CN 1834733 B CN1834733 B CN 1834733B CN 2006100080105 A CN2006100080105 A CN 2006100080105A CN 200610008010 A CN200610008010 A CN 200610008010A CN 1834733 B CN1834733 B CN 1834733B
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- China
- Prior art keywords
- light
- substrate
- overlay film
- colored overlay
- color moire
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- Expired - Fee Related
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- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B17/00—Guiding record carriers not specifically of filamentary or web form, or of supports therefor
- G11B17/02—Details
- G11B17/022—Positioning or locking of single discs
- G11B17/028—Positioning or locking of single discs of discs rotating during transducing operation
- G11B17/0284—Positioning or locking of single discs of discs rotating during transducing operation by clampers
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B19/00—Driving, starting, stopping record carriers not specifically of filamentary or web form, or of supports therefor; Control thereof; Control of operating function ; Driving both disc and head
- G11B19/20—Driving; Starting; Stopping; Control thereof
- G11B19/2009—Turntables, hubs and motors for disk drives; Mounting of motors in the drive
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B2220/00—Record carriers by type
- G11B2220/20—Disc-shaped record carriers
- G11B2220/25—Disc-shaped record carriers characterised in that the disc is based on a specific recording technology
- G11B2220/2537—Optical discs
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- Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
- Testing Of Optical Devices Or Fibers (AREA)
- Optical Filters (AREA)
- Testing, Inspecting, Measuring Of Stereoscopic Televisions And Televisions (AREA)
- Length Measuring Devices By Optical Means (AREA)
Abstract
The invention discloses a color moire detecting method and relative method, which can avoid the personal effects to detect the existence and degrees of color moir accurately. Wherein, the focus of focusing optical system (34) is adjusted to remove the network pattern, and using the camera device (35) to shoot the basic plate (31), to detect the existence and degrees of color moir.
Description
Technical field
The present invention relates in color Filter Manufacturing Process etc., be used to check method and the device thereof of the having or not of color moire (mura), degree etc. of the colored overlay film that on substrate, forms.
Background technology
, be well known that: in the employed color Filter Manufacturing Process of flat-panel monitor etc., produce inhomogeneous, composition cohesion, the caused color moire of Thickness Variation by pigment dispersing in the past.In order to prevent the problem of under the state that has produced this color moire, proceeding manufacturing operation, use video camera and light source, carry out the inspection of the having or not of color moire, degree etc.
In addition, proposed to utilize camera head to take the display frame that LCD etc. is examined display element, checked the whether good method (with reference to patent documentation 1) that is examined display element with CCD etc.The method of patent documentation 1 is as follows: by visual identification in photographed images, produced under the situation of reticulate pattern (moire), regulate the focus (focal length) of the camera lens of camera head, offset the frequency characteristic of LCD panel thus, remove reticulate pattern.
Check having or not of color moire in the method that adopts patent documentation 1, during degree etc., think and to check having or not of color moire accurately by removing reticulate pattern, degree, position etc., but owing to be that the operator has produced reticulate pattern by visual identification, so certainly lead to individual differences, and regulating degree for the focus (focal length) of the camera lens of camera head, also because regulate focus in visual one side on one side by the operator, so certainly lead to individual differences, the result is that there are the following problems: when changing the operator, and the having or not of color moire, deviation appears in the check result of degree etc.Specifically, the existence problem that can not remove reticulate pattern fully or color moire has also been removed.
And even under the constant situation of operator, for example morning and the eyesight at dusk time the, concentrated force etc. change, so exist check result the problem of deviation to occur.
In addition, the laminated layer sequence of the color of colored overlay film, the figure on the substrate, colored overlay film is different because of each type, so the problem that exists the generation condition of reticulate pattern to change.
Summary of the invention
The present invention proposes in view of the above problems, its purpose is, color moire inspection method and device thereof are provided, can check the having or not of color moire, degree etc. accurately, and can not be subjected to difference, the individual's of individual differences, type the influence of state difference.
