CN105196116B - A kind of mechanical grinding method of high-precision diamond glass formula pressure head - Google Patents

A kind of mechanical grinding method of high-precision diamond glass formula pressure head Download PDF

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CN105196116B
CN105196116B CN201510508090.XA CN201510508090A CN105196116B CN 105196116 B CN105196116 B CN 105196116B CN 201510508090 A CN201510508090 A CN 201510508090A CN 105196116 B CN105196116 B CN 105196116B
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pressure head
diamond
head handle
grinding
handle
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CN105196116A (en
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宗文俊
吴东
姚学磊
李增强
孙涛
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Harbin Institute of Technology
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Harbin Institute of Technology
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    • BPERFORMING OPERATIONS; TRANSPORTING
    • B24GRINDING; POLISHING
    • B24BMACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B1/00Processes of grinding or polishing; Use of auxiliary equipment in connection with such processes
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B24GRINDING; POLISHING
    • B24BMACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B3/00Sharpening cutting edges, e.g. of tools; Accessories therefor, e.g. for holding the tools
    • B24B3/60Sharpening cutting edges, e.g. of tools; Accessories therefor, e.g. for holding the tools of tools not covered by the preceding subgroups
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B24GRINDING; POLISHING
    • B24BMACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B37/00Lapping machines or devices; Accessories
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B24GRINDING; POLISHING
    • B24BMACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B37/00Lapping machines or devices; Accessories
    • B24B37/34Accessories

Abstract

The invention discloses a kind of mechanical grinding method of high-precision diamond glass formula pressure head, start with from the obvious anisotropy of diamond crystal and high wearability feature, with reference to the diamond cutter machinery sharpening processing experience that early stage is accumulated, also using the method processing diamond glass formula pressure head of machinery sharpening.Tested by the grinding technics of diamond penetrator, the influence of labor diamond abrasive granularity, grinding pressure, lap speed, reciprocating motion to diamond Bo Shi pressure heads grinding gained blunt round radius, including sophisticated blunt round radius and seamed edge blunt round radius, and set up the diamond Bo Shi pressure head grinding technics of optimization.To break the technology barriers of foreign countries, improving the level of processing of China's diamond glass formula pressure head, a step of inquiry has been stepped.

Description

A kind of mechanical grinding method of high-precision diamond glass formula pressure head
Technical field
The present invention relates to a kind of mechanical grinding method for being suitable for manufacturing high-precision diamond glass formula pressure head, material is applied to The detection of surface micronano yardstick mechanical characteristic, belongs to nano hardness field of measuring technique.
Background technology
In the last thirty years, nano hardness e measurement technology is widely used in the inspection of material surface micro-nano-scale mechanical characteristic Survey.Nano hardness e measurement technology is referred to by using the press-in of high-precision diamond penetrator or scribed material surface so as to detect A kind of method of material micro volume interior mechanics characteristic.The depth of impression and cut be generally micron even nanoscale, be into The ideal style of the mechanical property testings such as row face coat, thin-film material and material micro-nano scale surface.Design in this manner Nano-hardness tester by record loading and uninstall process of the pressure head in sample surfaces of real-time continuous ground, process of the test can be obtained In be applied to the relation that load on pressure head is pressed into depth of material with pressure head, this is traditional macro or microhardness detection method institute It is inaccessiable.
For nano hardness e measurement technology, the impression or cut of nanoscale are obtained, except high-precision test Beyond instrument, good test environment and satisfactory sample surfaces, in addition it is also necessary to high-precision diamond penetrator.Wherein glass Family name's pressure head is the pressure head that current most of instrumentation nano indentation tests are used, and compared with other pressure heads, it can be processed It is very sharp, even and if in the depth bounds of very little, the pattern of this pressure head is also smaller with the deviation of preferable pressure head, very It is adapted to the little indentation test of compression distance.Due to the limitation of current pressure head abrasive levels, even high accuracy Bo Shi pressure heads Tip also has certain passivation, traditionally regards crest truncation region as sphere.Under identical depth, non-ideal pressure head Cross-sectional area is more than the cross-sectional area of preferable pressure head, and this will cause many negative effects.For example with the pressure that tip is more blunt When head carries out indentation test to very thin film, because the depth of required perfect plasticity deformation is larger, and film is relatively thin, therefore can not The accurate related mechanical characteristic for measuring film;If conversely, indenter tip blunt round radius very little, obtains reliable Hardness Measurement Results Impression or scratch depth it is smaller, the material thickness that it can be detected is also thinner.In a word, the manufacture of diamond penetrator and crudy Material mechanical performance test result is had a very big impact.
