CN1715181A - Method for controlling carbon nano tube oriented arranging, distribution and density - Google Patents
Method for controlling carbon nano tube oriented arranging, distribution and density Download PDFInfo
- Publication number
- CN1715181A CN1715181A CN 200410009281 CN200410009281A CN1715181A CN 1715181 A CN1715181 A CN 1715181A CN 200410009281 CN200410009281 CN 200410009281 CN 200410009281 A CN200410009281 A CN 200410009281A CN 1715181 A CN1715181 A CN 1715181A
- Authority
- CN
- China
- Prior art keywords
- carbon nanotube
- density
- distribution
- electrode
- electric field
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Images
Abstract
The present invention relates to method of controlling carbon nanotube oriented arrangement, distribution and density, and belongs to the field of carbon nanotube processing technology. The method includes the following steps: preparing electrodes according to the oriented arrangement requirement, dispersing carbon nanotube in organic solvent in controlled concentration, dropping carbon nanotube solution onto silicon substrate with electrodes and applying AC current. Under the action of HF AC electric field, carbon nanotube dispersed inside the organic solvent will generate polarized charges on two ends and the carbon nanotube will be oriented owing to the mutual action between the AC electric field and the polarized charges. By means of controlling the concentration of carbon nanotube in solvent, AC electric field strength, electrode shape and structure, and the application of AC current, carbon nanotube oriented arrangement, distribution and density may be controlled.
Description
Technical field
The invention belongs to field of carbon nanotube processing technology, be specifically related to the method for a kind of controlling carbon nanotube orientations, density and distribution.
Background technology
Realize the two kinds of technological approaches that have of nanometer electronic device, i.e. " from top to bottom " (top down) and " from bottom to top " (bottomup), the former is meant by little processing or solid state technology, with inorganic materials (Si, GaAs etc.) be that main solid electronic device size is dwindled, constantly make the functional device microminiaturization, the microminiaturization of device relies on the application and the potential development of existing micro-processing technology; The latter is meant that with atom, molecule be elementary cell, control unit molecule, on molecular level, increase structural complexity, wish by people designs and assembles, construct the device with specific function, how utilizing above-mentioned two kinds of technology to prepare nanometer electronic device is in the present nanosecond science and technology field one research focus.
Carbon nanotube is because of its molecular structure, has unique electrology characteristic, utilize carbon nanotube to can be made into various nanometer electronic devices, for example: field-effect transistor, transmitter etc., in addition can the nanometer electronic device based on carbon nanotube is integrated, obtain circuit with certain logic function.But carbon nanotube is used for the difficulty that a maximum is arranged that nanometer electronic device faces: how with carbon nanotube along certain orientations, and its distribution, controllable density.The method of existing orientational alignment carbon nano-tube mainly contains two kinds, the one, the controlling carbon nanotube growth, it is grown along a certain direction, thereby obtain to have certain orientation carbon nano pipe array (K.B.K.Teo, M.Chhowalla, et al, Appl.Phys.Lett., Vol.79, P.1534,2001; M.Chhowalla, K.B.K.Teo, et al, Journal of Physics, Vol 90, P.5308,2001).This method mainly by control catalyst, gas flow rate, auxiliary direct current field, magnetic field etc., makes carbon nanotube grow perpendicular to substrate or along substrate surface; Carbon nanotube bottom perpendicular to substrate links to each other with substrate usually, has limited its application aspect nanometer electronic device; Along the substrate surface carbon nanotubes grown, though structure is comparatively desirable, because process of growth is difficult to the density of controlling carbon nanotube and is limited to domestic micro-processing technology at present, the unusual difficulty of electrode preparation during follow-up making device.The 2nd, utilize external electrical field, magnetic field directly to make its orientations, the possessor has attempted utilizing extra electric field, magnetic field can make its orientations to the greatest extent, but employed method is the density and distribution (the Kunitoshi Yamamoto et al. of controlling carbon nanotube effectively, Jap.J.Appl.Phys., Vol.35, L917,1996; Kunitoshi Yamamoto et al., J.Phys.D:Appl.Phys., Vol.31, L34,1998; B.W.Smith et al., Appl.Phys.Lett., Vol.77, P.663,2001; X.Q.Chen, T.Saito et al., Appl.Phys.Lett., Vol.78, P.3714,2001; A.Larr et al., Appl.Phys.Lett., Vol.80, P.3826,2002).
