CN1809627A - 清洗漂洗方法 - Google Patents
清洗漂洗方法 Download PDFInfo
- Publication number
- CN1809627A CN1809627A CNA2004800175138A CN200480017513A CN1809627A CN 1809627 A CN1809627 A CN 1809627A CN A2004800175138 A CNA2004800175138 A CN A2004800175138A CN 200480017513 A CN200480017513 A CN 200480017513A CN 1809627 A CN1809627 A CN 1809627A
- Authority
- CN
- China
- Prior art keywords
- ether
- cleaning
- rinsing
- hydrocarbon
- fluorine
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
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- 238000000034 method Methods 0.000 title claims abstract description 49
- 238000004140 cleaning Methods 0.000 title claims abstract description 26
- 239000002904 solvent Substances 0.000 claims abstract description 56
- 229930195733 hydrocarbon Natural products 0.000 claims abstract description 53
- 150000002430 hydrocarbons Chemical class 0.000 claims abstract description 53
- 239000004215 Carbon black (E152) Substances 0.000 claims abstract description 52
- 150000004945 aromatic hydrocarbons Chemical class 0.000 claims abstract description 14
- 125000004432 carbon atom Chemical group C* 0.000 claims abstract description 11
- 150000001875 compounds Chemical class 0.000 claims abstract description 10
- 125000001153 fluoro group Chemical group F* 0.000 claims abstract description 6
- RTZKZFJDLAIYFH-UHFFFAOYSA-N Diethyl ether Chemical compound CCOCC RTZKZFJDLAIYFH-UHFFFAOYSA-N 0.000 claims description 88
- 229910052731 fluorine Inorganic materials 0.000 claims description 35
- 239000011737 fluorine Substances 0.000 claims description 33
- YCKRFDGAMUMZLT-UHFFFAOYSA-N Fluorine atom Chemical compound [F] YCKRFDGAMUMZLT-UHFFFAOYSA-N 0.000 claims description 32
- HYFLWBNQFMXCPA-UHFFFAOYSA-N 1-ethyl-2-methylbenzene Chemical compound CCC1=CC=CC=C1C HYFLWBNQFMXCPA-UHFFFAOYSA-N 0.000 claims description 8
- ODLMAHJVESYWTB-UHFFFAOYSA-N ethylmethylbenzene Natural products CCCC1=CC=CC=C1 ODLMAHJVESYWTB-UHFFFAOYSA-N 0.000 claims description 8
- 150000001338 aliphatic hydrocarbons Chemical class 0.000 claims description 6
- HCBRSIIGBBDDCD-UHFFFAOYSA-N 1,1,2,2-tetrafluoro-3-(1,1,2,2-tetrafluoroethoxy)propane Chemical compound FC(F)C(F)(F)COC(F)(F)C(F)F HCBRSIIGBBDDCD-UHFFFAOYSA-N 0.000 claims description 2
- 125000003709 fluoroalkyl group Chemical group 0.000 claims description 2
- 229950000929 flurotyl Drugs 0.000 claims description 2
- 229910052799 carbon Inorganic materials 0.000 claims 1
- 150000002170 ethers Chemical class 0.000 abstract 2
- 125000000217 alkyl group Chemical group 0.000 abstract 1
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- 238000009835 boiling Methods 0.000 description 13
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- 238000005259 measurement Methods 0.000 description 8
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- 239000007788 liquid Substances 0.000 description 7
- SZXQTJUDPRGNJN-UHFFFAOYSA-N dipropylene glycol Chemical compound OCCCOCCCO SZXQTJUDPRGNJN-UHFFFAOYSA-N 0.000 description 6
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- UWIULCYKVGIOPW-UHFFFAOYSA-N Glycolone Natural products CCOC1=C(CC=CC)C(=O)N(C)c2c(O)cccc12 UWIULCYKVGIOPW-UHFFFAOYSA-N 0.000 description 5
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- 230000001476 alcoholic effect Effects 0.000 description 4
- 150000001298 alcohols Chemical class 0.000 description 4
- 238000002791 soaking Methods 0.000 description 4
- OKKJLVBELUTLKV-UHFFFAOYSA-N Methanol Chemical compound OC OKKJLVBELUTLKV-UHFFFAOYSA-N 0.000 description 3
