CN1828280B - Appearance checking device and method - Google Patents
Appearance checking device and method Download PDFInfo
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- CN1828280B CN1828280B CN2006100576897A CN200610057689A CN1828280B CN 1828280 B CN1828280 B CN 1828280B CN 2006100576897 A CN2006100576897 A CN 2006100576897A CN 200610057689 A CN200610057689 A CN 200610057689A CN 1828280 B CN1828280 B CN 1828280B
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/01—Arrangements or apparatus for facilitating the optical investigation
- G01N21/15—Preventing contamination of the components of the optical system or obstruction of the light path
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/55—Specular reflectivity
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- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
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- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K3/00—Apparatus or processes for manufacturing printed circuits
- H05K3/0002—Apparatus or processes for manufacturing printed circuits for manufacturing artworks for printed circuits
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
- G01N21/956—Inspecting patterns on the surface of objects
- G01N2021/95638—Inspecting patterns on the surface of objects for PCB's
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- G—PHYSICS
- G06—COMPUTING; CALCULATING OR COUNTING
- G06T—IMAGE DATA PROCESSING OR GENERATION, IN GENERAL
- G06T2207/00—Indexing scheme for image analysis or image enhancement
- G06T2207/30—Subject of image; Context of image processing
- G06T2207/30108—Industrial image inspection
- G06T2207/30141—Printed circuit board [PCB]
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- Engineering & Computer Science (AREA)
- Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
- Manufacturing & Machinery (AREA)
- Crystallography & Structural Chemistry (AREA)
- Optics & Photonics (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Testing Of Optical Devices Or Fibers (AREA)
Abstract
The invention relates to a testing device for appearance and the testing method. The said testing device can distinguish the false drawback cause by light source or optical element and the real drawback of base plate. The process is as that: said testing device (1) testing base plate by viewing the reflect light of illumination ray on surface (6a) of base plate, changing optical axis or focal point position through the periodical or free swinging or bending of optical element, of which comprises light source (2), and the second reflecting mirror (3) and the first reflecting mirror (4) or collective lens (5); then said false drawback will swing, through which realizes said distinguish.
Description
Technical field
The present invention relates to be used for the appearance inspection device and the appearance inspection method of the glass substrate of LCD etc.
Background technology
In the past, in the inspection of liquid crystal glass base etc.,, by visual its catoptrical optical change of observing, confirmed to coat that defective, the dust such as film line, pin hole of lip-deep resist adheres to has or not etc. by the observer to the substrate surface irradiates light.As the appearance inspection device that is used for this inspection, have by the device that constitutes with the lower part, that is: make from the catoptron of the light deflection of light source irradiation; The light of convergence by mirror deflection makes it shine convergent lens on the substrate surface, for example Fresnel lens (Fresnel lens) etc.; And keep substrate so that the illumination at low powers illumination of assembling by convergent lens is mapped to the substrate holder (for example with reference to patent documentation 1) on the substrate surface.In this appearance inspection device, the illumination at low powers light that shines on the substrate surface produces faint scattered light and is reflected in defective part, so the observer can check the defective of substrate surface by observe irreflexive reflected light (scattered light) with visual type.
Patent documentation 1 TOHKEMY 2000-97864 communique
But in existing appearance inspection device, when producing bad that distortion or tiny scar, dust adheres to etc. in optical elements such as lens and catoptron (lamp optical system), the illumination light that is upset by this undesirable element shines on the substrate surface.The observer is visual have been shone the substrate surface of illumination light and has detected defective on the substrate surface, is defective because of substrate itself causes, or the problem that causes because of the undesirable element of lamp optical system so there is the variation that can not identify the light that presents on the substrate surface.Therefore, exist false defect picture (false defect) misidentification that the undesirable element because of lamp optical system is caused to become the problem of the true defect of substrate itself.
Summary of the invention
The present invention is exactly In view of the foregoing and proposes, and its purpose is, appearance inspection device, and the appearance inspection method of this device of use of the true defect that can discern false defect that the undesirable element because of light source or optical element etc. causes and substrate itself is provided.
