JP2008170153A - Macro inspection device - Google Patents

Macro inspection device Download PDF

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JP2008170153A
JP2008170153A JP2007000672A JP2007000672A JP2008170153A JP 2008170153 A JP2008170153 A JP 2008170153A JP 2007000672 A JP2007000672 A JP 2007000672A JP 2007000672 A JP2007000672 A JP 2007000672A JP 2008170153 A JP2008170153 A JP 2008170153A
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illumination system
light
light source
illumination
glass substrate
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Makoto Nishizawa
誠 西澤
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Olympus Corp
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Olympus Corp
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Abstract

<P>PROBLEM TO BE SOLVED: To change the radiation direction of illumination light with respect to a substrate. <P>SOLUTION: A left lighting system 7 and a right lighting system 8 are arranged as second lighting systems on both sides of a holder body 1 with respect to a first lighting system 4 arranged substantially just above the holder body 1. <P>COPYRIGHT: (C)2008,JPO&INPIT

Description

本発明は、例えば液晶ディスプレイなどのフラットパネルディスプレイ（ＦＰＤ）のガラス基板などの基板面上に照射角度を変えて照明光を照射して欠陥部を検査するマクロ検査装置に関する。   The present invention relates to a macro inspection apparatus that inspects a defective portion by irradiating illumination light on a substrate surface such as a glass substrate of a flat panel display (FPD) such as a liquid crystal display at different irradiation angles.

例えば液晶ディスプレイのガラス基板のマクロ検査は、ガラス基板面上に観察用のマクロ照明光を照射し、ガラス基板面上からの反射光の変化を目視により観察し、ガラス基板面上に生じているパターンの傷や欠け、基板表面上の膜圧むらやダストの付着を検出する。   For example, a macro inspection of a glass substrate of a liquid crystal display is generated on the glass substrate surface by irradiating macro illumination light for observation on the glass substrate surface and visually observing a change in reflected light from the glass substrate surface. Detects scratches and chips on the pattern, uneven film pressure on the substrate surface, and dust adhesion.

ガラス基板面上には、例えばライン状又は縦横比の異なる長方形状のパターンが規則性を持って形成されている。具体的には、例えば縦横比の異なる長方形状のＴＦＴ（thin film trasistor）が格子状に規則正しく形成されている。このように規則性のあるＴＦＴパターンに対してマクロ照明光の入射方向を変えると、パターンからの回折光によりパターン発生した欠陥部の見え方が変わる。例えば、マクロ照明光の入射方向に対してパターンを９０°回転させると、長方形状のＴＦＴパターン上の欠陥からの反射条件、例えば散乱光や回折光の発生条件が変わる。これにより、ＴＦＴパターンや配線パターンに対してマクロ照明光の入射方向を変えると、パターンの長手方向から照射したマクロ照明光では観察されなかったガラス基板面上の欠陥部がパターンの長手方向と直交する方向からマクロ照明光を照射することにより観察できるようになる。液晶ディスプレイ用のマザーガラス基板は、生産性を高めるために多面取りの基板を用いているが、例えば多面取り基板の一部のパターンが９０°向きを変えて形成されていることがある。このような多面取りのマザーガラス基板は、マクロ照明光の入射方向に対して９０°に回転させることによりパターン方向の異なる多面取り基板を良好に観察することができる。   On the glass substrate surface, for example, a linear pattern or a rectangular pattern having a different aspect ratio is formed with regularity. Specifically, for example, rectangular TFTs (thin film transformers) having different aspect ratios are regularly formed in a lattice shape. When the incident direction of the macro illumination light is changed with respect to the regular TFT pattern in this manner, the appearance of the defect portion where the pattern is generated is changed by the diffracted light from the pattern. For example, when the pattern is rotated by 90 ° with respect to the incident direction of the macro illumination light, the reflection conditions from defects on the rectangular TFT pattern, for example, the generation conditions of scattered light and diffracted light are changed. As a result, when the incident direction of the macro illumination light is changed with respect to the TFT pattern or the wiring pattern, the defect portion on the glass substrate surface that is not observed with the macro illumination light irradiated from the longitudinal direction of the pattern is orthogonal to the longitudinal direction of the pattern. It becomes possible to observe by irradiating the macro illumination light from the direction to do. As a mother glass substrate for a liquid crystal display, a multi-chamfer substrate is used in order to increase productivity. For example, a part of the pattern of the multi-chamfer substrate may be formed by changing the orientation by 90 °. Such a multi-sided mother glass substrate can be favorably observed by rotating it at 90 ° with respect to the incident direction of the macro illumination light.

特許文献１は、複数の円弧状の開口部を同心円状に形成したホルダ本体上に液晶ディスプレイ等のガラス基板を載置し、回転機構の各リフトピンを円弧状の各開口部を通すことによりガラス基板をホルダ本体の上方に持ち上げ、この状態で各リフトピンを介してガラス基板を略９０°回転させ、この後に各リフトピンを下降させてガラス基板をホルダ本体上に再度載置するホルダ装置が開示されている。
特開２００４−０１２３４１号公報 In Patent Document 1, a glass substrate such as a liquid crystal display is placed on a holder body in which a plurality of arc-shaped openings are formed concentrically, and each lift pin of a rotating mechanism is passed through each arc-shaped opening. A holder device is disclosed in which the substrate is lifted above the holder body, and in this state, the glass substrate is rotated by approximately 90 ° via each lift pin, and thereafter, each lift pin is lowered to place the glass substrate again on the holder body. ing.
JP 2004-012341 A

液晶ディスプレイを多面取りで製造するマザーガラス基板は、半導体製造の技術の進歩と共に大型化が進み、例えば一辺が２０００×３０００ｍｍを超える大型サイズが出現している。このような大型ガラス基板のマクロ検査を行うのに特許文献１のホルダ装置を用いるとすれば、検査者が目視観察し易い角度に基板ホルダ本体を立ち上げた状態でマクロ照明光を照射してマクロ検査を行い、次に基板ホルダ本体を水平な状態まで戻した後、基板ホルダ本体上に吸着保持された大型ガラス基板の吸着を解除し、各リフトピンにより支持して上方に持ち上げて略９０°回転させ、この後に各リフトピンを下降させてガラス基板をホルダ本体上に載置し、吸着保持した後、再び基板ホルダ本体を目視観察に適した角度に立ち上げた状態でマクロ照明光を大型ガラス基板に照射してマクロ検査を行うことになる。   A mother glass substrate for manufacturing a liquid crystal display by multi-cavity has been increased in size with the progress of semiconductor manufacturing technology. For example, a large size having a side exceeding 2000 × 3000 mm has appeared. If the holder apparatus of patent document 1 is used for performing the macro inspection of such a large glass substrate, the macro illumination light is irradiated in a state where the substrate holder body is raised at an angle that is easy for the inspector to visually observe. After performing a macro inspection and then returning the substrate holder body to a horizontal state, the suction of the large glass substrate sucked and held on the substrate holder body is released, supported by each lift pin, and lifted upward to approximately 90 °. Rotate and then lower each lift pin to place the glass substrate on the holder body, hold it by suction, and then hold the substrate holder body up again at an angle suitable for visual observation. A macro inspection is performed by irradiating the substrate.