Diamond is hardness highest material in nature, therefore extremely difficult to its grinding and polishing.How efficiently to make The grinding cutting mechanisms for making high-precision diamond instrument and diamond crystal are current study hotspot and difficult points.Specialize in The data of diamond Bo Shi pressure head processing methods is less, but diamond penetrator is used as one kind of diamond tool, analyzes other gold The method of manufacturing technology of diamond cutter has certain universality.The process for being presently used for diamond cutter processing has:Machine Tool sharpening method, ion sputter polishing processes, chemical polishing, chemical mechanical polishing method, chemical Aided Machine polishing processes, heat chemistry are thrown Light method, laser ablation method, heat engine coupling sharpening method, focused ion beam processing method etc..Consider processing efficiency, cost and essence Degree, tradition machinery sharpening method still manufactures the prefered method of high-precision diamond cutter, currently also without other process energy It is enough to be substituted.
Tradition machinery grinding method is typically ground using the cast iron abrasive disk for being coated with diamond abrasive to diamond, In the surface micropore of diamond abrasive grain embedded in cast iron abrasive disk or be free on grinding panel surface and the diamond surface to being ground Extruding delineation is carried out, so as to reach the purpose of removal material.Diamond penetrator is also mainly added using the method for machinery sharpening Work.According to the product information that external diamond penetrator manufacturer provides, diamond Bo Shi indenter tip blunt round radius have been able to 20nm is ground to, the 200nm that international standard specifies is much better than.And the manufacturer of domestic diamond penetrator, such as Shanghai natural golden is firm The producers such as stone tools factory, Hao Su diamond tools Co., Ltd, jewelling tool Co., Ltd of Japan, there is provided diamond penetrator essence Degree is not universal high, sophisticated blunt round radius be hundreds of nanometers to a few micrometers, or even have obvious breakage, do not reach nano hardness measurement Standard.As for Natural Diamond Tools, ancestor's text person of outstanding talent's scholar's deep study and analysis of domestic Harbin Institute of Technology diamond The mechanical sharpening process of cutter, and cutting mechanisms to diamond crystal skin-material have carried out brand-new understanding, are developed at present The rounded cutting edge radius of diamond cutter can stably reach 30~50nm (ZL 200510010404.X).
If as described above, directly with reference to the machinery sharpening technological parameter processing diamond Bo Shi pressures of Natural Diamond Tools Head, should be able to directly obtain the blunt round radius less than 50nm in theory.But shown according to our researchs of early stage, using diamond The machinery sharpening technological parameter processing diamond Bo Shi pressure heads of cutter, sophisticated blunt round radius will be less than the iso standard of 200nm It is also more difficult.Therefore, in order to realize the production domesticization of high-precision diamond Bo Shi pressure heads manufacture, and international like product is reached Highest technical merit, it is necessary in detail research machinery sharpening during influence of each technological parameter to indenter tip blunt round radius, Seek preferably machinery sharpening technological parameter.
The content of the invention
The diamond glass formula pressure head of the requirements of ISO 14577 is reached the invention aims to process indices, is proposed A kind of mechanical grinding method for being suitable for manufacturing high-precision diamond glass formula pressure head.It is of the invention main obvious from diamond crystal Anisotropy and high wearability feature start with, with reference to early stage accumulate diamond cutter machinery sharpening processing experience, also Diamond glass formula pressure head is processed using the method for machinery sharpening.Tested by the grinding technics of diamond penetrator, labor gold Hard rock abrasive grain, grinding pressure, lap speed, reciprocating motion to diamond Bo Shi pressure heads grind gained blunt round radius shadow Ring, including sophisticated blunt round radius and seamed edge blunt round radius, and set up the diamond Bo Shi pressure head grinding technics of optimization.To break state Outer technology barriers, the level of processing of raising China diamond glass formula pressure head, has stepped a step of inquiry.