- CBENFWSGALASAD-UHFFFAOYSA-N Ozone Chemical compound [O-][O+]=O CBENFWSGALASAD-UHFFFAOYSA-N 0.000 description 3
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- 238000005507 spraying Methods 0.000 description 3
- KVNYFPKFSJIPBJ-UHFFFAOYSA-N 1,2-diethylbenzene Chemical compound CCC1=CC=CC=C1CC KVNYFPKFSJIPBJ-UHFFFAOYSA-N 0.000 description 2
- RQUBQBFVDOLUKC-UHFFFAOYSA-N 1-ethoxy-2-methylpropane Chemical compound CCOCC(C)C RQUBQBFVDOLUKC-UHFFFAOYSA-N 0.000 description 2
- ZWEHNKRNPOVVGH-UHFFFAOYSA-N 2-Butanone Chemical compound CCC(C)=O ZWEHNKRNPOVVGH-UHFFFAOYSA-N 0.000 description 2
- AFABGHUZZDYHJO-UHFFFAOYSA-N 2-Methylpentane Chemical compound CCCC(C)C AFABGHUZZDYHJO-UHFFFAOYSA-N 0.000 description 2
- ZAFNJMIOTHYJRJ-UHFFFAOYSA-N Diisopropyl ether Chemical compound CC(C)OC(C)C ZAFNJMIOTHYJRJ-UHFFFAOYSA-N 0.000 description 2
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- 150000005215 alkyl ethers Chemical class 0.000 description 2
- 230000000052 comparative effect Effects 0.000 description 2
- MWKFXSUHUHTGQN-UHFFFAOYSA-N decan-1-ol Chemical compound CCCCCCCCCCO MWKFXSUHUHTGQN-UHFFFAOYSA-N 0.000 description 2
- POLCUAVZOMRGSN-UHFFFAOYSA-N dipropyl ether Chemical compound CCCOCCC POLCUAVZOMRGSN-UHFFFAOYSA-N 0.000 description 2
- 238000004821 distillation Methods 0.000 description 2
- SNRUBQQJIBEYMU-UHFFFAOYSA-N dodecane Chemical compound CCCCCCCCCCCC SNRUBQQJIBEYMU-UHFFFAOYSA-N 0.000 description 2
- 238000001035 drying Methods 0.000 description 2
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- 238000011156 evaluation Methods 0.000 description 2
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- UAEPNZWRGJTJPN-UHFFFAOYSA-N methylcyclohexane Chemical compound CC1CCCCC1 UAEPNZWRGJTJPN-UHFFFAOYSA-N 0.000 description 2
- 239000011259 mixed solution Substances 0.000 description 2
- 229940094933 n-dodecane Drugs 0.000 description 2
- ZWRUINPWMLAQRD-UHFFFAOYSA-N nonan-1-ol Chemical compound CCCCCCCCCO ZWRUINPWMLAQRD-UHFFFAOYSA-N 0.000 description 2
- 230000003287 optical effect Effects 0.000 description 2
- FDPIMTJIUBPUKL-UHFFFAOYSA-N pentan-3-one Chemical compound CCC(=O)CC FDPIMTJIUBPUKL-UHFFFAOYSA-N 0.000 description 2
- BDERNNFJNOPAEC-UHFFFAOYSA-N propan-1-ol Chemical compound CCCO BDERNNFJNOPAEC-UHFFFAOYSA-N 0.000 description 2
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- RSJKGSCJYJTIGS-UHFFFAOYSA-N undecane Chemical compound CCCCCCCCCCC RSJKGSCJYJTIGS-UHFFFAOYSA-N 0.000 description 2
- CFQPVBJOKYSPKG-UHFFFAOYSA-N 1,3-dimethylimidazol-2-one Chemical compound CN1C=CN(C)C1=O CFQPVBJOKYSPKG-UHFFFAOYSA-N 0.000 description 1
- RRQYJINTUHWNHW-UHFFFAOYSA-N 1-ethoxy-2-(2-ethoxyethoxy)ethane Chemical compound CCOCCOCCOCC RRQYJINTUHWNHW-UHFFFAOYSA-N 0.000 description 1
- SBASXUCJHJRPEV-UHFFFAOYSA-N 2-(2-methoxyethoxy)ethanol Chemical compound COCCOCCO SBASXUCJHJRPEV-UHFFFAOYSA-N 0.000 description 1
- TZYRSLHNPKPEFV-UHFFFAOYSA-N 2-ethyl-1-butanol Chemical compound CCC(CC)CO TZYRSLHNPKPEFV-UHFFFAOYSA-N 0.000 description 1
- YIWUKEYIRIRTPP-UHFFFAOYSA-N 2-ethylhexan-1-ol Chemical compound CCCCC(CC)CO YIWUKEYIRIRTPP-UHFFFAOYSA-N 0.000 description 1
- CRWNQZTZTZWPOF-UHFFFAOYSA-N 2-methyl-4-phenylpyridine Chemical compound C1=NC(C)=CC(C=2C=CC=CC=2)=C1 CRWNQZTZTZWPOF-UHFFFAOYSA-N 0.000 description 1
- COAUHYBSXMIJDK-UHFFFAOYSA-N 3,3-dichloro-1,1,1,2,2-pentafluoropropane Chemical compound FC(F)(F)C(F)(F)C(Cl)Cl COAUHYBSXMIJDK-UHFFFAOYSA-N 0.000 description 1
- QCAHUFWKIQLBNB-UHFFFAOYSA-N 3-(3-methoxypropoxy)propan-1-ol Chemical compound COCCCOCCCO QCAHUFWKIQLBNB-UHFFFAOYSA-N 0.000 description 1