このため、大型ガラス基板を９０°回転させて目視観察するためには、大型で重量のあるホルダ本体を回転させる回転機構が大型化するばかりでなく、ホルダ本体を水平状態に戻して大型ガラス基板を略９０°回転しなければならないために時間がかかる。タクトタイムを出来るだけ小さくしたい液晶ディスプレイのガラス基板の製造工程では、ガラス基板を製造した後に欠陥検査を行う一連の工程があり、欠陥検査に要する時間も短縮したい要求がある。しかしながら、特許文献１では、ホルダ本体を水平位置まで戻した後に大型ガラス基板を持ち上げて略９０°回転させてからホルダ本体上に載置し、再度、ホルダ本体を目視観察のために立ち上げる目視検査には不要な時間がかかり、検査タクトタイムの大きな損失となっている。   For this reason, in order to rotate the large glass substrate 90 ° for visual observation, not only the rotating mechanism for rotating the large and heavy holder main body is enlarged, but also the holder main body is returned to the horizontal state to obtain a large glass substrate. Takes approximately 90 ° to rotate. In the manufacturing process of a glass substrate of a liquid crystal display where the tact time is desired to be as small as possible, there is a series of processes for performing defect inspection after manufacturing the glass substrate, and there is a demand for reducing the time required for defect inspection. However, in Patent Document 1, after returning the holder main body to the horizontal position, the large glass substrate is lifted and rotated by approximately 90 °, and then placed on the holder main body, and the holder main body is raised again for visual observation. The inspection takes unnecessary time, resulting in a large loss of inspection tact time.

本発明は、基板を保持し検査者の目視視察に適した所定の角度に回動可能なホルダ本体と、ホルダ本体を所定の角度に回動させた状想で、基板に対して斜め上方の照肘方向と、斜め上方の照射方向に対して左側または右側に回転した照射方向とから照明光を照射する照明系とを備えたマクロ検査装置である。   The present invention is a holder body that holds a substrate and can be rotated to a predetermined angle suitable for an inspector's visual inspection, and a concept in which the holder body is rotated to a predetermined angle. It is a macro inspection apparatus provided with the illumination system which irradiates illumination light from an illuminating elbow direction and the irradiation direction rotated to the left or the right side with respect to the obliquely upward irradiation direction.

本発明によれば、基板に対する照明光の照射方向の切り替えを短時間で行うことができるマクロ検査装置を提供できる。   ADVANTAGE OF THE INVENTION According to this invention, the macro inspection apparatus which can switch the irradiation direction of the illumination light with respect to a board | substrate in a short time can be provided.

以下、本発明の一実施の形態について図面を参照して説明する。
図１乃至図３はマクロ検査装置の構成図であって、図１は正面図、図２は上面図、図３は側面図である。ホルダ本体１上には、例えばＦＰＤ基板として液晶ディスプレイを多面取りするガラス基板２が載置されている。このガラス基板２は、図４に示すように縦横比の異なる長方形状のＴＦＴ３が格子状に複数規則正しく形成されている。ホルダ本体１は、図３に示すように検査者が目視で観察する観察位置Ｃとなる検査装置の正面側に向って矢印Ａ方向に揺動可能に設けられている。 Hereinafter, an embodiment of the present invention will be described with reference to the drawings.
1 to 3 are configuration diagrams of a macro inspection apparatus, in which FIG. 1 is a front view, FIG. 2 is a top view, and FIG. 3 is a side view. On the holder main body 1, for example, a glass substrate 2 on which a liquid crystal display is multi-faced as an FPD substrate is placed. In this glass substrate 2, a plurality of rectangular TFTs 3 having different aspect ratios are regularly formed in a lattice shape as shown in FIG. As shown in FIG. 3, the holder body 1 is provided so as to be swingable in the direction of arrow A toward the front side of the inspection apparatus, which is an observation position C where an inspector visually observes.

第１の照明系４は、ホルダ本体１の上方に配置されている。この第１の照明系４は、検査者の目視観察に適した所定の角度に立ち上げられたホルダ本体１に保持されたガラス基板２に対しての斜め上方の照射方向から第１の照明光をガラス基板２の面上に照射する。この第１の照明系４は、光束を放射する例えばメタルハライドランプ、ナトリウムランプ、蛍光灯などの第１の光源５と、この第１の光源５から放射された照明光（光束）を収束させて第１の照明光としてガラス基板２の面上に照射するフレネルレンズ等からなる第１の収束レンズ６とを有する。   The first illumination system 4 is disposed above the holder body 1. This 1st illumination system 4 is 1st illumination light from the irradiation direction of the diagonally upper direction with respect to the glass substrate 2 hold | maintained at the holder main body 1 raised by the predetermined angle suitable for an observer's visual observation. Is irradiated onto the surface of the glass substrate 2. The first illumination system 4 converges a first light source 5 such as a metal halide lamp, a sodium lamp, or a fluorescent lamp that emits a light beam, and illumination light (light beam) emitted from the first light source 5. A first convergent lens 6 made of a Fresnel lens or the like that irradiates the surface of the glass substrate 2 as the first illumination light.

これら第１の光源５と第１の収束レンズ６とは、ホルダ本体１上に載置されたガラス基板２に対する光軸（入射光軸）Ｑ１上に一列に配置されている。本実施の形態では、第１の照明系４の光軸Ｑ１を図３に示すように下方に垂直に設けてあるが、検査装置の正面側に対して前後方向に傾斜させてもよい。又、図５に示すように第１の収束レンズ６の後側焦点距離か長い場合には、反射ミラー３０で照明光路を折り曲げることも可能である。 The first light source 5 and the first converging lens 6 are arranged in a line on the optical axis (incident optical axis) Q 1 with respect to the glass substrate 2 placed on the holder body 1. In the present embodiment, the optical axis Q1 of the first illumination system 4 is provided vertically downward as shown in FIG. 3, but it may be inclined in the front-rear direction with respect to the front side of the inspection apparatus. Further, as shown in FIG. 5, when the rear focal length of the first convergent lens 6 is long, the illumination optical path can be bent by the reflection mirror 30.

第１の照明系４は、例えば図３に示すようにホルダ本体１が傾斜している状態で、第１の光源５から発した第１の照明光を光軸Ｑ１に沿って第１の収束レンズ６を通してガラス基板２に対して斜め上方の照明方向Ｉ１から照射する。第１の収束レンズ６で収束された第１の照明光は、図５に示すように検査者の観察位置Ｃに向くようにガラス基板２上で反射される。このときの第１の照明光の照射方向Ｉ１は、図４に示すように例えばＴＦＴ３の長手方向と平行である。 First illumination system 4, for example in a state where the holder body 1 is inclined as shown in FIG. 3, first along the first illumination light emitted from the first light source 5 to the optical axis Q 1 irradiated from the illumination direction I 1 of the obliquely upward with respect to the glass substrate 2 through the converging lens 6. The first illumination light converged by the first converging lens 6 is reflected on the glass substrate 2 so as to face the observation position C of the inspector as shown in FIG. Irradiation direction I 1 of the first illumination light in this case is parallel to the longitudinal direction of the example TFT3 as shown in FIG.

