CN1683233A - Stepping omnibearing nano moving platform - Google Patents
Stepping omnibearing nano moving platform Download PDFInfo
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- CN1683233A CN1683233A CN 200410020407 CN200410020407A CN1683233A CN 1683233 A CN1683233 A CN 1683233A CN 200410020407 CN200410020407 CN 200410020407 CN 200410020407 A CN200410020407 A CN 200410020407A CN 1683233 A CN1683233 A CN 1683233A
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Abstract
The invention relates to a micro-device assembly technology, in particular to a stepping omnibearing nano moving platform for micro-processing, biological cell operation and the like. The piezoelectric actuator comprises an upper platform and three groups of piezoelectric actuators, wherein the upper platform is connected with the three groups of piezoelectric actuators through elastic hinges, and the three groups of piezoelectric actuators are arranged at equal intervals of 120 degrees along the circumference of the upper platform; each group of piezoelectric drivers at least comprises one driving unit, and more than two driving units are arranged in series; each driving unit consists of two piezoelectric ceramics, a beam and a contact element, the upper ends of the two piezoelectric ceramics are connected with the upper platform through elastic hinges, the lower ends of the two piezoelectric ceramics are fixedly connected with the beam, and the contact element and the beam are fixedly connected below the two piezoelectric ceramics; each piezoelectric ceramic is connected with a control circuit and is in wireless communication with a computer through a communication circuit. The invention can realize plane omnibearing nanometer motion and improve the precision and flexibility of the mechanism.
Description
Technical field
The present invention relates to the micro element mounting technology, specifically a kind of comprehensive nanometer mobile platform of step-by-step movement that is used for little processing and biological cell operation etc.
Technical background
Micro-nano mobile platform is meant the micromotion platform with nanoscale kinematic accuracy, and it is the important component part of micro-nano science and technology, can measure for nanoscale, nanoscale assembling provides key equipment.
Present nanometer travel mechanism generally adopts looper mechanism, inertia impact and inertia friction driving mechanism, the former two all can only realize single dof mobility, realize the stack that the multifreedom motion of these mechanisms can only lean on a plurality of mechanism with single degree of freedom, thereby volume is excessive.Though the inertia friction driving mechanism can be realized omnibearing motion, load capacity very little (a few approximately hectogram).On the other hand, the wired control mode of the many employings of nanometer mobile platform in the prior art, the tension force of lead has reduced the precision and flexibility (the document 1:T.Higuchi of platform motion to a great extent, Y.Yamagata, Kfurutani, et.al, " Precise Positioning Mechanism Utilizing Rapid Deformations ofPiezoelectric Elements ", Proc.of IEEE Micro Electro Mechanical Systems, pp.220-226, February 1990; Document 2:H.Aoyama and A.Hayashi, " MultipleMicro Robots for Desktop Precise Production ", Proc.of 1
StConf.of EUSPEN, Bremenn, pp.60-63,1999; Document 3:Sylvain Martel, Mark Sherwood, ChadHelm, et al, " Three-legged wireless miniature robots for mass-scale operationoperations at the sub-atomic scale ", Proc.of the 2001 IEEE International Conf.on Robotics and Automation.Seoul, Korea, May 21-26, pp.3423-3428,2001)
Summary of the invention
Can not realize plane omnibearing movable and lead interference problem simultaneously in order to overcome nanometer mobile platform of the prior art, the object of the invention provides the comprehensive nanometer mobile platform of a kind of step-by-step movement, adopt the present invention not only can realize the comprehensive nanometer motion in plane, and can improve mechanism precision and flexibility.
