CN101816598B - CVD diamond thick-film ophthalmology scalpel manufacturing device and manufacturing method - Google Patents
CVD diamond thick-film ophthalmology scalpel manufacturing device and manufacturing method Download PDFInfo
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Abstract
The invention discloses a CVD diamond thick-film ophthalmology scalpel manufacturing device and a manufacturing method, which belong to the technical field of instrument. A planetary grinding-polishing mode is adopted, and the device comprises a grinding disc, a heater, a bracket, a force measuring strain gauge, a temperature measuring sensor, a fixture, an air inlet pipe, a shaft, a bearing, a worktable, a support, a motor and a pulley; the shaft is fixed on the support by the bearing, the support is connected and fixed with the worktable, and one end of the shaft is provided with the pulley and is connected with the motor which is provided with a pulley by a belt; and the other end of the shaft is fixedly connected with the grinding disc. The invention has the advantages of utilizing the high-temperature diffusion principle of diamond, innovatively introducing a thermochemical diffusing-grinding mode to grind the CVD diamond thick-film ophthalmology scalpel, overcoming long-standing problems of machining the CVD diamond thick film and obtaining good grinding speed, high diamond surface quality, precise shape precision and blade quality.
Description
Technical field
The present invention relates to a kind of CVD diamond thick-film ophthalmology scalpel manufacturing device and manufacture method, belong to technical field of tools.
Background technology
CVD thick film diamond scalpel is mainly used in field of ophthalmology such as curing cataract.China's cataract operation cutter for same is mainly metal blade (if the patient proposes to adopt diamond scalpel, need add high expense) now, and it is serious to the damage of tissue, causes the healing stage lengthening, and influences therapeutic effect.The glacing flatness of the scalpel blade that diamond is made can reach 0.01 μ m, and is promptly flawless under the 500-5000 power microscope; Blade arc radius 0.005 μ m, it is the one thousandth of carbide tool, only form by several carbon atoms are regularly arranged, be far smaller than individual cells, blade only therefrom is divided into two individual cells when therefore performing the operation, and do not injure cell and the tissue that is adjacent, can not cause hemorrhagely, the notching edge aurora are clean neat, make wound heal at cellular level, the no cicatrix that heals does not produce astigmatism.And diamond cutter cutting force is little, makes operation technique brisk, simultaneously also can metal dust be remained in the tissue and influences wound healing as the metal cutter.
Modern age, science and technology successfully was transformed into diamond with common gases (methane gas adds hydrogen) under the low pressure condition, be called chemical vapour deposition (CVD) (Chemical Vapor Deposition, be called for short CVD) diamond, to be different from synthetic monocrystalline and the polycrystalline diamond (PCD) that sinters under natural diamond and the High Temperature High Pressure.The breakthrough of CVD method growing diamond technology, the CVD diamond is the pure polycrystalline diamond of pleocrystalline, do not resemble and contain a spot of non-diamond binding material the sintered diamond PCD, so it is near the artificial material of natural diamond, can substitute expensive natural diamond in a lot of applications, thereby reduce the cutter manufacturing cost.
Adamantine excellent properties, make its scope that is widely used, but also just because of these character, make the unusual difficulty of adamantine processing, the method of tradition polishing diamond is to adopt the cast iron plate that is coated with bortz powder, polishes in the softest direction of anisotropic single-crystal diamond.The hardness of bortz powder is the diamond average hardness on the cast iron plate, and it is higher than polished the softest adamantine direction, thereby makes polishing smooth.And diamond thin is the diamond of glomerocryst form, and the hardness of its all directions all is adamantine average hardness, and is suitable with the hardness of bortz powder on the cast iron plate, so adopt cast iron plate polishing diamond thin film, the problem of two aspects can occur:
The one, polishing velocity is extremely slow, needs several days time could polish a slice diamond thin.The 2nd, of poor quality, the surface roughness of the diamond thin that polishes out generally can only reach the magnitude of Ra 0.1 μ m, also fall far short apart from minute surface, let alone nano level surface.Severe impact during simultaneously owing to machine glazed finish also can produce darker surface damage layer.Precision and ultraprecise processing can not be applicable to it.