又、検査者は、第１の照明光がガラス基板２の面上に照射したときの反射光が検査者の観察位置Ｃに向くように、ホルダ本体１の傾き角度を調整する。このとき、検査者は、ガラス基板２上で反射した収束光の外側からガラス基板２上の欠陥部を良好に観察し易い角度に立ち上げる。なお、ガラス基板２の面上からの反射光が検査者の観察位置Ｃに到達するためには、第１の照明光を光軸Ｑ１の傾き角度とホルダ本体１の傾斜角度とを相互に調整してもよく、検査者の背の高さ（身長）に応じてホルダ本体１の傾斜角度を予め設定してもよい。 Further, the inspector adjusts the tilt angle of the holder body 1 so that the reflected light when the first illumination light is irradiated onto the surface of the glass substrate 2 is directed to the observation position C of the inspector. At this time, the inspector raises the defect portion on the glass substrate 2 from the outside of the convergent light reflected on the glass substrate 2 at an angle at which it is easy to observe well. In order to light reflected from the surface of the glass substrate 2 to reach the observation position C of the examiner, the first illumination light and the inclination angle and the inclination angle of the holder main body 1 of the optical axis Q 1 to each other The tilt angle of the holder body 1 may be set in advance according to the height (height) of the examiner.

図１に示すようにホルダ本体１の正面側に対して左右両側には、それぞれ左側の第２の照明系（以下、左側照明系と称する）７と右側の第２の照明系（以下、右側照明系と称する）８とが配置されている。左側照明系７は、目視観察と易い所定の角度に回動されたホルダ本体１の左側の斜め上方に設けられている。この左側照明系７は、光束を放射する例えばメタルハライドランプ、ナトリウムランプ、蛍光灯などの第２の左側光源９と、この第２の左側光源９から放射された光束を集光して第２の左側照明光として左側斜め上方からガラス基板２の面上に照射する左側の第２の左側収束レンズ１０とを有し、光軸Ｑ２上に一列に配置されている。 As shown in FIG. 1, a left second illumination system (hereinafter referred to as a left illumination system) 7 and a right second illumination system (hereinafter referred to as a right side) are respectively provided on the left and right sides with respect to the front side of the holder body 1. 8) (referred to as the illumination system). The left side illumination system 7 is provided obliquely above and on the left side of the holder main body 1 that is rotated at a predetermined angle that is easy for visual observation. The left illumination system 7 condenses a second left light source 9 such as a metal halide lamp, a sodium lamp, or a fluorescent lamp that emits a light beam, and a second light source 9 that condenses the light beam emitted from the second left light source 9. and a second left converging lens 10 on the left side to be irradiated on the surface of the glass substrate 2 from the left side obliquely upward as left illumination light are arranged in a row on the optical axis Q 2.

左側照明系７は、図３に示すようにホルダ本体１が傾斜している状態で、第２の左側照明光を光軸Ｑ２に沿って左斜め上方からガラス基板２の左側面内に照射する。このときの第２の左側照明光は、図４に示すように例えばＴＦＴ３の長手方向と直交する左側斜め上方の照射方向Ｉ２から入射する。すなわち、第２の左側照明光の照射方向Ｉ２は、第１の照明系４により第１の照明光をガラス基板２の面上に照射する照射方向Ｉ１に対してガラス基板２の入射角度が略同じになるようにして左側方向に所定の角度回転、例えば略９０°回転させた方向である。 Left illumination system 7, in a state where the holder body 1 as shown in FIG. 3 is inclined, the irradiation from the left obliquely upward along the second left illumination light to the optical axis Q 2 in the left side surface of the glass substrate 2 To do. Second left illumination light at this time is incident from the illumination direction I 2 of the left obliquely upward perpendicular to the longitudinal direction of the example TFT3 as shown in FIG. That is, the irradiation direction I 2 of the second left illumination light is the incident angle of the glass substrate 2 with respect to the irradiation direction I 1 where the first illumination system 4 irradiates the first illumination light onto the surface of the glass substrate 2. Are rotated by a predetermined angle in the leftward direction, for example, approximately 90 °.

右側照明系８は、ホルダ本体１の右側の斜め上方に設けられた点を除いて左側照明系７と同様である。第２の右側光源１１と第２の右側収束レンズ１２とは、光軸Ｑ３上に一列に配置されている。
右側照明系８は、図３に示すようにホルダ本体１が傾斜している状態で、第２の右側照明光を光軸Ｑ３に沿って右斜め上方からガラス基板２の右側面内に照射する。このときの第２の右側照明光の照射方向Ｉ３は、図４に示すように第１の照明系４により第１の照明光をガラス基板２上のパターンに照射する照射方向Ｉ１に対して右側方向に略９０°回転させた方向である。 The right illumination system 8 is the same as the left illumination system 7 except that the right illumination system 8 is provided obliquely above the right side of the holder body 1. A second right light source 11 and the second right convergent lens 12 are arranged in a row on the optical axis Q 3.
Right illumination system 8, in a state where the holder body 1 is inclined as shown in FIG. 3, radiation from the right obliquely upward along the second right illumination light to the optical axis Q 3 in the right side surface of the glass substrate 2 To do. Irradiation direction I 3 of the second right illumination light at this time, compared irradiation direction I 1 is irradiated to the pattern on the glass substrate 2 of the first illumination light by the first illumination system 4, as shown in FIG. 4 This is the direction rotated approximately 90 ° in the right direction.

第１の照明系４の第１の光源５、左側照明系７の左側光源９、右側照明系８の右側光源１１は、いずれか１つが点灯されていればよく、他の２つも必要に応じて点灯することも可能である。
図５はマクロ検査装置の第１の照明系４の具体的な構成図を示す。なお、図１と同一部分には同一符号を付してその詳しい説明は省略する。検査装置本体２０内には、ベース２１が設けられている。このベース２１上には、ホルダ本体１を備えた基板支持台２２が設けられている。ホルダ本体１は、基板支持台２２上で矢印Ａ方向に回動可能であり、かつ検査者が観察に適した所定の傾斜角度に係止させることが可能である。ベース２１上には、ミクロ検査用として顕微鏡ユニットを門型アーム（ガントリー）に搭載した顕微鏡装置２３が矢印Ｂ方向に移動可能に設けられている。 Any one of the first light source 5 of the first illumination system 4, the left light source 9 of the left illumination system 7, and the right light source 11 of the right illumination system 8 need only be lit, and the other two are also necessary. It is also possible to light up.
FIG. 5 shows a specific configuration diagram of the first illumination system 4 of the macro inspection apparatus. The same parts as those in FIG. 1 are denoted by the same reference numerals, and detailed description thereof is omitted. A base 21 is provided in the inspection apparatus main body 20. On the base 21, a substrate support 22 having the holder body 1 is provided. The holder main body 1 can be rotated in the direction of arrow A on the substrate support base 22 and can be locked at a predetermined inclination angle suitable for observation by the inspector. On the base 21, a microscope device 23 in which a microscope unit is mounted on a portal arm (gantry) for micro inspection is provided so as to be movable in the arrow B direction.

検査装置本体２０の上部には、第１の照明系４として光源カバー２５内に収納された第１の光源５を備える光源ユニット２４が配置されている。第１の光源５から放射される光束Ｌ１の光路上には、熱線吸収フィルタ２６、調光ユニット２７及びフィルタ２８が設けられている。
光源ユニット２４から放射される光束Ｌ１の光路上には、取付け枠２９に固定された反射ミラー３０が配置されている。この反射ミラー３０は、その反射方向が下方のガラス基板２に向くように光束Ｌ１の光路に対して傾斜するように設けられている。この反射ミラー３０は、光源ユニット２４から放射された光束Ｌ１を光軸Ｑ１上に沿って斜め下方に反射する折り返し光路を構成するもので、ガラス基板２の大型化に適用するために折り返し光路を採用している。 A light source unit 24 including a first light source 5 housed in a light source cover 25 as a first illumination system 4 is disposed on the inspection apparatus body 20. On the optical path of the light beam L 1 emitted from the first light source 5, a heat ray absorption filter 26, a light control unit 27, and a filter 28 are provided.
On the optical path of the light beam L1 emitted from the light source unit 24, a reflection mirror 30 fixed to the mounting frame 29 is disposed. The reflection mirror 30 is provided so as to be inclined with respect to the optical path of the light beam L 1 so that the reflection direction thereof faces the lower glass substrate 2. The reflection mirror 30 constitutes a folded optical path that reflects the light beam L 1 radiated from the light source unit 24 obliquely downward along the optical axis Q 1 , and is folded for application to an increase in the size of the glass substrate 2. An optical path is used.