In order to achieve the above object, the invention provides following means.
Appearance inspection device of the present invention is characterised in that to have: lamp optical system, and it has light source and is used to assemble from the convergent lens of the illumination light of this light source ejaculation; And substrate holder, its substrate is held in the angle that is suitable for macro check, wherein, check defective on the described substrate by observing the described illumination light that penetrates from described light source at the lip-deep reflected light of described substrate, described appearance inspection device also has driver element, this driver element makes described light source in described light source or at least one optical element or at least one side's small sway in the described optical element, change described optical axis or described focal position, the swing of wherein said at least one optical element can change from the optical axis or the focal position of the described illumination light of described light source ejaculation, described appearance inspection device is by changing from the optical axis or the described focal position of the described illumination light of described light source ejaculation, described illumination light is shone on the described surface of described substrate, the false defect picture that is caused by described lamp optical system is rocked on the described surface of described substrate, focus state is changed, identify the false defect that causes by described lamp optical system and the described lip-deep true defect of described substrate.
And, according to appearance inspection device of the present invention, it is characterized in that, described lamp optical system also has makes the described illumination light that penetrates from the described light source catoptron to described substrate deflection, and described convergent lens is assembled and made on its described surface that shines described substrate by the illumination light of this mirror reflects; Described driver element is swung the plate-shaped optical element of described convergent lens or described catoptron to change described optical axis or described focal position.
In addition, the illumination light that appearance inspection method of the present invention penetrates from light source to the surface irradiation that remains on the substrate on the substrate holder with predetermined incident angle, by the reflected light of visualization from the surface of described substrate, check the defective on the described substrate, it is characterized in that, make described light source or the small sway on the direction that the optical axis direction with described illumination light intersects of at least one side in the described optical element in described light source or at least one optical element, change described optical axis, described illumination light is shone on the described surface of described substrate, make thus by having the false defect picture that lamp optical system that described light source and being used to assembles the convergent lens of the described illumination light that penetrates from this light source causes and rock on the described surface of described substrate, perhaps make described light source or the small sway on described optical axis direction of at least one side in the described optical element in described light source or at least one optical element, change described focal position, described illumination light is shone on the described surface of described substrate, the focus state of described false defect picture is changed, can discern false defect that is caused by described lamp optical system and the true defect that occurs regularly on the described surface of described substrate, the swing of wherein said at least one optical element can change from the optical axis or the focal position of the described illumination light of described light source ejaculation.
According to appearance inspection device of the present invention, at least one side that can swing in light source and the optical element changes optical axis or focal position.Thus, can discern in the defective that goes out by visual detection, project to the true defect that false defect on the substrate and substrate itself are produced with what the variation of optical axis or focal position was rocked.
Description of drawings
Fig. 1 is the figure of the appearance inspection device of expression the 1st embodiment of the present invention.
Fig. 2 is the figure of the appearance inspection device of expression the 2nd embodiment of the present invention.
Embodiment
Below, the appearance inspection device and the appearance inspection method of the 1st embodiment of the present invention are described with reference to Fig. 1.
The 1st embodiment of the present invention provide as shown in Figure 1, for example be used for the appearance inspection device 1 of the inspection of liquid crystal glass base, this appearance inspection device 1 is for example by constituting with the lower part: the light source 2 of metal-halide lamp etc.; The 1st catoptron 4 (optical element), it makes the light that penetrates from light source 2 change to the 2nd catoptron 3 lateral deviations; The 2nd catoptron 3 (optical element), it makes the light by 4 deflections of the 1st catoptron change to convergent lens 5 lateral deviations; Convergent lens 5 (optical element), it is assembled on the inspection area of broad of surperficial 6a that light by 3 deflections of the 2nd catoptron makes its substrate 6 that shines whole or part; Substrate holder 7, it is configured in the below of convergent lens 5, and the glass substrate that for example keeps flat-panel monitor (FPD) usefulness is as becoming the substrate 6 of checking object.Herein, light source the 2, the 1st catoptron the 4, the 2nd catoptron 3, convergent lens 5 and substrate holder 7 are housed in the crust of the device body 9 of rectangular box shape, a part of opening of one side (front) 9a of observer's side of this crust of the device body 9 makes the surperficial 6a that observer 8 can visualization substrate 6.In addition, label 9b represents other side (back side, right flank, left surface) except becoming a positive side 9a, constituent apparatus shell body 9.