The purpose of the present invention is achieved through the following technical solutions:
A kind of mechanical grinding method of high-precision diamond glass formula pressure head, is anisotropy, superhard based on diamond crystal Difficult-to-machine material, total score is carried out to diamond abrasive granularity, grinding pressure, lap speed, reciprocating motion in processing etc. Analysis, set up parameter it is preferred after mechanical sharpening technique, blunt round radius obtained with this be less than 30nm, angular error and reach ISO The diamond glass formula pressure head of 14577 standards requirement.Implement step as follows:
Step one:The regular hexahedron natural diamond particles of selection select thermal coefficient of expansion as ram head material Extremely low iron-nickel alloy gets out pressure as pressure head handle material according to pressure head handle design parameter and hexahedron diamond particles size Head handle.
Step 2:The firm connection of diamond particles and pressure head handle is realized using vacuum brazing method.
Step 3:Pressure head handle is installed on the indexing fixture of jewelling tool grinder, makes pressure head handle perpendicular to diamond After abrasive disc, the unnecessary solder in pressure head end and pressure head handle material are removed using W50 diamonds or silicon carbide grinding wheel, expose gold Hard rock body, then unloads and pressure head handle under an optical microscope to diamond crystal orientation, in pressure head handle after selected crystal orientation On carry out mark.
Step 4:Pressure head handle is reinstalled on indexing fixture by mark, and the optical monitoring system carried in grinder System lowers correction head handle alignment error, makes pressure head handle as parallel as possible with indexing fixture axis, and the alignment error after adjustment is:Pressure Head handle carries out 360 ° of revolutions, and the end amount of swinging is less than 20 μm.
Step 5:Barrel finishing is carried out to pressure head pommel portion using W50 diamonds or silicon carbide grinding wheel, barreling cone angle should be accorded with Combined pressure head handle design parameter, barreling to expose diamond particles can stopping.
Step 6:Thermostatic control grinder ambient environmental conditions are 23 DEG C, constant-temperature precision ± 0.5 DEG C;In main shaft cooling water Under circulatory system normal operation, zero load stands grinder, its performance is reached stable state.
Step 7:Again operation is zeroed out to balance staff, indexing fixture axis and abrasive disk angle is set after the completion of clearing It it is 65.03 °, the parameter represents diamond penetrator side and pressure head handle axis angle.
Step 8:Using three sides of copper base diamond emery wheel corase grind diamond penetrator of 800#, positioning is by sharpening face Direction is ground well, and then setting sharpening technological parameter is:The additional reciprocating motion of abrasive disc, speed of mainshaft 4200r/min, grinding pressure 20N, diamond penetrator side is with skive contacting points position apart from alignment of shafts 30mm.In this operation, can be from indexing Pressure head handle is pulled down on fixture, then using three sides of light microscope offline inspection diamond penetrator, if 800 × lower prong and Seamed edge is visible by naked eyes defect can then enter precision grinding process, and otherwise repeat step eight is to defect is visible by naked eyes.
Step 9:Cylinder iron abrasive disk replaces 800# boart boart wheel discs, then uniformly coats W0.1 in cast iron panel surface Diamond paste, abrasive disk excess surface is then struck off after 10 minutes in grinding panel surface craft beforehand research with grinding block and is ground Cream.
Step 10:Three sides of diamond penetrator are refined, fine grinding technology parameter is set to:Cast iron abrasive disk is added Move back and forth, speed of mainshaft 4200r/min, grinding pressure 15N, diamond penetrator side and cast iron abrasive disk contacting points position away from It is 30mm with a distance from the alignment of shafts.
Step 11:Pressure head handle is pulled down from indexing fixture, using three sides of light microscope offline inspection diamond penetrator Face, if 1400 × lower prong and seamed edge are visible by naked eyes defect, can continue to detect indenter tip pattern and calculate pressure using AFM Head blunt round radius;If 1400 × lower prong and seamed edge there are naked eyes visual defects, it is considered as unqualified, should be carried out by step 10 again Fine grinding.
Step 12:Detect that qualified diamond Bo Shi pressure heads carry out the processing of pressure head handle for AFM.
Step 13:After pressure head handle is machined, using laser confocal microscope to diamond each angle of Bo Shi pressure heads The foozle of parameter is detected.