- VEXZGXHMUGYJMC-UHFFFAOYSA-M Chloride anion Chemical compound [Cl-] VEXZGXHMUGYJMC-UHFFFAOYSA-M 0.000 description 1
- XDTMQSROBMDMFD-UHFFFAOYSA-N Cyclohexane Chemical compound C1CCCCC1 XDTMQSROBMDMFD-UHFFFAOYSA-N 0.000 description 1
- KFZMGEQAYNKOFK-UHFFFAOYSA-N Isopropanol Chemical compound CC(C)O KFZMGEQAYNKOFK-UHFFFAOYSA-N 0.000 description 1
- LRHPLDYGYMQRHN-UHFFFAOYSA-N N-Butanol Chemical class CCCCO LRHPLDYGYMQRHN-UHFFFAOYSA-N 0.000 description 1
- IMNFDUFMRHMDMM-UHFFFAOYSA-N N-Heptane Chemical compound CCCCCCC IMNFDUFMRHMDMM-UHFFFAOYSA-N 0.000 description 1
- OFBQJSOFQDEBGM-UHFFFAOYSA-N Pentane Chemical compound CCCCC OFBQJSOFQDEBGM-UHFFFAOYSA-N 0.000 description 1
- DUFKCOQISQKSAV-UHFFFAOYSA-N Polypropylene glycol (m w 1,200-3,000) Chemical class CC(O)COC(C)CO DUFKCOQISQKSAV-UHFFFAOYSA-N 0.000 description 1
- 241000779819 Syncarpia glomulifera Species 0.000 description 1
- HPXRVTGHNJAIIH-UHFFFAOYSA-N cyclohexanol Chemical compound OC1CCCCC1 HPXRVTGHNJAIIH-UHFFFAOYSA-N 0.000 description 1
- XXJWXESWEXIICW-UHFFFAOYSA-N diethylene glycol monoethyl ether Chemical compound CCOCCOCCO XXJWXESWEXIICW-UHFFFAOYSA-N 0.000 description 1
- SBZXBUIDTXKZTM-UHFFFAOYSA-N diglyme Chemical compound COCCOCCOC SBZXBUIDTXKZTM-UHFFFAOYSA-N 0.000 description 1
- 239000004205 dimethyl polysiloxane Substances 0.000 description 1
- KPUWHANPEXNPJT-UHFFFAOYSA-N disiloxane Chemical compound [SiH3]O[SiH3] KPUWHANPEXNPJT-UHFFFAOYSA-N 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- LYCAIKOWRPUZTN-UHFFFAOYSA-N ethylene glycol Natural products OCCO LYCAIKOWRPUZTN-UHFFFAOYSA-N 0.000 description 1
- 239000012467 final product Substances 0.000 description 1
- 238000011010 flushing procedure Methods 0.000 description 1
- 238000005194 fractionation Methods 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 238000011086 high cleaning Methods 0.000 description 1
- WGCNASOHLSPBMP-UHFFFAOYSA-N hydroxyacetaldehyde Natural products OCC=O WGCNASOHLSPBMP-UHFFFAOYSA-N 0.000 description 1
- 238000007654 immersion Methods 0.000 description 1
- 229910052500 inorganic mineral Inorganic materials 0.000 description 1
- 150000002632 lipids Chemical class 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- GYNNXHKOJHMOHS-UHFFFAOYSA-N methyl-cycloheptane Natural products CC1CCCCCC1 GYNNXHKOJHMOHS-UHFFFAOYSA-N 0.000 description 1
- 239000011707 mineral Substances 0.000 description 1
- VLKZOEOYAKHREP-UHFFFAOYSA-N n-Hexane Chemical compound CCCCCC VLKZOEOYAKHREP-UHFFFAOYSA-N 0.000 description 1
- HMMGMWAXVFQUOA-UHFFFAOYSA-N octamethylcyclotetrasiloxane Chemical compound C[Si]1(C)O[Si](C)(C)O[Si](C)(C)O[Si](C)(C)O1 HMMGMWAXVFQUOA-UHFFFAOYSA-N 0.000 description 1
- TVMXDCGIABBOFY-UHFFFAOYSA-N octane Chemical compound CCCCCCCC TVMXDCGIABBOFY-UHFFFAOYSA-N 0.000 description 1
- RGSFGYAAUTVSQA-UHFFFAOYSA-N pentamethylene Natural products C1CCCC1 RGSFGYAAUTVSQA-UHFFFAOYSA-N 0.000 description 1
- 125000004817 pentamethylene group Chemical group [H]C([H])([*:2])C([H])([H])C([H])([H])C([H])([H])C([H])([H])[*:1] 0.000 description 1
- 239000001739 pinus spp. Substances 0.000 description 1
- 229920000435 poly(dimethylsiloxane) Polymers 0.000 description 1
- 238000007639 printing Methods 0.000 description 1
- 238000012545 processing Methods 0.000 description 1
- 230000003252 repetitive effect Effects 0.000 description 1
- 239000011347 resin Substances 0.000 description 1
- 229920005989 resin Polymers 0.000 description 1
- 238000003756 stirring Methods 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
- 238000012546 transfer Methods 0.000 description 1