The 1st catoptron 4 forms the rectangular thin plate shape, be located on the emergent light axis of light source 2, and be provided with being tilted, make minute surface 4a, make 2nd catoptron 3 of illumination light that penetrates from light source 2 reflect (deflection) to the top of being located at crust of the device body 9 towards the 2nd catoptron 3 sides.In addition, the rotary drive unit 10 of motor etc. for example is installed on the 1st catoptron 4, the operation of the driving switch 11a of the operating portion 11 of the open side by being located at crust of the device body 9 is just changeed, is reversed in the axes O 1 with rotary drive unit 10 is the predetermined rotation angle range at center (swing) repeatedly.For example, on the axle that the optical axis with illumination light intersects, the 1st catoptron 4 is is periodically come and gone with the minute angle in ± several years rotate (swing), the optical axis O2 that is shone the illumination light on the substrate 6 thus after 3 reflections of the 2nd catoptron can periodically be shifted on the direction vertical with optical axis O2.The periodic shift (swing) of optical axis O2 by this illumination light, the light beam of illumination light is swung on the surface of substrate 6.Herein, the periodic rotary of the 1st catoptron 4 is, so that optical axis O2 can rotate in the minute angle of the about 10mm～100mm of surperficial 6a superior displacement of substrate 6, consider from observer 8 checking efficiency aspect, on plan range, change 30mm～70mm according to being preferably, more preferably on plan range, change the mode that is about 50mm and carry out cyclical movement.
The 2nd catoptron 3 forms the rectangular thin plate shape, is located at than light source 2 more on the reflection optical axis of the 1st catoptron 4 of top, and setting, make minute surface 3a towards convergent lens 5. with being tiltedAnd the 2nd catoptron 3 is rotated a 3b and rotatably supports, and a side 9a of observer's 8 sides of this turning axle 3b and crust of the device body 9 extends setting abreast, and this turning axle 3b is connected on the rotary drive unit 12 of motor etc.This rotary drive unit 12 comes the 2nd catoptron 3 is rotated control according to the operation of operating portion 11, thereby change illumination light by convergent lens 5 irradiations to the range of exposures of the surperficial 6a of substrate 6, for example make the 2nd catoptron 3 with ± 30 ° rotate than wide-angle.
Convergent lens 5 for example is made of the Fresnel lens that forms rectangular plate shape, is used to assemble by the light of the 2nd catoptron 3 reflections make it shine the surperficial 6a of substrate 6.In the present embodiment, constituted convergent lens 5 by the 1st Fresnel lens that the diffusion light that penetrates from light source 2 is converted to parallel beam and near the 2nd Fresnel lens of the converging parallel light beam of the 1st Fresnel lens configuration, but also can constitute by a Fresnel lens.After, this convergent lens 5 is called Fresnel lens.
Substrate holder 7 forms rectangular plate shape, and 7a comes supporting substrate 6 by absorbing unit (omitting diagram) in the above.And substrate holder 7 is configured in the below of Fresnel lens 5, makes the illumination light of assembling by Fresnel lens 5 shine on the surperficial 6a of substrate 6.In addition, substrate holder 7 is rotated a 7b and rotatably supports, and a side 9a of observer's 8 sides of this turning axle 7b and crust of the device body 9 extends setting abreast.The rotary drive unit 13 that on this turning axle 7b, has connected motor etc., the operation of driving switch 11a by operating portion 11, substrate holder 7 tilts for being suitable for the predetermined pitch angle of macro check from horizontal attitude under illumination light, perhaps reverses and checks to carry out the back side.