Step 14:Diamond Bo Shi pressure heads are cleaned with alcohol after the completion of detection, and fills sheath, mounted box protection.
The present invention has following beneficial effect compared with prior art:
1st, the invention provides a kind of mechanical grinding method for being suitable for manufacturing high-precision diamond glass formula pressure head, based on gold The obvious anisotropy of hard rock crystal and high wearability feature, to diamond abrasive granularity, grinding pressure, grinding in processing Disk rotating speed, reciprocating motion etc. carry out comprehensive analysis, optimization machinery sharpening combination of process parameters, i.e., first using the copper-based gold of coarse grit Diamond grinding wheel is roughly ground, the quick geometrical morphology for forming pressure head triangular pyramid, then using the casting of coating particle diameter W0.1 diamond pastes Iron abrasive disk is refined, the high accuracy Buddha's warrior attendant of the requirement that obtains that crudy is good and every angle parameter meets international standards Stone glass formula pressure head.
2nd, the present invention is not only high in machining efficiency, and the glass formula pressure head of processing is very sharp, sophisticated and seamed edge blunt round radius 30nm is smaller than, pressure head angle parameter complies fully with the standards of ISO 14577.
Brief description of the drawings
Fig. 1 is the jewelling tool grinder for processing diamond glass formula pressure head;
Fig. 2 is the structural representation of jewelling tool grinder critical moving components;
Fig. 3 is the process chart for manufacturing high-precision diamond glass formula pressure head.
Specific embodiment
Technical scheme is further described below in conjunction with the accompanying drawings, but is not limited thereto, it is every to this Inventive technique scheme is modified or equivalent, without deviating from the spirit and scope of technical solution of the present invention, all should be covered In protection scope of the present invention.
A kind of mechanical grinding method for being suitable for manufacturing high-precision diamond glass formula pressure head, and extremely sharp glass can be obtained Formula pressure head to implement step as follows:
Step one:The regular hexahedron natural diamond particles of selection are used as ram head material, the selection of pressure head handle material The extremely low iron-nickel alloy of thermal coefficient of expansion, this alloy material can keep the stability of length within the scope of very big temperature.Root Pressure head handle, such as Fig. 3 a are got out according to pressure head handle design parameter and hexahedron diamond particles size) shown in.
Step 2:The firm connection of diamond particles and pressure head handle is realized using vacuum brazing method.To first be pressed with alcohol Head handle is cleaned up, the pollutant such as removal oil stain;Then, diamond particles are positioned in the groove of pressure head handle, and bury and cover silver Copper titanium cored solder;Finally, the pressure head handle for being embedded with diamond particles and cored solder is placed in carries out soldering, high temperature in vacuum brazing furnace Make solder fusing and embed diamond particles, while diamond particles and pressure head handle material are consolidated linking together, such as scheme Shown in 3b).
Step 3:Diamond particles after soldering are buried by solder, for the ease of pressure head lateral orientation, pressure head handle peace It is attached on the indexing fixture shown in Fig. 1 and Fig. 2, makes pressure head handle after boart boart wheel disc, using W50 diamonds or carbonization Silica sand wheel removes the unnecessary solder in pressure head end and pressure head handle material, exposes diamond body, and then pressure head handle is unloaded simultaneously Diamond crystal is oriented under an optical microscope, such as Fig. 3 c) shown in, mark is carried out on pressure head handle after selected crystal orientation.
Step 4:Pressure head handle is reinstalled on indexing fixture by mark, and the optical monitoring system carried in grinder System lowers correction head handle alignment error, makes pressure head handle as parallel as possible with indexing fixture axis, and the alignment error after adjustment is:Pressure Head handle carries out 360 ° of revolutions, and the end amount of swinging is less than 20 μm.
Step 5:Barrel finishing is carried out to pressure head pommel portion using W50 diamonds or silicon carbide grinding wheel, barreling cone angle should be accorded with Combined pressure head handle design parameter, barreling to expose diamond particles can stopping.
Step 6:As shown in figure 1, thermostatic control grinder ambient environmental conditions are 23 DEG C, constant-temperature precision ± 0.5 DEG C; Under main shaft cooling water recirculation system normal operation, zero load stands grinder, its performance is reached stable state.