Invention/utility model content
The present invention has overcome above-mentioned in the orientational alignment carbon nano-tube process, and the defective of uncontrollable carbon nanotube density, distribution provides the method for a kind of controlling carbon nanotube orientation, density and distribution, can obtain the carbon nanotube that aligns of different densities, distribution.
The method of a kind of controlling carbon nanotube orientation, density and distribution, step comprises:
(1) according to the requirement of carbon nanotube orientations, the electrode of preparation definite shape and structure;
(2) carbon nanotube is scattered in the organic solvent, and the drips of solution that will contain carbon nanotube is on the silicon substrate that is shaped on electrode in advance;
(3) apply alternating-current between electrode, the orientation of control alternating-electric field and apply the order of alternating-electric field makes carbon nanotube in the preset bearing, arrange along the direction of determining;
(4) control is scattered in the concentration of carbon nanotube in the organic solvent, the intensity of alternating-electric field, with the density of control orientations carbon nanotube.
Described organic solvent is ethanol, acetone, normal hexane, Virahol, dimethyl formamide or 1,2-ethylene dichloride etc.
The shape of electrode can be cruciform, and wherein the distance of comparative electrode is 2 μ m, and the distance of adjacent electrode is 200-500nm.
The shape of electrode can be interdigitated, and distance between electrodes is 2 μ m, 5 μ m or 10 μ m.
Technique effect of the present invention: after the match at high-frequency alternating current, the carbon nanotube two ends that are scattered in the organic solvent can produce polarization charge, because the interaction between alternating-electric field and the polarization charge can make carbon nanotube along the direction of an electric field orientations, and be overlapped in the electrode two ends.Be scattered in the concentration of carbon nanotube in the organic solvent, the intensity of alternating-electric field by control, density with control orientations carbon nanotube, content of carbon nanotubes is high more in the solvent, electric field is strong more, obtain is just big more to the density of carbon nanotubes arranged, by this method can obtain different densities (single, several, hundreds of or thousands of, even film like) the carbon nanotube that aligns.By the electrode of design definite shape and structure, and the orientation of control alternating-electric field and apply the order of alternating-electric field, can make carbon nanotube in the preset bearing, arrange along the direction of determining, thus the distribution of controlling carbon nanotube on substrate.The carbon nanotube of different densities, distribution and orientations can be used for preparing nanometer electronic device and integrated, and this method has important use to be worth in carbon nanotube nanometer electronic device field.
Description of drawings
Below in conjunction with accompanying drawing, utility model of the present invention is made detailed description.
Fig. 1 is the process unit floor map of controlling carbon nanotube orientation of the present invention, density and distribution;
Fig. 2 is the process unit schematic perspective view of controlling carbon nanotube orientation of the present invention, density and distribution;
Fig. 3 is the interdigited electrode synoptic diagram;
Fig. 4 is a cross electrode synoptic diagram;
The low-density carbon nanotube of Fig. 5 is arranged synoptic diagram;
The highdensity carbon nanotube of Fig. 6 is arranged synoptic diagram;
The low-density carbon nanotube of Fig. 7 is in different azimuth, along different directions orientations synoptic diagram.
Embodiment
1, electrode design and preparation
Be orientation, distribution and the density of controlling carbon nanotube, designed interdigitated and cross electrode, the design width of the former electrode is respectively 2 μ m, 5 μ m, and 10 μ m, spacing is respectively 2 μ m, 5 μ m, 10 μ m.The design width of cross electrode is 2 μ m, and the spacing of comparative electrode is 2 μ m, and the spacing of adjacent electrode is 200-500nm.The silicon-dioxide that thermal oxide growth 180～300nm is thick on the heavily doped silicon substrate of P type utilizes photoetching method to prepare metal electrode as insulation layer, and its process is: whirl coating photoetching, exposure, development; The sputtering sedimentation metal removes photoresist then, can obtain metal electrode, and electrode materials can be Au/Ti (20nm/100nm) or Ti/Al (70nm/930nm).
2, the preparation of carbon nanotube, purifying and dispersion
Employed carbon nanotube can be multi-walled carbon nano-tubes, Single Walled Carbon Nanotube or Single Walled Carbon Nanotube tube bank in the experiment, and multi-walled carbon nano-tubes adopts the CVD method to make, and Single Walled Carbon Nanotube and tube bank adopt arc process to obtain.Be used for experiment of the present invention after original carbon nanotube is purified.