In color moire inspection method of the present invention, by light source to the substrate irradiates light that has formed colored overlay film, light-gathering optics by can regulating focus, take the real estate that has formed colored overlay film by camera head, check color moire according to image pickup result, wherein, when checking beginning, carry out matrixing to taking the image that obtains by described camera head, calculate the luminance deviation of the matrix of at least a portion; Threshold value to described luminance deviation and regulation compares; When described luminance deviation surpassed the threshold value of described regulation, the focus of regulating light-gathering optics automatically was so that described luminance deviation enters in the described threshold value.
If adopt this structure, when checking beginning, regulate the focus of light-gathering optics automatically, can check accurately that thus colored overlay film is that colored overlay film, substrate with light transmission is to have the having or not of color moire under the situation of substrate of light transmission, degree etc.
Wherein, if can be preferably light-gathering optics the light that has seen through substrate and colored overlay film is assembled by seeing through the moire (light that cause, that see through moire portion such as uneven thickness by colored overlay film are different with the light wavelength and/or the intensity that see through normal portion) that light detects.
And, if the moire that can detect by reflected light (by the unequal light that cause, that reflected by moire portion of the deterioration of colored overlay film with different), be preferably light-gathering optics the light that colored overlay film reflected is assembled by the light wavelength and/or the intensity of the reflection of normal portion.
In addition, measure to see through at the same time under the situation of the intrinsic moire of intrinsic moire of light and reflected light, formation is the optical system that benchmark has disposed light source symmetrically with the substrate, by selecting a ground, can check the moire of the light that sees through colored overlay film and the moire of the light that reflected by colored overlay film to the substrate irradiates light.And,, can not check so do not increase the number of light-gathering optics owing to be to select one inspection method.And, by switching continuously, can check the moire of the light that sees through colored overlay film simultaneously and the moire of the light that reflected by colored overlay film, calculate synthetic result.
And the focus that is preferably light-gathering optics is automatically regulated in the mode of removing reticulate pattern and is carried out, can be according to the image pickup result under the state that does not have reticulate pattern, check the having or not of color moire, degree etc. accurately.In addition, more preferably, the focus of light-gathering optics is automatically regulated the mode that is in outside the depth of field that with substrate measured is the center with focus and is carried out, can be according to the image pickup result under the state that does not have reticulate pattern, check the having or not of color moire, degree etc. accurately.
Color moire testing fixture of the present invention comprises: light source, and it is to the substrate irradiates light that has formed colored overlay film; Camera head, it takes the real estate that has formed colored overlay film by the light-gathering optics that can regulate focus; And inspection unit, it checks color moire according to image pickup result, wherein, also comprises: the luminance deviation computing unit, and it carries out matrixing to taking the image that obtains by described camera head, calculates the luminance deviation of the matrix of at least a portion; Comparing unit, its threshold value to described luminance deviation and regulation compares; And the focus automatic adjustment unit, when described luminance deviation surpassed the threshold value of described regulation, it regulated the focus of light-gathering optics automatically, so that described luminance deviation enters in the described threshold value.
If adopt this structure, when checking beginning, regulate the focus of light-gathering optics automatically, can check accurately that thus colored overlay film is that colored overlay film, substrate with light transmission is to have the having or not of color moire under the situation of substrate of light transmission, degree etc.Wherein, if can be preferably light-gathering optics the light that has seen through substrate and colored overlay film is assembled by seeing through the moire (light that cause, that see through moire portion such as uneven thickness by colored overlay film are different with the light wavelength and/or the intensity that see through normal portion) that light detects.
And, if can be preferably light-gathering optics the light that substrate or colored overlay film reflected is assembled by the moire (unequal that cause, different with the light wavelength and/or the intensity that reflect in normal portion) of reflected light detection at the light of moire portion reflection by the deterioration of colored overlay film.