- 229940036248 turpentine Drugs 0.000 description 1
- 238000010792 warming Methods 0.000 description 1
- 238000005406 washing Methods 0.000 description 1
- 239000001993 wax Substances 0.000 description 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C11—ANIMAL OR VEGETABLE OILS, FATS, FATTY SUBSTANCES OR WAXES; FATTY ACIDS THEREFROM; DETERGENTS; CANDLES
- C11D—DETERGENT COMPOSITIONS; USE OF SINGLE SUBSTANCES AS DETERGENTS; SOAP OR SOAP-MAKING; RESIN SOAPS; RECOVERY OF GLYCEROL
- C11D3/00—Other compounding ingredients of detergent compositions covered in group C11D1/00
- C11D3/16—Organic compounds
- C11D3/20—Organic compounds containing oxygen
- C11D3/2068—Ethers
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B3/00—Cleaning by methods involving the use or presence of liquid or steam
- B08B3/04—Cleaning involving contact with liquid
- B08B3/08—Cleaning involving contact with liquid the liquid having chemical or dissolving effect
-
- C—CHEMISTRY; METALLURGY
- C11—ANIMAL OR VEGETABLE OILS, FATS, FATTY SUBSTANCES OR WAXES; FATTY ACIDS THEREFROM; DETERGENTS; CANDLES
- C11D—DETERGENT COMPOSITIONS; USE OF SINGLE SUBSTANCES AS DETERGENTS; SOAP OR SOAP-MAKING; RESIN SOAPS; RECOVERY OF GLYCEROL
- C11D3/00—Other compounding ingredients of detergent compositions covered in group C11D1/00
- C11D3/16—Organic compounds
- C11D3/18—Hydrocarbons
-
- C—CHEMISTRY; METALLURGY
- C11—ANIMAL OR VEGETABLE OILS, FATS, FATTY SUBSTANCES OR WAXES; FATTY ACIDS THEREFROM; DETERGENTS; CANDLES
- C11D—DETERGENT COMPOSITIONS; USE OF SINGLE SUBSTANCES AS DETERGENTS; SOAP OR SOAP-MAKING; RESIN SOAPS; RECOVERY OF GLYCEROL
- C11D3/00—Other compounding ingredients of detergent compositions covered in group C11D1/00
- C11D3/16—Organic compounds
- C11D3/24—Organic compounds containing halogen
- C11D3/245—Organic compounds containing halogen containing fluorine
-
- C—CHEMISTRY; METALLURGY
- C11—ANIMAL OR VEGETABLE OILS, FATS, FATTY SUBSTANCES OR WAXES; FATTY ACIDS THEREFROM; DETERGENTS; CANDLES
- C11D—DETERGENT COMPOSITIONS; USE OF SINGLE SUBSTANCES AS DETERGENTS; SOAP OR SOAP-MAKING; RESIN SOAPS; RECOVERY OF GLYCEROL
- C11D7/00—Compositions of detergents based essentially on non-surface-active compounds
- C11D7/22—Organic compounds
- C11D7/24—Hydrocarbons
-
- C—CHEMISTRY; METALLURGY
- C11—ANIMAL OR VEGETABLE OILS, FATS, FATTY SUBSTANCES OR WAXES; FATTY ACIDS THEREFROM; DETERGENTS; CANDLES
- C11D—DETERGENT COMPOSITIONS; USE OF SINGLE SUBSTANCES AS DETERGENTS; SOAP OR SOAP-MAKING; RESIN SOAPS; RECOVERY OF GLYCEROL
- C11D7/00—Compositions of detergents based essentially on non-surface-active compounds
- C11D7/22—Organic compounds
- C11D7/24—Hydrocarbons
- C11D7/247—Hydrocarbons aromatic
-
- C—CHEMISTRY; METALLURGY
- C11—ANIMAL OR VEGETABLE OILS, FATS, FATTY SUBSTANCES OR WAXES; FATTY ACIDS THEREFROM; DETERGENTS; CANDLES
- C11D—DETERGENT COMPOSITIONS; USE OF SINGLE SUBSTANCES AS DETERGENTS; SOAP OR SOAP-MAKING; RESIN SOAPS; RECOVERY OF GLYCEROL
- C11D7/00—Compositions of detergents based essentially on non-surface-active compounds
- C11D7/22—Organic compounds
- C11D7/26—Organic compounds containing oxygen
- C11D7/263—Ethers
-
- C—CHEMISTRY; METALLURGY
- C11—ANIMAL OR VEGETABLE OILS, FATS, FATTY SUBSTANCES OR WAXES; FATTY ACIDS THEREFROM; DETERGENTS; CANDLES
- C11D—DETERGENT COMPOSITIONS; USE OF SINGLE SUBSTANCES AS DETERGENTS; SOAP OR SOAP-MAKING; RESIN SOAPS; RECOVERY OF GLYCEROL
- C11D7/00—Compositions of detergents based essentially on non-surface-active compounds
- C11D7/22—Organic compounds