Carbon nanotube behind the purifying is scattered in ethanol, acetone, normal hexane, Virahol, dimethyl formamide or 1, organic solvents such as 2-ethylene dichloride, preparation contains the solution of different carbon nanotube concentration.Before the orientations carbon nanotube, the solution that will contain carbon nanotube in advance carries out high-power, ultrasonic for a long time, and the carbon nanotube in the solvent is fully disperseed.
3, orientations under the carbon nanotube electric field.
At high-frequency alternating current after the match, the electric charge and the density thereof that are scattered in transient state on the carbon nanotube in the organic solvent will change, produce polarization charge on the carbon nanotube, electric charge mainly concentrates on its end, because the interaction of polarization charge and extra electric field, can make carbon nanotube along the direction of an electric field orientations, and be overlapped in the electrode at two ends.By the density of carbon nanotube in the control solvent, the intensity of alternating-electric field, the density of may command orientations carbon nanotube, the density of carbon nanotube is high more in the solvent, electric field is strong more, the density of the carbon nanotube that is obtained is just big more, by this method can obtain different densities (single, several, hundreds of or thousands of, even film like) the carbon nanotube that aligns.By the electrode of design definite shape and structure, and the orientation of control alternating-electric field and apply the order of alternating-electric field, can make carbon nanotube in the preset bearing, arrange along the direction of determining, thus the distribution of controlling carbon nanotube on substrate.
Embodiments of the invention one
After the preparation interdigital electrode, compound concentration is the solution of the carbon nanotube of 0.2 μ g/ml, and on the silicon substrate that is shaped on electrode in advance, the parameter of the alternating-current that applies is V with drips of solution
Pp=10V, frequency 5MHZ.Interelectrode strength of electric field is about 2.5 * 10 in the interdigital electrode
6V/m moments later dries up solution, and cuts off AC power.With reference to figure 5, some carbon nanotube tube banks align.
Embodiments of the invention two
After making interdigital electrode, preparation concentration is the solvent of the carbon nanotube of 0.1mg/ml, and solvent is dropped on the substrate, and the parameter of the alternating-current that applies is V
PP=10V, frequency 5MHZ.Strength of electric field for different interelectrode distances (2,5 and 10 μ m) is about respectively: 2.5 * 10
6V/m, 1 * 10
6V/m, 5 * 10
5V/m.Moments later solution is dried up, and cut off AC power.With reference to figure 6, the orientations array of high-density carbon nano-tube tube bank.
Embodiments of the invention three
After making the cross electrode, preparation concentration is about the solution of the carbon nanotube of 0.1 μ g/ml, and on the silicon substrate that is shaped on electrode in advance, the parameter of the alternating-current that applies is V with drips of solution
PP=2V, frequency 5MHZ.In the cruciform electrode, the strength of electric field between comparative electrode is 5 * 10
6V/m, the strength of electric field between adjacent electrode is 2～5 * 10
6V/m moments later dries up solution, and cuts off AC power.By designing electrode shape, also controlling direction and the order that applies alternating-electric field, the may command carbon nanotube is along the direction arrangement of being scheduled to, thereby controlling carbon nanotube is in interelectrode distribution.With reference to figure 7, the tube bank of several carbon nanotubes is distributed in different azimuth, arranges along different orientation.
Claims (4)
1, the method for a kind of controlling carbon nanotube orientations, distribution and density, step comprises:
(1) according to the requirement of carbon nanotube orientations, the electrode of preparation definite shape and structure;
(2) carbon nanotube is scattered in the organic solvent, and the drips of solution that will contain carbon nanotube is on the silicon substrate that is shaped on electrode in advance;
(3) apply alternating-current between electrode, the orientation of control alternating-electric field and apply the order of alternating-electric field makes carbon nanotube in the preset bearing, arrange along the direction of determining;
(4) control is scattered in the concentration of carbon nanotube in the organic solvent, the intensity of alternating-electric field, with the density of control orientations carbon nanotube.
2, the method for controlling carbon nanotube orientations as claimed in claim 1, distribution and density is characterized in that: organic solvent is ethanol, acetone, normal hexane, Virahol, dimethyl formamide or 1,2-ethylene dichloride etc.
3, the method for controlling carbon nanotube orientations as claimed in claim 1, distribution and density is characterized in that: electrode be shaped as cruciform.