The technical solution adopted in the present invention is: by upper mounting plate, three groups of piezoelectric actuators are formed, and upper mounting plate is connected by elastic hinge with three groups of piezoelectric actuators, and three groups of piezoelectric actuators become 120 ° of symmetric arrangement along the upper mounting plate circumference;
Described every group of piezoelectric actuator comprises a driver element at least, and two above driver elements are arranged in series; Described each driver element is by two piezoelectric ceramics, and a crossbeam and a contact element are formed, and two piezoelectric ceramics upper ends are connected with elastic hinge with upper mounting plate, and lower end and crossbeam are connected, and contact element and crossbeam are fixed on the below; Described each piezoelectric ceramics is connected to control circuit, carries out wireless telecommunications by communicating circuit and computer; Described communicating circuit is made up of communication single-chip microcomputer, main frame, and main frame links to each other with the communication single-chip microcomputer by the serial ports level translator through serial ports, and the communication single-chip microcomputer is exported through wireless data transmission module and control circuit communication; Described control circuit receives the communication module signal by wireless data transmission module, is made up of control single chip computer, high voltage output module, and from wireless data transmission module, output signal is delivered to high voltage output module respectively to the input signal of control single chip computer through serial ports; High voltage output module is made up of digital to analog converter, operational amplifier, high voltage operational amplifier, and wherein the first～two digital to analog converter input signal is connected to the control single chip computer output; The output of the first～two digital to analog converter is connected to the first～two operational amplifier, more ambipolar voltage is connected to the first～two high voltage operational amplifier respectively.
The beneficial effect of this patent is:
1. can realize the plane omnibearing movable.The present invention adopts three pairs of piezoelectric actuators to become circumference to be spacedly distributed for 120 ° by piezoelectric ceramics dilatation principle, is applied to the driving voltage of each piezoelectric ceramics on the driver by control, realizes that the comprehensive nanoscale on the plane moves, and the flexibility of mechanism is good.
2. mechanism precision height.The present invention adopts communication, compares with wired control mode in the prior art, and the present invention does not have lead and disturbs; Adopt the present invention can realize comprehensive nanoscale motion (as 20nm).
3. adopt the step-by-step movement principle, can continuous motion, stroke is unrestricted.
4. simple in structure, volume is little; The present invention adopts piezoelectric ceramics in addition, so load is big.
5. can be applicable to little assembling work and micro-nano locating platform, be specially adapted to the biological cell operation.
Description of drawings
Fig. 1-1 is nanometer of the present invention travel mechanism schematic diagram.
Fig. 1-2 is Fig. 1-1 nanometer travel mechanism vertical view.
Fig. 2 is one group of step motion mechanism sketch in the nanometer of the present invention travel mechanism driver element.
Fig. 3 is the corresponding driving voltage waveform figure of Fig. 2 step motion.
Fig. 4-1 is Fig. 2 nanometer travel mechanism directions X mass motion schematic diagram.
Fig. 4-2 is Fig. 2 nanometer Y of travel mechanism direction mass motion schematic diagram.
Fig. 4-3 is Fig. 2 nanometer θ of travel mechanism direction mass motion schematic diagram.
Fig. 4-4 is the whole omnibearing movable schematic diagram of Fig. 2 nanometer travel mechanism.
Fig. 5 is a circuit structure block diagram of the present invention.
Fig. 6 is a telecommunication circuit schematic diagram among Fig. 5.
Fig. 7 is a control circuit schematic diagram among Fig. 5.
The specific embodiment
Below in conjunction with accompanying drawing the present invention is described in further detail.
This nanometer mobile platform is made up of 1, three group of piezoelectric actuator of upper mounting plate, and upper mounting plate 1 is connected by elasticity (flexible revolute pair 2) hinge with three groups of piezoelectric actuators, and three groups of piezoelectric actuators become 120 ° of symmetric arrangement along upper mounting plate 1 circumference; Wherein every group of piezoelectric actuator comprises a driver element at least, and two above driver elements are arranged in series; Each driver element is by two piezoelectric ceramics, a crossbeam and a contact element are formed, two piezoelectric ceramics upper ends are connected with upper mounting plate 1 usefulness elasticity (flexible revolute pair 2) hinge, and lower end and crossbeam 5 bond together, and contact element 6 is bonded in its below with crossbeam 5.
Each piezoelectric ceramics of the present invention is connected to control circuit, and control circuit is located on the upper mounting plate 1, carries out wireless telecommunications by communicating circuit and computer; The upper mounting plate 1 and the crossbeam 5 of nanometer mobile platform of the present invention can adopt pmma material, and contact element adopts the hemispherical stainless steel material.Described piezoelectric ceramics can be piezoelectric ceramic tube or stacked piezoelectric ceramic material (present embodiment adopts the stacked piezoelectric pottery).Present embodiment is three groups of piezoelectric actuators, and every group comprises a driver element.The present embodiment volume is: φ 140*110mm; Load: 1500g.