- C11D7/28—Organic compounds containing halogen
-
- C—CHEMISTRY; METALLURGY
- C11—ANIMAL OR VEGETABLE OILS, FATS, FATTY SUBSTANCES OR WAXES; FATTY ACIDS THEREFROM; DETERGENTS; CANDLES
- C11D—DETERGENT COMPOSITIONS; USE OF SINGLE SUBSTANCES AS DETERGENTS; SOAP OR SOAP-MAKING; RESIN SOAPS; RECOVERY OF GLYCEROL
- C11D7/00—Compositions of detergents based essentially on non-surface-active compounds
- C11D7/50—Solvents
- C11D7/5004—Organic solvents
- C11D7/5018—Halogenated solvents
-
- C—CHEMISTRY; METALLURGY
- C11—ANIMAL OR VEGETABLE OILS, FATS, FATTY SUBSTANCES OR WAXES; FATTY ACIDS THEREFROM; DETERGENTS; CANDLES
- C11D—DETERGENT COMPOSITIONS; USE OF SINGLE SUBSTANCES AS DETERGENTS; SOAP OR SOAP-MAKING; RESIN SOAPS; RECOVERY OF GLYCEROL
- C11D7/00—Compositions of detergents based essentially on non-surface-active compounds
- C11D7/50—Solvents
- C11D7/5004—Organic solvents
- C11D7/5022—Organic solvents containing oxygen
-
- C—CHEMISTRY; METALLURGY
- C11—ANIMAL OR VEGETABLE OILS, FATS, FATTY SUBSTANCES OR WAXES; FATTY ACIDS THEREFROM; DETERGENTS; CANDLES
- C11D—DETERGENT COMPOSITIONS; USE OF SINGLE SUBSTANCES AS DETERGENTS; SOAP OR SOAP-MAKING; RESIN SOAPS; RECOVERY OF GLYCEROL
- C11D7/00—Compositions of detergents based essentially on non-surface-active compounds
- C11D7/50—Solvents
- C11D7/5004—Organic solvents
- C11D7/5027—Hydrocarbons
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23G—CLEANING OR DE-GREASING OF METALLIC MATERIAL BY CHEMICAL METHODS OTHER THAN ELECTROLYSIS
- C23G5/00—Cleaning or de-greasing metallic material by other methods; Apparatus for cleaning or de-greasing metallic material with organic solvents
- C23G5/02—Cleaning or de-greasing metallic material by other methods; Apparatus for cleaning or de-greasing metallic material with organic solvents using organic solvents
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23G—CLEANING OR DE-GREASING OF METALLIC MATERIAL BY CHEMICAL METHODS OTHER THAN ELECTROLYSIS
- C23G5/00—Cleaning or de-greasing metallic material by other methods; Apparatus for cleaning or de-greasing metallic material with organic solvents
- C23G5/02—Cleaning or de-greasing metallic material by other methods; Apparatus for cleaning or de-greasing metallic material with organic solvents using organic solvents
- C23G5/032—Cleaning or de-greasing metallic material by other methods; Apparatus for cleaning or de-greasing metallic material with organic solvents using organic solvents containing oxygen-containing compounds
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- C—CHEMISTRY; METALLURGY
- C11—ANIMAL OR VEGETABLE OILS, FATS, FATTY SUBSTANCES OR WAXES; FATTY ACIDS THEREFROM; DETERGENTS; CANDLES
- C11D—DETERGENT COMPOSITIONS; USE OF SINGLE SUBSTANCES AS DETERGENTS; SOAP OR SOAP-MAKING; RESIN SOAPS; RECOVERY OF GLYCEROL
- C11D2111/00—Cleaning compositions characterised by the objects to be cleaned; Cleaning compositions characterised by non-standard cleaning or washing processes
- C11D2111/10—Objects to be cleaned
- C11D2111/14—Hard surfaces
- C11D2111/18—Glass; Plastics
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- C—CHEMISTRY; METALLURGY
- C11—ANIMAL OR VEGETABLE OILS, FATS, FATTY SUBSTANCES OR WAXES; FATTY ACIDS THEREFROM; DETERGENTS; CANDLES
- C11D—DETERGENT COMPOSITIONS; USE OF SINGLE SUBSTANCES AS DETERGENTS; SOAP OR SOAP-MAKING; RESIN SOAPS; RECOVERY OF GLYCEROL
- C11D2111/00—Cleaning compositions characterised by the objects to be cleaned; Cleaning compositions characterised by non-standard cleaning or washing processes
- C11D2111/10—Objects to be cleaned