4, the method for controlling carbon nanotube orientations as claimed in claim 1, distribution and density is characterized in that: electrode be shaped as interdigitated.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 200410009281 CN1715181A (en) | 2004-06-30 | 2004-06-30 | Method for controlling carbon nano tube oriented arranging, distribution and density |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 200410009281 CN1715181A (en) | 2004-06-30 | 2004-06-30 | Method for controlling carbon nano tube oriented arranging, distribution and density |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN1715181A true CN1715181A (en) | 2006-01-04 |
Family
ID=35821395
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN 200410009281 Pending CN1715181A (en) | 2004-06-30 | 2004-06-30 | Method for controlling carbon nano tube oriented arranging, distribution and density |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN1715181A (en) |
Cited By (15)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN100594177C (en) * | 2008-06-03 | 2010-03-17 | 北京大学 | Method for preparing carbon nano-tubes by gas induce and products produced thereby |
| CN101704503A (en) * | 2009-04-30 | 2010-05-12 | 中国计量学院 | New method for controllably synthetizing one-dimensional nano material graft |
| US7785165B2 (en) | 2006-04-05 | 2010-08-31 | Tsinghua University | Methods for making field emission electron source having carbon nanotube |
| CN101051596B (en) * | 2006-04-07 | 2010-09-29 | 清华大学 | Carbon nano tube field transmitting electronic source and its producing method |
| CN101254915B (en) * | 2008-03-27 | 2010-10-06 | 浙江大学 | High-voltage electric field treating apparatus for preparing area vertically aligned nano carbon tube |
| CN101042977B (en) * | 2006-03-22 | 2011-12-21 | 清华大学 | Carbon nanotube field emission type electron source and its manufacturing method |
| CN102431964A (en) * | 2011-12-15 | 2012-05-02 | 北京石油化工学院 | Method for controllable generation of quantum dots or quantum wires |
| CN101298315B (en) * | 2008-01-18 | 2012-05-30 | 北京大学 | Preparation of nano-tube contilever beam array |
| CN102701185A (en) * | 2012-06-21 | 2012-10-03 | 中国兵器工业集团第五三研究所 | Method and device for orientating carbon nanotube |
| CN104891424A (en) * | 2015-05-28 | 2015-09-09 | 东北大学 | New parallel electric field type photoelectric chip capable of chaining carbon nano tubes |
| CN105405791A (en) * | 2015-11-04 | 2016-03-16 | 咏巨科技有限公司 | Polishing component generating micro electrostatic field and chemical polishing equipment |
| CN105609636A (en) * | 2016-02-17 | 2016-05-25 | 上海交通大学 | Field effect transistor employing directional single-walled carbon nanotube array as channel and manufacturing method |
| CN106904572A (en) * | 2017-03-29 | 2017-06-30 | 青岛科技大学 | A kind of CNT electric field orienting device |
| CN111655366A (en) * | 2018-02-14 | 2020-09-11 | 国际商业机器公司 | Carbon nanotube crystal sheet |
| CN112432589A (en) * | 2020-11-30 | 2021-03-02 | 中南大学 | Parallel flexible strain sensor and preparation method thereof |
-
2004
- 2004-06-30 CN CN 200410009281 patent/CN1715181A/en active Pending
Cited By (20)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101042977B (en) * | 2006-03-22 | 2011-12-21 | 清华大学 | Carbon nanotube field emission type electron source and its manufacturing method |
| US7785165B2 (en) | 2006-04-05 | 2010-08-31 | Tsinghua University | Methods for making field emission electron source having carbon nanotube |
| CN101051596B (en) * | 2006-04-07 | 2010-09-29 | 清华大学 | Carbon nano tube field transmitting electronic source and its producing method |
| CN101298315B (en) * | 2008-01-18 | 2012-05-30 | 北京大学 | Preparation of nano-tube contilever beam array |
| CN101254915B (en) * | 2008-03-27 | 2010-10-06 | 浙江大学 | High-voltage electric field treating apparatus for preparing area vertically aligned nano carbon tube |
| CN100594177C (en) * | 2008-06-03 | 2010-03-17 | 北京大学 | Method for preparing carbon nano-tubes by gas induce and products produced thereby |
| CN101704503B (en) * | 2009-04-30 | 2015-11-25 | 中国计量学院 | A kind of method of one-dimensional nano material graft controlledly synthesis |
| CN101704503A (en) * | 2009-04-30 | 2010-05-12 | 中国计量学院 | New method for controllably synthetizing one-dimensional nano material graft |