Below, the method for using the appearance inspection device 1 that as above constitutes to carry out the inspection of substrate 6 is described.
At first, mounting substrate 6 also adsorbs maintenance on the reference position of 7a on substrate holder 7, obtains the origin of substrate 6, and it is predetermined pitch angle that substrate holder 7 is holded up.Then, the illumination light that penetrates from light source 2 to substrate 6 irradiations of mounting on substrate holder 7 by the 1st catoptron 4 and the 2nd catoptron 3 and Fresnel lens 5.As shown in Figure 1, when illumination light big at the substrate 6 of mounting on substrate holder 7, that assemble by Fresnel lens 5 can not shine whole of substrate 6, the 2nd catoptron 3 is rotated driving, makes by the illumination light of the 2nd catoptron 3 reflections on substrate 6, in the enterprising line scanning of above-below direction of being holded up to the substrate 6 at predetermined pitch angle.The reflection of light light that observer 8 observes on the surperficial 6a that shines substrate 6, checking on the surperficial 6a of substrate 6 has zero defect.Herein, when for example producing scar on the surperficial 6a of substrate 6, the illumination light of being shone seems different with other normal part because of this defective diffuse reflection.
When carrying out this macro check, the operating rod 11b of observer 8 operating operation portions 11 makes rotary drive unit 13 rotatings, makes substrate holder 7 turn to the angle of inclination of seeing the defective on the substrate 6 easily clearly under illumination.Substrate holder 7 be set at be suitable for angle of inclination that observer 8 observes after, fine motion operating rod 11b on fore-and-aft direction makes substrate holder 7 swings, can detect the defective that produces well thus on the surperficial 6a of substrate 6.
During defectiveness, observer 8 makes substrate holder 7 stop fine motion on the surperficial 6a that has detected substrate 6 by this visualization.In this stage, the rotary drive unit 10 of drive installation on the 1st catoptron 4 makes the 1st catoptron 4 come and go rotation (swinging minutely) on predetermined angular range intercycle ground.Periodic wobble motion by the 1st catoptron 4, the optical axis O2 that shines the illumination light on the surperficial 6a of substrate 6 along with oscillating motion at scope internal shift from optical axis O3 to optical axis O4.It is mobile or fixing on the surperficial 6a of substrate 6 along with the cycle shift of this optical axis that observer 8 observes by the detected defective of visualization.Promptly, if the true defect that substrate 6 is produced itself, even then the optical axis O2 of illumination light is displaced to optical axis O4 from optical axis O3, its position does not change yet, with respect to this, if project to false defect on the surperficial 6a of substrate 6 owing to the undesirable element (for example attached to the dust on the optical element surface) of lamp optical system, then this false defect swing on substrate 6 along with the displacement of optical axis.Therefore,, then be judged as the false defect that the undesirable element because of lamp optical system causes, can identify the true defect on the substrate 6 if the defective that goes out by visual detection is periodically swung.On the other hand,, then be judged as this detected defective and be the true defect of substrate 6 itself, for example use laser designator to wait the position coordinates that obtains (registration) this true defect if the defective that goes out by visual detection does not move with the cycle shift of optical axis.
Big at checked substrate 6, can not cut apart examination scope under the situation of inspection to whole irradiates light, regulate the angle of the 2nd catoptron 3, cut apart scope irradiating illumination light to each, carry out operation as hereinbefore repeatedly, implement whole inspection of substrate 6.