In addition, measure to see through at the same time under the situation of the intrinsic moire of intrinsic moire of light and reflected light, formation is the optical system that benchmark has disposed light source symmetrically with the substrate, by selecting a ground, can check the moire of the light that sees through colored overlay film and the moire of the light that reflected by colored overlay film to the substrate irradiates light.And,, can not check so do not increase the number of light-gathering optics owing to be to select one inspection method.And, by switching continuously, can check the moire of the light that sees through colored overlay film simultaneously and the moire of the light that reflected by colored overlay film, calculate synthetic result.
In addition, be preferably the focus that the focus automatic adjustment unit carries out light-gathering optics in the mode of removing reticulate pattern and regulate automatically, can be according to the image pickup result under the state that does not have reticulate pattern, check the having or not of color moire, degree etc. accurately.In addition, more preferably, the focus of light-gathering optics is automatically regulated the mode that is positioned at outside the depth of field that with substrate measured is the center with focus and is carried out, can be according to the image pickup result under the state that does not have reticulate pattern, check the having or not of color moire, degree etc. accurately.
Color moire inspection method of the present invention has the peculiar effect that can check the having or not of color moire, degree, position etc. accurately.
Color moire testing fixture of the present invention also has the peculiar effect that can check the having or not of color moire, degree, position etc. accurately.
Description of drawings
Fig. 1 is the skeleton diagram that the major part of the color filter manufacturing installation that the flat-panel monitor of color moire inspection method of the present invention uses has been used in expression.
Fig. 2 is a skeleton diagram of representing color moire testing fixture in detail.
Fig. 3 is the process flow diagram of an example of the processing of account for color moire testing fixture.
Fig. 4 is that expression exists the luminance deviation of a plurality of matrixes under the state of reticulate pattern and the skeleton diagram of the relation between the predetermined threshold.
Fig. 5 represents not exist the luminance deviation of a plurality of matrixes under the state of reticulate pattern and the skeleton diagram of the relation between the predetermined threshold.
Fig. 6 is that expression is the skeleton diagram of the focal position of the focusing of light-gathering optics after the depth of field under the state on the substrate surface and adjusting.
Fig. 7 is that expression is the figure of the shooting example of the focusing of light-gathering optics under the state on the substrate surface.
Fig. 8 is that expression makes the focus of light-gathering optics depart from the figure of the shooting example under the state of substrate surface.
Fig. 9 is the skeleton diagram of the another kind of embodiment of expression color moire testing fixture of the present invention.
Embodiment
Below, the color moire inspection method that present invention will be described in detail with reference to the accompanying and the embodiment of device thereof.
Fig. 1 is the skeleton diagram that the major part of the color filter manufacturing installation that the flat-panel monitor of color moire inspection method of the present invention uses has been used in expression.
This color filter manufacturing installation has: apparatus for coating 1, and it has the colored overlay film that coating has light transmission on the substrate of light transmission at glass etc.; Exsiccator 2, it is used for the colored overlay film after drying coated; And color moire testing fixture 3, it checks the having or not of color moire, degree, position of dried colored overlay film etc.
For example, under the situation of color filter, be to be configured to three primary colors at least rectangular and to form, so apparatus for coating 1, exsiccator 2 and color moire testing fixture 3 are set at every kind of color.
Fig. 2 is a skeleton diagram of representing color moire testing fixture 3 in detail.
This color moire testing fixture 3 has: the conveyer 32 that transports the substrate 31 that has formed colored overlay film in the horizontal direction; In the precalculated position from the following light source 33 of direction substrate 31 irradiates lights; Be configured to receive light-gathering optics 34 and camera head 35 through the light of substrate 31; Carry out the image processing apparatus 36 that predetermined picture is handled according to camera head 35 acquired image data; According to generations such as processing result images and control device 37 at the director data of conveyer 32, light-gathering optics 34 etc. is provided; And the scrambler that transports distance 38 that detects substrate 31.In addition, 30 expression programmable logic controller (PLC)s.
Described conveyer 32 for example has a plurality of transfer rollers, is rotated driving by the active transfer roller to a part, transmits substrate 31 in a predetermined direction, guides substrate 31 reposefully by remaining driven voller.Wherein, be preferably by upstream side travelling belt and downstream travelling belt and constitute, in this case, can in the gap of upstream side travelling belt and downstream travelling belt,, and receive the light that sees through substrate 31 to substrate 31 irradiates lights.