第１の収束レンズ６は、第１のフレネルレンズ３１、第２のフレネルレンズ３２及び液晶散乱板３３を有する。第１のフレネルレンズ３１は、第１の光源５から出射された照明光を平行光束に成形するものである。第２のフレネルレンズ３２は、第１のフレネルレンズ３１で平行光束に成形された照明光を収束し、第１の照明光Ｌ１としてホルダ本体１上のガラス基板２の面上に対してパターンの長手方向と平行となる上方向からパターンエッジからの回折光や欠陥部からの散乱光が発生し易い入射角度で照射する。液晶散乱板３３は、通常、光を透過しない散乱状態にあり、電圧印加により光透過状態になる。光源ユニット２４は、液晶散乱板３３を散乱状態にすることで面光源として使用し、透過状態にすることで収束光源として使用する。 The first converging lens 6 includes a first Fresnel lens 31, a second Fresnel lens 32, and a liquid crystal scattering plate 33. The first Fresnel lens 31 shapes the illumination light emitted from the first light source 5 into a parallel light flux. Second Fresnel lens 32, the pattern for the first has been converged illumination light formed into a parallel beam by the Fresnel lens 31, the first illumination light L 1 as the glass substrate 2 faces the upper on the holder main body 1 Irradiation is performed at an incident angle from which the diffracted light from the pattern edge and the scattered light from the defect portion are likely to be generated from the upper direction parallel to the longitudinal direction. The liquid crystal scattering plate 33 is normally in a scattering state that does not transmit light, and enters a light transmitting state when a voltage is applied. The light source unit 24 is used as a surface light source by setting the liquid crystal scattering plate 33 in a scattering state, and is used as a convergent light source by setting it in a transmissive state.

図６は左側照明系７及び右側照明系８の具体的な構成図である。なお、左側照明系７及び右側照明系８は、同一構成を有するので、一方の左側照明系７について説明する。第２の照明系である左側照明系７（右側照明系８）の各光源ユニット４０は、光源カバー４１内に収納された左側光源９（右側光源１１）を備える。各光源ユニット４０は、左側光源９（右側光源１１）から放射される各光束Ｌ２の光路上には、熱線吸収フィルタ４２、調光ユニット４３及びフィルタ４４が設けられている。 FIG. 6 is a specific configuration diagram of the left side illumination system 7 and the right side illumination system 8. Since the left illumination system 7 and the right illumination system 8 have the same configuration, only one left illumination system 7 will be described. Each light source unit 40 of the left illumination system 7 (right illumination system 8), which is the second illumination system, includes a left light source 9 (right light source 11) housed in a light source cover 41. Each light source unit 40 is provided with a heat ray absorption filter 42, a light control unit 43, and a filter 44 on the optical path of each light beam L 2 emitted from the left light source 9 (right light source 11).

各光源ユニット４０から放射される光束Ｌ２の光路上には、取付け枠４５に固定された反射ミラー４６が配置されている。反射ミラー４６は、その反射方向が第１の照明系の光軸Ｑ１に対して左右方向に略９０°回転した方向から下方のガラス基板２に向くように光束Ｌ２の光路に対して傾斜するように設けられている。これら反射ミラー４６は、各光源ユニット４０から放射された各光束Ｌ２をそれぞれ各光軸Ｑ２、Ｑ３上に沿って斜め下方に反射する折り返し光路を構成する。 On the optical path of the light beam L2 radiated from each light source unit 40, a reflection mirror 46 fixed to the mounting frame 45 is disposed. The reflection mirror 46 is inclined with respect to the optical path of the light beam L 2 so that the reflection direction is directed to the lower glass substrate 2 from a direction rotated approximately 90 ° in the left-right direction with respect to the optical axis Q 1 of the first illumination system. It is provided to do. These reflecting mirrors 46 constitute a folded optical path for reflected obliquely downward along the emitted respective light beams L 2 and on the optical axis Q 2, Q 3 from the respective light source units 40.

各第２の収束レンズ１０、１２は、それぞれ第１のフレネルレンズ４７、第２のフレネルレンズ４８及び液晶散乱板４９を有する。第１のフレネルレンズ４７は、左側光源９（右側光源１１）から出射された照明光を平行光束に成形させるものである。第２のフレネルレンズ４８は、第１のフレネルレンズ４７で平行光束に成形された照明光を収束し、第２の照明光Ｌ２としてホルダ本体１上のガラス基板２の面上に対してパターンの長手方向と直交する左側上方（右側上方）からパターンエッジからの回折光や欠陥部からの散乱光が発生し易い入射角度でそれぞれ照射する。液晶散乱板４９は、第１の照明系４の散乱板３３と同じである。 Each of the second converging lenses 10 and 12 includes a first Fresnel lens 47, a second Fresnel lens 48, and a liquid crystal scattering plate 49, respectively. The first Fresnel lens 47 is for shaping the illumination light emitted from the left light source 9 (right light source 11) into a parallel light flux. Second Fresnel lens 48, the pattern for the first converging illumination light formed into a parallel light beam by the Fresnel lens 47, the second illumination light L 2 as the holder body 1 on the glass substrate 2 faces the upper Irradiation is performed at an incident angle at which diffracted light from the pattern edge and scattered light from the defect portion are likely to be generated from the upper left side (upper right side) perpendicular to the longitudinal direction. The liquid crystal scattering plate 49 is the same as the scattering plate 33 of the first illumination system 4.

照明切換部５０は、第１の照明系４の第１の光源５、左側照明系７の左側光源９を点灯制御するもので、検査条件に応じて第１の光源５、左側光源９又は右側光源１１のいずれか１つを点灯制御したり、第１の光源５と左側光源９、第１の光源５と右側光源１１、左側光源９と右側光源１１のいずれかの組み合わせで点灯制御する。   The illumination switching unit 50 controls the lighting of the first light source 5 of the first illumination system 4 and the left light source 9 of the left illumination system 7, and the first light source 5, the left light source 9 or the right light source according to the inspection conditions. Lighting control of any one of the light sources 11 is performed, or lighting control is performed with any combination of the first light source 5 and the left light source 9, the first light source 5 and the right light source 11, and the left light source 9 and the right light source 11.