| CN102431964A (en) * | 2011-12-15 | 2012-05-02 | 北京石油化工学院 | Method for controllable generation of quantum dots or quantum wires |
| CN102431964B (en) * | 2011-12-15 | 2014-08-13 | 北京石油化工学院 | Method for controllable generation of quantum dots or quantum wires |
| CN102701185A (en) * | 2012-06-21 | 2012-10-03 | 中国兵器工业集团第五三研究所 | Method and device for orientating carbon nanotube |
| CN104891424A (en) * | 2015-05-28 | 2015-09-09 | 东北大学 | New parallel electric field type photoelectric chip capable of chaining carbon nano tubes |
| CN104891424B (en) * | 2015-05-28 | 2016-08-17 | 东北大学 | A kind of novel parallel Electric field photoelectric chip ordering about CNT chaining |
| CN105405791A (en) * | 2015-11-04 | 2016-03-16 | 咏巨科技有限公司 | Polishing component generating micro electrostatic field and chemical polishing equipment |
| CN105609636A (en) * | 2016-02-17 | 2016-05-25 | 上海交通大学 | Field effect transistor employing directional single-walled carbon nanotube array as channel and manufacturing method |
| CN105609636B (en) * | 2016-02-17 | 2018-05-08 | 上海交通大学 | Directional single-wall carbon nanotube array is the field-effect transistor and production method of raceway groove |
| CN106904572A (en) * | 2017-03-29 | 2017-06-30 | 青岛科技大学 | A kind of CNT electric field orienting device |
| CN111655366A (en) * | 2018-02-14 | 2020-09-11 | 国际商业机器公司 | Carbon nanotube crystal sheet |
| US11820663B2 (en) | 2018-02-14 | 2023-11-21 | International Business Machines Corporation | Crystalline film of carbon nanotubes |
| CN112432589A (en) * | 2020-11-30 | 2021-03-02 | 中南大学 | Parallel flexible strain sensor and preparation method thereof |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN1715181A (en) | Method for controlling carbon nano tube oriented arranging, distribution and density | |
| Chen et al. | Aligning single-wall carbon nanotubes with an alternating-current electric field | |
| Nagahara et al. | Directed placement of suspended carbon nanotubes for nanometer-scale assembly | |
| Wei et al. | Design and synthesis of TiO2 nanorod assemblies and their application for photovoltaic devices | |
| Lin et al. | The impact of nanocontact on nanowire based nanoelectronics | |
| Han et al. | Transition metal oxide core− shell nanowires: generic synthesis and transport studies | |
| Hecht et al. | Conductivity scaling with bundle length and diameter in single walled carbon nanotube networks | |
| Graham et al. | Carbon nanotubes for microelectronics? | |
| CN101667611B (en) | Preparation method of solar micro battery on basis of directional carbon nano tube | |
| Wang | Nanowires and Nanobelts: Materials, Properties and Devices: Volume 2: Nanowires and Nanobelts of Functional Materials | |
| Zhang | Carbon nanotubes and their applications | |
| Guo et al. | Well‐Defined Fullerene Nanowire Arrays | |
| CN101842317A (en) | A deposit and electrical devices comprising the same | |
| KR20060048657A (en) | Carbon nanotube microfibers | |
| Ranjan et al. | Growing One‐Dimensional Metallic Nanowires by Dielectrophoresis | |
| Yang et al. | Borophenes: monolayer, bilayer and heterostructures | |
| CN101293629B (en) | Process for producing carbon nano-tube or nano-wire bifurcate structure | |
| Xu et al. | Electrochemical fabrication of one-dimensional silica nanostructures | |
| Zheng et al. | Computational and experimental studies of phase separation in pentacene: C60 mixtures | |
| Vijayaraghavan | Bottom‐up assembly of nano‐carbon devices by dielectrophoresis | |
| CN1269195C (en) | Method for producing nano-transistor with high performance | |
| CN101817499B (en) | Nanoscale gap electrode pair array and preparation method thereof | |
| Ruppel et al. | A defect-free thin film pentacene diode: Interplay between transport and scanning tunneling microscope tip tunneling injection | |
| de Oliveira Hansen et al. | In situ–directed growth of organic nanofibers and nanoflakes: Electrical and morphological properties | |
| CN1215973C (en) | Electrochemical preparation method of fullerene nanotubes |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| C02 | Deemed withdrawal of patent application after publication (patent law 2001) | ||
| WD01 | Invention patent application deemed withdrawn after publication |