Therefore, in the appearance inspection device 1 that as above constitutes, on than the 1st little catoptron 4 of the 2nd catoptron 3, rotary drive unit 10 is set, can be center periodically just change repeatedly, reverse (swing) thus with the axes O 1 of rotary drive unit 10, the 1st catoptron 4 is come and gone with minute angle rotate, the optical axis O2 by the illumination light on the surperficial 6a that shines substrate 6 after Fresnel lens 5 convergences is shifted on the scope intercycle ground from optical axis O3 to optical axis O4.Thus, can discern in the defective that goes out by visual detection, on substrate 6 true defects that false defect that the undesirable element because of lamp optical system of swing periodically causes and substrate 6 itself are produced along with the periodic shift of optical axis O2.
According to the appearance inspection method that has used the appearance inspection device 1 that as above constitutes, the true defect of false defect that existing method can't realize, that cause because of the undesirable element of lamp optical system and substrate 6 itself can be identified reliably, the defects detection precision in the visual examination can be improved.
Like this, by making the lamp optical system swing, can discern the false defect that causes because of lamp optical system and the true defect on the substrate 6 reliably, only detect the true defect on the substrate 6, for example, the time that the defective of carrying out in the operation in the back, use microscope etc. is observed in detail can be reduced, the required time of inspecting substrate can be reduced.
In addition, the invention is not restricted to above-mentioned the 1st embodiment, can suitably change in the scope that does not break away from its aim.For example, the unit that periodically is shifted as the focal position of optical axis O2 that makes the illumination light on the surperficial 6a that shines substrate 6 or illumination light, except making the swing of the 1st catoptron 4, also can make light source 2 or the 2nd catoptron 3, be configured near the light source 2 lens, at least one side who is disposed in the optical element in the lamp optical system of Fresnel lens 5 etc. swings.For example, also can periodically push the 1st catoptron the 4, the 2nd catoptron 3, Fresnel lens 5 etc. plate-shaped optical element periphery and make its bending, make the optical axis or the focal position A displacement of illumination light, at least one optical element of constituting lamp optical system is moved continuously or discontinuously along a direction or other direction in the plane that intersects with optical axis O2, thereby the optical axis of illumination light is shifted.And, more than by rotary drive unit 10 each optical element is periodically swung, if but can identify by observer 8 naked eyes because lamp optical system and the false defect that occurs on substrate 6 then needn't make it periodically swing also can be swung randomly.And, in the 1st embodiment, formed and used the 1st catoptron 4 and the 2nd catoptron 3 to make, but also can not use the 1st catoptron 4, and the illumination light from light source 2 is shone directly on the 2nd catoptron 3 from the structure of the illumination light deflection of light source 2 ejaculations.In these structures, by driver element is set, make at least one the optical element swing that constitutes lamp optical system, make the optical axis displacement that shines the illumination light on the substrate 6, or change the focal position A of illumination light, whether be the false defect that the undesirable element because of lamp optical system causes thereby can discern.
Below, the appearance inspection device and the appearance inspection method of the 2nd embodiment of the present invention are described with reference to Fig. 2.
The 2nd embodiment of the present invention is the same with the 1st embodiment shown in Figure 1, relates to being used for for example appearance inspection device 20 of the inspection of FPD usefulness glass substrate., the structure identical with the appearance inspection device 1 of the 1st embodiment is marked with same numeral herein, and detailed.In addition, in Fig. 2, the state when representing from observer 8 (not shown among Fig. 2) side observation appearance inspection device 20 inside.And in Fig. 2, showing with axes O 5 is the state at the pre-determined tilt angle (45 °～60 °) that substrate 6 is rotated into be suitable for macro check, center.