次に、上記の如く構成された装置の動作について説明する。
第１の照明系４の第１の光源５が照明切換部５０によって点灯されると、この第１の光源５から放射された光束Ｌ１は、反射ミラー３０で斜め下方に反射される。この反射ミラー３０で反射された光束Ｌ１は、第１のフレネルレンズ３１及び第２のフレネルレンズ３２により収束され、液晶散乱板３３を通って第１の照明光Ｌ１としてホルダ本体１上のガラス基板２の上方向から所定の入射角度で照射される。これにより、ガラス基板２は、第１の照明光Ｌ１の収束光によって例えば図４に示すようにＴＦＴ３の例えば長手方向と平行な照射方向Ｉ１から照明される。 Next, the operation of the apparatus configured as described above will be described.
When the first light source 5 of the first illumination system 4 is turned on by the illumination switching unit 50, the light beam L 1 emitted from the first light source 5 is reflected obliquely downward by the reflection mirror 30. The light beam L 1 reflected by the reflecting mirror 30 is converged by the first Fresnel lens 31 and the second Fresnel lens 32, the liquid crystal scattering plate 33 through the first on the holder body 1 as the illumination light L 1 and the Irradiation is performed at a predetermined incident angle from above the glass substrate 2. Thus, the glass substrate 2 is illuminated from, for example, parallel to the longitudinal direction irradiation direction I 1 of the TFT3 as shown by the first converging light of the illumination light L 1 in FIG. 4, for example.

このとき、ホルダ本体１は、図３に示すように検査装置の正面側（検査者側）に向って検査者が目視観察し易い角度まで矢印Ａ方向に回動させて起き上がらせる。ホルダ本体１が所定の傾斜角度に停止して保持されたとき、ホルダ本体１上のガラス基板２が第１の照明光Ｌ１の光束によりマクロ照明される。このときのガラス基板２の面上からの散乱光や回折光等の反射光は、検査者の観察位置Ｃに到達する。検査者は、観察位置Ｃにおいてガラス基板２の面上からの反射光の変化を目視観察し、ガラス基板２の面上に露光機により形成されたパターンのみだれによる傷、欠けなどの欠陥、パターンの膜厚むらやガラス基板２上に付着したダストなどの欠陥を検出する。 At this time, as shown in FIG. 3, the holder main body 1 is turned up in the direction of arrow A to the front side (inspector side) of the inspection apparatus to an angle that is easy for the inspector to visually observe. When the holder body 1 is held stopped at a predetermined inclination angle, the glass substrate 2 on the holder body 1 is the macro illuminated by the first light flux of the illumination light L 1 of. At this time, the reflected light such as scattered light and diffracted light from the surface of the glass substrate 2 reaches the observation position C of the inspector. The inspector visually observes a change in reflected light from the surface of the glass substrate 2 at the observation position C, and a defect such as a flaw or a chip caused by an ablation of the pattern formed on the surface of the glass substrate 2 by an exposure machine. And defects such as dust adhering to the glass substrate 2 are detected.

照明切換部５０によって第１の照明系４の第１の光源５が消灯され、左側照明系７の左側光源９が点灯されると、この左側光源９から放射された光束Ｌ２は、反射ミラー４６に入射し、第１のフレネルレンズ４７及び第２のフレネルレンズ４８と、液晶散乱板４９を通って第２の照明光Ｌ２としてホルダ本体１上のガラス基板２を左側斜め上方から照射する。これにより、第２の照明光Ｌ２は、例えば図４に示すようにＴＦＴ３の長手方向と直交する第１の照明系４の照射方向Ｉ１に対して左側方向に略９０°回転した照射方向Ｉ２から第２の照明光Ｌ２により照明される。 The illumination switching unit 50 is the first light source 5 of the first illumination system 4 is turned off, the left light source 9 of the left illumination system 7 is lit, the light beam L 2 emitted from the left light source 9, a reflection mirror incident on 46, the first Fresnel lens 47 and the second Fresnel lens 48, irradiates the glass substrate 2 on the holder body 1 from the left side obliquely upward as the liquid crystal scattering plate 49 second illumination light L 2 through . As a result, the second illumination light L 2 is, for example, as shown in FIG. 4, an irradiation direction rotated approximately 90 ° in the left direction with respect to the irradiation direction I 1 of the first illumination system 4 orthogonal to the longitudinal direction of the TFT 3. from I 2 it is illuminated by the second illumination light L 2.

このように第１の照明系４から第２の照明系７に切り換えることによりＴＦＴパターンに対して照明光の入射角度を９０°変えることができ、第１の照明系４の照明方向では観察できなかったガラス基板２の面上の欠陥が観察できるようになる。
照明切換部５０によって左側照明系７の左側光源９が消灯され、右側照明系８の右側光源１１が点灯されると、第２の照明光Ｌ２がホルダ本体１上のガラス基板２を右側斜め上方から照射される。これにより、第２の照明光Ｌ２は、例えば図４に示すようにＴＦＴ３に対する第１の照明系４の照射方向Ｉ１に対して右側方向に略９０°回転した照射方向Ｉ３から第２の照明光Ｌ２を照明する。 By switching from the first illumination system 4 to the second illumination system 7 in this way, the incident angle of the illumination light can be changed by 90 ° with respect to the TFT pattern, and observation is possible in the illumination direction of the first illumination system 4. The defect on the surface of the glass substrate 2 that has not been present can be observed.
By the illumination switching unit 50 is turned off the left light source 9 of the left illumination system 7, the right light source 11 of the right lighting system 8 is turned on, the second illumination light L 2 is a glass substrate 2 right diagonally on the holder main body 1 Irradiated from above. As a result, the second illumination light L 2 is emitted from the irradiation direction I 3 rotated approximately 90 ° to the right with respect to the irradiation direction I 1 of the first illumination system 4 for the TFT 3 as shown in FIG. illuminating the illumination light L 2 of the.

このように配列方向に規則性のあるＴＦＴパターンに対して照明光の入射方向を９０°変えてガラス基板２を目視観察することにより、ある特定の照射方向Ｉ１からの第１の照明光Ｌ１により観察できなかったガラス基板２の面上の方向性のある欠陥からの回折条件や散乱条件が変わり良好に検出することが可能になる。 In this way, by visually observing the glass substrate 2 while changing the incident direction of the illumination light by 90 ° with respect to the TFT pattern having regularity in the arrangement direction, the first illumination light L from the specific irradiation direction I 1 is observed. The diffraction condition and the scattering condition from the directional defect on the surface of the glass substrate 2 that could not be observed by 1 change, and it becomes possible to detect well.

このように上記第１の実施の形態によれば、ホルダ本体１の略真上に配置された第１の照明系４に対してホルダ本体１の左右両側に第２の照明系として左側照明系７と右側照明系８とを配置することで、従来のようにガラス基板２をホルダ４５上で回転させたり、ホルダ本体１自体を回転させることなく、第１の光源５と左側光源９、右側光源１１とを点灯、消灯するだけで、ガラス基板２面上に例えば０°、４５°、９０°と異なる方向に形成されたＴＦＴ３や配線パターンに対して異なる照射角度、例えば照射方向Ｉ１と、この照射方向Ｉ１に対して左側又は右側の方向に略９０°回転した各照射方向Ｉ２、Ｉ３に照明光を短時間に切り換えることができる。これにより、異なる方向のパターンに対して各照射方向Ｉ１、Ｉ２、Ｉ３からそれぞれ照明光を照射することにより、パターン上の欠陥からの反射条件、例えば散乱光や回折光の発生条件を変えて、ガラス基板２面上の欠陥部の検査精度を向上させることができると共に、各照明光源５、９、１１を点灯、消灯制御するだけで高速でガラス基板２に対する照射方向をでき、液晶ディスプレイのガラス基板２の製造工程での検査タクトタイムを短縮できる。 As described above, according to the first embodiment, the left illumination system as the second illumination system on both the left and right sides of the holder body 1 with respect to the first illumination system 4 disposed substantially directly above the holder body 1. 7 and the right illumination system 8 are arranged so that the glass substrate 2 is not rotated on the holder 45 or the holder main body 1 itself is rotated as in the prior art. By simply turning on and off the light source 11, different irradiation angles, for example, irradiation direction I 1, with respect to TFTs 3 and wiring patterns formed on the glass substrate 2 surface in directions different from, for example, 0 °, 45 °, and 90 °. The illumination light can be switched in a short time to the respective irradiation directions I 2 and I 3 rotated approximately 90 ° in the left or right direction with respect to the irradiation direction I 1 . Thereby, by irradiating illumination light from the respective irradiation directions I 1 , I 2 , and I 3 to patterns in different directions, reflection conditions from defects on the pattern, for example, conditions for generating scattered light and diffracted light are set. In addition, the inspection accuracy of the defective portion on the surface of the glass substrate 2 can be improved, and the irradiation direction with respect to the glass substrate 2 can be changed at high speed by simply turning on / off the illumination light sources 5, 9, and 11. Inspection tact time in the manufacturing process of the glass substrate 2 of the display can be shortened.