Summary of the invention
In order to overcome the deficiencies in the prior art, the invention provides a kind of CVD diamond thick-film ophthalmology scalpel manufacturing device and manufacture method.
A kind of CVD diamond thick-film ophthalmology scalpel manufacturing device has abrasive disk, heater, support, dynamometry foil gauge, thermometric sensing part, anchor clamps, air inlet pipe, axle, bearing, workbench, support, motor and belt pulley; Axle is supporting by bearing fixing, the support and connection stationary work-table, and an end of axle is equipped with belt pulley and is connected with the motor that has belt pulley by belt; The fixedly connected abrasive disk of the other end of axle,
Above the workbench and abrasive disk below having heaters be fixed on the workbench,
The processing cover is arranged on the workbench, and there is air inlet pipe the side of processing cover, and observation window is arranged above,
Support stands on the workbench, other end jockey, and anchor clamps insert from the end face window of processing cover, and the anchor clamps card engaging workpiece waits to grind the CVD diamond, and workpiece is waited to grind the CVD diamond and is contacted with abrasive disk,
The dynamometry foil gauge is rack-mount, and the thermometric sensing part is installed in the anchor clamps.
The present invention adopts the heat chemistry polishing: in the high temperature more than 700 ℃, the diamond atom can dissolve in the metal lattices such as ferrum or nickel and be corroded.Utilize this principle, just diamond contact with pure iron card in the rotation under 900 ℃ of high temperature, diamond is carried out heat chemistry accurately grind, and can obtain the form accuracy and the blade quality of good grinding rate, high diamond surface quality, precision.
The technical solution adopted for the present invention to solve the technical problems is: a kind of CVD diamond thick-film ophthalmology scalpel manufacturing method, contain following steps:
Step 1: adopt laser means that CVD diamond thick-film material is cut, cut into the size that needs;
Step 2: profile is ground and polishing; Adopt lapping using star lapping machine polishing mode, 60 rev/mins of rotating speeds, pressure 1Kpa;
Step 3: thickness grinding and polishing; Wear into thin slice, 3000 rev/mins of rotating speeds, pressure 200Kpa;
Step 4: corase grind blade; Adopt the heat chemistry Ginding process; Under 900 ℃ of temperature, 60 rev/mins of rotating speeds, pressure, 10Kpa;
Step 5: correct grinding blade; Under 900 ℃ of temperature; The blade angle of wedge is the 30-38-40 degree, and the blade glacing flatness is 0.1 μ m;
Step 6: grind blade; Under 900 ℃ of temperature; Pressure is 10-50Kpa, and grinding speed is 0.16m/s,
Step 7: detect.
A kind of CVD diamond thick-film ophthalmology scalpel, nose angle are 35-50 °, and the blade angle of wedge is 30-40 °; The glacing flatness of blade reaches 0.1 μ m, and is promptly flawless under the 500-5000 power microscope; Blade arc radius 0.05 μ m; The tool surface roughness is less than Ra0.005 μ m.
Beneficial effect of the present invention:
Compare traditional diamond mechanical grinding method, thermochemical method grinding of the present invention and polishing diamond, have a lot of advantages: its grinding pressure is little, has only 10-50Kpa, grinding speed can be low to moderate 0.16m/s, (mechanical means is respectively 1-5Mpa and 30-50m/s), greatly reduce the suffered shock and vibration of diamond blade in the grinding process, the blade rectilinearity further improves, have only 38 ° ophthalmology scalpel even grind the blade angle of wedge, can guarantee that also blade is flawless under 500 power microscopes.Secondly, directivity was not strong when diamond was ground in thermochemical method, can grind on any direction of any crystal face of diamond, and these characteristics make it can polish the diamond thin of glomerocryst form.Diamond crystal at high temperature can also discharge part internal stress wherein, and its performance is improved.