Operating principle of the present invention: be provided with two piezoelectric ceramics 41～42 in each driver element 3, first piezoelectric ceramics 41 applies positive voltage, produce elongation strain, second piezoelectric ceramics 42 applies negative voltage, produce corresponding contraction distortion, push contact element 6 (present embodiment adopts contact hemisphere) and contact platform plane formation roll displacement.Roll each time after the end, pottery shrinks simultaneously, and center of gravity is raise, and piezoelectric ceramics drove contact element and is returned to initial conditions during hemisphere takeoff aloft, descended, rolled.So repeat then can realize continuous linear movement.
Referring to Fig. 2, establishing X is the driver element direction of motion, and each step motion cycle of driver element comprises rolling, lifts, recovers to be out of shape three phases.Specific operation process is as follows:
The t0-t1 time period, first piezoelectric ceramics 41 extends under the positive voltage effect, and second piezoelectric ceramics 42 shrinks (referring to the direction of arrow) under the negative voltage effect, and contact hemisphere rolls on the contact platform plane, produces a displacement;
The t1-t2 time period, apply negative voltage simultaneously for first piezoelectric ceramics 41 and second piezoelectric ceramics 42, make them shrink (referring to the direction of arrow) simultaneously, body (referring to complete machine) rises, and contact hemisphere leaves the contact platform plane;
The t2-t3 time period, apply negative voltage for first piezoelectric ceramics 41, make its contraction, second piezoelectric ceramics 42 applies positive voltage, makes its elongation (referring to the direction of arrow), and piezoelectric ceramics and hemisphere recover initial attitude, descend, and prepare roll displacement next time.
The t3-t4 time period, first piezoelectric ceramics 41 applies positive voltage, elongation, and second piezoelectric ceramics 42 applies negative voltage, shrinks (referring to the direction of arrow), begins a new step motion circulation.
Fig. 3 is the corresponding driving voltage waveform of step motion, and wherein t0, t1, t2, t3 are corresponding with each stage of two piezoelectric ceramics among Fig. 2 respectively.
X of the present invention, Y, θ direction motion principle are:
Directions X (Fig. 4-1): first group of piezoelectric actuator moves along the V1 direction, and second group of piezoelectric actuator moves along the V2 direction; The 3rd group of piezoelectric actuator moves along the V3 direction, and three groups of piezoelectric actuators roll simultaneously, takeoffs simultaneously, drives body and moves to directions X.
Y direction (Fig. 4-2): second group of piezoelectric actuator is along the V2 direction; The 3rd group of piezoelectric actuator is along the V3 direction, and two groups of piezoelectric actuators roll simultaneously, takeoffs simultaneously, and first group of piezoelectric actuator do not participate in rolling, and only along with other group piezoelectric actuators takeoff, to reduce resistance, body moves to the Y direction.
θ direction (Fig. 4-3): three groups of piezoelectric actuators respectively tangentially roll simultaneously, takeoff simultaneously, and body is around self center of gravity rotation.
Plane omnibearing movable (Fig. 4-4): the mass motion of nanometer mobile platform is the synthetic of three set drives motion, and its velocity attitude and size are by the velocity decision of three set drives.Because the speed of every set drive is tangentially all the time, thereby its center of rotation is positioned at the geometric center of mobile platform in theory.
XOY represents the mobile platform coordinate system among Fig. 4-4.φ is the deflection of nanometer mobile platform, i.e. the angle of bulk velocity direction and OX axle.V represents body speed of vehicle, V
1, V
2, V
3Represent the speed of three set drives respectively.
Under desirable geometrical relationship, the restriction relation of platform translational speed and driver movement velocity:
V
1＝V
X-Rω (1)
V
2＝-cos(π/3)V
X-sin(π/3)V
Y-Rω (2)
V
3＝-cos(π/3)V
X+sin(π/3)V
Y-Rω (3)
Wherein: V
X, V
YRepresent the projection of V on OX, OY axle respectively; ω represents the platform angular velocity of rotation.R represents that the platform center O puts the vertical range of driver.