Described light source 33 also can be any one in pointolite, line source, the area source.
Described light-gathering optics 34 can be focused motor etc. as drive source.
Described camera head 35 also can be any one in one dimension camera head, the two-dimensional camera device.And,, can enumerate line sensor, ccd video camera, cmos camera etc. as camera head 35.
And described light-gathering optics 34 and described camera head 35 are housed in (not shown) in the shading housing, and this shading housing can cover outer light, so that can detect the poor of the faint brightness value that caused by color moire.
Described image processing apparatus 36 carries out following processing: for example from scrambler 38 transport distance detecting output as input, synthesize the camera data of camera head 35 and generate the processing of the view data corresponding with the gamut of substrate 31; The view data that is generated is subdivided into rectangular processing; Calculate the mean flow rate of each matrix and the processing of luminance deviation; And the processing that the luminance deviation that calculates and predetermined threshold value are compared etc.And described image processing apparatus 36 also can carry out necessary processing according to the data from pretreating device, this pretreating device from the original camera data of camera head 35 as input, the pre-treatment of being scheduled to.
In addition, threshold value for regulation, for example when having reticulate pattern, the high-high brightness in the image that photographs by camera head and the difference of minimum brightness are bigger, when not having reticulate pattern on the contrary, the high-high brightness in the image that photographs by camera head and the difference of minimum brightness are less, therefore can rule of thumb obtain (with reference to Fig. 4 and Fig. 5).Specifically, for example represent the brightness (for example brightness on the cross curve) of photographed images, make pen travel arrive the position at reticulate pattern place, measure luminance difference (confirming), determine threshold value based on measured luminance difference by histogram with histogram.
Described control device 37 for example the comparative result of image processing apparatus 36 etc. as input, provide the instruction of regulating focus to light-gathering optics 34 as required, provide substrate to transport instruction to conveyer 32, provide the shooting instruction to camera head 35.And control device 37 and image processing apparatus 36 also can jointly be made of 1 computing machine.
Below, the process flow diagram with reference to shown in Figure 3 further specifies color moire testing fixture.
In step SP1, on conveyer 32, placed substrate 31 in response to going out by not shown sensor, provide the processing sign on from control device 37 to image processing apparatus 36.Then, in step SP2, provide the shooting instruction to camera head 35 from control device 37.Then, in step SP3, take by camera head 35.Then, in step SP4, carry out the image input and output by pretreating device.Then, in step SP5, carry out the matrixing of image by image processing apparatus 36.Then, in step SP6, calculate the luminance deviation of each matrix by image processing apparatus 36.Then, in step SP7, comparison brightness deviation and predetermined threshold value.
Then, when in step SP7, being judged as luminance deviation, in step SP8, provide the focal adjustments instruction to light-gathering optics 34 from control device 37 greater than predetermined threshold value.Then, in step SP9, regulate focus, in step SP10, provide the shooting instruction to camera head 35 from control device 37 by light-gathering optics 34.Specifically, as shown in Figure 6, light-gathering optics 34 with focal adjustments is, outside the depth of field under the state of focusing on the surface of substrate 31 of focusing.
Then, in step SP11,, take by camera head 35 by the light-gathering optics 34 after the adjusting focus.Then, carry out the processing of step SP4 once more.
On the contrary, in step SP7, be judged as luminance deviation when being not more than predetermined threshold value, in step SP12, provide to conveyer 32 from control device 37 substrate 31 is transported the instruction of taking the required distance in next zone.Then, in step SP13,, substrate 31 is transported the required distance in next zone of shooting by conveyer 32.Then, carry out the processing of step SP2 once more.
In addition, though the flow process at Fig. 3 is not shown, but also can be the gamut that photographs substrate 31 as condition, use luminance deviation etc. carries out known in the past processing, check the having or not of color moire, degree etc., show check result, transport substrate 31 to next step, finish a series of processing, prepare to be transported into next substrate 31.But if all substrates 31 are carried out above-mentioned a series of processing, then efficient reduces, so be preferably when changing type at every turn, carries out above-mentioned a series of processing.