又、各照射方向Ｉ１、Ｉ２、Ｉ３で照射したときのガラス基板２で反射した収束光は、全て検鏡者の観察位置Ｃに到達するので、検査者は、観察位置Ｃを変えることなく同一観察位置Ｃでガラス基板２を目視観察することができる。
ガラス基板２は、又は所定の角度に立ち上げられたホルダ本体１上に位置決めされた状態で固定保持されるため、従来のようにガラス基板２をホルダ本体１から持ち上げて回転させるものと比べてガラス基板２を位置決めした位置からずれることはなく、照射方向Ｉ１と略９０°回転させた各照射方向Ｉ２、Ｉ３との照明により検出した各欠陥部の各座標に誤差が生じることがない。 Further, since all the convergent light reflected by the glass substrate 2 when irradiated in the respective irradiation directions I 1 , I 2 , and I 3 reaches the observation position C of the spectrographer, the inspector changes the observation position C. The glass substrate 2 can be visually observed at the same observation position C without any problem.
Since the glass substrate 2 is fixed and held in a state of being positioned on the holder main body 1 raised at a predetermined angle, the glass substrate 2 is lifted from the holder main body 1 and rotated as in the conventional case. There is no deviation from the position where the glass substrate 2 is positioned, and an error may occur in each coordinate of each defect detected by illumination with the irradiation directions I 2 and I 3 rotated approximately 90 ° with the irradiation direction I 1. Absent.

次に、本発明の第２の実施の形態について図面を参照して説明する。なお、図１と同一部分には同一符号を付してその詳しい説明は省略する。
図７はマクロ検査装置の構成図である。このマクロ検査装置は、第１の実施の形態に記載された左側光源９及び右側光源１１を省き、第１の光源５を第１の照明系４の光軸Ｑ１上と左側照明系７の光軸Ｑ２上と右側照明系８の光軸Ｑ３上との間に移動可能に設けたものである。第１の光源５の移動機構６０は、例えば各光軸Ｑ１、Ｑ２、Ｑ３間に敷設された軌道と、この軌道上を移動可能なステージとを有し、このステージ上に第１の光源５を設ける。他の構成は、第１の実施の形態と同じである。 Next, a second embodiment of the present invention will be described with reference to the drawings. The same parts as those in FIG. 1 are denoted by the same reference numerals, and detailed description thereof is omitted.
FIG. 7 is a block diagram of the macro inspection apparatus. In this macro inspection apparatus, the left light source 9 and the right light source 11 described in the first embodiment are omitted, and the first light source 5 is placed on the optical axis Q 1 of the first illumination system 4 and the left illumination system 7. those provided movably between the optical axis Q 3 on the optical axis Q 2 and on the right the illumination system 8. The moving mechanism 60 of the first light source 5 includes, for example, a track laid between the optical axes Q 1 , Q 2 , and Q 3 and a stage that can move on the track, and a first stage is placed on the stage. The light source 5 is provided. Other configurations are the same as those of the first embodiment.

第１の照明系４から照明光をガラス基板２上に照射するときは、移動機構６０によって第１の光源５が第１の照明系４の光軸Ｑ１上に設けられる。左側照明系７から照明光をガラス基板２上に照射するときは、移動機構６０によって第１の光源５が左側照明系７の光軸Ｑ２上に設けられる。右側照明系８から照明光をガラス基板２上に照射するときは、移動機構６０によって第１の光源５が右側照明系８の光軸Ｑ３上に設けられる。
このように上記第２の実施の形態によれば、上述の第１の実施の形態と同様の効果を奏することが出来る。第１の光源５を第２の照明系の光源として流用することにより構成を簡略化することが出来る。 When the illumination light is irradiated onto the glass substrate 2 from the first illumination system 4, the first light source 5 is provided on the optical axis Q 1 of the first illumination system 4 by the moving mechanism 60. When the illumination light is irradiated onto the glass substrate 2 from the left illumination system 7, the first light source 5 is provided on the optical axis Q 2 of the left illumination system 7 by the moving mechanism 60. When the illumination light is irradiated onto the glass substrate 2 from the right illumination system 8, the first light source 5 is provided on the optical axis Q 3 of the right illumination system 8 by the moving mechanism 60.
As described above, according to the second embodiment, the same effects as those of the first embodiment described above can be obtained. The configuration can be simplified by diverting the first light source 5 as the light source of the second illumination system.

次に、本発明の第３の実施の形態について図面を参照して説明する。なお、図１と同一部分には同一符号を付してその詳しい説明は省略する。
図８はマクロ検査装置の構成図である。このマクロ検査装置は、第２の実施の形態と同様に左側光源９及び右側光源１１を省き、第２の照明系７、８の各光軸Ｑ２、Ｑ３上とにそれぞれ第１の折返しミラー６１、６２を設け、第１の光源５を第１と第２の折返しミラー６１、６２に向くように回動可能に設けたものである。第１の折返しミラー６１は、左側照明系７の光軸Ｑ２上に設けられ、第１の光源５からの第１の照明光を光軸Ｑ２上に折り曲げる。第１の折返しミラー６２は、右側照明系８の光軸Ｑ３上に設けられ、第１の光源５からの第１の照明光を光軸Ｑ３上に折り曲げる。 Next, a third embodiment of the present invention will be described with reference to the drawings. The same parts as those in FIG. 1 are denoted by the same reference numerals, and detailed description thereof is omitted.
FIG. 8 is a configuration diagram of the macro inspection apparatus. In this macro inspection apparatus, the left light source 9 and the right light source 11 are omitted as in the second embodiment, and the first folding is performed on each of the optical axes Q 2 and Q 3 of the second illumination systems 7 and 8. Mirrors 61 and 62 are provided, and the first light source 5 is rotatably provided so as to face the first and second folding mirrors 61 and 62. The first folding mirror 61 is disposed on the optical axis Q 2 on the left side the illumination system 7, bending the first illumination light from the first light source 5 on the optical axis Q 2. The first folding mirror 62 is disposed on the optical axis Q 3 of the right illumination system 8, bending the first illumination light from the first light source 5 on the optical axis Q 3.