- C11D2111/14—Hard surfaces
- C11D2111/22—Electronic devices, e.g. PCBs or semiconductors
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- C—CHEMISTRY; METALLURGY
- C11—ANIMAL OR VEGETABLE OILS, FATS, FATTY SUBSTANCES OR WAXES; FATTY ACIDS THEREFROM; DETERGENTS; CANDLES
- C11D—DETERGENT COMPOSITIONS; USE OF SINGLE SUBSTANCES AS DETERGENTS; SOAP OR SOAP-MAKING; RESIN SOAPS; RECOVERY OF GLYCEROL
- C11D2111/00—Cleaning compositions characterised by the objects to be cleaned; Cleaning compositions characterised by non-standard cleaning or washing processes
- C11D2111/40—Specific cleaning or washing processes
- C11D2111/44—Multi-step processes
Landscapes
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Organic Chemistry (AREA)
- Life Sciences & Earth Sciences (AREA)
- Oil, Petroleum & Natural Gas (AREA)
- Wood Science & Technology (AREA)
- General Chemical & Material Sciences (AREA)
- Emergency Medicine (AREA)
- Health & Medical Sciences (AREA)
- Metallurgy (AREA)
- Mechanical Engineering (AREA)
- Materials Engineering (AREA)
- Detergent Compositions (AREA)
- Cleaning And De-Greasing Of Metallic Materials By Chemical Methods (AREA)
- Cleaning Or Drying Semiconductors (AREA)
- Cleaning By Liquid Or Steam (AREA)
- Registering, Tensioning, Guiding Webs, And Rollers Therefor (AREA)
- Mechanical Treatment Of Semiconductor (AREA)
- Electrical Discharge Machining, Electrochemical Machining, And Combined Machining (AREA)
- Manufacturing Of Printed Wiring (AREA)
Abstract
本发明提供了清洗性能和漂洗性能均优良的物品的清洗漂洗方法。它是包括使附着污渍的物品接触含有芳香烃或乙二醇醚类的烃系溶剂的清洗工序，以及使其接触含氟醚的漂洗工序的物品清洗漂洗方法，其特征在于，含氟醚为式1所示的化合物。R1－O－R2……式1，R1、R2分别独立地表示含氟烷基。R1及R2中含有的氟原子数都大于等于1，而且，R1及R2中含有的碳原子数合计为4～8。
Description
技术领域
本发明涉及为除去IC等电子部件、精密机械部件、玻璃基板、树脂成型部件等部件上附着的油脂类、印刷基板等的溶剂、尘埃等的污物而采用非燃性溶剂进行清洗漂洗的方法。
背景技术
目前，作为除去在精密机械工业，光学仪器工业、电器电子工业、以及塑料加工业等制造加工中附着的油、溶剂、尘埃、蜡等而使用的用于精密清洗的含氟溶剂，常用二氯五氟丙烷(以下称为R-225)等的含氢氯氟烃(以下，称为HCFC)
但是，由于HCFC可破坏臭氧，发达国家已规定在2020年完全禁止使用HCFC。作为分子中不含氯，且不破坏臭氧的含氟溶剂，公知的有含氢氟烃(以下，称为HFC)、含氢氟醚(以下，称为HFE)可成为HCFC的替代溶剂。
例如，公知的有使用具有约20～120℃沸点的HFE清洗由印刷回路板或金属构成的物品的方法(参考日本专利文献1)。但是，这种方法中，由于HFE对污渍的溶解能力并不充分，常常不能彻底清除污渍。另外，也有使用脂肪烃来清洗物品的方法。
这些烃系溶剂虽然不破坏臭氧，而且污渍的除去能力高，但是由于难以干燥，因此存在为了干燥清洗后的物品必须大量耗能的问题。
作为解决该问题的方法，公开了在用烃系溶剂清洗之后，再用HFE漂洗的方法(参考日本专利文献2)。但是，该文献中对HFE没有示例。
然而，即使是上述方法，由于HFE的种类不同，使用与清洗用烃系溶剂相溶性低的HFE，即使漂洗被清洗物品，也不能完全除去烃系溶剂，在被清洗物品的表面残留烃系溶剂，从而存在出现污迹等漂洗不良问题。
日本专利文献1：日本专利特开平05-271692号公报(权利要求范围)
日本专利文献2：日本专利特开平10-202209号公报(权利要求范围)
发明的揭示
发明欲解决的课题
本发明是使用目前与烃系溶剂的相溶性不充分的，且用于漂洗有困难的HFE来清洗漂洗物品的方法，目的是为了提供清洗性能与漂洗性能均优良的方法。
解决课题的方法
本发明是包括使附着污渍的物品接触含有芳香烃或者乙二醇醚类的烃系溶剂的清洗工序和使其接触含氟醚的漂洗工序的清洗漂洗物品方法，提供了含氟醚为式1所示化合物的清洗漂洗物品的方法。
R1-O-R2···式1
式中，R1、R2分别独立地表示含氟烷基。R1及R2中含有的氟原子数都大于等于1，而且，R1及R2中含有的碳原子数合计为4～8。
由于在清洗工序中作为烃系溶剂使用了含芳香烃或者乙二醇醚类的溶剂，因此本发明在使用HFE的漂洗工序中可显现优良的漂洗性能。
发明的效果
本发明能把目前用于漂洗有困难的、由式1所示的化合物用于漂洗工序，可以显示出优良的清洗性能和漂洗性能。
实施发明的最佳方式
本发明中的含氟醚是式1所示的化合物。R1及R2都具有大于等于1、较好为2～10的氟原子，而且R1及R2中含有的碳原子数合计为4～8。与在R1或R2任一者中具有氟原子的HFE相比，本发明的含氟醚热稳定性优良。
作为式1表示的含氟醚，具体可例举如1，1，2，2-四氟乙基-2，2，2-三氟***，(CHF2CF2-O-CH2CF3，以下称为OHFE347)、1，1，2，2-四氟乙基-2，2，3，3-四氟丙醚(CHF2CF2-O-CH2CF2CHF2，以下称为，HFE458)等。本发明中的含氟醚可使用1种，也可将大于等于2种混合使用。
另外，由于是通过将表面被烃系溶剂覆盖的被清洗物品的表面用含氟醚置换，再干燥的方法，因此作为含氟醚较好使用沸点为30～100℃的含氟醚，更好是R1及R2中含有的碳原子数合计为4～6的含氟醚。
本发明中在清洗工序中使用的烃系溶剂，含有芳香烃或乙二醇醚类。
作为该芳香烃，从高清洗力、高闪燃点以及与式1所示的含氟醚的相溶性高的角度来看，较好为碳原子数为7～10的芳香烃，更好为碳原子数为9或10的芳香烃。具体可例举如甲苯、二甲苯、、甲基乙基苯、二乙基苯等。其中从与式1所示化合物具有合适相溶性的角度来看，较好为甲基乙基苯。
另外，作为乙二醇醚类的具体例，从与式1所示含氟醚的相溶性较高的角度来看，较好为二甘醇的烷基醚类或者双丙甘醇的烷基醚类。具体可例举以下化合物。
二甘醇一甲醚、二甘醇一***、二甘醇一正丙醚、二甘醇一异丙醚、二甘醇一正丁醚、二甘醇一异丁醚、二甘醇二甲醚、二甘醇二***、二甘醇二丁醚等二甘醇系醚。
双丙甘醇一甲醚、双丙甘醇一***、双丙甘醇一正丙醚、双丙甘醇一异丙醚、双丙甘醇一正丁醚、双丙甘醇一异丁醚等双丙甘醇系醚。