1. adopt lapping using star lapping machine polishing mode, each crystal grain on CVD diamond thick-film surface can both be ground on its softest direction.
2. adopt air bearing as grinding and polishing machine main shaft, eliminate vibration and impact in the grinding and polishing process.
3. utilize diamond High temperature diffusion principle, the introducing heat chemistry diffusion lapping mode of innovation grinds the CVD diamond thick-film ophthalmology scalpel, having overcome the long-standing processing difficult problem of CVD diamond thick-film, belonged to international most advanced level, is research and development first at home.
Description of drawings
Fig. 1 is a CVD diamond thick-film ophthalmology scalpel sketch map of the present invention.
Fig. 2 is a lapping using star lapping machine burnishing device sketch map of the present invention.
The producing device sketch map that Fig. 3 grinds for heat chemistry of the present invention.
The present invention is further described below in conjunction with drawings and Examples.
The specific embodiment
Embodiment 1: as Figure 1-3, and a kind of manufacture method of CVD diamond thick-film ophthalmology scalpel, contain following steps:
Step 1: adopt laser means that CVD diamond thick-film material is cut, cut into the size that needs;
Step 2: profile is ground and polishing; Adopt lapping using star lapping machine polishing mode, 60 rev/mins of rotating speeds, pressure 1Kpa;
Step 3: thickness grinding and polishing; Wear into thin slice, 3000 rev/mins of rotating speeds, pressure 200Kpa; Natural diamond is a typical brittleness material, the CVD diamond thick-film is relatively also more crisp, and owing to be synneusis texture, grinding hardness is adamantine average hardness, not resembling has the softest direction (abrasive hardness on the diamond crystals on the soft or hard direction differs more than 100 times) the natural diamond, so grinding difficulty more.In the thin slice process of it being worn into 0.2X1X6mm, diamond is easy to fracture.
Step 4: add hydrogen to machining area by air inlet pipe, the heater heating according to thermometric and gaging result, is adjusted temperature and pressure, under 900 ℃ of temperature, and 60 rev/mins of rotating speeds, pressure, 10Kpa, the blade of corase grind thin slice;
Step 5: the blade that continues the correct grinding thin slice; Under 900 ℃ of temperature; The blade angle of wedge is the 30-38-40 degree, and the blade glacing flatness is 0.1 μ m; This be main in the diamond cutter manufacture process also be the operation of most critical, the final mass level of its decision diamond cutter according to thermometric and gaging result, is adjusted temperature and pressure;
The blade angle of wedge of ophthalmology scalpel is 38 degree, the blade glacing flatness that the little angle of wedge like this will be accomplished 0.1 μ m,
Step 6: the blade that continues abrasive sheet; According to thermometric and gaging result, adjust temperature and pressure, under 900 ℃ of temperature; Pressure is 10-50Kpa, and grinding speed is 0.16m/s,
Step 7: detect.
A kind of CVD diamond thick-film ophthalmology scalpel manufacturing device has abrasive disk 2, heater 3, support 4, dynamometry foil gauge 5, thermometric sensing part 6, anchor clamps 7, air inlet pipe 9, axle 15, bearing 10, workbench, support, motor and belt pulley 11; Axle 15 is fixed on by bearing 10 and supports on 12, supports 12 and is connected and fixed workbench 14, and an end of axle 15 is equipped with belt pulley 11 and is connected with the motor that has belt pulley by belt; The fixedly connected abrasive disk 2 of the other end of axle 15;
Counterweight 16 is arranged on the anchor clamps 7;
Above the workbench 14 and abrasive disk 2 below having heaters 3 be fixed on the workbench 14;
Processing cover 13 is arranged on the workbench 14, and there is air inlet pipe 9 side of processing cover 13, and observation window 8 is arranged above;
Support stands on the workbench 14, other end jockey 7, and anchor clamps 7 insert from the end face window of processing cover 13, and anchor clamps 7 card engaging workpieces wait to grind CVD diamond 1, and workpiece is waited to grind CVD diamond 1 and is contacted with abrasive disk 2;
Dynamometry foil gauge 5 is installed on the anchor clamps 7, and thermometric sensing part 6 is installed in the anchor clamps 7.