Thus, the movement velocity of nanometer mobile platform is:
Movement velocity with OX deflection that axle becomes is
By formula (4) (5) as can be known, nanometer mobile platform movement velocity deflection by
Value decision, promptly by V
1, V
2, V
3Value decision, φ can be the arbitrary value between 0-360 °.When φ=0 ° or 180 °, motion is along directions X; When φ=90 ° or 270 °, motion is along the Y direction.
Shown in Fig. 5～7, circuit comprises two parts altogether, and a part is a communicating circuit, and another part is a control circuit.
Described communicating circuit is responsible for the wireless telecommunications between computer and nanometer mobile platform, form by communication single-chip microcomputer U0 (can adopt CYGNAL8051), main frame, main frame links to each other with communication single-chip microcomputer U0 by serial ports level translator MAX1 (MAX232) through serial ports (RS232), communication single-chip microcomputer U0 output realizes the transmission of signal through the first wireless data transmission module P1 (PTR2000) and control circuit communication;
Described control circuit produces the driving voltage of piezoelectric ceramics, the powered battery that is loaded with by upper mounting plate 1.
Receive the communication module signal by the second wireless data transmission module P2, form by control single chip computer U1, high voltage output module, from the second wireless data transmission module P2, output signal is delivered to high voltage output module respectively to the input signal of control single chip computer U1 (CYGNAL8051) through serial ports; High voltage output module is made up of digital to analog converter, operational amplifier, high voltage operational amplifier, the first～two digital to analog converter DAC1～2, (adopting the AD7225LN chip) input signal is connected to control single chip computer U1 output, carry out the D/A conversion, the data signal that computer is exported converts analog signal to; The first～two digital to analog converter DAC1～2 outputs are connected to the first～two operational amplifier LF1～LF2, export ambipolar voltage; Again ambipolar voltage is connected to the first～two high voltage operational amplifier PA1～PA6 respectively, converts bipolar voltage to piezoelectric ceramics distortion required high voltage.
Wherein computer is used for man-machine interaction, and parameter is provided with etc., and system is totally controlled; Communication single-chip microcomputer U0 is mainly used in the communication between the first wireless data transmission module P1 and the computer; Control single chip computer U1 is used for realizing the motion control that the nanometer mobile platform is concrete, after control single chip computer U1 receives the parameter setting and displacement command that computer sends, and the corresponding HT waveform of control output, the motion of control nanometer mobile platform.When three groups of driver elements when circumference becomes 120 ° of symmetric arrangement, by controlling the driving voltage of piezoelectric ceramics in every group of piezoelectric actuator, can make mechanism realize omnibearing movable on the plane.Dc sources etc. are integrated on the upper mounting plate 1 together.
Because the digital to analog converter output voltage is unipolar, and the present invention needs ambipolar output, therefore realizes bipolarity with the operational amplifier of high voltage output module.Because the drive characteristic of piezoelectric ceramics needs high voltage source to come it is driven, so the present invention is amplified to high pressure range with the output of bipolarity low pressure.The PA142 high voltage operational amplifier of having selected APEX company is as the high pressure amplifier in the high-pressure modular.Present embodiment comes the DAC output voltage is amplified with six PA142, adopts the in-phase proportion circuit here.After present embodiment adopts digital high voltage amplifier scheme, can be input as that output-130V arrives under the situation of 5V+free voltage value between 130V, and overcome the delay problem of high pressure when 0V changes, the performance of nanometer mobile platform system is greatly improved.Present embodiment can be realized the nanoscale motion of comprehensive 20nm.
Every group of piezoelectric actuator of the present invention can be two or more driver elements, is arranged in series between the unit, and load capacity and speed can be stronger.
Claims (7)
1. comprehensive nanometer mobile platform of step-by-step movement is characterized in that: by upper mounting plate, three groups of piezoelectric actuators are formed, and upper mounting plate is connected by elastic hinge with three groups of piezoelectric actuators, and three groups of piezoelectric actuators become 120 ° of symmetric arrangement along the upper mounting plate circumference.
2. according to the comprehensive nanometer mobile platform of the described step-by-step movement of claim 1, it is characterized in that: described every group of piezoelectric actuator comprises a driver element at least, and two above driver elements are arranged in series.