烃系溶剂中，芳香烃的含有比例以及乙二醇醚类的含有比例的合计，从提高烃系溶剂与式1所示含氟醚的相溶性以及在短时间内高效进行漂洗的角度来看，较好为大于等于10质量％，更好为大于等于30质量％。
本发明中的烃系溶剂除含有芳香烃和乙二醇醚类之外，也可含有脂肪烃。脂肪烃具有低廉、清洗能力强以及与较其他烃类溶剂热稳定性较高的优点。
作为脂肪烃，较好为碳原子数大于等于8且为直链或支链的饱和烃，具体可例举如正辛烷、正癸烷、正十一烷、正十二烷、灯油、矿油精等。
另外，通常在30～100℃进行物品的清洗，但由于希望烃系溶剂的沸点比清洗温度高，因此较好为大于等于100℃，特别是大于等于150℃。
另外，从清洗工序以及漂洗工序回收烃系溶剂以及含氟醚时，从高效蒸馏分离然后再生的角度看，较好为选择使烃系溶剂与含氟醚的沸点之差大于等于50℃的含氟醚和烃系溶剂的组合。
如要例举在漂洗工序中所用的含氟醚和在清洗工序中所用的烃系溶剂的较好组合的具体例，可例举如，含氟醚若为HFE347或HFE458时，烃系溶剂可为甲基乙基苯等碳原子数为9的芳香烃、碳原子数为9的芳香烃和二甘醇一正丁醚的混合物、正癸烷和二甘醇一正丁醚的混合物以及正十二烷、正十一烷和二甘醇一正丁醚三者的混合物。
另外，本发明的烃系溶剂，也可根据需要含有醇类、含氮有机物以及有机硅化合物中的至少一种，具体可例举如以下化合物。
醇类：2-乙基丁醇、2-乙基己醇、壬醇、癸醇、环己醇。
含氮有机物：N-甲基-2-吡咯烷酮、1，3-二甲基-2-咪唑啉酮、
有机硅化合物：聚二甲基硅氧烷、聚环硅氧烷、八甲基环四硅氧烷。
另外，本发明中也可使用含有漂洗助剂的含氟醚进行漂洗工序。作为漂洗助剂，可使用烃系、低级醇类以及酮类。相对于含氟醚和漂洗助剂的合计量，漂洗助剂的混合比例较好为未满20质量％，更好为未满10质量％，因为含氟醚多为非燃性的。
为了蒸馏再利用含氟醚以及为了提高漂洗助剂的回收效率，漂洗助剂较好与含氟醚同样，是沸点为30～100℃的物质。更好为由含氟醚和漂洗助剂形成的混合溶液呈共沸组合物或共沸样组合物，这时，在蒸馏后不需调整漂洗助剂的添加量，即可在漂洗工序之后使用由含氟醚和漂洗助剂形成的混合物进一步进行蒸汽清洗。
作为漂洗助剂，具体可例举如下。
烃类：正戊烷、正己烷、异己烷、正庚烷、异辛烷、环戊烷、环己烷、甲基环己烷。
低级醇类：甲醇、乙醇、正丙醇、异丙醇、丁醇。
酮类：乙酮、丁酮。
以下，按照工序具体说明本发明的附着污渍物品的清洗漂洗方法。
首先，使烃系溶剂接触附着污渍的物品。物品与烃系溶剂的接触方法可通过在烃系溶剂中浸泡物品的方法、采用喷雾式将烃系溶剂吹附到物品上的方法等任意的方法实施。
为了促进除去污渍，物品和烃系溶剂接触时的温度较好为在未到烃系溶剂闪燃点的范围内稍稍加热。具体较好为在比烃系溶剂的闪燃点低大于等于10℃的温度的浴锅中浸泡物品。对于浸泡的接触方法，为了促进溶解除去污渍，也可并用超声波振动、搅拌、振摇、外加毛刷等机械力方法。物品和烃系溶剂的接触时间是除去污渍至希望程度所需的时间即可。
接着，使与烃系溶剂接触清洗的被清洗物品，与由含氟醚形成的漂洗液接触漂洗。物品与漂洗液的接触方法也可通过在漂洗液中浸泡清洗物品的方法，采用喷雾式将漂洗液吹附到被清洗物品上的方法等任意的方法实施。
另外，为了提高漂洗效率，可以重复操作同一漂洗方法，或者组合不同漂洗方法进行实施。特别是，将浸泡方法或吹附方法，与接触蒸气的方法相组合，可提高漂洗的效率。这时，较好为在漂洗液中浸泡被清洗物品或者喷雾式吹附之后，再暴露于蒸气中的漂洗方法。
另外，在漂洗液中浸泡被清洗物品之后，再与蒸气接触漂洗时，由于可提高漂洗效率，因此较好为将临与蒸气接触之前的漂洗液的温度，调至比含氟醚的沸点低大于等于10℃，这是因为在被清洗物升温至含氟醚沸点的范围内，被清洗物品表面上含氟醚一直在凝聚。
实施例
以下，说明本发明的实施例和比较例。例1、2、4～8、10～14、16～20、22～24是实施例，例3、9、15以及21是比较例。
〔例1～6〕
对于HFE347(沸点56℃)，或者HFE347与乙醇的共沸组合物(HFE347/乙醇＝94.5/5.5(质量基准)，沸点54℃)和表1中记载的烃系溶剂的混合液，测定不使该混合溶液相分离为2相下的烃系溶剂最大含有比例。上述烃系溶剂的最大含有比例是通过在25℃的HFE100g中加入烃系溶剂直至相分离而进行测定的。
测定结果示于表1。表1的“测定结果”中，◎：上述烃系溶剂的最大含有比例大于等于50％的混合溶液，○上述烃系溶剂的最大含有比例为30～50％的混合溶液，×上述烃系溶剂的最大含有比例未满30％的混合溶液。
表1
| HFE | 例 | 烃系溶剂(沸点) | 闪燃点[℃] | 测定结果 |
| HFE347 | 1 | 甲基乙基苯(160℃) | 44 | ◎ |
| 2 | 二甘醇一正丁醚(230℃) | 230 | ◎ | |
| 3 | 正癸烷(174℃) | 46 | × | |
| 4 | 正癸烷(174℃)/二甘醇一正丁醚(230℃)＝80/20 | 46＜ | ◎ | |
| 5 | 正癸烷(174℃)/二甘醇一正丁醚(230℃)＝90/10 | 46＜ | ○ | |
| HFE347/乙醇＝94.5/5.5 | 6 | 正癸烷(174℃)/二甘醇一正丁醚(230℃)＝90/10 | 46＜ | ◎ |
〔例7～12〕
对于HFE458(沸点93℃)，或者HFE458与乙醇的共沸组合物(HFE458/乙醇＝71.0/29.0(质量基准)，沸点74℃)和表2中记载的烃系溶剂的混合液，与例1～6同样测定该混合溶液不相分离为2相下的烃系溶剂最大含有比例。测定结果示于表2。表2的“测定结果”中，◎、○、×的示意与表1相同。
表2
| HFE | 例 | 烃系溶剂(沸点) | 闪燃点[℃] | 测定结果 |
| HFE458 | 7 | 甲基乙基苯(160℃) | 44 | ◎ |
| 8 | 二甘醇一正丁醚(230℃) | 230 | ◎ | |
| 9 | 正癸烷(174℃) | 46 | × | |
| 10 | 正癸烷(174℃)/二甘醇一正丁醚(230℃)＝85/15 | 46＜ | ◎ | |
| 11 | 正癸烷(174℃)/二甘醇一正丁醚(230℃)＝95/5 | 46＜ | × | |
| HFE458/乙醇＝71.0/29.0 | 12 | 正癸烷(174℃)/二甘醇一正丁醚(230℃)＝95/5 | 46＜ | ◎ |
〔例13～18〕
在表1记载的烃系溶剂中浸泡切成50mm×50mm的100目金属网1分钟，接着，于室温下在HFE347，或者HFE347与乙醇的共沸组合物中浸泡3分钟之后，观察提捞后的金属网的外观。评价结果示于表3。表3中符号表示如下，◎：无斑点，○：略有斑点，×：有斑点
表3
| HFE | 例 | 烃系溶剂 | 闪燃点[℃] | 浴温度[℃] | 测定结果 |
| HFE347 | 13 | 甲基乙基苯 | 44 | 30 | ◎ |
| 14 | 二甘醇一正丁醚 | 230 | 30 | ◎ | |
| 15 | 正癸烷 | 46 | 30 | × | |
| 16 | 正癸烷/二甘醇一正丁醚＝80/20 | 46＜ | 30 | ◎ | |
| 17 | 正癸烷/二甘醇一正丁醚＝90/10 | 46＜ | 30 | ○ | |
| HFE347/乙醇＝94.5/5.5 | 18 | 正癸烷/二甘醇一正丁醚＝90/10 | 46＜ | 30 | ◎ |
〔例19～24〕
在表2记载的烃系溶剂中浸泡切成50mm×50mm的100目金属网1分钟，接着，于室温下在HFE458，或者HFE458与乙醇的共沸组合物中浸泡3分钟之后，观察提捞后的金属网的外观。评价结果示于表3。表3中符号表示如下，◎：无斑点，○：略有斑点，×：有斑点
表4
| HFE | 例 | 烃系溶剂 | 闪燃点[℃] | 浴温度[℃] | 测定结果 |
| HFE458 | 19 | 甲基乙基苯 | 44 | 30 | ◎ |
| 20 | 二甘醇一正丁醚 | 230 | 30 | ◎ | |
| 21 | 正癸烷 | 46 | 30 | × | |
| 22 | 正癸烷/二甘醇一正丁醚＝85/15 | 46＜ | 30 | ◎ | |
| 23 | 正癸烷/二甘醇一正丁醚＝95/5 | 46＜ | 30 | ○ | |
| HFE458/乙醇＝71.0/29.0 | 24 | 正癸烷/二甘醇一正丁醚＝95/5 | 46＜ | 30 | ◎ |