To be commercially available strain-type force sensor be connected with commercially available pressure-display device dynamometry foil gauge 5.
The structure of heater 3 adopts the fuel gas mode of heating, and heater 3 is the kitchen range eye of natural gas or coal gas; Or take Electric heating, heater 3 is the electric furnace heating wire structure;
Thermometric sensing part 6 is connected with commercially available temperature measurer;
Bearing 10 is the superhigh precision air bearing.
Embodiment 2: structure such as embodiment 1,
The present invention polishes mode, heat chemistry Ginding process and the superhigh precision air bearing main shaft as the grinding and polishing machine by the lapping using star lapping machine of original creation, air bearing adopts the processing modes such as medium of the pressure-air film of high cleaning as supporting spindle, it is crisp to have solved CVD diamond thick-film material effectively, hardness does not on average have the softest direction, flimsy technological difficulties have realized the high-precision requirement of ophthalmology scalpel.To open the New Times of homemade diamond scalpel after project is finished, reach the machining accuracy and the sharpness requirement of import diamond scalpel fully, substitute traditional metal blade, reduce the injury tolerance of ophthalmologic operation greatly eye.
The typical shape of diamond ophthalmology scalpel diamond knife head part is as shown in Figure 1: its overall dimensions is 0.2X1X6mm, and nose angle is 45 °, and the blade angle of wedge is 38 °.Require the glacing flatness of blade to reach 0.1 μ m, promptly flawless under the 500-5000 power microscope; Blade arc radius 0.05 μ m.
1. thickness grinding and polishing, natural diamond is a typical brittleness material, the CVD diamond thick-film is relatively also more crisp, and owing to be synneusis texture, grinding hardness is adamantine average hardness, not resembling has the softest direction (abrasive hardness on the diamond crystals on the soft or hard direction differs more than 100 times) the natural diamond, so grinding difficulty more.In the thin slice process of it being worn into 0.2X1X6mm, diamond is easy to fracture.
2. grinding blade, this be main in the diamond cutter manufacture process also be the operation of most critical, the final mass level of its decision diamond cutter.For a long time, numerous diamond cutter experts is in the research of being engaged in this respect and innovation, in the hope of obtaining accurate, sharper more diamond blade.
Ophthalmology scalpel difficult point in this regard also will be given prominence to more: the blade angle of wedge of general diamond machining tool is more than 80 degree, and the blade angle of wedge of ophthalmology scalpel has only 38 degree, the blade glacing flatness that the little angle of wedge like this will be accomplished 0.1 μ m, its difficulty is well imagined; In addition, CVD diamond fragility is bigger, and intensity is littler, has increased the difficulty that reaches the above-mentioned requirements blade more.
At above-mentioned difficult point, the present invention is the employing lapping using star lapping machine polishing mode as shown in Figure 2 of novelty at first:
In the grinding wheel high speed rotating of bottom, the anchor clamps that diamond thick-film is housed above the emery wheel drive diamond and slowly run along self axis.This kind mode is because all directions of making the grinding direction spread all over diamond surface, can make each crystal grain of diamond surface that chance in its softest direction grinding is all arranged, so grinding speed improves greatly, and reduced the danger that diamond thick-film fractures and damages.