Step 7:Again operation is zeroed out to balance staff shown in Fig. 1 and Fig. 2, indexing fixture axis is set after the completion of clearing It it is 65.03 ° with abrasive disk angle, the parameter represents diamond penetrator side and pressure head handle axis angle.
Step 8:Using three sides of copper base diamond emery wheel corase grind diamond penetrator of 800#, positioning is by sharpening face Direction is ground well, and then setting sharpening technological parameter is:The additional reciprocating motion of abrasive disc, speed of mainshaft 4200r/min, grinding pressure 20N, diamond penetrator side is with skive contacting points position apart from alignment of shafts 30mm.In this operation, can be from indexing Pressure head handle, such as Fig. 3 d are pulled down on fixture) shown in, then using three sides of light microscope offline inspection diamond penetrator, if 800 × lower prong and seamed edge are visible by naked eyes defect can then enter precision grinding process, and otherwise repeat step eight is scarce to being visible by naked eyes Untill falling into.
Step 9:Cylinder iron abrasive disk replaces 800# boart boart wheel discs, then uniformly coats W0.1 in cast iron panel surface Diamond paste, abrasive disk excess surface is then struck off after 10 minutes in grinding panel surface craft beforehand research with grinding block and is ground Cream.
Step 10:Three sides of diamond penetrator are refined, fine grinding technology parameter is set to:Cast iron abrasive disk is added Move back and forth, speed of mainshaft 4200r/min, grinding pressure 15N, diamond penetrator side and cast iron abrasive disk contacting points position away from It is 30mm with a distance from the alignment of shafts.
Step 11:Pressure head handle is pulled down from indexing fixture, using three sides of light microscope offline inspection diamond penetrator Face, if 1400 × lower prong and seamed edge are visible by naked eyes defect, can continue to detect indenter tip pattern and calculate pressure using AFM Head blunt round radius, such as figure Fig. 3 e) shown in;If 1400 × lower prong and seamed edge there are naked eyes visual defects, it is considered as unqualified, Ying Chong Newly refined by step 10.
Step 12:Detect that qualified diamond Bo Shi pressure heads carry out the processing of pressure head handle, such as Fig. 3 f for AFM) shown in, Need to protect ground pressure head end in pressure head handle process.The overall structure of pressure head handle can refer to difference The interface parameters of nano-hardness tester carries out individually designed, and impression examination is carried out on the instrument so that made pressure head can be installed on Test.
Step 13:After pressure head handle is machined, using laser confocal microscope to diamond each angle of Bo Shi pressure heads The foozle of parameter detected, such as Fig. 3 g) shown in.
Step 14:Diamond Bo Shi pressure heads are cleaned with alcohol after the completion of detection, and fill sheath, mounted box protection, Such as Fig. 3 h) shown in.
According to the diamond Bo Shi pressure heads that above-mentioned steps are processed, tip and seamed edge blunt round radius can be better than 30nm, three sides In face and pressure head Rhizoma Sparganii cone axis angle ± 0.3 °, three seamed edges are in the projection angle in Rhizoma Sparganii cone axis plane In error ± 1 °, in 0.5 ° of Rhizoma Sparganii cone axis and pressure head handle axis angle.Above-mentioned all technical complies fully with ISO 14577 standards, wherein tip and seamed edge blunt round radius index are much better than the 200nm precision of the regulations of ISO 14577.