なお、第１の光源５は、図示しない自転機構により矢印Ｄ方向に自転可能とし、第１の光源５から放射される光束Ｌ１の出射方向を第１の照明系４の光軸Ｑ１の方向と、第１の折返しミラー６１の設置された方向Ｅ１と、第１の折返しミラー６２の設置された方向Ｅ２とに変更可能である。
第１の照明系４から照明光をガラス基板２上に照射するときは、第１の光源５から放射された光束Ｌ１を第１の照明系４の光軸Ｑ１上に沿って伝播させ、第１の収束レンズ６を通して第１の照明光としてガラス基板２面上に照射する。
左側照明系７から照明光をガラス基板２上に照射するときは、例えば第１の光源５を回転させて光束Ｌ１の伝播方向を第１の折返しミラー６１の設置された方向Ｅ１に設定する。第１の光源５から放射された光束Ｌ１は、第１の折り返しミラー６１で反射し、さらに第２の折り返しミラー４６で反射して左側照明系７の光軸Ｑ２上に沿って伝播し、第２の照明光Ｌ２としてホルダ本体１上のガラス基板２を左側斜め上方から照射する。 The first light source 5 can be rotated in the direction of arrow D by a rotation mechanism (not shown), and the emission direction of the light beam L 1 radiated from the first light source 5 is set to the optical axis Q 1 of the first illumination system 4. direction, and the installed direction E 1 of the first folding mirror 61, can be changed in the installed direction E 2 of the first mirror 62.
When irradiating the illumination light on the glass substrate 2 from the first illumination system 4, the light beam L 1 emitted from the first light source 5 is propagated along the optical axis Q 1 of the first illumination system 4. The glass substrate 2 is irradiated as first illumination light through the first convergent lens 6.
When irradiated from the left side illumination system 7 to the illumination light on the glass substrate 2, for example setting a first light source 5 rotates the in propagation direction of the light beam L 1 in the installed direction E 1 of the first mirror 61 To do. The light beam L 1 radiated from the first light source 5 is reflected by the first folding mirror 61, further reflected by the second folding mirror 46, and propagated along the optical axis Q 2 of the left illumination system 7. , irradiating the glass substrate 2 on the holder body 1 from the left side obliquely upward as the second illumination light L 2.

右側照明系８から照明光をガラス基板２上に照射するときは、例えば第１の光源５を回転させて光束Ｌ１の伝播方向を第２の折返しミラー５２の設置された方向Ｅ２に設定する。第１の光源５から放射された光束Ｌ１は、第１の折り返しミラー６１で反射し、さらに第２の折り返しミラー４６で反射して右側照明系８の光軸Ｑ３上に沿って伝播し、第２の照明光Ｌ２としてホルダ本体１上のガラス基板２における右側半面を右側斜め上方から照射する。 When irradiated from the right side illumination system 8 illumination light on the glass substrate 2, for example setting a first light source 5 rotates the in propagation direction of the light beam L 1 in the installed direction E 2 of the second folding mirror 52 To do. The light beam L 1 radiated from the first light source 5 is reflected by the first folding mirror 61, further reflected by the second folding mirror 46, and propagated along the optical axis Q 3 of the right illumination system 8. , irradiating the right half from the right side diagonally above the glass substrate 2 on the holder body 1 as the second illumination light L 2.

このように上記第３の実施の形態においても上記第２の実施の形態と同様の作用効果を奏することができる。なお、第１の折返しミラー６１、６２に限らず、複数の折返しミラーを設け、これら折返しミラーによって液晶ディスプレイのガラス基板２やその他の検査対象に形成されたパターンの方向に応じて欠陥部を観察しやすい傾斜角度で照明光をガラス基板２等の検査対象に照射するようにしてもよい。   As described above, also in the third embodiment, the same operational effects as those in the second embodiment can be obtained. In addition, not only the first folding mirrors 61 and 62 but also a plurality of folding mirrors are provided, and the defective parts are observed according to the direction of the pattern formed on the glass substrate 2 of the liquid crystal display and other inspection objects by these folding mirrors. You may make it irradiate to test | inspection objects, such as the glass substrate 2, with the inclination angle which is easy to do.

なお、本発明は、上記各実施の形態に限定されるものではなく、各種変形してもよい。例えば、照明系は、第１の光源を複数備えるようにしてもよい。
ガラス基板２面上に照射する照明光の照射方向は、第１の照明系の照射方向Ｉ１に対して左側又は右側略９０°回転させた各照射方向Ｉ２又はＩ３とに限らず、液晶ディスプレイのガラス基板２やその他の検査対象に形成されたパターンの方向に応じて少なくとも第１の照明系４の照射方向Ｉ１に対して第２の照明系７、８の照射方向Ｉ２又はＩ３を９０°の回転範囲内に設定してもよい。 The present invention is not limited to the above embodiments, and various modifications may be made. For example, the illumination system may include a plurality of first light sources.
The irradiation direction of the illumination light irradiated on the surface of the glass substrate 2 is not limited to each irradiation direction I 2 or I 3 rotated approximately 90 ° on the left side or the right side with respect to the irradiation direction I 1 of the first illumination system, irradiation direction I 2 of the second illumination system 7, 8 with respect to the irradiation direction I 1 of at least the first illumination system 4 according to the direction of the glass substrate 2 and other test pattern formed on the object of liquid crystal display or I 3 may be set within a rotation range of 90 °.

第２の照明系として左側照明系７及び右側照明系８を設けているが、これら左側照明系７と右側照明系８とのうちいずれか一方のみを設ける構成としてもよい。この構成であっても、一つの照射方向だけでは観察されなかったガラス基板２面上の欠陥部を検査することができる。   Although the left illumination system 7 and the right illumination system 8 are provided as the second illumination system, only one of the left illumination system 7 and the right illumination system 8 may be provided. Even if it is this structure, the defect part on the glass substrate 2 surface which was not observed only by one irradiation direction can be test | inspected.

又、上記各実施の形態では、第１の照明系と第２の照明系とを別体にしたが、光束を放射する光源と、この光源から放射された照明光を収束させる収束レンズとを一つのユニットに構成する。この照明系を第１の照明系の光軸Ｑ１に相当する基板に対して斜め上方の照射方向と、第２の照明系の光軸Ｑ２又はＱ３に相当する斜め上方の照射方向に対して左側又は右側に回転した照射方向との間に移動可能に設けてもよい。 In each of the above embodiments, the first illumination system and the second illumination system are separated. However, a light source that emits a light beam and a converging lens that converges the illumination light emitted from the light source are provided. Configure as one unit. The irradiation direction of obliquely upward with respect to the substrate corresponding to the illumination system to the optical axis to Q 1 first illumination system, the irradiation direction of obliquely upward, which corresponds to the optical axis Q 2 or Q 3 of the second illumination system On the other hand, it may be provided so as to be movable between the irradiation direction rotated to the left or right.

本発明に係るマクロ検査装置の第１の実施の形態を示す正面図。The front view which shows 1st Embodiment of the macro inspection apparatus which concerns on this invention. 同装置の上面図。The top view of the apparatus. 同装置の側面図。The side view of the apparatus. 同装置の検査対象であるガラス基板上の格子パターンを示す摸式図。The schematic diagram which shows the lattice pattern on the glass substrate which is a test object of the same apparatus. 同装置における第１の反射照明系の具体的な構成図。The specific block diagram of the 1st reflective illumination system in the apparatus. 同装置における第２の左側反射照明系及び第２の右側反射照明系の具体的な構成図。The specific block diagram of the 2nd left reflective illumination system and the 2nd right reflective illumination system in the apparatus. 本発明に係るマクロ検査装置の第２の実施の形態を示す正面図。The front view which shows 2nd Embodiment of the macro inspection apparatus which concerns on this invention. 本発明に係るマクロ検査装置の第３の実施の形態を示す正面図。The front view which shows 3rd Embodiment of the macro inspection apparatus which concerns on this invention.