According to above explanation as can be known, the focal adjustments of light-gathering optics 34 for removing the state of reticulate pattern, is taken, check the having or not of color moire, degree, position etc. according to camera data, so can improve the inspection precision.Specifically, even when color moire is difficult to detect color moire owing to the influence of reticulate pattern (with reference to Fig. 7), by with the focal adjustments of light-gathering optics 34 for removing the state of reticulate pattern, can detect color moire (with reference to Fig. 8) reliably.
In the above-described embodiment, luminance deviation and predetermined threshold value are compared, the focus of regulating light-gathering optics 34 according to comparative result (specifically, for example regulate the focus of light-gathering optics 34, make the luminance deviation of all matrixes be no more than threshold value), but also the luminance deviation of the appointed area of captured image can be compared with the threshold value that sets, regulate the focus of light-gathering optics 34, in the threshold value that luminance deviation is entered set.
Fig. 9 is the skeleton diagram of the another kind of embodiment of expression color moire testing fixture of the present invention.
The difference of the color moire testing fixture among this color moire testing fixture and Fig. 2 is, also be provided with on the precalculated position from the light source 39 of direction substrate 31 irradiates lights, also be provided with optical gate 33a, 39a in light source 33,39 emission side separately.
As long as described optical gate 33a, 39a can select to substrate 31 irradiation can to use known in the past various optical gates such as mechanical optical gate, liquid crystal photic gate from the state of the light of light source with stop state from the irradiation of the light of light source reliably.And camera head 35 must receive only the light that light source produced, so also at least one optical gate can be controlled to the irradiation that stops reliably from the light of light source.
And, if light source uses LED, flashlamp, laser diode etc., then do not need above-mentioned various optical gates, by lighting of control light source, can obtain identical effect.
According to the color moire testing fixture of said structure, only need transport substrate 31 in a predetermined direction No. one time, just can check accurately based on catoptrical color moire with based on the color moire that sees through light.
Claims (12)
1. color moire inspection method, to the substrate irradiates light that has formed colored overlay film, the light-gathering optics by can regulating focus, take the real estate that has formed colored overlay film by light source, check color moire according to image pickup result by camera head, it is characterized in that
When checking beginning, carry out matrixing to taking the image that obtains by described camera head, calculate the luminance deviation of the matrix of at least a portion;
Threshold value to described luminance deviation and regulation compares;
When described luminance deviation surpassed the threshold value of described regulation, the focus of regulating light-gathering optics automatically was so that described luminance deviation enters in the described threshold value.
2. color moire inspection method according to claim 1, wherein,
Colored overlay film is the colored overlay film with light transmission, and substrate is the substrate with light transmission, and light-gathering optics is assembled the light that sees through substrate and colored overlay film.
3. color moire inspection method according to claim 1, wherein,
Colored overlay film is the colored overlay film with light transmission, and substrate is the substrate with light transmission, and light-gathering optics is assembled the light that is reflected by colored overlay film.
4. color moire inspection method according to claim 1, wherein,
Colored overlay film is the colored overlay film with light transmission, and substrate is the substrate with light transmission, is that benchmark has disposed light source in relative both sides with the substrate, and light-gathering optics is assembled and seen through substrate and the light of colored overlay film and the light that is reflected by colored overlay film.
5. color moire inspection method according to claim 4, wherein,
With the substrate is that baseline configuration is selected a ground to the substrate irradiates light at the light source of relative both sides.
6. according to any described color moire inspection method in the claim 1～5, wherein,
When the focus of carrying out light-gathering optics is regulated automatically, be to carry out in the mode that described focus is in outside the depth of field that with substrate measured is the center.