Appearance inspection device 20 shown in Figure 2 is different with the 1st embodiment, does not have to be provided with the catoptron of the optical axis deflection make the light that penetrates from light source 2.On the other hand, be provided with and be fixed as predetermined angle with can be to two Fresnel lenses 5 of the surperficial 6a irradiating illumination light of substrate 6 and to two light sources 2 of each Fresnel lens 5 irradiates lights.And each light source 2 relatively is provided with Fresnel lens 5, is configured in the position of more leaning on the top of crust of the device body 9 than Fresnel lens 5.In addition, the driver element 21 of linear motion actuator for example etc. has been installed on light source 2, by this driver element 21 light source 2 (optical axis direction) on directions X has been come and gone and move (swing), thus periodically fine motion.In addition, the operation according to the driving switch 11a (not shown in Fig. 2) of operating portion for example shown in Figure 1 11 comes control drive unit 21.Herein, the periodic fine motion of light source 2 is carried out to making the focal position of the Fresnel lens 5 about 50mm～150mm of displacement for example on optical axis O2 line, consider from the aspect of observer's checking efficiency, be preferably and make light source 2 periodically come and go mobile along optical axis O2 line, make that 100mm approximately is shifted as the translocation distance of focal position.In addition, label 2b represents the outer cover of light source 2.
Below, the method for using the appearance inspection device 20 that as above constitutes to carry out the inspection of substrate 6 is described.
Penetrate light from each light source 2, make this light shine mounting on the substrate on the substrate holder 76 by each Fresnel lens 5.On the substrate on the substrate holder 76, shine the illumination light that has by 5 convergences of two Fresnel lenses in mounting.The focal position of illumination light during the driver element 21 of not drive installation on light source 2, that form by Fresnel lens 5 is respectively focal position B.
Then, make under its state that rotates to the angle of inclination that is suitable for observing, under illumination light the surperficial 6a that observes substrate 6 and when detecting defective at driving substrate support 7, the driver element 21 of drive installation on each light source 2 makes light source 2 periodically swing and round mobile in small scope on optical axis O2 line.By come and go moving of this light source 2, the focal position B that shines the illumination light on the surperficial 6a of substrate 6 is displaced to focal position C along the direction of optical axis O2.The observer observes: follow the cycle shift from this focal position B to focal position C, whether the variation of the focus states such as variation of size variation (amplify, dwindle) for example or vividness is arranged on the surperficial 6a of defective at substrate 6 that occurs on the substrate 6, perhaps whether do not change fully or almost.When confirming to change, be judged as undesirable element owing to the optical element of lamp optical system and project to false defect on the substrate 6.On the other hand, if the defective that goes out by visual detection does not change, does not change on the surperficial 6a of substrate 6 with coming and going of light source 2 is mobile, then be judged as this defective that goes out by visual detection and be the true defect on the substrate 6, for example use laser designator etc. to obtain the position coordinates of (registration) true defect.
Therefore, in the appearance inspection device 20 that as above constitutes, driver element 21 is set on light source 2, on optical axis, periodically comes and goes repeatedly and move, can make focal position periodically displacement between B and C of the illumination light of assembling by Fresnel lens 5 thus.Thus, the true defects that false defect that the undesirable element because of lamp optical system that can be identified in the defective that the surperficial 6a of substrate 6 go up to occur, changes along with the cycle shift of focal position causes and the substrate 6 that does not thereupon change itself produce.
In addition, the invention is not restricted to above-mentioned the 2nd embodiment, can suitably change in the scope that does not break away from its aim.For example, the unit that periodically is shifted as the focal position (focal length) that makes the light on the surperficial 6a that shines substrate 6, on light source 2, be provided with driver element 21, but also can make the lens 2a of light source 2 or Fresnel lens 5 on optical axis O2 direction, come and go mobile, make the focal position displacement of illumination light, or make Fresnel lens 5 periodically crooked along optical axis O2 direction, make the focal position displacement of illumination light.And, in the 2nd embodiment, formed structure, but quantity separately is not particularly limited with a plurality of light sources 2 and Fresnel lens 5.In addition, the catoptron that makes from the illumination light deflection of light source 2 ejaculations can be set also, this catoptron be come and gone on optical axis direction move or crooked displacement, thereby the focal position is shifted.And, in the 2nd embodiment, at least one optical element that constitutes lamp optical system is moved, thereby the focal position of illumination light periodically is shifted, but be not limited thereto, focal position displacement gets final product for making the observer can identify the false defect that the undesirable element because of lamp optical system causes.