符号の説明Explanation of symbols

１：ホルダ本体、２：ガラス基板、３：ＴＦＴ、４：第１の照明系、５：第１の光源、６：第１の収束レンズ、３０：反射ミラー、７：第２の照明系（左側照明系）、８：右側の第２の照明系（右側照明系）、９：第２の左側光源、１０：第２の左側収束レンズ、１１：第２の右側光源、１２：第２の右側収束レンズ、２０：検査装置本体、２１：ベース、２２：基板支持台、２３：顕微鏡装置、２５：光源カバー、２４：光源ユニット、２６：熱線吸収フィルタ、２７：調光ユニット、２８：フィルタ、２９：取付け枠、３１：第１のフレネルレンズ、３２：第２のフレネルレンズ、３３：液晶散乱板、４０：光源ユニット、４１：光源カバー、４２：熱線吸収フィルタ、４３：調光ユニット、４４：フィルタ、４５：取付け枠、４６：反射ミラー、４７：第１のフレネルレンズ、４８：第２のフレネルレンズ、４９：液晶散乱板、５０：照明切換部、６０：移動機構、６１，６２：折返しミラー。   1: holder body, 2: glass substrate, 3: TFT, 4: first illumination system, 5: first light source, 6: first focusing lens, 30: reflection mirror, 7: second illumination system ( Left illumination system), 8: second illumination system on the right side (right illumination system), 9: second left light source, 10: second left convergence lens, 11: second right light source, 12: second Right convergence lens, 20: inspection device main body, 21: base, 22: substrate support, 23: microscope device, 25: light source cover, 24: light source unit, 26: heat ray absorption filter, 27: light control unit, 28: filter , 29: mounting frame, 31: first Fresnel lens, 32: second Fresnel lens, 33: liquid crystal scattering plate, 40: light source unit, 41: light source cover, 42: heat ray absorption filter, 43: light control unit, 44: Filter, 45: Mounting frame, 46: Anti Mirror, 47: first Fresnel lens, 48: second Fresnel lens, 49: liquid crystal scattering plate, 50: Lighting switching unit, 60: moving mechanism, 61 and 62: a folding mirror.

Claims (7)

基板を保持し検査者の目視視察に適した所定の角度に回動可能なホルダ本体と、
前記ホルダ本体を前記所定の角度に回動させた状想で、前記基板に対して斜め上方の照肘方向と、前記斜め上方の照射方向に対して左側または右側に回転した照射方向とから照明光を照射する照明系とを、
備えたことを特徴とするマクロ検査装置。 A holder body that holds the substrate and can be rotated to a predetermined angle suitable for an inspector's visual inspection;
Illuminating from the direction of the illuminator obliquely upward with respect to the substrate and the irradiation direction rotated to the left or right with respect to the irradiation direction obliquely upward, with the idea of rotating the holder body at the predetermined angle An illumination system that emits light,
A macro inspection apparatus characterized by comprising. 前記照明系は、前記基板に対して前記斜め上方の照射方向から前記照明光を照射する第１の照明系を前記ホルダの上方に配置し、前記斜め上方の照射方向に対して左側または右側に回転した照射方向とから前記照明光を照射する第２の照明系を前記ホルダの左側または右側のいずれかの位置に配置したことを特赦とする請求項１記載のマクロ検査装置。   The illumination system includes a first illumination system that irradiates the illumination light from the obliquely upward irradiation direction with respect to the substrate, and is disposed on the left side or the right side with respect to the obliquely upward irradiation direction. 2. The macro inspection apparatus according to claim 1, wherein the second illumination system that irradiates the illumination light from the rotated irradiation direction is disposed at either the left side or the right side of the holder. 前記第１の照明系および前記第２の照明系は、光束を放射する光源と、この光源から放射された前記照明光を収束させる収束レンズをそれぞれ備えたこと特徴とする請求項２記載のマクロ検査装置。   3. The macro according to claim 2, wherein each of the first illumination system and the second illumination system includes a light source that emits a light beam and a converging lens that converges the illumination light emitted from the light source. Inspection device. 前記第１の照明系及び前記第２の照明系は、前記各照明系の各光軸に移動可能に設けられた光源と、前記各照明系の各光軸上に配置され前記光源からの前記照明光を収束させる収束レンズとを備えたことを特徴とする請求項２記載のマクロ検査装置。   The first illumination system and the second illumination system include a light source movably provided on each optical axis of each illumination system, and the light source disposed on each optical axis of each illumination system. The macro inspection apparatus according to claim 2, further comprising a converging lens that converges the illumination light. 前記第１の照明系は、光束を放射する光源と、この光源から放射された前記照明光を収束させる収束レンズとを備え、前記第２の照明系は、該照明系の光軸上に前記光源から放射された前記照明光を導く折り返しミラーと、前記折り返しミラーで反射した前記照明光を収束させる収束レンズとを備え、前記光源を前記折り返しミラーに向くように回動可能に設けたことを特徴とする請求項２記載のマクロ検査装置。   The first illumination system includes a light source that emits a light beam and a converging lens that converges the illumination light emitted from the light source, and the second illumination system is arranged on the optical axis of the illumination system. A folding mirror for guiding the illumination light emitted from a light source; and a converging lens for converging the illumination light reflected by the folding mirror, wherein the light source is rotatably provided to face the folding mirror. The macro inspection apparatus according to claim 2, wherein 前記第２の照明系は、前記第１の照明系の照射方向に対して前記左側又は右側に９０°回転した位置に配置されることを特徴とする請求項２乃至５のいずれか１項記載のマクロ検査装置。   The said 2nd illumination system is arrange | positioned in the position rotated 90 degree | times to the said left side or the right side with respect to the irradiation direction of the said 1st illumination system. Macro inspection device. 前記照明系は、光束を放射する光源と、この光源から放射された前記照明光を収束させる収束レンズとを備え、これら光源および収束レンズを前記基板に対して斜め上方の照射方向と、前記斜め上方の照射方向に対して左側または右側に回転した照射方向との間に移動可能に設けたことを特徴とする請求項１記載のマクロ検査装置。   The illumination system includes a light source that emits a light beam and a converging lens that converges the illumination light emitted from the light source, and the light source and the converging lens are obliquely above the substrate with an irradiation direction, and the oblique 2. The macro inspection apparatus according to claim 1, wherein the macro inspection apparatus is provided so as to be movable between an irradiation direction rotated leftward or rightward with respect to an upper irradiation direction.
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Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2010043897A (en) * 2008-08-11 2010-02-25 Koito Mfg Co Ltd Foreign matter inspection device and foreign matter inspection method for vehicular lamp
CN106680289A (en) * 2017-01-25 2017-05-17 江苏东旭亿泰智能装备有限公司 Macroscopic inspection system for glass substrate

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2010043897A (en) * 2008-08-11 2010-02-25 Koito Mfg Co Ltd Foreign matter inspection device and foreign matter inspection method for vehicular lamp
CN106680289A (en) * 2017-01-25 2017-05-17 江苏东旭亿泰智能装备有限公司 Macroscopic inspection system for glass substrate

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