7. color moire testing fixture comprises: light source, and it is to the substrate irradiates light that has formed colored overlay film; Camera head, it takes the real estate that has formed colored overlay film by the light-gathering optics that can regulate focus; And inspection unit, it checks color moire according to image pickup result, it is characterized in that,
This color moire testing fixture also comprises:
The luminance deviation computing unit, it carries out matrixing to taking the image that obtains by described camera head, calculates the luminance deviation of the matrix of at least a portion;
Comparing unit, its threshold value to described luminance deviation and regulation compares; And
The focus automatic adjustment unit, when described luminance deviation surpassed the threshold value of described regulation, it regulated the focus of light-gathering optics automatically, so that described luminance deviation enters in the described threshold value.
8. color moire testing fixture according to claim 7, wherein,
Colored overlay film is the colored overlay film with light transmission, and substrate is the substrate with light transmission, and light-gathering optics is assembled the light that sees through substrate and colored overlay film.
9. color moire testing fixture according to claim 7, wherein,
Colored overlay film is the colored overlay film with light transmission, and substrate is the substrate with light transmission, and light-gathering optics is assembled the light that is reflected by colored overlay film.
10. color moire testing fixture according to claim 7, wherein,
Colored overlay film is the colored overlay film with light transmission, and substrate is the substrate with light transmission, light source with the substrate be baseline configuration in relative both sides, light-gathering optics is assembled and is seen through substrate and the light of colored overlay film and the light that is reflected by colored overlay film.
11. color moire testing fixture according to claim 10, wherein,
With the substrate is that baseline configuration is selected a ground to the substrate irradiates light at the light source of relative both sides.
12. according to any described color moire testing fixture in the claim 7～11, wherein,
When the focus automatic adjustment unit is regulated automatically in the focus of carrying out light-gathering optics, be to carry out in the mode that focus is in outside the depth of field that with substrate measured is the center.
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2005-046914 | 2005-02-23 | ||
| JP2005046914 | 2005-02-23 | ||
| JP2005046914A JP4425815B2 (en) | 2005-02-23 | 2005-02-23 | Color unevenness inspection method and apparatus |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN1834733A CN1834733A (en) | 2006-09-20 |
| CN1834733B true CN1834733B (en) | 2010-11-10 |
Family
ID=37002545
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2006100080105A Expired - Fee Related CN1834733B (en) | 2005-02-23 | 2006-02-23 | Method and device for inspecting color unevenness |
Country Status (4)
| Country | Link |
|---|---|
| JP (1) | JP4425815B2 (en) |
| KR (1) | KR20060094056A (en) |
| CN (1) | CN1834733B (en) |
| TW (1) | TWI405962B (en) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP7310423B2 (en) * | 2019-08-06 | 2023-07-19 | 日本電気硝子株式会社 | Film-coated substrate inspection method, film-coated substrate manufacturing method, and film-coated substrate inspection apparatus |
Family Cites Families (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH07113756A (en) * | 1993-10-19 | 1995-05-02 | Dainippon Printing Co Ltd | Defect inspection method of color filter for view finder |
| JPH08122272A (en) * | 1994-10-25 | 1996-05-17 | Mitsubishi Heavy Ind Ltd | Inspection device of liquid crystal color filter |
| JPH11166900A (en) * | 1997-12-05 | 1999-06-22 | Canon Inc | Examining device and method, and computer-readable storage medium |
-
2005
- 2005-02-23 JP JP2005046914A patent/JP4425815B2/en not_active Expired - Fee Related
-
2006
- 2006-02-14 TW TW095104888A patent/TWI405962B/en not_active IP Right Cessation
- 2006-02-23 KR KR1020060017763A patent/KR20060094056A/en not_active Application Discontinuation
- 2006-02-23 CN CN2006100080105A patent/CN1834733B/en not_active Expired - Fee Related
Also Published As
| Publication number | Publication date |
|---|---|
| KR20060094056A (en) | 2006-08-28 |
| JP4425815B2 (en) | 2010-03-03 |
| TW200636228A (en) | 2006-10-16 |
| CN1834733A (en) | 2006-09-20 |
| JP2006234470A (en) | 2006-09-07 |
| TWI405962B (en) | 2013-08-21 |
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