Claims (5)

1. a kind of mechanical grinding method of high-precision diamond glass formula pressure head, it is characterised in that methods described step is as follows:
Step one:The regular hexahedron natural diamond particles of selection are used as ram head material, and selection thermal coefficient of expansion is extremely low Iron-nickel alloy as pressure head handle material, pressure head is ready to according to pressure head handle design parameter and hexahedron diamond particles size Handle;
Step 2:The firm connection of diamond particles and pressure head handle is realized using vacuum brazing method;
Step 3:Pressure head handle is installed on the indexing fixture of jewelling tool grinder, makes pressure head handle perpendicular to skive After disk, the unnecessary solder in pressure head end and pressure head handle material are removed using W50 diamonds or silicon carbide grinding wheel, expose diamond Body, then unloads pressure head handle and under an optical microscope to diamond crystal orientation, is done on pressure head handle after selected crystal orientation Good mark;
Step 4:Pressure head handle is reinstalled on indexing fixture by mark, and under the optical monitoring system that grinder is carried Adjustment pressure head handle alignment error;
Step 5:Barrel finishing is carried out to pressure head pommel portion using W50 diamonds or silicon carbide grinding wheel, barreling is to exposing diamond Particle can stop;
Step 6:Thermostatic control grinder ambient environmental conditions are 23 DEG C, constant-temperature precision ± 0.5 DEG C;In main shaft cooling water circulation In the case of system worked well, zero load stands grinder, its performance is reached stable state;
Step 7:Again operation is zeroed out to balance staff, indexing fixture axis is set after the completion of clearing is with abrasive disk angle 65.03°;
Step 8:Using three sides of copper base diamond emery wheel corase grind diamond penetrator of 800#, positioning is by the good mill in sharpening face Direction, then setting sharpening technological parameter is:The additional reciprocating motion of abrasive disc, speed of mainshaft 4200r/min, grinding pressure 20N, Diamond penetrator side is with skive contacting points position apart from alignment of shafts 30mm;
Step 9:Cylinder iron abrasive disk replaces 800# boart boart wheel discs, and the gold of W0.1 is then uniformly coated in cast iron panel surface Hard rock abrasive pastes, then strike off abrasive disk excess surface abrasive pastes with grinding block after panel surface craft beforehand research is ground 10 minutes;
Step 10:Three sides of diamond penetrator are refined;
Step 11:Pressure head handle is pulled down from indexing fixture, using three sides of light microscope offline inspection diamond penetrator, if 1400 × lower prong and seamed edge are visible by naked eyes defect, then can continue to detect indenter tip pattern using AFM and to calculate pressure head blunt Radius of circle;If 1400 × lower prong and seamed edge there are naked eyes visual defects, it is considered as unqualified, essence should be carried out by step 10 again Mill;
Step 12:Detect that qualified diamond Bo Shi pressure heads carry out the processing of pressure head handle for AFM;
Step 13:After pressure head handle is machined, using laser confocal microscope to diamond each angle parameter of Bo Shi pressure heads Foozle detected;
Step 14:Diamond Bo Shi pressure heads are cleaned with alcohol after the completion of detection, and fills sheath, mounted box protection.
2. the mechanical grinding method of high-precision diamond glass formula pressure head according to claim 1, it is characterised in that the step Rapid two comprise the following steps that:Pressure head handle is cleaned up with alcohol first, pollutant is removed;Then, diamond particles are placed In in the groove of pressure head handle, and bury and cover silver-bearing copper titanium cored solder;Finally, the pressure head handle for being embedded with diamond particles and cored solder is placed in Soldering is carried out in vacuum brazing furnace, high temperature makes solder fusing and embeds diamond particles, while by diamond particles and pressure head Handle material is firm to link together.
3. the mechanical grinding method of high-precision diamond glass formula pressure head according to claim 1, it is characterised in that the step In rapid four, alignment error is:Pressure head handle carries out 360 ° of revolutions, and the end amount of swinging is less than 20 μm.
4. the mechanical grinding method of high-precision diamond glass formula pressure head according to claim 1, it is characterised in that the step In rapid eight, in technique is sharpened, pressure head handle can be pulled down from indexing fixture, then using light microscope offline inspection diamond Three sides of pressure head, if 800 × lower prong and seamed edge are visible by naked eyes defect can enter step 9, otherwise repeat step eight to Untill being visible by naked eyes defect.
5. the mechanical grinding method of high-precision diamond glass formula pressure head according to claim 1, it is characterised in that the step In rapid ten, fine grinding technology parameter is set to:The additional reciprocating motion of cast iron abrasive disk, speed of mainshaft 4200r/min, grinding pressure 15N, diamond penetrator side is 30mm apart from the distance of the alignment of shafts with cast iron abrasive disk contacting points position.
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高精度金刚石玻氏压头的设计方法及其机械研磨技术研究;吴东;《CNKI》;20150701;19-61 *

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Publication number Priority date Publication date Assignee Title
CN107457616A (en) * 2017-09-07 2017-12-12 哈尔滨工业大学 A kind of diamond crystal surface chemical mechanical polishing method based on nano-nickel powder

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