3. according to the comprehensive nanometer mobile platform of the described step-by-step movement of claim 2, it is characterized in that: described each driver element is by two piezoelectric ceramics, a crossbeam and a contact element are formed, two piezoelectric ceramics upper ends are connected with elastic hinge with upper mounting plate, lower end and crossbeam are connected, and contact element and crossbeam are fixed on the below.
4. according to the comprehensive nanometer mobile platform of the described step-by-step movement of claim 3, it is characterized in that: described each piezoelectric ceramics is connected to control circuit, carries out wireless telecommunications by communicating circuit and computer.
5. according to the comprehensive nanometer mobile platform of the described step-by-step movement of claim 4, it is characterized in that: described communicating circuit is made up of communication single-chip microcomputer, main frame, main frame links to each other with the communication single-chip microcomputer by the serial ports level translator through serial ports, and the communication single-chip microcomputer is exported through wireless data transmission module and control circuit communication.
6. according to the comprehensive nanometer mobile platform of the described step-by-step movement of claim 4, it is characterized in that: described control circuit receives the communication module signal by wireless data transmission module, form by control single chip computer, high voltage output module, from wireless data transmission module, output signal is delivered to high voltage output module respectively to the input signal of control single chip computer through serial ports.
7. according to the comprehensive nanometer mobile platform of the described step-by-step movement of claim 6, it is characterized in that: high voltage output module is made up of digital to analog converter, operational amplifier, high voltage operational amplifier, and wherein the first～two digital to analog converter input signal is connected to the control single chip computer output; The output of the first～two digital to analog converter is connected to the first～two operational amplifier, more ambipolar voltage is connected to the first～two high voltage operational amplifier respectively.
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Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN101850946A (en) * | 2010-04-20 | 2010-10-06 | 赵宏伟 | Nanoscale-precision surface ironing treatment and micro-nano structure array processing platform |
| CN102506785A (en) * | 2011-09-23 | 2012-06-20 | 哈尔滨工业大学 | Three-degree-of-freedom integrated stick-slip linear positioning device |
| CN103552975A (en) * | 2013-11-15 | 2014-02-05 | 江苏尚飞光电科技有限公司 | Hydraulic micro-displacement driver and micro-displacement device |
| CN104742099A (en) * | 2015-04-09 | 2015-07-01 | 南京航空航天大学 | Self-propelled planar three-degrees-of-freedom piezoelectric driving platform |
| CN111421523A (en) * | 2020-04-03 | 2020-07-17 | 清华大学 | Micro-motion platform |
Family Cites Families (3)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN2519270Y (en) * | 2002-01-31 | 2002-10-30 | 重庆大学 | Lens of high precision scanning tunnel microscope |
| CN2568620Y (en) * | 2002-08-08 | 2003-08-27 | 财团法人工业技术研究院 | Single layer multi-freedom gas static pressure nano positioning platform |
| CN2576434Y (en) * | 2002-11-18 | 2003-10-01 | 哈尔滨工业大学博实精密测控有限责任公司 | Six-freedom precision paralleled robot |
-
2004
- 2004-04-16 CN CNB2004100204077A patent/CN100387508C/en not_active Expired - Fee Related
Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101850946A (en) * | 2010-04-20 | 2010-10-06 | 赵宏伟 | Nanoscale-precision surface ironing treatment and micro-nano structure array processing platform |
| CN102506785A (en) * | 2011-09-23 | 2012-06-20 | 哈尔滨工业大学 | Three-degree-of-freedom integrated stick-slip linear positioning device |
| CN102506785B (en) * | 2011-09-23 | 2013-11-06 | 哈尔滨工业大学 | Three-degree-of-freedom integrated stick-slip linear positioning device |
| CN103552975A (en) * | 2013-11-15 | 2014-02-05 | 江苏尚飞光电科技有限公司 | Hydraulic micro-displacement driver and micro-displacement device |
| CN104742099A (en) * | 2015-04-09 | 2015-07-01 | 南京航空航天大学 | Self-propelled planar three-degrees-of-freedom piezoelectric driving platform |
| CN104742099B (en) * | 2015-04-09 | 2016-05-18 | 南京航空航天大学 | A kind of self-propelled planar three freedom piezoelectric drive platform |
| CN111421523A (en) * | 2020-04-03 | 2020-07-17 | 清华大学 | Micro-motion platform |
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