Claims (8)
1. appearance inspection device is characterized in that having:
Lamp optical system, it has light source and is used to assemble from the convergent lens of the illumination light of this light source ejaculation; And
Substrate holder, its substrate is held in the angle that is suitable for macro check,
Wherein, check defective on the described substrate at the lip-deep reflected light of described substrate by observing the described illumination light that penetrates from described light source,
Described appearance inspection device also has driver element, this driver element makes described light source in described light source or at least one optical element or at least one side's small sway in the described optical element, change described optical axis or described focal position, the swing of wherein said at least one optical element can change from the optical axis or the focal position of the described illumination light of described light source ejaculation
Described appearance inspection device is by changing from the optical axis or the described focal position of the described illumination light of described light source ejaculation, described illumination light is shone on the described surface of described substrate, the false defect picture that is caused by described lamp optical system is rocked on the described surface of described substrate, focus state is changed, identify the false defect that causes by described lamp optical system and the described lip-deep true defect of described substrate.
2. appearance inspection device according to claim 1 is characterized in that,
Described driver element is swung described light source or at least one side in the described optical element in described light source or described at least one optical element on the direction that the described optical axis with described illumination light intersects, make the optical axis displacement of described lamp optical system.
3. appearance inspection device according to claim 1 is characterized in that,
Described driver element is swung described light source in described light source or described at least one optical element or at least one side in the described optical element on the direction of described optical axis, change described focal position.
4. according to any described appearance inspection device in the claim 1～3, it is characterized in that,
Described driver element makes described light source in described light source or described at least one optical element or the periodically fine motion of at least one side in the described optical element.
5. appearance inspection device according to claim 1, it is characterized in that, described lamp optical system also has makes the described illumination light that penetrates from the described light source catoptron to described substrate deflection, and described convergent lens is assembled and made on its described surface that shines described substrate by the illumination light of described mirror reflects;
Described driver element is swung the plate-shaped optical element of described convergent lens or described catoptron to change described optical axis or described focal position.
6. appearance inspection device according to claim 5 is characterized in that,
Described mirror arrangement is made of the 1st catoptron that described optical axis is turned to and the 2nd catoptron bigger than the 1st catoptron between described light source and described convergent lens, and described driver element makes the side swing in described the 1st catoptron and described the 2nd catoptron.
7. appearance inspection device according to claim 1 is characterized in that,
Described driver element makes described optical element come and go with minute angle and rotates, make the scope of described optical axis at the described surperficial superior displacement 10mm～100mm of described substrate, perhaps described driver element come and go to move described light source or described optical element on the direction of described optical axis, make the scope of described focal position at the line superior displacement 50mm～150mm of described optical axis.
8. appearance inspection method, to the illumination light of the surface irradiation that remains on the substrate on the substrate holder,, check the defective on the described substrate with predetermined incident angle by the reflected light of visualization from the described surface of described substrate from the light source ejaculation, it is characterized in that
Make described light source or the small sway on the direction that the optical axis direction with described illumination light intersects of at least one side in the described optical element in described light source or at least one optical element, change described optical axis, described illumination light is shone on the described surface of described substrate, make thus by having the false defect picture that lamp optical system that described light source and being used to assembles the convergent lens of the described illumination light that penetrates from this light source causes and rock on the described surface of described substrate, perhaps make described light source or the small sway on described optical axis direction of at least one side in the described optical element in described light source or at least one optical element, change described focal position, described illumination light is shone on the described surface of described substrate, the focus state of described false defect picture is changed, can discern false defect that is caused by described lamp optical system and the true defect that occurs regularly on the described surface of described substrate, the swing of wherein said at least one optical element can change from the optical axis or the focal position of the described illumination light of described light source ejaculation.