Secondly, the present invention has also adopted the main shaft of superhigh precision air bearing as the grinding and polishing machine, air bearing adopts the medium of the pressure-air film of high cleaning as supporting spindle, rotational resistance is little, running accuracy height (end face run-out is less than 0.5 μ m), the steady friction of high speed rotating, and air film itself has very strong vibration absorption ability, can absorb the microvibration that grinding process self produces fully, whole grinding and polishing process is carried out under the condition of not having any microvibration substantially, thereby guarantee the quality of finish of diamond wafers.
The most important thing is that the blade Ginding process that the present invention adopts with innovating is the heat chemistry Ginding process, its principle as shown in Figure 3:
At 700 degree Celsius during above temperature, if diamond surface is contacted with ferrum, the carbon atom in the diamond crystal can be broken away from the constraint of self lattice, is diffused in the ferrum crystal lattices and goes.Use the process of lapping of this mechanism to be:
In hydrogen atmosphere the irony mill is heated to 900 ℃, makes diamond and contact of irony mill and relative slip, the carbon atom in the diamond lattice can be diffused in the ferrum crystal lattices, reaches the adamantine purpose of grinding.The carbon that enters in the ferrum lattice is dispersed in the air with hydrogen reaction generation methane and with air-flow again.The grinding speed of this method is a per second 40-2000 atomic layer.
Compare traditional diamond mechanical grinding method, with this thermochemical method grinding and polishing diamond, have a lot of advantages: its grinding pressure is little, have only 10-50Kpa, grinding speed can be low to moderate 0.16m/s, (mechanical means is respectively 1-5Mpa and 30-50m/s), greatly reduce the suffered shock and vibration of diamond blade in the grinding process, the blade rectilinearity further improves, and the diamond surface that processes is extremely smooth, can reach nano level surface easily.Secondly, non-directional when diamond is ground in thermochemical method, can be on any direction of any crystal face of diamond high-efficient grinding, these characteristics make it can polish the diamond thin of glomerocryst form.Diamond crystal at high temperature can also discharge part internal stress wherein, and its performance is improved.
More than be main research contents of the present invention and technology path, its major technique innovative point is summarized as follows:
1. adopt lapping using star lapping machine polishing mode, each crystal grain on CVD diamond thick-film surface can both be ground on its softest direction.
2. adopt air bearing as grinding and polishing machine main shaft, eliminate vibration and impact in the grinding and polishing process.
3. utilize diamond High temperature diffusion principle, the introducing heat chemistry diffusion lapping mode of innovation grinds the CVD diamond thick-film ophthalmology scalpel, having overcome the long-standing processing difficult problem of CVD diamond thick-film, belonged to international most advanced level, is research and development first at home.
Embodiment 3:
A kind of CVD diamond thick-film ophthalmology scalpel, overall dimensions are 0.2X1X6mm; Nose angle is 45 °, and the blade angle of wedge is 38 °; The glacing flatness of blade reaches 0.1 μ m, and is promptly flawless under the 500-5000 power microscope; Blade arc radius 0.05 μ m; The tool surface roughness is less than Ra0.005 μ m.
Or a kind of CVD diamond thick-film ophthalmology scalpel, nose angle is 35 °, the blade angle of wedge is 30 °; The glacing flatness of blade reaches 0.1 μ m; Blade arc radius 0.05 μ m; The tool surface roughness is less than Ra0.005 μ m.
Or a kind of CVD diamond thick-film ophthalmology scalpel, nose angle is 50 °, the blade angle of wedge is 40 °; The glacing flatness of blade reaches 0.1 μ m; Blade arc radius 0.05 μ m; The tool surface roughness is less than Ra0.005 μ m.