Claims (6)
1.物品的清洗漂洗方法，它是包括使附着污渍的物品接触含有芳香烃或乙二醇醚类的烃系溶剂的清洗工序，以及使其接触含氟醚的漂洗工序的物品清洗漂洗方法，其特征在于，含氟醚为式1所示的化合物，
R1-O-R2···式1
式中，R1、R2分别独立地表示含氟烷基。R1及R2中所含的氟原子数都大于等于1，而且，R1及R2中所含碳原子数合计为4～8。
2.如权利要求1所述的清洗漂洗方法，其特征还在于，含氟醚为1，1，2，2-四氟乙基-2，2，2-三氟***或者1，1，2，2-四氟乙基-2，2，3，3-四氟丙醚。
3.如权利要求1或2中所述的清洗漂洗方法，其特征还在于，烃系溶剂中作为芳香烃含有甲基乙基苯。
4.如权利要求1～3中任一项所述的清洗漂洗方法，其特征还在于，烃系溶剂中芳香烃的含有比例和乙二醇醚类的含有比例合计大于等于10质量％。
5.如权利要求1～4中任一项所述的清洗漂洗方法，其特征还在于，烃系溶剂中还含有脂肪烃。
6.如权利要求5所述的清洗漂洗方法，其特征还在于，脂肪烃为碳原子数大于等于8的直链或支链饱和烃。
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-
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- 2004-06-25 SG SG200719051-5A patent/SG161108A1/en unknown
- 2004-06-25 WO PCT/JP2004/008981 patent/WO2005001015A1/ja active IP Right Grant
- 2004-06-25 ES ES07013715T patent/ES2335362T3/es not_active Expired - Lifetime
- 2004-06-25 JP JP2005511045A patent/JP4655931B2/ja not_active Expired - Fee Related
- 2004-06-25 KR KR1020107024285A patent/KR101026095B1/ko not_active IP Right Cessation
- 2004-06-25 CN CNB2004800175138A patent/CN100412184C/zh not_active Expired - Fee Related
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- 2004-06-25 AT AT04746450T patent/ATE392466T1/de not_active IP Right Cessation
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- 2004-06-25 DE DE602004013154T patent/DE602004013154T2/de not_active Expired - Lifetime
- 2004-06-25 ES ES04746450T patent/ES2304613T3/es not_active Expired - Lifetime
- 2004-06-25 AT AT07013715T patent/ATE449156T1/de not_active IP Right Cessation
- 2004-06-25 CA CA2530180A patent/CA2530180C/en not_active Expired - Fee Related
- 2004-06-25 DE DE602004024253T patent/DE602004024253D1/de not_active Expired - Lifetime
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- 2005-11-18 KR KR1020057022056A patent/KR101080657B1/ko not_active IP Right Cessation
- 2005-12-27 US US11/316,811 patent/US7662192B2/en not_active Expired - Fee Related
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- 2009-03-06 AU AU2009200896A patent/AU2009200896B2/en not_active Ceased
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- 2010-07-13 JP JP2010158628A patent/JP2010242097A/ja not_active Withdrawn
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101679922B (zh) * | 2007-06-08 | 2011-11-09 | 旭硝子株式会社 | 清洗溶剂及清洗方法 |
| CN109415798A (zh) * | 2017-06-26 | 2019-03-01 | Ａｇｃ株式会社 | 真空蒸镀用的掩模的清洗方法和冲洗组合物 |
Also Published As
| Publication number | Publication date |
|---|---|
| ATE449156T1 (de) | 2009-12-15 |
| AU2009200896B2 (en) | 2010-11-11 |
| WO2005001015A1 (ja) | 2005-01-06 |
| DE602004013154D1 (de) | 2008-05-29 |
| KR101080657B1 (ko) | 2011-11-08 |
| AU2004252335A1 (en) | 2005-01-06 |
| AU2009200896A1 (en) | 2009-03-26 |
| JP2010242097A (ja) | 2010-10-28 |
| US20060135390A1 (en) | 2006-06-22 |
| SG161108A1 (en) | 2010-05-27 |
| ES2304613T3 (es) | 2008-10-16 |
| CA2530180C (en) | 2011-05-24 |
| KR20100123928A (ko) | 2010-11-25 |
| EP1640443A4 (en) | 2006-12-06 |
| CA2530180A1 (en) | 2005-01-06 |
| EP1640443A1 (en) | 2006-03-29 |
| JP4655931B2 (ja) | 2011-03-23 |
| JPWO2005001015A1 (ja) | 2006-08-10 |
| AU2004252335B2 (en) | 2009-04-09 |
| EP1640443B1 (en) | 2008-04-16 |
| ATE392466T1 (de) | 2008-05-15 |
| EP1867709A1 (en) | 2007-12-19 |
| US7662192B2 (en) | 2010-02-16 |
| KR101026095B1 (ko) | 2011-03-31 |
| CN100412184C (zh) | 2008-08-20 |
| DE602004013154T2 (de) | 2009-05-14 |
| DE602004024253D1 (de) | 2009-12-31 |
| ES2335362T3 (es) | 2010-03-25 |
| EP1867709B1 (en) | 2009-11-18 |
| KR20060029217A (ko) | 2006-04-05 |
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