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2005-052799 | 2005-02-28 | ||
| JP2005052799 | 2005-02-28 | ||
| JP2005052799A JP4633499B2 (en) | 2005-02-28 | 2005-02-28 | Appearance inspection apparatus and appearance inspection method |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN1828280A CN1828280A (en) | 2006-09-06 |
| CN1828280B true CN1828280B (en) | 2011-07-13 |
Family
ID=36946776
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2006100576897A Expired - Fee Related CN1828280B (en) | 2005-02-28 | 2006-02-24 | Appearance checking device and method |
Country Status (4)
| Country | Link |
|---|---|
| JP (1) | JP4633499B2 (en) |
| KR (1) | KR20060095479A (en) |
| CN (1) | CN1828280B (en) |
| TW (1) | TW200632311A (en) |
Families Citing this family (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR100831629B1 (en) * | 2006-08-31 | 2008-05-22 | 동일파텍주식회사 | Parallel and double action type apparatus for testing a macro |
| JP5006024B2 (en) * | 2006-12-27 | 2012-08-22 | オリンパス株式会社 | Projection device for visual inspection |
| KR101373129B1 (en) * | 2011-12-30 | 2014-03-13 | 엘아이지에이디피 주식회사 | Substrate Inspecting System |
| KR101593020B1 (en) * | 2014-07-09 | 2016-02-11 | 세광테크 주식회사 | Panel Aligning Apparatus with Lighting Reflection Plate |
| JP6587822B2 (en) * | 2015-04-22 | 2019-10-09 | 株式会社ブイ・テクノロジー | Appearance inspection device |
| CN105115978A (en) * | 2015-09-09 | 2015-12-02 | 山东华芯富创电子科技有限公司 | Touch screen detection jig |
| CN107589072A (en) * | 2017-08-30 | 2018-01-16 | 东莞新友智能科技有限公司 | A kind of light supply apparatus for Surface testing |
| CN108627516A (en) * | 2018-03-21 | 2018-10-09 | 郑州轻工业学院 | A kind of repair method and examination and repair system for air-conditioning products |
| CN109030495A (en) * | 2018-06-26 | 2018-12-18 | 大连鉴影光学科技有限公司 | A kind of optical element defect inspection method based on machine vision technique |
| JP7111659B2 (en) * | 2019-06-28 | 2022-08-02 | 矢崎総業株式会社 | Appearance inspection device for terminals |
Family Cites Families (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP4576006B2 (en) * | 1998-09-21 | 2010-11-04 | オリンパス株式会社 | Projection device for visual inspection |
| KR20040053375A (en) * | 2000-08-24 | 2004-06-23 | 올림푸스 가부시키가이샤 | Device for appearance inspection |
| JP2002374445A (en) * | 2001-06-12 | 2002-12-26 | Nikon Corp | Electronic camera |
| TWI274183B (en) * | 2002-05-31 | 2007-02-21 | Olympus Corp | Macro illumination apparatus |
| JP4107020B2 (en) * | 2002-09-06 | 2008-06-25 | セイコーエプソン株式会社 | LCD panel inspection equipment |
| JP2004153422A (en) * | 2002-10-29 | 2004-05-27 | Toshiba Corp | Imaging apparatus, face collating apparatus, method for detecting dirt of the imaging apparatus, and face collating method |
| JP4245452B2 (en) * | 2003-10-06 | 2009-03-25 | 富士通株式会社 | Lens dirt determination method and apparatus |
-
2005
- 2005-02-28 JP JP2005052799A patent/JP4633499B2/en not_active Expired - Fee Related
-
2006
- 2006-02-09 TW TW095104369A patent/TW200632311A/en unknown
- 2006-02-24 CN CN2006100576897A patent/CN1828280B/en not_active Expired - Fee Related
- 2006-02-24 KR KR1020060018372A patent/KR20060095479A/en not_active Application Discontinuation
Also Published As
| Publication number | Publication date |
|---|---|
| CN1828280A (en) | 2006-09-06 |
| JP2006234721A (en) | 2006-09-07 |
| JP4633499B2 (en) | 2011-02-16 |
| TW200632311A (en) | 2006-09-16 |
| KR20060095479A (en) | 2006-08-31 |
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