Claims (4)
1. CVD diamond thick-film ophthalmology scalpel manufacturing device is characterized in that abrasive disk is arranged, heater, support, dynamometry foil gauge, thermometric sensing part, anchor clamps, air inlet pipe, axle, bearing, workbench, support, motor and first belt pulley; Axle is supporting by bearing fixing, the support and connection stationary work-table, and an end of axle is equipped with first belt pulley, is connected with the motor that has second belt pulley by belt; The fixedly connected abrasive disk of the other end of axle,
Above the workbench and abrasive disk below having heaters be fixed on the workbench,
The processing cover is arranged on the workbench, and there is air inlet pipe the side of processing cover, and observation window is arranged above,
Support stands on the workbench, other end jockey, and anchor clamps insert from the end face window of processing cover, and the anchor clamps card engaging workpiece waits to grind the CVD diamond, and workpiece is waited to grind the CVD diamond and is contacted with abrasive disk,
The dynamometry foil gauge is rack-mount, and the thermometric sensing part is installed in the anchor clamps.
2. a kind of CVD diamond thick-film ophthalmology scalpel manufacturing device according to claim 1 is characterized in that: bearing is an air bearing, and air bearing adopts the medium of air film as supporting spindle.
3. a kind of CVD diamond thick-film ophthalmology scalpel manufacturing device according to claim 1 and 2 is characterized in that: counterweight is arranged on the anchor clamps;
The structure of heater adopts the fuel gas mode of heating, and heater is the kitchen range eye of natural gas or coal gas; Or to take Electric heating, heater be the electric furnace heating wire structure.
4. a kind of CVD diamond thick-film ophthalmology scalpel manufacturing method of a kind of CVD diamond thick-film ophthalmology scalpel manufacturing device according to claim 1, contain following steps:
Step 1: adopt laser means that CVD diamond thick-film material is cut, cut into the size that needs;
Step 2: carry out profile and grind and polishing; Adopt lapping using star lapping machine polishing mode, 60 rev/mins of rotating speeds, pressure 1Kpa;
Step 3: thickness grinding and polishing; Wear into thin slice, 3000 rev/mins of rotating speeds, pressure 200Kpa;
Step 4: corase grind blade; Adopt the heat chemistry Ginding process; Under 900 ℃ of temperature, 60 rev/mins of rotating speeds, pressure, 10Kpa;
Step 5: correct grinding blade; Under 900 ℃ of temperature; The blade angle of wedge is the 30-38-40 degree, and the blade glacing flatness is 0.1 μ m;
Step 6: grind blade; Under 900 ℃ of temperature; Pressure is 10-50Kpa, and grinding speed is 0.16m/s,
Step 7: detect.
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Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1539593A (en) * | 2003-10-29 | 2004-10-27 | 哈尔滨理工大学 | Welding method for diamond thick film by chemical vapor deposition |
| CN1586815A (en) * | 2004-09-03 | 2005-03-02 | 沈阳理工大学 | High speed percision polishing device and polishing method with diamond film |
| CN1751848A (en) * | 2005-09-29 | 2006-03-29 | 哈尔滨工业大学 | High-precision mechanical sharpening method for diamond cutter with high-efficiency and low-cost |
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Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1539593A (en) * | 2003-10-29 | 2004-10-27 | 哈尔滨理工大学 | Welding method for diamond thick film by chemical vapor deposition |
| CN1586815A (en) * | 2004-09-03 | 2005-03-02 | 沈阳理工大学 | High speed percision polishing device and polishing method with diamond film |
| CN1751848A (en) * | 2005-09-29 | 2006-03-29 | 哈尔滨工业大学 | High-precision mechanical sharpening method for diamond cutter with high-efficiency and low-cost |
Non-Patent Citations (1)
| Title |
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| JP特开平11-48143A 1999.02.23 |
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Owner name: SHENZHEN XINYUNXIANG PRECISION CUTTING TOOLS CO., Free format text: FORMER OWNER: LIU XIAOMING Effective date: 20110704 |
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Assignee: Shenzhen Xinyunxiang Precision Cutting Tools Co., Ltd. Assignor: Liu Xiaoming Contract record no.: 2011440020246 Denomination of invention: CVD diamond thick-film ophthalmology scalpel manufacturing device and manufacturing method License type: Exclusive License Open date: 20100901 Record date: 20110629 |